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    • 44. 发明申请
    • METHOD OF PRODUCING A THREE-DIMENSIONAL COMPONENT OR GROUP OF COMPONENTS
    • 一种用于生产三维部件或任何部件组
    • WO1996008749A2
    • 1996-03-21
    • PCT/DE1995001151
    • 1995-08-23
    • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.ROTHE, MartinaMACIOSSEK, AndreasLÖCHEL, Bernd
    • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    • G03F07/00
    • H01L28/10F15C5/00G03F7/00G03F7/0035H01F41/041H01F2017/0086
    • The invention concerns a method of producing a three-dimensional component or group of components, particularly on surfaces of already processed semiconductor chips . The production of three-dimensional features on chip surfaces is based on the stucturing of thick photosensitive resists and subsequent formation of the surface features by galvanic etching. Prior art methods merely use a thick photoresist and interposed galvanic starting layers to form three-dimensional features. The production of complex features is only possible with considerable difficulty owing to the low stability of the photoresist. The method proposed for the production of three-dimensional features uses, in addition to the galvanic etching of e.g. UV-structured photoresist layers with build-on metal films (16), etching using metal auxiliary films which are later removed again (sacrificial layers) (13). These metal auxiliary films lying in the resist layers are also used, in multi-layer features, as galvanic starting layers for additional build-on levels. The three-dimensional features which can be made by the method described enable, for example, e.g. coils and transformers to be manufactured, in a form in which they could not be manufactured previously, for integration on chip surfaces.
    • 本发明涉及一种方法,用于对已经处理过的的半导体芯片表面上产生的三个组分或组分的组,尤其如此。 在芯片上表面上已知的三维结构的基础是厚光致抗蚀剂和随后的电镀形成该抗蚀剂结构的结构。 公知的方法只使用厚光致抗蚀剂和中间晶种电极层为三维结构的形成。 更复杂的结构的建设是只增加了费用可能的,因为光致抗蚀剂的稳定性低。 根据本发明的方法使用三维结构除了的电复制,对于构成金属层(16)和与后要除去再次金属辅助层(牺牲层)(13)的印象的例子UV图案化光致抗蚀剂层。 这种固有的在金属涂料层的辅助层,同时使用在多层结构作为种子电极层为更要建立的水平。 这里描述的方法提供了三维结构,例如,线圈和变压器准备在切屑表面集成,这不能被以这种形式到目前为止实现。
    • 49. 发明申请
    • NOZZLE ASSEMBLY FOR LASER BEAM CUTTING
    • JET安排激光切断
    • WO1995019865A1
    • 1995-07-27
    • PCT/DE1995000050
    • 1995-01-18
    • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.ZEFFERER, HartmutPETRING, Dirk
    • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    • B23K26/14
    • B23K26/123B23K26/125B23K26/1436B23K26/1476
    • A nozzle assembly (34) for laser beam cutting having a truncated conical nozzle body (10) matched to the focussed laser beam with a through drilling (11) for the laser beam, with a nozzle sleeve (13) concentrically surronding the nozzle body (10) and thus forming an annular gap (12), said sleeve having an outlet drilling (14) coaxial with the through drilling (11) for a stream of cutting gas from the annular gap (12) connected to a source of gas, in which the outlet drilling (14) is arranged in front of the through drilling (11) on the workpiece side and has a diameter (D) exceeding that (d) of the through drilling (11). To ensure that thegas stream is deflected from the nozzle parallel to the axis of the laser beam with a minimum of flow losses, the nozzle assembly is designed so that the outlet cross section of the outlet drilling (14) is approximately the same as the transition cross section between the annular gap (12) and the outlet drilling (14).
    • 对于激光束切割时,匹配一个聚焦激光束,周围具有用于将激光束的通路孔(11)的截头圆锥形喷嘴主体(10)一种模具组件(34),已与喷嘴主体(10)同心地包围,从而形成环形间隙(12) 喷嘴套筒(13)同轴的一个与所述通道孔(11)的出口孔(14),用于将连接到气体源的环形间隙(12),出口孔(14)的切削气体射流布置在工件侧的通路孔的前面(11),并用一个 直径(d)在过量的通路孔(11)直径(D)的设置。 为了实现从喷嘴的气体射流的偏转是平行于具有最小的流量损失的激光束的轴线,形成喷嘴组件,使得出口孔(14)大致等于所述环形间隙(12)到所述出口孔中的过渡的横截面的出口截面( 14)。