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    • 25. 发明申请
    • POWER SEMICONDUCTOR DEVICES
    • 功率半导体器件
    • WO2004032243A1
    • 2004-04-15
    • PCT/IB2003/004138
    • 2003-09-15
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.KELLY, Brendan, P.PEAKE, Steven, T.GROVER, Raymond, J.
    • KELLY, Brendan, P.PEAKE, Steven, T.GROVER, Raymond, J.
    • H01L29/78
    • H01L29/7813H01L29/402H01L29/407H01L29/7397H01L29/7831H02M3/1588H03K17/063Y02B70/1466
    • A vertical insulated gate field effect power transistor (3) has a plurality of parallel transistor cells (TC3) with a peripheral gate structure (G31, G2) at the boundary between each two transistor cells (TC3). The gate structure (G31, G32) comprises first (G31) and second (G32) gates isolated from each other so as to be independently operable. The first gate (G31) is a trench-gate (21, 22), and the second gate (G32) has at least an insulated planar gate portion (13, 14). Simultaneous operation of the first (G31) and second (G32) gates forms a conduction channel (23c, 23b) between source (16) and drain (12) regions of the device (3). The device (3) has on-state resistance approaching that of a trench-gate device, better switching performance than a DMOS device, and a better safe operating area than a trench-gate device. The device (3) may be a high side power transistor is series with a low side power transistor (6) in a circuit arrangement (50) (Figure 14) for supplying a regulated output voltage. The device (3) may also be a switch in a circuit arrangement (60) (Figure 15) for supplying current to a load (L). These circuit arrangements (50, 60) include a terminal (Vcc, V F ) for applying a supplied fixed potential to an electrode (G311) for the first gates (G31) and a gate driver circuit (573, 673) for applying modulating potential to an electrode (G321) for the second gates (G32).
    • 垂直绝缘栅场效应功率晶体管(3)在每两个晶体管单元(TC3)之间的边界处具有多个具有外围栅极结构(G31,G2)的并联晶体管单元(TC3)。 栅极结构(G31,G32)包括彼此隔离的第一(G31)和第二(G32)栅极,以便可独立地操作。 第一栅极(G31)是沟槽栅极(21,22),第二栅极(G32)至少具有绝缘平面栅极部分(13,14)。 第一(G31)和第二(G32)栅极的同时操作在器件(3)的源极(16)和漏极(12)区域之间形成导电沟道(23c,23b)。 器件(3)具有接近沟槽栅极器件的导通电阻,比DMOS器件更好的开关性能,以及比沟槽栅极器件更好的安全工作区域。 器件(3)可以是用于提供稳定输出电压的电路装置(50)(图14)中的与低侧功率晶体管(6)串联的高侧功率晶体管。 装置(3)还可以是用于向负载(L)供电的电路装置(60)(图15)中的开关。 这些电路装置(50,60)包括用于将提供的固定电位施加到用于第一栅极(G31)的电极(G311)的端子(Vcc,V> F <)和用于施加的栅极驱动电路(573,673) 对第二栅极(G32)的电极(G321)进行调制电位。