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    • 1. 发明授权
    • Method for depositing on a substrate a plurality of epitaxial layers in succession
    • 用于在衬底上连续沉积多个外延层的方法
    • US3890194A
    • 1975-06-17
    • US45995174
    • 1974-04-11
    • RCA CORP
    • ETTENBERG MICHAEL
    • C30B19/06C30B19/10H01L21/208H01L29/14
    • C30B19/063C30B19/10H01L21/02546H01L21/02625
    • A deposition furnace boat includes a plurality of wells each of which is adapted to contain a solution of the material to be deposited. A slide extends across the bottoms of the wells and is adapted to carry a substrate from one well to the next. Between each pair of adjacent wells is a narrow slot extending to the surface of the slide. Epitaxial layers are deposited on the substrate by moving the slide to bring the substrate into each well in succession. While the substrate is in each well, the solution is cooled to deposit the material from the solution onto the substrate. When the slide is moved to carry the substrate from one well to the next, the substrate passes beneath the slot which is between the wells. Any of the solution which may be carried with the substrate from the one well will be drawn up into the slot by capillary action so as to prevent contamination of the solution in the next well by any carry-over solution.
    • 沉积炉船包括多个孔,每个孔适于容纳待沉积材料的溶液。 滑块延伸穿过井的底部,并且适于将衬底从一个孔运送到下一个孔。 在每对相邻的井之间是延伸到载玻片表面的窄槽。 外延层通过移动载玻片沉积在基板上,以使基板连续地进入每个孔。 当基材在每个孔中时,将溶液冷却以将材料从溶液沉积到基底上。 当滑块移动以将衬底从一个孔运送到下一个孔时,衬底通过位于井之间的槽的下面。 通过毛细管作用可以将来自一个孔的基质携带的任何溶液通过毛细管作用吸入槽中,以防止任何结转溶液污染下一个孔中的溶液。
    • 5. 发明授权
    • High-density nonvolatile semiconductor memory
    • 高密度非易失性半导体存储器
    • US5401992A
    • 1995-03-28
    • US153101
    • 1993-11-17
    • Takashi Ono
    • Takashi Ono
    • H01L27/115H01L29/423H01L29/14H01L29/788
    • H01L27/115H01L29/42324
    • A nonvolatile semiconductor memory has active regions that form parallel strips extending in a first direction in a semiconductor substrate. Each active region has source areas, drain areas, and channel areas for a series of memory cells. Floating gates are formed over the channel areas, and control gates over the floating gates. The upper surfaces of the control gates and the sides of the control gates and floating gates are covered by insulating films. Source interconnecting lines made of a conductive material are formed as parallel strips extending in a second direction different from the first direction on the semiconductor substrate, interconnecting the source areas of the memory cells.
    • 非易失性半导体存储器具有在半导体衬底中形成沿第一方向延伸的平行条带的有源区。 每个有源区域具有用于一系列存储器单元的源极区域,漏极区域和沟道区域。 在通道区域上形成浮动栅极,并在浮动栅极上形成控制栅极。 控制栅极的上表面和控制栅极和浮动栅极的侧面被绝缘膜覆盖。 由导电材料制成的源极互连线形成为沿与半导体衬底上的第一方向不同的第二方向延伸的平行条,互连存储器单元的源极区域。