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1. 发明申请

US20120269045A1 Watch winder assembly with moveable attention-attracting mechanism 失效
标题翻译：具有可移动注意吸引机构的手表络纱机组件
公开(公告)号：US20120269045A1
公开(公告)日：2012-10-25
申请号：US13066597
申请日：2011-04-20
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： G04B5/00
CPC分类号： G04B5/00 , G04D7/009
摘要： Provided is the assembly of a watch winder with a moveable attention-attracting mechanism driven from the motor of the watch winder through a transmission mechanism. According to one modification, the attention-attracting mechanism comprises a multilink mechanism composed of a crank driven into rotation from the watch winder through pulleys and driving belt and pivotally connected to a first link, the other end of which is connected to one end of the second link. The other end of the second link is pivotally connected to the base of the assembly. The multilink mechanism of the device of this modification is made in the form of a human being, wherein the first link is formed as hands, the second link as a body, and the base support as legs. Rotation of the crank may be further transmitted to another attention-attracting mechanism that is formed as a Ferris wheel. According to the second modification, the multilink mechanism is formed as an oil-extracting pump.
摘要翻译：提供了具有通过传动机构从手表络纱机的电机驱动的可移动注意吸引机构的手表络纱机的组装。根据一个变型，注意吸引机构包括一个多链路机构，该多链路机构包括一个曲柄，该曲柄通过皮带轮和驱动带从手表卷绕机驱动旋转并枢转地连接到第一连杆，另一端连接到第一连杆第二连接。第二连杆的另一端枢转地连接到组件的底座。本变形例的装置的多链路机构是以人的形式进行的，其中，第一连杆形成为手，第二连杆作为主体，底座支撑为腿。曲柄的旋转可以进一步传递到形成为摩天轮的另一注意力吸引机构。根据第二变形例，多链路机构形成为抽油泵。

2. 发明授权

US4891516A Device for axially and angularly positioning a beam or the like in a sealed chamber 失效
标题翻译：用于将梁等轴向和角度地定位在密封室中的装置
公开(公告)号：US4891516A
公开(公告)日：1990-01-02
申请号：US316487
申请日：1989-02-27
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： H01J37/02 , H01J37/20
CPC分类号： H01J37/023 , H01J37/20
摘要： A device for focusing and positioning a high-energy beam in a vacuum chamber comprises a high-energy beam generator (10), which is sealingly connected to a housing (18) of a high-energy beam generator (20), a focusing unit (12) which consists of two tubular elements (26 and 28) having opposite external threads engageable with inner threads on a sleeve (30), and an adjustable connector unit (14) which is connected at one end to the focusing unit and at the other end to a vacuum chamber (16). Connector unit 14 consists of two skewed rings (60 and 62). One of these rings rotates on the lower end of focusing unit (12), while the other end ring is rotatably installed on the end of vacuum chamber (16). Both rings are rotatably connected to each other by means of a set of balls (68) inserted into a race, which is formed by annular grooves on the mating surfaces of the rings. The ball race between the rings is inclined with respect to the guide element which guides ring (60) during its rotation on the focusing unit. As a result, a relative rotation of rings (60 and 62) determines an angular position of the beam (B) emitted by the beam generator with respect to the plane of an object (96) to be treated. The rings can be driven from pulse motors (118 and 120), so that the beam, e.g., an electron beam, can describe any intricate pattern o the obect, e.g., a silicon substrate. Another embodiment of the invention is a device which is based on the same principle, but which can orient a rod (134) which carries a sample (136) to be treated in a vacuum chamber (16).
摘要翻译：用于将高能束聚焦并定位在真空室中的装置包括高能束发生器（10），其密封地连接到高能束发生器（20）的壳体（18），聚焦单元（12），其由具有与套筒（30）上的内螺纹接合的相对的外螺纹的两个管状元件（26和28）组成，以及可调连接器单元（14），其一端连接到聚焦单元另一端连接到真空室（16）。连接器单元14由两个偏斜环（60和62）组成。这些环中的一个在聚焦单元（12）的下端旋转，而另一端环可旋转地安装在真空室（16）的端部上。两个环通过插入到座圈中的一组球（68）彼此可旋转地连接，该环由环的配合表面上的环形槽形成。环之间的滚珠相对于在聚焦单元旋转期间引导环（60）的引导元件倾斜。结果，环（60和62）的相对旋转决定了光束发生器相对于被处理物体（96）的平面发射的光束（B）的角度位置。这些环可以从脉冲电动机（118和120）驱动，使得电子束（例如电子束）可以描述例如硅衬底的任何复杂的图案。本发明的另一个实施方案是基于相同原理的装置，但是可以使携带要在真空室（16）中处理的样品（136）的杆（134）定向。

3. 发明授权

US4779649A Gate valve with camming wedge, pressure equalizer, and replaceable bleeder valve 失效
标题翻译：闸阀带凸轮楔，压力均衡器和可更换泄放阀
公开(公告)号：US4779649A
公开(公告)日：1988-10-25
申请号：US8661
申请日：1987-01-30
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： F16K3/18
CPC分类号： F16K3/186 , Y10T137/8696
摘要： A gate valve for controlling the passage of fluid between inlet and outlet openings comprises a housing (40) containing a reciprocating expandable gate element formed of a wedge (54) which is sandwiched between two spring-loaded plates (56 and 58) so that reciprocation of the wedge causes expansion of the plates for closing the valve's openings. In order to facilitate the return stroke of the wedge and to overcome the holding force of the vacuum on one of the plate, the device includes a bleeder valve element (80) which is connected to the first plate and has a seat on the second plate so that when the first plate (56) located on the higher pressure side commences its movement, it opens the bleeder valve element and equilizes the pressures on both sides of the valve. This eliminates the vacuum and thus the holding force. In the second embodiment, the valve has a time-delay mechanism which delays retraction of the plate on the low pressure side until a certain equilibrium of pressure is achieved.
摘要翻译：用于控制入口和出口之间流体通过的闸阀包括一个包含一个由楔形物（54）形成的往复式可膨胀闸门元件的壳体，该楔形件夹在两个弹簧加载板（56和58）之间，以便往复运动的楔形件导致板的膨胀以关闭阀的开口。为了便于楔形件的返回行程并且克服其中一个板上的真空的保持力，该装置包括泄放阀元件（80），其连接到第一板并且具有位于第二板上的座使得当位于较高压力侧的第一板（56）开始运动时，其打开泄放阀元件并平衡阀两侧的压力。这消除了真空并因此消除了保持力。在第二实施例中，阀具有时间延迟机构，其延迟板在低压侧的回缩，直到实现一定的压力平衡。

4. 发明授权

US4893980A Device for moving objects within a sealed chamber 失效
标题翻译：用于在密封室内移动物体的装置
公开(公告)号：US4893980A
公开(公告)日：1990-01-16
申请号：US286602
申请日：1988-12-19
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , Y10T74/18992
摘要： A sample transfer device (110) for manipulating a sample in a sealed vacuum chamber comprises a tubular housing (112) made from magnetically permeable material. The housing has one end (114) closed and another attached to the vacuum chamber. Located inside the housing is a shaft (116) which is connected to a sample holder. One end of this shaft is connected to a hollow body (140) which is made from a magnetically-permeable and air-tight material. This hollow body (140) forms a sealed cavity which contains an inner permanent magnet (142). The magnet (142) is held in place by two cup-shaped members (152 and 154) and two aluminum blocks (156 and 158). The inner magnet (142) interacts with an outer permanent magnet (166) which slides over the surface of cylindrical housing (112) and moves, through magnetic force, the inner magnet and hence the shaft (116) and the sample holder with the sample in the axial direction of the housing, i.e., into a required position in the vacuum chamber. The sealed hollow body prevents the inner magnet (142), which is made from a porous samarium-cobalt alloy, from exposure to vacuum. As a result, the porous material of the magnet is protected from accumulation of impurities detrimental to characteristics of semiconductor devices treated in the vacuum chamber.
摘要翻译：用于在密封真空室中操作样品的样品转移装置（110）包括由导磁材料制成的管状壳体（112）。壳体具有封闭的一端（114），另一端连接到真空室。位于壳体内的是连接到样品架的轴（116）。该轴的一端连接到由透气性和气密材料制成的中空体（140）。该中空体（140）形成包含内部永磁体（142）的密封空腔。磁体（142）通过两个杯状构件（152和154）和两个铝块（156和158）保持就位。内磁体（142）与外部永久磁铁（166）相互作用，该外部永久磁体在圆柱形壳体（112）的表面上滑动，并通过磁力将内部磁体和因此的轴（116）和样本保持器与样品在壳体的轴向上，即进入真空室中的所需位置。密封的中空体防止由多孔钐 - 钴合金制成的内部磁体（142）暴露于真空。结果，保护磁体的多孔材料不会对在真空室中处理的半导体器件的特性有害的杂质的积累。

5. 发明授权

US4781520A Polar-coordinate manipulator for vacuum application 失效
标题翻译：用于真空应用的极坐标机械手
公开(公告)号：US4781520A
公开(公告)日：1988-11-01
申请号：US143635
申请日：1988-01-13
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： H01J37/20 , H01L21/68 , B65G54/00
CPC分类号： H01L21/68 , H01J37/20 , Y10T74/18752 , Y10T74/20207
摘要： A polar-coordinate manipulator for vacuum application, e.g., for positioning of a specimen (S) between several operating positions in a vacuum chamber (16) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures. The device comprises a circular stationary support (12) attached to the flange of vacuum chamber (16). A square-shaped rotary table (22) is rotatingly supported by a circular support (22) and in turn slidingly supports a sliding block (44). The sliding block can be shifted by a micrometer (50) radially with respect to the axis of rotation of the turntable. The sliding block supports a moveable plate (72) which can be shifted along the above-mentioned axis of rotation and carries a rigidly attached rod (92) which penetrates into the vacuum chamber and supports the sample to be treated. The manipulator can position the sample at a target point in a polar coordinate system.
摘要翻译：用于真空施加的极坐标操纵器，例如用于在真空室（16）中的几个操作位置之间定位试样（S），其中试样可进行离子注入或类似的处理或测量程序。该装置包括附接到真空室（16）的凸缘的圆形固定支撑件（12）。方形旋转台（22）由圆形支撑件（22）旋转地支撑，并且滑动地支撑滑块（44）。滑动块可以相对于转台的旋转轴线径向偏移千分尺（50）。滑动块支撑可移动的板（72），其可以沿着上述旋转轴线移动，并且携带刚性连接的杆（92），其穿透到真空室中并支撑待处理的样品。操纵器可以将样品定位在极坐标系中的目标点。

6. 发明授权

US4768911A Device for moving objects within and between sealed chambers 失效
标题翻译：用于在密封室内和之间移动物体的装置
公开(公告)号：US4768911A
公开(公告)日：1988-09-06
申请号：US91963
申请日：1987-09-01
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： H01J37/18 , H01L21/677 , H01L21/68 , B25J1/00
CPC分类号： H01J37/185 , H01L21/67796 , H01L21/68 , Y10S414/139 , Y10T74/18992
摘要： A sample transfer device (10) for manipulating a sample (S) in a pair of sealed vacuum chambers (18, 102) comprises a tubular housing (12) made from a magnetically permeable material. The housing has one closed end (14) and another flanged open end (16) for attachment to the vacuum chamber. Located inside the housing is shaft (40) of a square cross section. One end of the shaft is rotatingly connected to an inner permanent magnet (66) which can rotate with respect to the shaft but moves axially together therewith. The other end of the shaft protrudes from the housing into the vacuum chamber (110). The shaft is supported inside the housing by a bevel gear (32) which rotates in a bearing (20) in the housing. The bevel gear (32) has a square opening (38) which guides the above-mentioned square shaft during its axial movements. The gear (32) engages another gear (98) which is attached to an output shaft of a rotary drive unit (80) having its drive element outside the housing. The device can transfer a sample from one chamber to another and can position the sample in either chamber in any desired axial or angular orientation for treatment or measurement. In the illustrated embodiment, the sample is shown as a silicon substrate subjected to ion beam implantation in one chamber and to formation of a pattern by a CVD process in another chamber.
摘要翻译：用于操纵一对密封真空室（18,102）中的样品（S）的样品转移装置（10）包括由导磁材料制成的管状壳体（12）。壳体具有一个封闭端（14）和另一个用于连接到真空室的凸缘开口端（16）。位于壳体内的是方形横截面的轴（40）。轴的一端旋转地连接到能够相对于轴旋转但与其轴向移动的内部永磁体（66）。轴的另一端从壳体突出到真空室（110）中。轴通过在壳体中的轴承（20）中旋转的锥齿轮（32）支撑在壳体内。锥齿轮（32）具有在其轴向移动期间引导上述方形轴的方形开口（38）。齿轮（32）接合另一个齿轮（98），齿轮（98）连接到其驱动元件在壳体外部的旋转驱动单元（80）的输出轴上。该装置可以将样品从一个室转移到另一个室，并且可以将样品以任何所需的轴向或角度取向放置在任一室中用于处理或测量。在所示实施例中，样品被示出为在一个室中进行离子束注入并通过在另一个室中的CVD工艺形成图案的硅衬底。

7. 发明授权

US4629219A Adjustable connector unit 失效
标题翻译：可调连接器单元
公开(公告)号：US4629219A
公开(公告)日：1986-12-16
申请号：US735021
申请日：1985-05-17
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： F16L27/08 , F16L27/00
CPC分类号： F16L27/0849 , Y10S285/912
摘要： A connector unit for a number of different coupling applications such as for interconnecting a pair of pipes or other structural parts which must be mounted near each other and at an angle with respect to each other. The connector unit includes a pair of side members which are spaced apart and to which are mounted the structural parts to be interconnected. Each side member has a respective ring rotatably mounted thereon by a first set of balls, and the two rings are rotatably coupled to each other by a second set of balls. Each set of balls is in an annular race formed by a pair of mating grooves. The balls of each set are fed into a respective race through a hole in the respective ring, then the hole is plugged to keep the balls in place. The race between the two rings is inclined at an angle relative to the race between each side member and the respective ring. Thus, rotation of one ring relative to the other ring will cause a change in the angular orientation of the side members relative to each other without rotating the side members relative to each other and without allowing one side member to move toward or away from each other. A pair of gears can be provided to rotate each ring relative to its corresponding side member.
摘要翻译：用于多个不同耦合应用的连接器单元，例如用于互连一对管道或其他结构部件，这些管道或其他结构部件必须彼此靠近地彼此安装并且相对于彼此成一定角度。连接器单元包括间隔开的一对侧构件，并且安装有要互连的结构部件。每个侧构件具有通过第一组球可旋转地安装在其上的相应的环，并且两个环通过第二组球彼此可旋转地联接。每组球是由一对配合槽形成的环形圈。每组的球通过相应的环中的孔被馈送到相应的座圈中，然后将孔塞住以将球保持在适当位置。两个环之间的比例相对于每个侧构件和相应环之间的座圈倾斜一定角度。因此，一个环相对于另一个环的旋转将导致侧构件相对于彼此的角取向的改变，而不使侧构件相对于彼此旋转，并且不允许一个侧构件朝向彼此或远离彼此移动。可以提供一对齿轮以使每个环相对于其对应的侧构件旋转。

8. 发明授权

US4885947A Mechanism for feedthrough of rotary motion to a sealed chamber 失效
公开(公告)号：US4885947A
公开(公告)日：1989-12-12
申请号：US286612
申请日：1988-12-19
申请人： Valentin Balter , Gerald H. Hooper
发明人： Valentin Balter , Gerald H. Hooper
IPC分类号： F16J15/52
CPC分类号： F16J15/525 , Y10T74/1836
摘要： A rotary motion feedthrough mechanism for a sealed chamber comprises a first driven shaft (56) with a through opening (66) and a second driven shaft (96) moveably inserted into the through opening of the first shaft. At its rear end the first driven shaft has a recess (102) which is eccentric and inclined with respect to the axis of rotation of both shafts. The recess rotatingly supports one end of a conical sleeve (110), the other end of which is rotatingly supported in an inclined opening of an external sleeve (68) which is connected to a rotary drive unit through a sprocket (76) installed on the outer surface of the external sleeve. The end of the second drive shaft opposite to the eccentric opening of the first shaft is connected to an independent rotary motion feedthrough mechanism which is capable of transmitting rotation into a sealed space. When the mechanism is sealingly connected, e.g., to a vacuum chamber (46), it can transmit two independent rotations from outside of the chamber (46) to the first and second driven shafts. The first driven shaft (56) is rotated from the rotary drive unit, via the sprocket (76), and the external sleeve (68). Since the rear end of the conical sleeve is inclined, rotation of the external sleeve will cause orbital motions of the conical sleeve (110). The front end of the conical sleeve is installed in the eccentric recess (102) of the first driven shaft (56). Therefore, the latter will be driven into rotation. At the same time, the second shaft (96) is rotated from its independently installed rotary motion feedthrough mechanisms. In the second embodiment, the rotary motion feedthrough mechanism (94) is replaced by a linear motion feedthrough drive unit (138) and the second shaft (132) is moved axially within the first driven shaft (56). In a third embodiment, the second shaft is substituted by a tube (142) and is used for the supply of fluid, e.g., liquid nitrogen from an externally installed fluid feedthrough device (148).

9. 发明授权

US4797053A Manipulator for vacuum applications 失效
标题翻译：真空应用的机械手
公开(公告)号：US4797053A
公开(公告)日：1989-01-10
申请号：US156340
申请日：1988-02-16
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： H01J37/20 , H01L21/68 , B65G54/00
CPC分类号： H01L21/68 , H01J37/20 , Y10T74/20207
摘要： A manipulator for vacuum applications, e.g., for positioning of a specimen at a required point in a vacuum chamber (20) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures, comprises an adjustable angular connector (12) which is formed by two skewed rings (32) and (36) which slide one over another. When the rings rotate, the end of drive shaft (72) describes a planetary path along a circle. The drive shaft (72) has one end connected to a rotary drive mechanism (14) and another end to a driven shaft (92) through a universal joint (90). The lower end of the driven shaft is installed in a rotating manner in a slide (87). The slide (87) is guided in one direction along another slide (84) which in turn is guided in a direction perpendicular to the first one along a rigid frame (80). Planetary motion of driven shaft (92) causes linear motions of the slides (84, 87) in mutually perpendicular directions. As a result, the second slide (87), which carries a sample holder (18), can be installed in any required position within an orthogonal system of coordinates. In addition, the sample holder is rotated from the above-mentioned rotary drive mechanism. The manipulator moves the sample holder with high accuracy since the slide (84) is guided in the rigid frame (80).
摘要翻译：用于真空应用的操纵器，例如用于将样品定位在真空室（20）中所需点处，其中样品可进行离子注入或类似处理或测量程序，其包括可调角度连接器（12）由两个将另一个滑动的倾斜环（32）和（36）形成。当环转动时，驱动轴（72）的端部描述沿着圆的行星路径。驱动轴（72）的一端通过万向节（90）连接到旋转驱动机构（14），另一端连接到从动轴（92）。从动轴的下端以旋转方式安装在滑动件（87）中。滑动件（87）沿着另一个滑动件（84）在一个方向被引导，该滑动件又沿着刚性框架（80）在垂直于第一滑动件的方向上被引导。从动轴（92）的行星运动导致滑块（84,87）在相互垂直的方向上的线性运动。结果，携带样本保持器（18）的第二滑动件（87）可以安装在正交坐标系中的任何所需位置。此外，样品架从上述旋转驱动机构旋转。由于滑块（84）在刚性框架（80）中被引导，操纵器以高精度移动样品架。

10. 发明授权

US4621790A Butterfly valve 失效
标题翻译：蝶阀
公开(公告)号：US4621790A
公开(公告)日：1986-11-11
申请号：US614495
申请日：1984-05-29
申请人： Valentin Balter
发明人： Valentin Balter
IPC分类号： F16K1/22 , F16K27/02
CPC分类号： F16K27/0218 , F16K1/22 , Y10T137/6048 , Y10T29/49419
摘要： A butterfly valve having a body provided with a fluid passage therethrough. The fluid passage includes a tapered inner surface. A circular valve member is in the housing across the passage and is secured to a shaft rotatable on the housing. One end of the shaft is in a portion of an annular groove in the tapered inner surface, and the other end of the shaft is rotatably mounted in a radial hole by a bearing and projects outwardly from the housing. A knob is on the outer end of the shaft for manual rotation of the shaft. The groove is formed in the body by turning the body on a lathe, thereby requiring only a single hole to be drilled in the body, namely, the hole for receiving the bearing and the adjacent portion of the shaft. Provision of the annular groove eliminates the need for drilling a pair of radial holes on opposite sides of the passage, thereby avoiding misalignment of the shaft.
摘要翻译：一种具有本体的蝶阀，该主体设置有穿过其中的流体通道。流体通道包括锥形内表面。圆形阀构件位于壳体中，横跨通道并且固定到可在壳体上旋转的轴。轴的一端位于锥形内表面的环形槽的一部分中，轴的另一端通过轴承可旋转地安装在径向孔中并从壳体向外突出。轴上的一个旋钮用于手动旋转轴。通过在车床上转动主体而形成凹槽，因此在主体中仅需要钻一个孔，即用于接收轴承的孔和轴的相邻部分。提供环形槽消除了在通道的相对侧上钻一对径向孔的需要，从而避免了轴的不对准。

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