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    • 1. 发明授权
    • Manufacture of a multi-layer interconnect structure
    • 制造多层互连结构
    • US5578151A
    • 1996-11-26
    • US397018
    • 1995-03-01
    • Gerald S. AndrisJohn P. Gauci
    • Gerald S. AndrisJohn P. Gauci
    • B41F15/08B05C5/02B41F15/40H01L21/48H01L23/538H05K1/03H05K1/09H05K3/12H05K3/40H05K3/46B32B31/00
    • B05C5/0295H01L21/4867H01L23/5383H05K3/1233H01L2924/0002H05K1/0306H05K1/092H05K2203/0126H05K2203/0139H05K2203/163H05K3/4053
    • In the manufacture of multi-layer ceramic interconnect structures, a greensheet is perforated with small holes and positioned on the support fixture of a screening machine. Then a planar surface of a screening mask is positioned in relation to the greensheet for producing the circuit pattern. Then the discharge end of a paste nozzle is positioned in relation to the opposite planer surface of the mask for injecting pressurized conductive paste through the nozzle into the mask. A normal force is applied to the nozzle toward the mask to maintain the discharge end of the nozzle with a clearance of 1 to 2 mils from the mask as the nozzle traverses the mask, injecting the conductive paste to extrude the circuit pattern on the greensheet and fill the perforations to produce vias to provide electrical connections between the layers produced. The force is adjusted dependent upon the pressure of the paste being injected into the mask to maintain the 1 to 2 mil clearance. Multiple layers of patterned greensheets are stacked and sintered under pressure and high temperature to produce the multi-layer ceramic interconnect structure.
    • 在多层陶瓷互连结构的制造中,毛坯穿孔具有小孔并且位于筛选机的支撑夹具上。 然后,屏蔽掩模的平坦表面相对于毛坯定位以产生电路图案。 然后,糊状喷嘴的排出端相对于掩模的相对的平面定位,用于将加压的导电浆通过喷嘴注入到掩模中。 向喷嘴朝向掩模施加法向力,以在喷嘴穿过掩模时使喷嘴的距离与掩模保持1至2密耳的间隙,注入导电膏以将电路图案挤出在毛坯上, 填充穿孔以产生通孔以在所生产的层之间提供电连接。 力被调整取决于浆料被注入到面罩中的压力以保持1至2密耳的间隙。 在压力和高温下堆叠并烧结多层图案化的纸屑以产生多层陶瓷互连结构。
    • 6. 发明授权
    • Apparatus for manufacture of multi-layer ceramic interconnect structures
    • 用于制造多层陶瓷互连结构的装置
    • US5540779A
    • 1996-07-30
    • US396987
    • 1995-03-01
    • Gerald S. AndrisJohn P. Gauci
    • Gerald S. AndrisJohn P. Gauci
    • B41F15/08B05C5/02B41F15/40H01L21/48H01L23/538H05K1/03H05K1/09H05K3/12H05K3/40H05K3/46
    • B05C5/0295H01L21/4867H01L23/5383H05K3/1233H01L2924/0002H05K1/0306H05K1/092H05K2203/0126H05K2203/0139H05K2203/163H05K3/4053
    • In the manufacture of multi-layer ceramic interconnect structures, a greensheet is perforated with small holes and positioned on the support fixture of a screening machine. Then a planar surface of a screening mask is positioned in relation to the greensheet for producing the circuit pattern. Then the discharge end of a paste nozzle is positioned in relation to the opposite planer surface of the mask for injecting pressurized conductive paste through the nozzle into the mask. A normal force is applied to the nozzle toward the mask to maintain the discharge end of the nozzle with a clearance of 1 to 2 mils from the mask as the nozzle traverses the mask, injecting the conductive paste to extrude the circuit pattern on the greensheet and fill the perforations to produce vias to provide electrical connections between the layers produced. The force is adjusted dependent upon the pressure of the paste being injected into the mask to maintain the 1 to 2 mil clearance. Multiple layers of patterned greensheets are stacked and sintered under pressure and high temperature to produce the multi-layer ceramic interconnect structure.
    • 在多层陶瓷互连结构的制造中,毛坯穿孔具有小孔并且位于筛选机的支撑夹具上。 然后,屏蔽掩模的平坦表面相对于毛坯定位以产生电路图案。 然后,糊状喷嘴的排出端相对于掩模的相对的平面定位,用于将加压的导电浆通过喷嘴注入到掩模中。 向喷嘴朝向掩模施加法向力,以在喷嘴穿过掩模时使喷嘴的距离与掩模保持1至2密耳的间隙,注入导电膏以将电路图案挤出在毛坯上, 填充穿孔以产生通孔以在所生产的层之间提供电连接。 力被调整取决于浆料被注入到面罩中的压力以保持1至2密耳的间隙。 在压力和高温下堆叠并烧结多层图案化的纸屑以产生多层陶瓷互连结构。