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    • 1. 发明申请
    • SPECTROSCOPY DATA DISPLAY SYSTEMS AND METHODS
    • 光谱数据显示系统和方法
    • WO2013101745A1
    • 2013-07-04
    • PCT/US2012/071311
    • 2012-12-21
    • ELECTRO SCIENTIFIC INDUSTRIES, INC.
    • CLEM, William E.WILKINS, Jay N.SUMMERFIELD, Leif
    • G01N21/25
    • H01J49/0004H01J49/0036H01J49/0463H01J49/105
    • Spectroscopy data are correlated to physical locations on a sample. A laser beam is scanned along a beam trajectory relative to the sample located in a sample chamber. The laser beam disassociates material from the sample along the beam trajectory to produce an aerosol of the disassociated material within the sample chamber. A fluid is passed through the sample chamber to transport the disassociated material to a spectrometer for determining spectroscopy data values of a selected element along the beam trajectory. The spectroscopy data values are correlated with respective locations of the sample along the beam trajectory, and an image is displayed of at least a portion of the sample including the respective locations along the beam trajectory where the material was disassociated by the laser beam. The image includes indicia of the spectroscopy data values at their correlated locations.
    • 光谱数据与样品上的物理位置相关。 沿着相对于位于样品室中的样品的光束轨迹扫描激光束。 激光束沿着光束轨迹分离样品中的材料,以产生样品室内的解离材料的气溶胶。 流体通过样品室以将解离的材料运送到光谱仪,以便沿着光束轨迹确定所选元素的光谱数据值。 光谱数据值与沿着光束轨迹的样本的相应位置相关,并且显示包括沿着光束轨迹的各个位置的样本的至少一部分的图像,其中材料被激光束分离。 该图像包括其相关位置处的光谱数据值的标记。