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    • 2. 发明授权
    • Scanning probe microscope with independent force control and displacement measurements
    • 扫描探针显微镜具有独立的力控制和位移测量
    • US08028343B2
    • 2011-09-27
    • US12362359
    • 2009-01-29
    • Warren C. OliverJohn SwindernanJennifer HayKarmit Parks
    • Warren C. OliverJohn SwindernanJennifer HayKarmit Parks
    • G01Q20/02G01Q10/00G01Q90/00
    • G01Q20/02G01Q60/366
    • A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.
    • 公开了包括干涉仪,杆,力致动器和控制器的纳米压痕器。 干涉仪产生从可移动反射器反射的光束,干涉仪确定参考位置和可移动反射器之间的距离。 杆的特征在于杆轴线并且在其第一端上包括尖端,杆在靠近尖端的位置处包括可移动反射器。 尖端以允许尖端被迫抵靠样品表面的方式设置。 响应于耦合到致动器的力控制信号,力致动器在平行于杆轴线的方向上向杆施加力。 控制器从干涉仪接收确定的距离并产生力控制信号。 本发明也可以用作扫描探针显微镜。
    • 3. 发明申请
    • System for sensing a sample
    • 用于感测样品的系统
    • US20050262931A1
    • 2005-12-01
    • US11192808
    • 2005-07-28
    • Thomas McWaidPeter PanagasSteven EatonAmin SamsavarWilliam Wheeler
    • Thomas McWaidPeter PanagasSteven EatonAmin SamsavarWilliam Wheeler
    • G01Q70/08G01B3/00G01B5/28G01B7/34G01B21/20G01B21/30G01Q10/00G01Q10/02G01Q10/04G01Q10/06G01Q60/38G01Q70/00G01Q70/06G01Q70/12G01Q90/00G01N13/10
    • G01B3/008G01B7/34G01Q10/06G01Q60/34Y10S977/851
    • A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
    • 扫描仪或扫描探针显微镜可以跨样品表面进行扫描,其间的距离被控制以允许感测尖端间歇地接触表面,以便找到并测量感兴趣的特征。 控制距离使得当感测尖端升高或降低以接触样品表面时,尖端和样品之间没有横向相对运动。 这可以防止尖端损坏。 可以提供或测量样品表面的高度分布的先前知识并且用于最初定位感测尖端或者用于控制分离以避免尖端和样品之间的横向接触。 该过程也可以分两部分执行:快速查找模式以查找特征,以及随后的测量模式来测量特征。 还可以通过选择横向相对运动的步骤来小于100纳米,以减少尖端损伤的可能性来执行快速步进模式。 在该模式中,在每个垂直步骤之后,增加尖端和样品之间的间隔,检测尖端和样品是否接触。 如果它们在垂直步骤之后仍然接触,则采取一个或多个垂直步骤来增加分离,并且不采取垂直步骤来减小分离,并且不会引起横向相对运动,直到确定尖端和样品 不再联系。
    • 4. 发明申请
    • Method of fabricating probe for spm having fet channel structure utilizing self-aligned fabrication
    • 使用自对准制造的具有胎儿通道结构的spm探针的制造方法
    • US20050214966A1
    • 2005-09-29
    • US10513170
    • 2003-04-26
    • Hong-Sik ParkHyun-Jung ShinJu-Hwan Jung
    • Hong-Sik ParkHyun-Jung ShinJu-Hwan Jung
    • G01Q60/60G01Q70/16G01Q80/00G01Q90/00H01L29/78H01L21/00
    • G01Q60/30
    • Provided is a method of fabricating a probe for a scanning probe microscope (SPM) having a field effect transistor (FET) channel structure utilizing a self-aligned fabrication. The provided method includes a first step of forming a first-shaped mask layer on a substrate and forming a source region and a drain region in regions of the substrate except for the mask layer; a second step of patterning a first-shaped photoresist in a perpendicular direction to the mask layer and performing an etching process to form a second-shaped mask layer; and a third step of etching the regions of the substrate except for the mask layer to form a probe. The provided method aligns the center of a tip with the center of a channel existing between the source region and the drain region to realize a tip having a size of tens of nanometers. Thus, a nano-device can be easily manufactured using the probe having the tip.
    • 提供一种制造具有利用自对准制造的场效应晶体管(FET)沟道结构的扫描探针显微镜(SPM)的探针的方法。 所提供的方法包括在衬底上形成第一形状掩模层并在除了掩模层之外的衬底的区域中形成源区和漏区的第一步骤; 在与掩模层垂直的方向上图案化第一形状的光致抗蚀剂并执行蚀刻工艺以形成第二形掩模层的第二步骤; 以及蚀刻除了掩模层之外的衬底的区域以形成探针的第三步骤。 所提供的方法将尖端的中心与存在于源极区域和漏极区域之间的通道的中心对准,以实现具有数十纳米尺寸的尖端。 因此,可以使用具有尖端的探针容易地制造纳米器件。
    • 6. 发明授权
    • Optical to magnetic alignment in magnetic tape system
    • 磁带系统中的光磁对准
    • US06940681B2
    • 2005-09-06
    • US09933920
    • 2001-08-20
    • George BellesisLeo GuglielmoTzuochang LeeRobert JohnsonJames Fitzpatrick
    • George BellesisLeo GuglielmoTzuochang LeeRobert JohnsonJames Fitzpatrick
    • G11B5/09G01Q60/50G01Q90/00G11B5/56G11B5/584G11B5/596
    • G11B5/584G11B5/59677
    • A method of positioning a selected recording channel on a recording head relative to an optical servo system includes positioning the optical servo system at a first position relative to the selected recording, processing an alignment tape to determine a lateral offset between the optical servo system and the selected recording channel and positioning the optical servo system at a second position relative to the selected recording channel using the lateral offset. An alignment tape is also provided, which includes an elongated continuous web of flexible plastic substrate material having two edges and defining a front major surface and a back major surface, a magnetic storage medium formed on the front major surface, an inert medium formed on the back major surface and a track of alignment voids for indicating actual lateral displacement of the selected recording channel relative to the optical servo system.
    • 将选定的记录通道相对于光学伺服系统定位在记录头上的方法包括将光学伺服系统相对于所选择的记录定位在第一位置,处理对准带以确定光学伺服系统和 选择的记录通道,并且使用横向偏移将光学伺服系统定位在相对于所选择的记录通道的第二位置。 还提供了一种对准带,其包括具有两个边缘并且限定前主表面和后主表面的柔性塑料基底材料的细长连续腹板,形成在前主表面上的磁存储介质,形成在前主表面上的惰性介质 背面主表面和用于指示所选择的记录通道相对于光学伺服系统的实际横向位移的对准空隙轨迹。
    • 7. 发明申请
    • Molecular topological fractionation of macromolecules
    • 大分子的分子拓扑分馏
    • US20050176154A1
    • 2005-08-11
    • US10510060
    • 2003-05-14
    • Patrick SmithDavid MeunierScott BakerRobert Prud'homme
    • Patrick SmithDavid MeunierScott BakerRobert Prud'homme
    • G01N30/88G01Q60/00B01J20/281G01N30/00G01N30/02G01N30/32G01N30/46G01N30/52G01N30/62G01N30/74G01N30/86G01N33/44G01Q80/00G01Q90/00G01N33/00
    • G01N30/32G01N30/0005G01N30/02G01N30/461G01N30/52G01N33/44G01N2030/001G01N2030/324G01N2030/525G01N2030/528B01D15/34
    • A process for characterizing a sample comprising a population of linear macromolecules of interest (104) and a population of long chain branched macromolecules of interest (103), the process including four steps. The first step is to provide a flow through separating medium (100) and a liquid eluant (101) in which the macromolecules of interest dissolve, the separating medium defining flow through channels (102), the eluant flow rate and the average diameter of the channels being in a range so that the linear macromolecules of interest elute before the long chain branched macromolecules of interest (105) (106). The second step is to introduce a sample into the liquid eluant. The third step is to flow the liquid eluant under pressure through the channels (102) of the separating medium (100). The fourth step is to differentiate the linear macromolecules of interest (104) from the long chain branched macromolecules of interest (103) based on their successive elution volumes established in the third step such as by determining the refractive index of the successive elution volumes or by subjecting the successive elution volumes to size exclusion chromatography.
    • 用于表征包含一组目标线性大分子(104)和一组感兴趣的长链支化大分子(103)的样品的方法,该方法包括四个步骤。 第一步是提供流过分离介质(100)和其中感兴趣的大分子的液体洗脱液(101)的流动,分离介质限定流过通道(102),洗脱液流速和平均直径 通道在一定范围内,使得目标线性大分子在感兴趣的长链支化大分子(105)(106)之前洗脱。 第二步是将样品引入液体洗脱液。 第三步骤是使液体洗脱液在压力下流过分离介质(100)的通道(102)。 第四步是基于其在第三步骤中建立的连续洗脱体积,例如通过确定连续洗脱体积的折射率或通过测定连续洗脱体积的折射率,或通过测定连续洗脱体积的折射率来区分感兴趣的线性大分子(104)与目标长链支化大分子(103) 对连续的洗脱体积进行排阻层析。
    • 8. 发明授权
    • Method of preparing ultra fine particle of metal chalcogenide
    • 制备金属硫族化物超细颗粒的方法
    • US06926927B2
    • 2005-08-09
    • US10182350
    • 2001-11-26
    • Akito Ishida
    • Akito Ishida
    • C01B19/04C01B17/20C01B19/00C09K11/08C09K11/88G01Q80/00G01Q90/00G02B6/26C23C16/00B05D1/12B05D5/12
    • B82Y30/00C01B17/20C01B19/007C01P2002/84C01P2004/64G02B6/262Y10S977/855
    • A chalcogen film is applied to an acute tip of a glass fiber and the acute tip is held in physical contact with a metal layer so as to induce diffusional reaction for generation of a metal chalcogenide nano-particle or nano-particles at the acute tip. In the case where the chalcogen film is directly applied to the acute tip, the generated nano-particle or nano-particles are transferred from the acute tip to a corresponding part of the metal layer. When a silane-adsorbed film is pre-formed on the acute tip before application of the chalcogen film, the generated nano-particle or nano-particles are fixed to the acute tip. The nano-particles are several to tens in number with very narrow distribution of particle size. Since particle size and fixed position of the nano-particle or nano-particles can be controlled with high freedom, the nano-particle or nano-particles are useful as a light-emitting or photo-detecting element.
    • 将硫属薄膜施加到玻璃纤维的尖端,并且急尖头与金属层保持物理接触,以便在尖锐尖端处引起用于产生金属硫族化物纳米颗粒或纳米颗粒的扩散反应。 在硫霉素膜直接施加到急性尖端的情况下,所产生的纳米颗粒或纳米颗粒从急性尖端转移到金属层的相应部分。 当在施用硫属薄膜之前,在尖锐尖端上预先形成硅烷吸附膜时,将所生成的纳米颗粒或纳米颗粒固定在尖锐尖端。 纳米颗粒的数量几十个,粒度分布非常窄。 由于可以高度自由地控制纳米颗粒或纳米颗粒的粒度和固定位置,所以纳米颗粒或纳米颗粒可用作发光或光检测元件。
    • 9. 发明授权
    • Record condition extraction system and method of dielectric recording medium, and information recording apparatus
    • 介质记录介质的记录条件提取系统和方法以及信息记录装置
    • US06912193B2
    • 2005-06-28
    • US10354101
    • 2003-01-30
    • Yasuo ChoAtsushi Onoe
    • Yasuo ChoAtsushi Onoe
    • G01Q60/24G01Q60/46G01Q80/00G01Q90/00G11B9/00G11B9/02G11B9/14G11B11/00G11B11/08
    • B82Y10/00G11B9/02G11B9/14G11B9/1472G11B11/007G11B11/08
    • The record condition extraction system (1) of a dielectric recording medium is intended to obtain an applied voltage and an applied time length to be recorded when recording information in the dielectric recording medium. The record condition extraction system (1) is provided with: an applied voltage setting device (11); an applied time length setting device (12); a record control device (13); an applied voltage/applied time length record device (14); a record device (15); a dot radius measurement device (16); a dot radius record device (17); an optimum dot radius detection device (18); a record condition determination device (19); and an output device (20). The applied voltage setting device (11) and the applied time length setting device (12) set a voltage and a time applied to a probe (31) of the record device (15), respectively. The dot radius of a polarization domain 38, which is recorded at the record device (15), is measured at the dot radius measurement device (16), and the optimum polarization domain (38) is obtained at the optimum dot radius detection device (18). The applied voltage and the applied time length which have formed the polarization domain (38) are extracted as an optimum record condition.
    • 电介质记录介质的记录条件提取系统(1)旨在获得在介质记录介质中记录信息时要记录的施加电压和施加的时间长度。 记录条件提取系统(1)具有:施加电压设定装置(11); 施加时间长度设定装置(12); 记录控制装置(13); 施加电压/施加时间长度记录装置(14); 记录装置(15); 点半径测量装置(16); 点半径记录装置(17); 最佳点半径检测装置(18); 记录条件确定装置(19); 和输出装置(20)。 施加电压设定装置(11)和施加的时间长度设定装置(12)分别设定施加到记录装置(15)的探头(31)的电压和时间。 在点半径测量装置(16)处测量在记录装置(15)处记录的偏振域38的点半径,并且在最佳点半径检测装置( 18)。 已经形成偏振域(38)的施加电压和施加的时间长度被提取为最佳记录条件。