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1. 发明申请

WO2020251782A1 LASER PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME 审中-公开
公开(公告)号：WO2020251782A1
公开(公告)日：2020-12-17
申请号：PCT/US2020/035152
申请日：2020-05-29
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： KLEINERT, Jan , LIN, Zhibin , SCHRAUBEN, Joel , UNRATH, Mark , HU, Honhhua , CHEN, Ruolin , YANG, Chuan , LOTT, Geoffrey , FINN, Daragh
IPC分类号： B23K26/386 , H05K3/00 , G02F1/33
摘要： Numerous embodiments are disclosed. Many of which relate to methods of forming vias in workpieces such as printed circuit boards. Some embodiments relates techniques for indirectly ablating a region of an electrical conductor structure of, for example, a printed circuit board by spatially distributing laser energy throughout the region before the electrical conductor is indirectly ablated. Other embodiments relate to techniques for temporally-dividing laser pulses, modulating the optical power within laser pulses, and the like.

2. 发明申请

WO2017173281A1 LASER-SEEDING FOR ELECTRO-CONDUCTIVE PLATING 审中-公开
标题翻译：用于导电镀层的激光种子
公开(公告)号：WO2017173281A1
公开(公告)日：2017-10-05
申请号：PCT/US2017/025392
申请日：2017-03-31
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： SCHRAUBEN, Joel , KLEINERT, Jan
IPC分类号： H01L23/15 , H01L21/268 , H01L23/14
摘要： A workpiece (100) having substrate, such as a glass substrate, can be etched by a laser or by other means to create recessed features (200, 202). A laser- induced forward transfer (LIFT) process or metal oxide printing process can be employed to impart a seed material (402), such as a metal, onto the glass substrate, especially into the recessed features (200, 202). The seeded recessed features can be plated, if desired, by conventional techniques, such as electroless plating, to provide conductive features (500) with predictable and better electrical properties. The workpieces (100) can be connected in a stacked such that subsequently stacked workpieces (100) can be modified in place.
摘要翻译：具有诸如玻璃基板的基板的工件（100）可以通过激光或其他手段来蚀刻以形成凹陷结构（200,202）。激光诱导正向转移（LIFT）工艺或金属氧化物印刷工艺可用于将诸如金属的种子材料（402）施加到玻璃基板上，特别是施加到凹陷结构（200,202）中。如果需要，可以通过常规技术（如无电电镀）对籽晶凹陷结构进行电镀，以提供具有可预测的和更好的电性能的导电部件（500）。工件（100）可以堆叠连接，使得随后堆叠的工件（100）可以被修改到位。

3. 发明申请

WO2016209818A1 MULTI-AXIS MACHINE TOOL AND METHODS OF CONTROLLING THE SAME 审中-公开
标题翻译：多轴机床及其控制方法
公开(公告)号：WO2016209818A1
公开(公告)日：2016-12-29
申请号：PCT/US2016/038535
申请日：2016-06-21
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： LU, Guang , ALPAY, Mehmet , TYLER, Mike , XU, Qian , KLEINERT, Jan , LIN, Zhibin , BROOKHYSER, Jim , LO, Ho, Wai , EATON, Kurt, M.
IPC分类号： B23Q1/25 , B23Q1/44 , B23Q5/54 , B23Q15/00
CPC分类号： B23Q15/14 , G05B19/402 , G05B2219/34015 , G05B2219/50218
摘要： One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.
摘要翻译：本发明的一个实施例可以被表征为一种用于控制多轴机床的方法，包括获得初步旋转致动器命令（其中旋转致动器指令的频率含量超过旋转致动器的带宽），产生处理旋转至少部分地基于初步旋转致动器命令，所述处理的旋转致动器命令具有在旋转致动器的带宽内的频率含量，并且至少部分地基于第一线性致动器命令和第二线性致动器命令产生第二线性致动器命令在加工的旋转执行器命令上。经处理的旋转致动器命令可以被输出到旋转致动器，第一线性致动器命令可被输出到第一线性致动器，并且第二线性致动器命令可被输出到第二线性致动器。

4. 发明申请

WO2022146580A1 LASER PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME 审中-公开
公开(公告)号：WO2022146580A1
公开(公告)日：2022-07-07
申请号：PCT/US2021/060504
申请日：2021-11-23
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： KLEINERT, Jan , CHEN, Ruolin , BROOKHYSER, James , UNRATH, Mark , HU, Honghua
IPC分类号： B23K26/382 , B23K26/03 , H01S3/137 , B23K101/42
摘要： A laser-processing apparatus can carry out a process to form a via in a workpiece, having a first material formed on a second material, by directing laser energy onto the workpiece such that the laser energy is incident upon the first material, wherein the laser energy has a wavelength to which the first material is more reflective than the second material. The apparatus can include a back-reflection sensing system operative to capture a back-reflection signal corresponding to a portion of laser energy directed to the workpiece and reflected by the first material and generate a sensor signal based on the captured back-reflection signal; and a controller communicatively coupled to an output of the back-reflection sensing system, wherein the controller is operative to control a remainder of the process by which the via is formed based on the sensor signal.

5. 发明申请

WO2020159666A1 LASER-PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME 审中-公开
公开(公告)号：WO2020159666A1
公开(公告)日：2020-08-06
申请号：PCT/US2020/012219
申请日：2020-01-03
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： BROOKHYSER, James , KLEINERT, Jan , KOSMOWSKI, Mark , NUCKOLLS, Timothy , RICHTER, Jered , YOSHINO, Fumiyo , MELIZA, Steve , ALPAY, Mehmet , LIU, Yuan , EATON, Kurt
IPC分类号： B23K26/067 , B23K26/06 , B23K26/38
摘要： Numerous embodiments are disclosed. In one, a laser-processing apparatus includes a positioner arranged within a beam path along which a beam of laser energy is propagatable. A controller may be used to control an operation of the positioner to deflect the beam path within first and second primary angular ranges, and to deflect the beam path to a plurality of angles within each of the first and second primary angular ranges. In another, an integrated beam dump system includes a frame; and a pickoff mirror and beam dump coupled to the frame. In still another, a wavefront correction optic includes a mirror having a reflective surface having a shape characterized by a particular ratio of fringe Zemike terms Z4 and Z9. Many more embodiments are disclosed.

6. 发明申请

WO2014066251A1 METHOD AND APPARATUS FOR MARKING AN ARTICLE 审中-公开
标题翻译：用于标记文章的方法和装置
公开(公告)号：WO2014066251A1
公开(公告)日：2014-05-01
申请号：PCT/US2013/065946
申请日：2013-10-21
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： REICHENBACH, Rebert , UNRATH, Mark , HOWERTON, Jeffrey , ALPAY, Mehmet, E. , KLEINERT, Jan , MATSUMOTO, Hisashi , MOORE, Andy
IPC分类号： B23K26/36 , B23K26/00 , B23K26/40 , B23K26/06 , H01S3/10
CPC分类号： B23K26/0066 , B23K26/082
摘要： The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.
摘要翻译：本发明是用于标记物品和如此标记的物品的方法和装置。它包括提供文章。产生多组激光脉冲。通过调制激光脉冲束来形成多个子束中的至少一个组。多个子束中的每一个包括至少一个激光脉冲。它还包括将多组激光脉冲引导到物品上使得多个组中的至少一个组内的激光脉冲在不彼此重叠的斑点区域处撞击物品，其中多个组内的激光脉冲被配置为在物品上产生可见标记。

7. 发明申请

WO2022125305A1 OPTICAL RELAY SYSTEM AND METHODS OF USE AND MANUFACTURE 审中-公开
公开(公告)号：WO2022125305A1
公开(公告)日：2022-06-16
申请号：PCT/US2021/060478
申请日：2021-11-23
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. [US]/[US]
发明人： BROOKHYSER, James , KLEINERT, Jan , RICHTER, Jered , UNRATH, Mark
IPC分类号： G02B27/09 , G02B17/06 , G02B27/14 , G02B27/18
摘要： Numerous embodiments of optical relay systems are disclosed. In one embodiment, a laser-processing apparatus includes an optical relay system configured to correct for beam placement errors by maintaining the optical path length of a beam of laser energy between a first positioner and a scan lens. In another embodiment, the optical relay system may include a first lens, a second lens, and a zoom lens assembly arranged between the first lens and the second lens, wherein the zoom lens assembly includes a first lens group and a second lens group. The zoom lens assembly may be movable relative to the first lens and the second lens (e.g., mounted on a positioner, such as a motion stage). The distance between the lenses of the first lens group and the distance between the lenses of the second lens group may be fixed or variable.

8. 发明申请

WO2020076583A1 SYSTEMS AND METHODS FOR DRILLING VIAS IN TRANSPARENT MATERIALS 审中-公开
公开(公告)号：WO2020076583A1
公开(公告)日：2020-04-16
申请号：PCT/US2019/054271
申请日：2019-10-02
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： MATSUMOTO, Hisashi , KLEINERT, Jan , LIN, Zhibin
IPC分类号： B23K26/382 , B23K26/40
摘要： A method for forming a through- via in a substrate having opposing first and second surfaces can include directing a focused beam of laser pulses into the substrate through the first surface of the substrate and, subsequently, through the second surface of the substrate. The focused beam of laser pulses can have a wavelength to which the substrate is at least substantially transparent and a beam waist of the focused beam of laser pulses is closer to the second surface than to the first surface. The focused beam of laser pulses is characterized by a pulse repetition rate, a peak optical intensity at the substrate and an average power at the substrate sufficient to: melt a region of the substrate near the second surface, thereby creating a melt zone within the substrate; propagate the melt zone toward the first surface; and vaporize or boil material of the substrate and located within the melt zone.

9. 发明申请

WO2016137819A1 LASER SYSTEMS AND METHODS FOR LARGE AREA MODIFICATION 审中-公开
标题翻译：激光系统和大面积修改方法
公开(公告)号：WO2016137819A1
公开(公告)日：2016-09-01
申请号：PCT/US2016/018501
申请日：2016-02-18
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： KLEINERT, Jan , YOSHINO, Fumiyo , NEUFELD, Corie , WILLEY, Jeremy , ALPAY, Mehmet
IPC分类号： B23K26/36 , B23K26/362 , B23K26/364
CPC分类号： B23K26/364 , B23K26/0006 , B23K26/0084 , B23K26/0087 , B23K26/066 , B23K26/0676 , B23K26/08 , B23K26/082 , B23K26/0823 , B23K26/0853 , B23K26/352 , B23K26/359 , B23K2201/40 , B23K2203/50 , B23K2203/56
摘要： A laser system (112, 1300) modifies a large area on an article (100) by employing a beamlet generator (1404) to provide a plurality of beamlets (1408) to a beamlet selection device (2350) whose operation is synchronized with movement of a beam steering system (1370) to variably select a number and spatial arrangement of beamlets (1408) to propagate a variable pattern of spot areas (302) to the article (100).
摘要翻译：激光系统（112,1300）通过使用子束发生器（1404）来修改物品（100）上的大面积，以向其选择装置（2350）提供多个子束（1408），该小射束的操作与波束转向系统（1370），用于可变地选择子束（1408）的数量和空间布置，以将斑点区域（302）的可变图案传播到物品（100）。

10. 发明申请

WO2014144877A1 PHASED ARRAY STEERING FOR LASER BEAM POSITIONING SYSTEMS 审中-公开
标题翻译：激光束定位系统的相位阵列转向
公开(公告)号：WO2014144877A1
公开(公告)日：2014-09-18
申请号：PCT/US2014/029470
申请日：2014-03-14
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： KLEINERT, Jan
IPC分类号： H01S3/105 , H01S3/10
CPC分类号： B23K26/03 , B23K26/035 , B23K26/0676 , H01S3/005 , H01S3/0071 , H01S3/06737 , H01S3/06741 , H01S3/06754 , H01S3/1003 , H01S3/10053 , Y10T29/49165
摘要： A laser beam positioning system (110) of a laser-based specimen processing system (112) produces at beam positioner stage (124), from a fully fiber-coupled optics phased array laser beam steering system (80), a steered laser input beam (106). System (110) directs beam (106) through one or more other beam positioner stages (130, 131, 134) to form a processing laser beam (116) that processes target features (118) of a workpiece (120) mounted on a support (122).
摘要翻译：基于激光的样本处理系统（112）的激光束定位系统（110）在光束定位器级（124）处从完全光纤耦合的光学相控阵激光束转向系统（80），转向激光输入光束（106）。系统（110）将光束（106）引导通过一个或多个其它光束定位器台（130,131,134）以形成处理激光束（116），其处理安装在支撑件上的工件（120）的目标特征（118）（122）。

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