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1. 发明授权

US08766523B2 Electron beam exit window in electron beam emitter and method for forming the same 有权
标题翻译：电子束发射器中的电子束出射窗及其形成方法
公开(公告)号：US08766523B2
公开(公告)日：2014-07-01
申请号：US13618682
申请日：2012-09-14
申请人： Steven R. Walther , Gerald M. Friedman , Michael L. Bufano
发明人： Steven R. Walther , Gerald M. Friedman , Michael L. Bufano
IPC分类号： H01J33/04
CPC分类号： G21K5/00 , H01J5/18 , H01J33/04 , H01J2237/164 , Y10T156/10
摘要： An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
摘要翻译：出口窗口可以包括出口窗口箔片和支撑出口窗口箔片的支撑格栅。支撑格栅可以具有第一和第二格栅，每个栅格具有相互对准的第一和第二格栅部分，并且彼此热隔离。第一和第二格栅部分可以各自具有一系列孔，其被对准以允许梁通过其到达并通过出射窗箔。第二格栅部分可以接触出口窗箔。第一格栅部分可以掩蔽第二格栅部分和出射窗箔，以防止由射束撞击第一格栅部分引起的热量。

2. 发明授权

US08338796B2 Electron beam emitter with slotted gun 有权
标题翻译：带开槽枪的电子束发射器
公开(公告)号：US08338796B2
公开(公告)日：2012-12-25
申请号：US12469123
申请日：2009-05-20
申请人： Steven Raymond Walther , Michael L. Bufano , Gerald M. Friedman
发明人： Steven Raymond Walther , Michael L. Bufano , Gerald M. Friedman
IPC分类号： G21K5/00
CPC分类号： H01J37/063 , H01J2237/06308 , H01J2237/06375
摘要： An electron beam emitter includes an electron generator for generating electrons. The electron generator can have a housing containing at least one electron source for generating the electrons. The at least one electron source has a width. The electron generator housing can have an electron permeable region spaced from the at least one electron source for allowing extraction of the electrons from the electron generator housing. The electron permeable region can include a series of narrow elongate slots and ribs formed in the electron generator housing and extending laterally beyond the width of the at least one electron source. The electron permeable region can be configured and positioned relative to the at least one electron source for laterally spreading the electrons that are generated by the at least one electron source.
摘要翻译：电子束发射器包括用于产生电子的电子发生器。电子发生器可以具有包含至少一个用于产生电子的电子源的壳体。至少一个电子源具有宽度。电子发生器壳体可以具有与至少一个电子源间隔开的电子透过区域，用于从电子发生器壳体提取电子。电子透射区域可以包括形成在电子发生器壳体中并且横向延伸超过至少一个电子源的宽度的一系列窄的细长槽和肋。电子可渗透区域可以相对于至少一个电子源被配置和定位，以横向扩展由至少一个电子源产生的电子。

3. 发明申请

US20110142575A1 ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM 有权
标题翻译：基于电梯的工具装载和缓冲系统
公开(公告)号：US20110142575A1
公开(公告)日：2011-06-16
申请号：US12897440
申请日：2010-10-04
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译：提供了一种基板处理装置。该装置具有壳体，低端口接口和载体保持站。壳体具有用于处理基板的处理装置。负载端口接口连接到外壳，用于将基板装载到处理设备中。托架保持站连接到外壳。载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

4. 发明授权

US06405843B1 Self supporting cable for use with linear motion devices 有权
标题翻译：用于线性运动装置的自支撑电缆
公开(公告)号：US06405843B1
公开(公告)日：2002-06-18
申请号：US09574127
申请日：2000-05-19
申请人： Gerald M. Friedman
发明人： Gerald M. Friedman
IPC分类号： H02G1100
CPC分类号： H02G11/006 , H01B7/0869
摘要： A self supporting electrical cable is provided which is especially of use in linear motion devices. The cable is in the form of a band having a crowned or curved cross-section. The band is self supporting and is typically employed in a looped configuration. The band is composed of a Mylar or other plastic or electrically insulating laminate with electrical conductors and reinforcing elements. The conductors are typically copper and the reinforcing elements are typically stainless steel. In use the cable is usually folded back on itself 180° to provide a loop configuration with a fixed radius loop end in which the loop is moveable along the direction of travel. One end of the cable is connected to the linear motion device, and the other end is connected to a stationary device.
摘要翻译：提供了一种自支撑电缆，特别适用于直线运动装置。电缆是具有加冠或弯曲横截面的带的形式。该带是自支撑的，并且通常以循环配置使用。该带由聚酯薄膜或具有电导体和增强元件的其它塑料或电绝缘层压材料组成。导体通常是铜，并且增强元件通常是不锈钢。在使用中，电缆通常折叠回自身180°以提供具有固定半径环端的环形结构，其中环可以沿着行进方向移动。电缆的一端连接到直线运动装置，另一端连接到固定装置。

5. 发明授权

US6053478A Wafer hoist with self-aligning bands 失效
标题翻译：带自调心带的fer。机
公开(公告)号：US6053478A
公开(公告)日：2000-04-25
申请号：US115974
申请日：1998-07-15
申请人： Gerald M. Friedman
发明人： Gerald M. Friedman
IPC分类号： H01L21/687 , B66D1/00
CPC分类号： H01L21/68792
摘要： A hoist system including a roller assembly which is allowed to pivot as a suspending member is rolled up around a drum compensates for lateral forces and allows a load on the suspending member to remain centered under the roller assembly. The drum has a shaft mounted through the center with a resilient coupling between the shaft and the drum which allows transfer of rotational torque while allowing the drum to pivot. Such a coupling can be furnished by a pair of concentric rings around the shaft having pivot holes orthogonal to the shaft axis. The innermost ring is connected by a pair of pivot pins to the shaft. The outermost ring is connected to the innermost ring by another pair of pivot pins perpendicular to the pivot pins through the shaft. The outermost ring is attached to the inside of the drum. The drum and outermost ring are allowed to pivot around the axis through pivot pins in the outermost ring, and the drum, outermost ring and innermost ring are allowed to pivot around the perpendicular axis through the pivot pins in the shaft.
摘要翻译：包括允许作为悬挂构件枢转的滚子组件的卷扬系统卷绕在滚筒周围卷绕侧向力，并允许悬挂构件上的载荷保持在滚子组件下方的中心。滚筒有一个通过中心安装的轴，在轴和滚筒之间具有弹性联接，允许转动转矩同时允许滚筒枢转。这种联接可以由围绕轴的一对同心环提供，其具有与轴线正交的枢转孔。最内圈通过一对枢轴销连接到轴上。最外面的环通过另一对通过轴垂直于枢轴销的枢轴销连接到最内圈。最外面的环连接到滚筒的内部。滚筒和最外圈允许通过最外面的环中的枢轴销围绕轴线枢转，并且滚筒，最外圈和最内环允许通过轴中的枢轴销绕垂直轴线枢转。

6. 发明授权

US08888433B2 Reduced capacity carrier and method of use 有权
标题翻译：减少能力的载体和使用方法
公开(公告)号：US08888433B2
公开(公告)日：2014-11-18
申请号：US11207231
申请日：2005-08-19
申请人： Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Gerald M. Friedman , Michael L. Bufano
发明人： Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Gerald M. Friedman , Michael L. Bufano
IPC分类号： H01L21/677 , H01L21/673
CPC分类号： H01L21/67763 , H01L21/67326 , H01L21/67353 , H01L21/67369 , H01L21/67373 , H01L21/67376 , H01L21/67383 , H01L21/67389 , H01L21/67393 , H01L21/67772 , H01L21/67778 , H01L21/6779 , Y10S414/139
摘要： A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
摘要翻译：提供了基板输送装置。该装置具有外壳和门。壳体适于在其中形成受控的环境。壳体具有用于在壳体中保持至少一个基板的支撑。壳体限定衬底传送开口，衬底传送系统通过该衬底传送系统访问壳体中的衬底。门连接到壳体以封闭壳体中的基板传送开口。壳体具有形成快速互换元件的结构，其允许用另一个基板从设备更换基板，而不会退回基板输送系统，而与壳体中的基板负载无关。

7. 发明申请

US20140209820A1 CONTOURED SUPPORT GRID FOR HERMETICALLY SEALED THIN FILM APPLICATIONS 审中-公开
标题翻译：用于人造密封薄膜应用的配套支持网格
公开(公告)号：US20140209820A1
公开(公告)日：2014-07-31
申请号：US14243554
申请日：2014-04-02
申请人： Kenneth J. Barry , Mark T. Brown , Michael L. Bufano , Gerald M. Friedman , Peter M. King , Matthew A. Medford , Anne L. Testoni , Steven R. Walther , Tzvi Avnery
发明人： Kenneth J. Barry , Mark T. Brown , Michael L. Bufano , Gerald M. Friedman , Peter M. King , Matthew A. Medford , Anne L. Testoni , Steven R. Walther , Tzvi Avnery
IPC分类号： H01J33/04 , G21K1/00
CPC分类号： H01J33/04 , G21K1/00
摘要： Systems and methods for manufacturing a vacuum device, such as an electron emitter, that includes a foil exit window palced over and joined to a support grid. In one particular method, the vacuum chamber of an electron emitter has a thin foil forming an exit window at one end. The thin foil may be titanium or any suitable material and the foil will typically enlarge during a bonding process that attaches the foil to the support grid. In one manufacturing process, the support grid is provided with a surface that has contours, typically being smooth recessed surfaces, that the foil once enlarged can lie against as the vacuum pulls the foil against the grid.
摘要翻译：用于制造诸如电子发射器的真空装置的系统和方法，其包括在支撑网格上踩过并连接到支撑网格的箔出口窗口。在一种特定方法中，电子发射器的真空室具有在一端形成出射窗的薄箔。薄箔可以是钛或任何合适的材料，并且箔将通常在将箔附接到支撑网格的粘合过程中扩大。在一个制造过程中，支撑格栅设置有表面，该表面具有轮廓，通常是光滑的凹面，当箔真空将箔拉到格栅上时，箔一旦放大就可以抵抗。

8. 发明申请

US20100158643A1 ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM 审中-公开
标题翻译：基于电梯的工具装载和缓冲系统
公开(公告)号：US20100158643A1
公开(公告)日：2010-06-24
申请号：US12696268
申请日：2010-01-29
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： H01L21/677
CPC分类号： H01L21/67715 , H01L21/67736 , H01L21/67775
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
摘要翻译：提供了一种基板处理装置。该装置具有壳体，低端口接口和载体保持站。壳体具有用于处理基板的处理装置。负载端口接口连接到外壳，用于将基板装载到处理设备中。托架保持站连接到外壳。载体保持站用于在负载端口接口处保持至少一个基板传输载体。载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。

9. 发明授权

US5673804A Hoist system having triangular tension members 失效
标题翻译：起升系统具有三角形张力构件
公开(公告)号：US5673804A
公开(公告)日：1997-10-07
申请号：US770516
申请日：1996-12-20
申请人： Mitchell Weiss , Gerald M. Friedman
发明人： Mitchell Weiss , Gerald M. Friedman
IPC分类号： B66D1/26 , B66D1/54 , H01L21/677 , H01L21/687 , B66C13/06
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733 , H01L21/67736
摘要： A hoist system having triangular suspension bands minimizes sway and twisting during the lifting of a payload. The system includes three depending retractable and extensible triangular tension members which provide three sets of opposed horizontal tensile forces aligned along three non-parallel lines. Each tension member comprises a flexible triangular band attached along one side to one of three rotatable spools arranged at 60.degree. to each other. The bands are attached near their vertices to a payload gripper assembly which is raised or lowered as the bands are wound or unwound from the spools. The three triangular bands provide six horizontal force components which provide good lateral stability and torsional rigidity, thereby minimizing sway and twisting of the payload. The bands also provide good payload lifting strength.
摘要翻译：具有三角形悬挂带的提升系统在提升有效载荷期间最小化摆动和扭转。该系统包括三个可伸缩和可伸展的三角形张紧构件，它们提供沿三个非平行线对准的三组相对的水平拉伸力。每个张力构件包括一个柔性的三角形带，该三角形带沿着彼此以60°排列的三个可旋转的卷轴之一连接。带子被附接到其顶点附近到有效载荷夹持器组件，当带被卷绕或从卷轴展开时，其被升高或降低。三个三角形带提供六个水平力分量，提供良好的横向稳定性和扭转刚度，从而最小化有效载荷的摆动和扭转。乐队还提供良好的有效载荷提升强度。

10. 发明授权

US08678734B2 Elevator-based tool loading and buffering system 有权
标题翻译：电梯工具装载和缓冲系统
公开(公告)号：US08678734B2
公开(公告)日：2014-03-25
申请号：US12897440
申请日：2010-10-04
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： B65G54/02 , B65G54/00 , H01L21/67 , H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译：提供了一种基板处理装置。该装置具有壳体，低端口接口和载体保持站。壳体具有用于处理基板的处理装置。负载端口接口连接到外壳，用于将基板装载到处理设备中。托架保持站连接到外壳。载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

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