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    • 18. 发明申请
    • METHOD AND APPARATUS FOR PROCESSING WORKPIECES
    • 处理工作的方法和装置
    • WO2013180835A1
    • 2013-12-05
    • PCT/US2013/035650
    • 2013-04-08
    • ELECTRO SCIENTIFIC INDUSTRIES, INC.
    • FRANKEL, Joseph, G.
    • G01N21/84B23K26/38
    • B23K26/032B23K26/082B23K26/36Y10T279/21
    • An apparatus for processing a workpiece can be exemplarily characterized as including a processing tool having a processing region within which a workpiece can be processed, and an illumination system configured to direct detection light into the processing region. In this embodiment, detection light directable by the illumination system has a wavelength to which the workpiece is at least partially opaque. The apparatus may further include an image sensor configured to detect a characteristic of the detection light transmitted through the processing region and a chuck configured to support a workpiece such that at least a portion of the workpiece is disposable within the processing region and is illuminatable by the detection light. Methods for processing a workpiece are also disclosed.
    • 用于加工工件的装置可以示例性地表征为包括具有可以处理工件的处理区域的处理工具和被配置为将检测光引导到处理区域中的照明系统。 在该实施例中,由照明系统可指示的检测光具有工件至少部分不透明的波长。 该装置还可以包括:图像传感器,被配置为检测透过该处理区域的检测光的特性;以及卡盘,其构造成支撑工件,使得该工件的至少一部分在处理区域内是可弃置的, 检测光。 还公开了加工工件的方法。
    • 19. 发明申请
    • SPECTROSCOPY DATA DISPLAY SYSTEMS AND METHODS
    • 光谱数据显示系统和方法
    • WO2013101745A1
    • 2013-07-04
    • PCT/US2012/071311
    • 2012-12-21
    • ELECTRO SCIENTIFIC INDUSTRIES, INC.
    • CLEM, William E.WILKINS, Jay N.SUMMERFIELD, Leif
    • G01N21/25
    • H01J49/0004H01J49/0036H01J49/0463H01J49/105
    • Spectroscopy data are correlated to physical locations on a sample. A laser beam is scanned along a beam trajectory relative to the sample located in a sample chamber. The laser beam disassociates material from the sample along the beam trajectory to produce an aerosol of the disassociated material within the sample chamber. A fluid is passed through the sample chamber to transport the disassociated material to a spectrometer for determining spectroscopy data values of a selected element along the beam trajectory. The spectroscopy data values are correlated with respective locations of the sample along the beam trajectory, and an image is displayed of at least a portion of the sample including the respective locations along the beam trajectory where the material was disassociated by the laser beam. The image includes indicia of the spectroscopy data values at their correlated locations.
    • 光谱数据与样品上的物理位置相关。 沿着相对于位于样品室中的样品的光束轨迹扫描激光束。 激光束沿着光束轨迹分离样品中的材料,以产生样品室内的解离材料的气溶胶。 流体通过样品室以将解离的材料运送到光谱仪,以便沿着光束轨迹确定所选元素的光谱数据值。 光谱数据值与沿着光束轨迹的样本的相应位置相关,并且显示包括沿着光束轨迹的各个位置的样本的至少一部分的图像,其中材料被激光束分离。 该图像包括其相关位置处的光谱数据值的标记。