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11. 发明申请

WO2008140728A3 SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM 审中-公开
标题翻译：使用机械开关机构的多个可移动臂的基板运输装置
公开(公告)号：WO2008140728A3
公开(公告)日：2009-12-30
申请号：PCT/US2008005884
申请日：2008-05-08
申请人： BROOKS AUTOMATION INC , HOFMEISTER CHRISTOPHER , KRUPYSHEV ALEXANDER , GILCHRIST ULYSSES , HOSEK MARTIN
发明人： HOFMEISTER CHRISTOPHER , KRUPYSHEV ALEXANDER , GILCHRIST ULYSSES , HOSEK MARTIN
IPC分类号： B66C23/00
CPC分类号： H01L21/68707 , H01L21/67742
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译：一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回组态。

12. 发明申请

WO2009012396A9 SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS 审中-公开
标题翻译：具有与室壁整体的电机的基板处理装置
公开(公告)号：WO2009012396A9
公开(公告)日：2009-04-23
申请号：PCT/US2008070346
申请日：2008-07-17
申请人： BROOKS AUTOMATION INC , KURPYSHEV ALEXANDER , HOFMEISTER CHRISTOPHER
发明人： KURPYSHEV ALEXANDER , HOFMEISTER CHRISTOPHER
IPC分类号： B65G1/00
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译：一种基板传送设备，包括：周壁，其具有限定能够保持隔离气氛的基板传送室的内表面;至少一个大致环形的电动机，其具有位于周壁内的至少一个定子模块，位于内表面与相邻的外围壁的外表面以及至少一个转子，所述转子基本上不接触地在传送室内接触，使得由环形马达包围的外围壁的表面构造成用于将预定装置附接到其上，并且至少一个基板传送臂连接到所述至少一个转子并且具有被配置为保持至少一个衬底的至少一个末端执行器。

13. 发明申请

WO2009012396A3 SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS 审中-公开
标题翻译：带电动机的底座加工设备到室内壁挂
公开(公告)号：WO2009012396A3
公开(公告)日：2009-03-05
申请号：PCT/US2008070346
申请日：2008-07-17
申请人： BROOKS AUTOMATION INC , KURPYSHEV ALEXANDER , HOFMEISTER CHRISTOPHER
发明人： KURPYSHEV ALEXANDER , HOFMEISTER CHRISTOPHER
IPC分类号： B65G1/00
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译：一种基板输送装置，包括具有内表面的外周壁，该内表面限定能够保持隔离气氛的基板输送室，至少一个基本上环形的马达，其具有位于周壁内的至少一个定子模块，位于内表面和所述周壁的相邻外表面和至少一个转子在所述输送室内基本上不接触地悬挂，使得由所述环形电机包围的所述周壁的表面构造成用于附接到预定装置和至少一个基板输送臂连接到所述至少一个转子并且具有构造成保持至少一个基板的至少一个末端执行器。

14. 发明申请

WO2009003186A1 MULTIPLE DIMENSION POSITION SENSOR 审中-公开
标题翻译：多尺寸位置传感器
公开(公告)号：WO2009003186A1
公开(公告)日：2008-12-31
申请号：PCT/US2008/068661
申请日：2008-06-27
申请人： BROOKS AUTOMATION, INC. , HOSEK, Martin , HOFMEISTER, Christopher , KRUPYSHEV, Alexander , ZETTLER, John, F. , SYSSOEV, Sergei , MAJCZAK, Krzystof, A.
发明人： HOSEK, Martin , HOFMEISTER, Christopher , KRUPYSHEV, Alexander , ZETTLER, John, F. , SYSSOEV, Sergei , MAJCZAK, Krzystof, A.
IPC分类号： G01B7/14 , G01B7/30 , G01R33/02
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi- dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译：一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括附接到可移动部分的至少一个场发生压板和至少一个定位的传感器组沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的至少一个传感器的输出信号被配置为计算所述可移动部分的多维位置，包括平面位置和间隙测量的三维位置。

15. 发明申请

WO2008144664A1 COMPACT SUBSTRATE TRANSPORT SYSTEM WITH FAST SWAP ROBOT 审中-公开
标题翻译：紧凑的基板运输系统与快速交流机器人
公开(公告)号：WO2008144664A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/064144
申请日：2008-05-19
申请人： BROOKS AUTOMATION, INC. , HOFMEISTER, Christopher , KRUPYSHEV, Alexander, G. , GILCHRIST, Ulysses
发明人： HOFMEISTER, Christopher , KRUPYSHEV, Alexander, G. , GILCHRIST, Ulysses
IPC分类号： H01L21/67 , H01L21/68
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译：一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆以及至少一个端部执行器，所述至少一个末端执行器彼此顺序地联接，其中第一和第二臂连杆具有不相等的长度。

16. 发明申请

WO2008140728A2 SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM 审中-公开
标题翻译：使用机械开关机构的多个可移动臂的基板运输装置
公开(公告)号：WO2008140728A2
公开(公告)日：2008-11-20
申请号：PCT/US2008/005884
申请日：2008-05-08
申请人： BROOKS AUTOMATION, INC. , HOFMEISTER, Christopher , KRUPYSHEV, Alexander , GILCHRIST, Ulysses , HOSEK, Martin
发明人： HOFMEISTER, Christopher , KRUPYSHEV, Alexander , GILCHRIST, Ulysses , HOSEK, Martin
IPC分类号： B66C23/00
CPC分类号： H01L21/68707 , H01L21/67742
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译：一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回组态。

17. 发明申请

WO2008024225A2 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少的容量载体，运输，装载港口，缓冲系统
公开(公告)号：WO2008024225A2
公开(公告)日：2008-02-28
申请号：PCT/US2007/017924
申请日：2007-08-13
申请人： BROOKS AUTOMATION, INC. , BUFANO, Michael, L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel , MAY, Robert, C.
发明人： BUFANO, Michael, L. , GILCHRIST, Ulysses , FOSNIGHT, William , HOFMEISTER, Christopher , BABBS, Daniel , MAY, Robert, C.
IPC分类号： B65B35/00
CPC分类号： H01L21/67733 , H01L21/67017 , H01L21/67126 , H01L21/67201 , H01L21/67276 , H01L21/67376 , H01L21/67379 , H01L21/67386 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67736 , H01L21/67757 , H01L21/67766 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
摘要翻译：根据一个示例性实施例，一种半导体工件处理系统，具有用于处理半导体工件的至少一个处理工具，用于在其中保持至少一个半导体工件的容器，用于传送到所述至少一个处理器工具和第一传送部分，所述第一传送部分伸长并限定行进方向。第一传送部分具有与容器接合的部件，该容器沿着行进方向支撑和运送容器往返于至少一个处理工具。当由第一运输部分支撑时，容器在行进方向上以基本恒定的速率基本上连续运输。第二传送部分连接到至少一个处理工具，用于将容器传送到至少一个处理工具和从至少一个处理工具传送。

18. 发明申请

WO2007133701A2 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少能力承运人，运输，装卸港，缓冲系统
公开(公告)号：WO2007133701A2
公开(公告)日：2007-11-22
申请号：PCT/US2007011443
申请日：2007-05-11
申请人： BROOKS AUTOMATION INC , BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
发明人： BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
IPC分类号： B05D5/12 , C07C15/20
CPC分类号： H01L21/67126 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译：一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

19. 发明申请

WO2012064949A1 DUAL ARM ROBOT 审中-公开
标题翻译：双ARM机器人
公开(公告)号：WO2012064949A1
公开(公告)日：2012-05-18
申请号：PCT/US2011/060174
申请日：2011-11-10
申请人： BROOKS AUTOMATION, INC. , CAVENEY, Robert, T. , KRUPYSHEV, Alexander , MARTIN, Elliott, R. , HOFMEISTER, Christopher
发明人： CAVENEY, Robert, T. , KRUPYSHEV, Alexander , MARTIN, Elliott, R. , HOFMEISTER, Christopher
IPC分类号： B25J9/04
CPC分类号： B25J9/043 , B25J9/042
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
摘要翻译：一种基板处理装置，包括框架，第一臂，其在肩部轴线处连接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂，所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的至少一个基板保持器，以及连接到所述框架的驱动部分，所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度手臂或第二臂。

20. 发明申请

WO2008144670A1 LOAD LOCK FAST PUMP VENT 审中-公开
标题翻译：装载快速泵出口
公开(公告)号：WO2008144670A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/064166
申请日：2008-05-19
申请人： BROOKS AUTOMATION, INC. , HOFMEISTER, Christopher , ELLIOT, Martin, R. , KRUPYSHEV, Alexander , HALLISEY, Joseph , KRAUS, Joseph, A. , FOSNIGHT, William , CARBONE, Craig, J. , BLAHNIK, Jeffrey, C. , FONG, Hi Yin, Owen
发明人： HOFMEISTER, Christopher , ELLIOT, Martin, R. , KRUPYSHEV, Alexander , HALLISEY, Joseph , KRAUS, Joseph, A. , FOSNIGHT, William , CARBONE, Craig, J. , BLAHNIK, Jeffrey, C. , FONG, Hi Yin, Owen
IPC分类号： H01L21/677
CPC分类号： H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
摘要翻译：一种基板处理工具，其包括形成至少一个可分离室的框架，该隔离室被构造成保持受控气氛，至少两个基板支撑件，位于所述至少一个可隔离室的每一个内，所述至少两个基板支撑件中的每个基板支撑件彼此堆叠并且被配置为保持相应的基板和可通信地联接到所述至少两个基板支撑件的冷却单元，使得所述至少两个基板支撑件和冷却单元对位于所述至少两个基板支撑件上的各个基板的每个基板进行同时导电冷却。

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