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    • 2. 发明授权
    • Apparatus and method for electropolishing surfaces
    • 电抛光表面的装置和方法
    • US06599415B1
    • 2003-07-29
    • US09846114
    • 2001-04-30
    • Yu-Chun KuRyan John Santos
    • Yu-Chun KuRyan John Santos
    • C25F300
    • C25F7/00C25F3/16
    • A method and apparatus for electropolishing a workpiece without immersing the workpiece in a bath of electrolytic solution. The workpiece is held in an atmospheric environment, while electrolytic solution is discharged from a reservoir in the form of a plurality of jet streams onto the surface of the workpiece. A voltage difference is applied across the workpiece and the jet streams, thereby inducing a current to flow, between the workpiece acting as anode and the jet streams acting as cathode. The workpiece may be rotated about an axis and moved linearly along the same axis while the jet streams of electrolytic solution are discharged onto the workpiece. Anodic dissolution causes polishing of the workpiece surface. The electrolytic solution may be collected after discharge and recycled back into the reservoir, after being filtered and cooled.
    • 一种用于在不将工件浸入电解液浴的情况下电抛光工件的方法和装置。 工件被保持在大气环境中,而电解液从多个喷射流形式的储存器排出到工件的表面上。 在工件和喷射流之间施加电压差,从而在作为阳极的工件和作为阴极的射流之间引起电流流动。 工件可以围绕轴线旋转并且沿着相同的轴线线性移动,同时电解溶液的喷射流被排出到工件上。 阳极溶解导致工件表面的抛光。 电解液可以在排放后收集,并在过滤和冷却后循环回到储存器中。
    • 6. 发明授权
    • Automated machine control gap for conical fluid dynamic bearing ECM grooving
    • 锥形流体动力轴承ECM槽的自动机器控制间隙
    • US06764590B1
    • 2004-07-20
    • US10080755
    • 2002-02-22
    • Dustin Alan Cochran
    • Dustin Alan Cochran
    • C25F300
    • F16C17/105B23H3/00B23H3/10B23H7/18B23H9/00B23H2200/10F16C33/107
    • In one aspect of the invention, an apparatus for ECM grooving of a workpiece is provided. A portion of a conical workpiece is supported on a frame, with the cone opening facing a Z-axis. A slide electrode assembly is provided, including an electrode movable along the Z-axis and having, on a face aligned across a machining gap from the workpiece, a pattern of grooves to be defined on the workpiece; As an electrolyte is pumped into or through the machining gap at a constant static pressure, the electrode reacts to the pressure by moving toward or away from the workpiece to establish a certain gap width to create the necessary groove depth and definition. The force acting on the slide electrode assembly is the primary controlling factor for establishing the machining gap as the electrode and support move in response to the constant static pressure of pumped electrolyte.
    • 在本发明的一个方面,提供了一种用于工件的ECM切槽的装置。 锥形工件的一部分被支撑在框架上,锥形开口面向Z轴。 提供了一种滑动电极组件,包括可沿Z轴移动的电极,并且在与工件相对的加工间隙对准的面上具有要限定在工件上的凹槽图案; 由于电解液在恒定的静压下被泵入或通过加工间隙,电极通过朝着或远离工件移动来反应压力,以建立一定的间隙宽度以产生必要的凹槽深度和定义。 作用在滑动电极组件上的力是当电极和支撑件响应于泵送电解质的恒定静压而移动时建立加工间隙的主要控制因素。
    • 9. 发明授权
    • Method and apparatus for etching
    • 蚀刻方法和设备
    • US06423207B1
    • 2002-07-23
    • US09653945
    • 2000-09-01
    • Babak HeidariLennart Olsson
    • Babak HeidariLennart Olsson
    • C25F300
    • C25F3/14H05K3/07
    • A method of making, by etching, depressions in selected portions of an etching surface of an electrically conductive etching material, the depressions forming an etching pattern, comprises the step of contacting the etching material with an etchant. A passivating layer is formed on the etching material which layer decreases or stops the etching capability of the etchant on the surface and which is dissolved in a chemical reaction when exposed to electromagnetic radiation. An electrode with electrically conductive electrode portions in selected portions of an electrode surface is provided, the electrode portions forming an electrode pattern corresponding to the etching pattern. The electrode is arranged in contact with the etchant and with the electrode portions facing the etching surface of the etching material, an electric voltage is applied between the electrode and the etching material, and the etching material is exposed to electromagnetic radiation essentially perpendicular to the etching surface.
    • 通过蚀刻导电蚀刻材料的蚀刻表面的选定部分中的凹陷,形成蚀刻图案的凹陷的方法包括使蚀刻材料与蚀刻剂接触的步骤。 在蚀刻材料上形成钝化层,该层在暴露于电磁辐射时降低或停止表面上蚀刻剂的蚀刻能力并溶解在化学反应中。 提供了在电极表面的选定部分中具有导电电极部分的电极,电极部分形成对应于蚀刻图案的电极图案。 电极与蚀刻剂接触并且电极部分面向蚀刻材料的蚀刻表面,在电极和蚀刻材料之间施加电压,并且蚀刻材料暴露于基本垂直于蚀刻的电磁辐射 表面。