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1. 发明申请

US20090032706A1 Fast-Scanning SPM and Method of Operating Same 有权
标题翻译：快速扫描SPM和操作方法相同
公开(公告)号：US20090032706A1
公开(公告)日：2009-02-05
申请号：US11832881
申请日：2007-08-02
申请人： Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
发明人： Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
IPC分类号： G01N23/00
CPC分类号： G01Q10/04 , G01Q10/065 , G01Q20/02 , G01Q60/38
摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
摘要翻译：提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用速率至少为1毫米/秒。能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

2. 发明授权

US07278298B2 Scanner for probe microscopy 有权
标题翻译：扫描仪用于探针显微镜
公开(公告)号：US07278298B2
公开(公告)日：2007-10-09
申请号：US11000589
申请日：2004-11-30
申请人： Paul K. Hansma , Georg Fantner , Johannes H. Kindt
发明人： Paul K. Hansma , Georg Fantner , Johannes H. Kindt
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/04
摘要： A scanner for probe microscopy that avoids low resonance frequencies and accounts better for piezo nonlinearities. The x, y and z axes of a linear stack scanner are partially decoupled from each other while maintaining all mechanical joints stiff in the direction of actuation. The scanning probe microscope comprises a probe, a housing, at least two actuators, each coupled to the housing, and a support coupled to the housing and to at least a first of the actuators at a position spaced from the point at which the actuator is coupled to the housing. The support constrains the motion of the first actuator along a first axis while permitting translation along a second axis. The actuators are preferably orthogonally arranged linear stacks of flat piezos, preferably in push-pull configuration. The support can take different forms in different embodiments of the invention. In a particular embodiment, the scanner is a 2D scanner having a support frame with x and y axes, and a member for supporting an object to be moved such as a sample for a probe, the scanner comprising a flexure and flexure coupled cross-conformed piezos arranged along x and y axes. Expansion of the piezos is measured by at least two strain gauges disposed to measure the differential motion of at least two opposed actuators. The strain gauges are preferably arranged to compensate for ambient temperature changes, and preferably two or more strain gauges of identical type are disposed on each actuator to magnify the strain signal.
摘要翻译：用于探针显微镜的扫描仪，可避免低共振频率，更好地考虑压电非线性。线性堆栈扫描器的x，y和z轴在保持所有机械接头在致动方向上僵硬的同时部分地相互分离。扫描探针显微镜包括探针，壳体，每个联接到壳体的至少两个致动器，以及支撑件，其联接到壳体以及至少一个致动器的至少第一致动器，该致动器与致动器的位置间隔开加上住房。支撑件沿着第一轴线限制第一致动器的运动，同时允许沿着第二轴线的平移。致动器优选地是平面压电体的正交布置的线性叠层，优选地在推挽构型中。在本发明的不同实施例中，支撑件可以采取不同的形式。在特定实施例中，扫描器是具有带x和y轴的支撑框架的2D扫描仪，以及用于支撑待移动物体的构件，例如用于探针的样品，扫描器包括弯曲和弯曲耦合的交叉沿x轴和y轴排列的压电体。通过至少两个应变仪来测量压电体的扩张，这些应变仪设置用于测量至少两个相对的致动器的差动运动。应变计优选地布置成补偿环境温度变化，并且优选地，两个或更多个相同类型的应变计布置在每个致动器上以放大应变信号。

3. 发明授权

US08782811B2 Cleaning station for atomic force microscope 失效
标题翻译：原子力显微镜清洗站
公开(公告)号：US08782811B2
公开(公告)日：2014-07-15
申请号：US13458725
申请日：2012-04-27
申请人： Johannes H. Kindt , Daniel Lyons , Charles Meyer , Russ Mead
发明人： Johannes H. Kindt , Daniel Lyons , Charles Meyer , Russ Mead
IPC分类号： G01Q90/00
CPC分类号： G01Q90/00 , G01Q70/00
摘要： A cleaning station for thoroughly cleaning the AFM component surfaces that are exposed to fluid during imaging of a sample supported in a fluid medium is disclosed. The cleaning station is designed to selectively expose the AFM component surfaces to cleansing agents, such as soap/detergent and water, plasma cleaning, etc., and cleaning tools, such as brushes, while protecting fluid sensitive components from exposure to the cleansing agents. The preferred embodiments are particularly beneficial for scanners in which the fluid sensitive components (actuator, sensor, connector, etc.) are integrated in the same device to which the cantilever holder is attached.
摘要翻译：公开了一种清洁站，用于在支撑在流体介质中的样品成像期间彻底清洁暴露于流体的AFM组件表面。清洁站被设计成将AFM组件表面选择性地暴露于清洁剂，例如肥皂/洗涤剂和水，等离子体清洁等，以及清洁工具，例如刷子，同时保护流体敏感组分免于暴露于清洁剂。优选实施例对于其中流体敏感部件（致动器，传感器，连接器等）集成在悬臂支架附接到的相同装置中的扫描器是特别有益的。

4. 发明授权

US07555941B2 Scanner for probe microscopy 有权
标题翻译：扫描仪用于探针显微镜
公开(公告)号：US07555941B2
公开(公告)日：2009-07-07
申请号：US11899309
申请日：2007-09-05
申请人： Paul K. Hansma , Georg Fantner , Johannes H. Kindt
发明人： Paul K. Hansma , Georg Fantner , Johannes H. Kindt
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/04
摘要： A scanner for probe microscopy that avoids low resonance frequencies and accounts better for piezo nonlinearities. The x, y and z axes of a linear stack scanner are partially decoupled from each other while maintaining all mechanical joints stiff in the direction of actuation. The scanning probe microscope comprises a probe, a housing, at least two actuators, each coupled to the housing, and a support coupled to the housing and to at least a first of the actuators at a position spaced from the point at which the actuator is coupled to the housing. The support constrains the motion of the first actuator along a first axis while permitting translation along a second axis. The actuators are preferably orthogonally arranged linear stacks of flat piezos, preferably in push-pull configuration. The support can take different forms in different embodiments of the invention. In a particular embodiment, the scanner is a 2D scanner having a support frame with x and y axes, and a member for supporting an object to be moved such as a sample for a probe, the scanner comprising a flexure and flexure coupled cross-conformed piezos arranged along x and y axes. Expansion of the piezos is measured by at least two strain gauges disposed to measure the differential motion of at least two opposed actuators. The strain gauges are preferably arranged to compensate for ambient temperature changes, and preferably two or more strain gauges of identical type are disposed on each actuator to magnify the strain signal.
摘要翻译：用于探针显微镜的扫描仪，可避免低共振频率，更好地考虑压电非线性。线性堆栈扫描器的x，y和z轴在保持所有机械接头在致动方向上僵硬的同时部分地相互分离。扫描探针显微镜包括探针，壳体，每个联接到壳体的至少两个致动器，以及支撑件，其联接到壳体以及至少一个致动器的至少第一致动器，该致动器与致动器的位置间隔开加上住房。支撑件沿着第一轴线限制第一致动器的运动，同时允许沿着第二轴线的平移。致动器优选地是平面压电体的正交布置的线性叠层，优选地在推挽构型中。在本发明的不同实施例中，支撑件可以采取不同的形式。在特定实施例中，扫描器是具有带x和y轴的支撑框架的2D扫描仪，以及用于支撑待移动物体的构件，例如用于探针的样品，扫描器包括弯曲和弯曲耦合的交叉沿x轴和y轴排列的压电体。通过至少两个应变仪来测量压电体的扩张，这些应变仪设置用于测量至少两个相对的致动器的差动运动。应变计优选地布置成补偿环境温度变化，并且优选地，两个或更多个相同类型的应变计布置在每个致动器上以放大应变信号。

5. 发明授权

US06871527B2 Measurement head for atomic force microscopy and other applications 有权
标题翻译：测量头用于原子力显微镜等应用
公开(公告)号：US06871527B2
公开(公告)日：2005-03-29
申请号：US10197771
申请日：2002-07-17
申请人： Paul K. Hansma , Barney Drake , James Thompson , Johannes H. Kindt , David Hale
发明人： Paul K. Hansma , Barney Drake , James Thompson , Johannes H. Kindt , David Hale
IPC分类号： G01Q20/02 , G01Q30/02 , G01Q60/24 , G01Q60/38 , G01Q60/58 , G01B5/28 , G01N13/16
CPC分类号： G01Q60/38 , G01Q20/02
摘要： An improvement for atomic force microscopes, more generally for light beam detecting systems, but also in part applicable to scanning probe microscopes, providing significant novel features and advantages. Particular features include using different objective lens regions for incident and reflected light, a flexure that allows three dimensional motion of the optics block, forming the housing and optics block of a composite material or ceramic, arranging the components so that the beam never hits a flat surface at normal incidence, and providing a resonant frequency of cantilever vibration greater than 850 HZ between the cantilever and sample and the cantilever and focusing lens.
摘要翻译：原子力显微镜的改进，通常用于光束检测系统，但也部分适用于扫描探针显微镜，提供显着的新颖特征和优点。特殊的特征包括为入射和反射光使用不同的物镜区域，允许光学块的三维运动的挠曲，形成复合材料或陶瓷的壳体和光学块，以使得光束不会撞击平面并且在悬臂与样品与悬臂和聚焦透镜之间提供大于850HZ的悬臂振动的共振频率。

6. 发明申请

US20120297510A1 Cleaning Station for Atomic Force Microscope 失效
标题翻译：原子力显微镜清洗站
公开(公告)号：US20120297510A1
公开(公告)日：2012-11-22
申请号：US13458725
申请日：2012-04-27
申请人： Johannes H. Kindt , Daniel Lyons , Charles Meyer , Russ Mead
发明人： Johannes H. Kindt , Daniel Lyons , Charles Meyer , Russ Mead
IPC分类号： G01Q90/00
CPC分类号： G01Q90/00 , G01Q70/00
摘要： A cleaning station for thoroughly cleaning the AFM component surfaces that are exposed to fluid during imaging of a sample supported in a fluid medium is disclosed. The cleaning station is designed to selectively expose the AFM component surfaces to cleansing agents, such as soap/detergent and water, plasma cleaning, etc., and cleaning tools, such as brushes, while protecting fluid sensitive components from exposure to the cleansing agents. The preferred embodiments are particularly beneficial for scanners in which the fluid sensitive components (actuator, sensor, connector, etc.) are integrated in the same device to which the cantilever holder is attached.
摘要翻译：公开了一种清洁站，用于在支撑在流体介质中的样品成像期间彻底清洁暴露于流体的AFM组件表面。清洁站被设计成将AFM组件表面选择性地暴露于清洁剂，例如肥皂/洗涤剂和水，等离子体清洁等，以及清洁工具，例如刷子，同时保护流体敏感组分免于暴露于清洁剂。优选实施例对于其中流体敏感部件（致动器，传感器，连接器等）集成在悬臂支架附接到的相同装置中的扫描器是特别有益的。

7. 发明授权

US07770231B2 Fast-scanning SPM and method of operating same 有权
标题翻译：快速扫描SPM及其操作方法
公开(公告)号：US07770231B2
公开(公告)日：2010-08-03
申请号：US11832881
申请日：2007-08-02
申请人： Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
发明人： Craig Prater , Chanmin Su , Nghi Phan , Jeffrey M. Markakis , Craig Cusworth , Jian Shi , Johannes H. Kindt , Steven F. Nagle , Wenjun Fan
IPC分类号： G01N23/00
CPC分类号： G01Q10/04 , G01Q10/065 , G01Q20/02 , G01Q60/38
摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
摘要翻译：提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用速率至少为1毫米/秒。能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

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