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    • 2. 发明授权
    • Manipulator for vacuum applications
    • 真空应用的机械手
    • US4797053A
    • 1989-01-10
    • US156340
    • 1988-02-16
    • Valentin Balter
    • Valentin Balter
    • H01J37/20H01L21/68B65G54/00
    • H01L21/68H01J37/20Y10T74/20207
    • A manipulator for vacuum applications, e.g., for positioning of a specimen at a required point in a vacuum chamber (20) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures, comprises an adjustable angular connector (12) which is formed by two skewed rings (32) and (36) which slide one over another. When the rings rotate, the end of drive shaft (72) describes a planetary path along a circle. The drive shaft (72) has one end connected to a rotary drive mechanism (14) and another end to a driven shaft (92) through a universal joint (90). The lower end of the driven shaft is installed in a rotating manner in a slide (87). The slide (87) is guided in one direction along another slide (84) which in turn is guided in a direction perpendicular to the first one along a rigid frame (80). Planetary motion of driven shaft (92) causes linear motions of the slides (84, 87) in mutually perpendicular directions. As a result, the second slide (87), which carries a sample holder (18), can be installed in any required position within an orthogonal system of coordinates. In addition, the sample holder is rotated from the above-mentioned rotary drive mechanism. The manipulator moves the sample holder with high accuracy since the slide (84) is guided in the rigid frame (80).
    • 用于真空应用的操纵器,例如用于将样品定位在真空室(20)中所需点处,其中样品可进行离子注入或类似处理或测量程序,其包括可调角度连接器(12) 由两个将另一个滑动的倾斜环(32)和(36)形成。 当环转动时,驱动轴(72)的端部描述沿着圆的行星路径。 驱动轴(72)的一端通过万向节(90)连接到旋转驱动机构(14),另一端连接到从动轴(92)。 从动轴的下端以旋转方式安装在滑动件(87)中。 滑动件(87)沿着另一个滑动件(84)在一个方向被引导,该滑动件又沿着刚性框架(80)在垂直于第一滑动件的方向上被引导。 从动轴(92)的行星运动导致滑块(84,87)在相互垂直的方向上的线性运动。 结果,携带样本保持器(18)的第二滑动件(87)可以安装在正交坐标系中的任何所需位置。 此外,样品架从上述旋转驱动机构旋转。 由于滑块(84)在刚性框架(80)中被引导,操纵器以高精度移动样品架。
    • 4. 发明授权
    • System for arranging ferromagnetic coil springs and feeding same to a
work station
    • 用于安排铁磁螺旋弹簧并将其送入工作台的系统
    • US4408624A
    • 1983-10-11
    • US329014
    • 1981-12-09
    • Horst Friemert
    • Horst Friemert
    • B65G54/00B65G47/14B65G51/02B65G54/02H05K13/02B08B3/04
    • H05K13/02B65G47/1407
    • An arrangement for unscrambling ferromagnetic coil springs from a pile of coil springs, and conducting the coil springs to a work station. A cassette containing a disorganized pile of springs is provided with a first surface having openings, and discharge tubes associated therewith. A second surface which adjoins the first surface is provided with impact edges for controlling the upwardly vertical travel of the coil springs in response to a traveling electromagnetic field which, in one embodiment, is produced by a linear motor stator. The linear motor stator is arranged at an angle with respect to the second surface of the cassette, the apex of the acute angle being arranged at the junction between the first and second surfaces of the cassette. The traveling electromagnetic field attracts the springs to the second surface and causes them to travel upwardly until they encounter the impact edges. The inclination of the second surface with respect to the linear motor stator causes the springs to be conveyed into the discharge tubes.
    • 一种用于从一堆螺旋弹簧解扰铁磁螺旋弹簧并将螺旋弹簧导向工作站的装置。 包含无组织的弹簧堆的盒子设置有具有开口的第一表面和与其相关联的放电管。 与第一表面相邻的第二表面设置有冲击边缘,用于响应于在一个实施例中由线性电动机定子产生的行进电磁场来控制螺旋弹簧的向上垂直行进。 线性电动机定子相对于盒的第二表面成一角度设置,锐角的顶点设置在盒的第一和第二表面之间的接合处。 行进的电磁场将弹簧吸引到第二表面并使它们向上行进直到碰到冲击边缘。 第二表面相对于线性电动机定子的倾斜导致弹簧被输送到放电管中。
    • 6. 发明授权
    • Device for non-contact transporting and holding of objects or material
    • 用于非接触运输和保持物体或材料的装置
    • US08794877B2
    • 2014-08-05
    • US12595359
    • 2008-04-09
    • Michael SchilpJosef ZimmermannAdolf Zitzmann
    • Michael SchilpJosef ZimmermannAdolf Zitzmann
    • B65G54/00
    • B65G54/00F16C32/0611
    • The present invention relates to a device for transporting and holding of touch-sensitive structural elements or materials, the device comprising the following features: At least an oscillatory plate-like take-up 2 for receiving the object to be transported or held, on which at least an oscillation generator 3 is fixed, and at least two supporting members 4, wherein the oscillation generator 3 is arranged on the plate-like take-up 2 at a predetermined position thereof to set the plate-like take-up into flexural vibrations, and the supporting members 4 are arranged at positions where the amplitude of the flexural vibration is lower than the maximum amplitude by at least 50%, and the oscillation generator 3 is operated with a frequency setting the plate-like take-up 2 into vibrations so that the structural elements or the material are (is) levitating in a contact-free way.
    • 本发明涉及一种用于传送和保持触摸敏感的结构元件或材料的装置,该装置包括以下特征:至少一个用于接收待运送或保持的物体的振荡板状的卷取装置2, 至少振动发生器3被固定,并且至少两个支撑构件4,其中振荡发生器3在其预定位置处布置在板状卷取装置2上,以将板状卷取物设置成弯曲振动 并且支撑构件4布置在弯曲振幅低于最大振幅的位置处至少50%的位置,并且振荡发生器3以将板状卷绕2的频率设定为振动 使得结构元件或材料以无接触的方式浮动。