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1. 发明申请

WO2011123667A2 TOUCH SCREEN INTERFACE FOR LASER PROCESSING 审中-公开
标题翻译：用于激光加工的触摸屏界面
公开(公告)号：WO2011123667A2
公开(公告)日：2011-10-06
申请号：PCT/US2011/030761
申请日：2011-03-31
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , SUMMERFIELD, Leif , CLEM, Bill , WILKINS, Jay , WERNIKOWSKI, Tom , BERNASEK, Jay
发明人： SUMMERFIELD, Leif , CLEM, Bill , WILKINS, Jay , WERNIKOWSKI, Tom , BERNASEK, Jay
CPC分类号： B23K26/032 , B23K26/0853 , G02B21/26
摘要： A touch screen user interface 24 for an optical device wherein the touch screen user interface 24 is connected to a controller 22 which controls motion stages 26 permitting the motion stages 26 to re-position, re-size, re-orient or focus the field of view 20 of the optical device in response to commands input from the touch screen user interface 24.
摘要翻译：用于光学装置的触摸屏用户界面24，其中触摸屏用户接口24连接到控制器22，控制器22控制运动台26，允许运动台26重新定位，重新定尺寸，重新定向或聚焦响应于从触摸屏用户界面24输入的命令，查看光学设备20。

2. 发明申请

WO2017123551A1 SIMULTANEOUS PATTERN-SCAN PLACEMENT DURING SAMPLE PROCESSING 审中-公开
标题翻译：样品处理过程中同时进行模式扫描放置
公开(公告)号：WO2017123551A1
公开(公告)日：2017-07-20
申请号：PCT/US2017/012871
申请日：2017-01-10
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： O'CONNOR, Ciaran , LARSEN, Erik , SUMMERFIELD, Leif
IPC分类号： G02B26/10 , H01S3/00 , G02B27/14
CPC分类号： B23K26/032 , B23K26/0622 , B23K26/082 , B23K26/0876 , B23K26/123 , B23K26/127 , B23K26/362 , B23K26/402 , B23K2203/30 , B23K2203/50 , G01N1/44 , G01N21/718 , G01N21/8806 , G02B21/0016 , G02B26/105 , G06T7/0004 , G06T2207/10056 , G06T2207/20021 , G06T2207/20104 , H01J49/04
摘要： A laser ablation system, and method, facilitates the execution of user-defined scans (i.e., in which a laser beam is scanned across a sample along a beam trajectory to ablate or dissociate a portion of the sample) and enables the user define additional scans while a scan is being executed.
摘要翻译：激光消融系统和方法有助于执行用户定义的扫描（即，其中沿着光束轨迹在样本上扫描激光束以消融或解离一部分样本），并允许用户在执行扫描时定义其他扫描。

3. 发明申请

WO2013101745A1 SPECTROSCOPY DATA DISPLAY SYSTEMS AND METHODS 审中-公开
标题翻译：光谱数据显示系统和方法
公开(公告)号：WO2013101745A1
公开(公告)日：2013-07-04
申请号：PCT/US2012/071311
申请日：2012-12-21
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： CLEM, William E. , WILKINS, Jay N. , SUMMERFIELD, Leif
IPC分类号： G01N21/25
CPC分类号： H01J49/0004 , H01J49/0036 , H01J49/0463 , H01J49/105
摘要： Spectroscopy data are correlated to physical locations on a sample. A laser beam is scanned along a beam trajectory relative to the sample located in a sample chamber. The laser beam disassociates material from the sample along the beam trajectory to produce an aerosol of the disassociated material within the sample chamber. A fluid is passed through the sample chamber to transport the disassociated material to a spectrometer for determining spectroscopy data values of a selected element along the beam trajectory. The spectroscopy data values are correlated with respective locations of the sample along the beam trajectory, and an image is displayed of at least a portion of the sample including the respective locations along the beam trajectory where the material was disassociated by the laser beam. The image includes indicia of the spectroscopy data values at their correlated locations.
摘要翻译：光谱数据与样品上的物理位置相关。沿着相对于位于样品室中的样品的光束轨迹扫描激光束。激光束沿着光束轨迹分离样品中的材料，以产生样品室内的解离材料的气溶胶。流体通过样品室以将解离的材料运送到光谱仪，以便沿着光束轨迹确定所选元素的光谱数据值。光谱数据值与沿着光束轨迹的样本的相应位置相关，并且显示包括沿着光束轨迹的各个位置的样本的至少一部分的图像，其中材料被激光束分离。该图像包括其相关位置处的光谱数据值的标记。

4. 发明申请

WO2009120706A3 AUTOFOCUS METHOD AND APPARATUS FOR WAFER SCRIBING 审中-公开
公开(公告)号：WO2009120706A3
公开(公告)日：2009-10-01
申请号：PCT/US2009/038122
申请日：2009-03-24
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , XIE, Xiuping , ZHU, Jun , SUMMERFIELD, Leif , HUANG, Chung-Po
发明人： XIE, Xiuping , ZHU, Jun , SUMMERFIELD, Leif , HUANG, Chung-Po
IPC分类号： H01L21/78 , H01L21/66
摘要： A method and an apparatus perform real time autofocus for a wafer scribing system. The method and apparatus uses polarized light (42) directed to the surface (50) of the wafer (10) directly under the objective lens (26) for the scribing laser beam at a grazing angle. The light reflected from the wafer is filtered (56) to remove light from the scribing laser beam and then focused on a position sensitive device (58) to measure the distance from the objective lens to the wafer surface.

5. 发明申请

WO2014124181A1 IN-CHAMBER FLUID HANDLING SYSTEM AND METHODS HANDLING FLUIDS USING THE SAME 审中-公开
标题翻译：室内流体处理系统和方法使用该方法处理流体
公开(公告)号：WO2014124181A1
公开(公告)日：2014-08-14
申请号：PCT/US2014/015173
申请日：2014-02-06
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , HILLIARD, Shane , O'CONNOR, Ciaran, J. , WILKINS, Jay , LARSEN, Erik , SUMMERFIELD, Leif
发明人： HILLIARD, Shane , O'CONNOR, Ciaran, J. , WILKINS, Jay , LARSEN, Erik , SUMMERFIELD, Leif
IPC分类号： G01N1/28 , G01N35/08
CPC分类号： H01J49/0459 , G01N1/2226 , G01N2001/2241 , G01N2001/383 , H01J49/04 , H01J49/0463
摘要： A sample chamber is configured to accommodate a target such that a portion of the target is removable as a sample. A carrier gas injection system is configured to introduce a carrier gas into the sample region from a first position and a second position within the sample chamber such that at least a portion of the sample is entrainable by the carrier gas within the sample region. A portion of the sample region is located between the first position and the second position. A sample transport conduit is configured to transport at least a portion of the sample entrained by the carrier gas to a location outside the sample chamber.
摘要翻译：样品室被配置为容纳目标，使得靶的一部分作为样品是可移除的。载气注入系统被配置为从样品室内的第一位置和第二位置将载气引入样品区域，使得至少一部分样品可以被样品区域内的载气夹带。样品区域的一部分位于第一位置和第二位置之间。样品输送导管构造成将载气携带的样品的至少一部分输送到样品室外部的位置。

6. 发明申请

WO2013095786A1 METHOD AND APPARATUS FOR ADJUSTING RADIATION SPOT SIZE 审中-公开
标题翻译：用于调整辐射点大小的方法和装置
公开(公告)号：WO2013095786A1
公开(公告)日：2013-06-27
申请号：PCT/US2012/063102
申请日：2012-11-01
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC , O'CONNOR, Ciaran, John Patrick , HILLIARD, Shane , SUMMERFIELD, Leif
发明人： O'CONNOR, Ciaran, John Patrick , HILLIARD, Shane , SUMMERFIELD, Leif
IPC分类号： G01N1/00 , G01N27/64 , G02B27/00
CPC分类号： H01J49/164 , G02B5/005
摘要： An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.
摘要翻译：一种装置可以包括：第一光束裁剪器，被配置成裁剪具有第一光斑尺寸的辐射脉冲的一部分，以形成具有小于第一光点尺寸的中间裁剪光斑尺寸的中间裁剪光斑的中间剪切辐射脉冲; 以及第二光束裁剪器，其被配置为裁剪所述中间裁剪的斑点以形成具有第二裁剪斑点的第二裁剪的辐射脉冲，其具有小于所述中间裁切斑点尺寸的第二裁剪斑点尺寸。

7. 发明申请

WO2011123664A2 IMPROVED SAMPLE CHAMBER FOR LASER ABLATION INDUCTIVELY COUPLED PLASMA MASS SPECTROSCOPY 审中-公开
标题翻译：改进的样品室用于激光吸收感应耦合等离子体质谱
公开(公告)号：WO2011123664A2
公开(公告)日：2011-10-06
申请号：PCT/US2011/030757
申请日：2011-03-31
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , HUTCHINSON, Robert , SUMMERFIELD, Leif , HILLIARD, Shane , WILKINS, Jay
发明人： HUTCHINSON, Robert , SUMMERFIELD, Leif , HILLIARD, Shane , WILKINS, Jay
IPC分类号： H01J49/04 , H01J49/26 , G01N27/62
CPC分类号： H01J49/0409 , H01J49/105
摘要： An improved sample chamber 40 for laser assisted spectroscopy integrates valve mechanisms 48, 58 into the sample drawer 46, permitting the sample chamber 40 to automatically bypass, purge and resume flow as the sample drawer 40 is opened 62 and closed 70 to insert samples for processing. Integrating valve mechanisms 48, 58 into the sample drawer 46 in this manner eliminates the need for external valves to be operated to bypass, purge and resume flow, thereby increasing system throughput and reducing system complexity.
摘要翻译：用于激光辅助光谱的改进的样品室40将阀机构48,58集成到样品抽屉46中，允许样品室40随着样品抽屉40打开62而被自动旁路，净化和恢复流动，并且关闭70以插入用于处理的样品。以这种方式将阀机构48,58集成到样品抽屉46中消除了外部阀的操作需要旁路，清除和恢复流动，从而增加系统吞吐量并降低系统复杂性。

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