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    • 8. 发明授权
    • Method and apparatus for imaging with fiber optic arrays on non-flat surfaces
    • 用于在非平坦表面上用光纤阵列进行成像的方法和装置
    • US06682875B2
    • 2004-01-27
    • US09883685
    • 2001-06-18
    • Leo B. KriksunovDerek HarrisJohn Mattson
    • Leo B. KriksunovDerek HarrisJohn Mattson
    • G03F724
    • G03F7/24H05K1/0284H05K3/0082H05K3/064
    • A photoresist etching process and system can be used for the etching of non-planar or three-dimensional surfaces by using a non-planar shaped fiber optic array or fiber optic panel. The array or panel has a contour or shape that may nest a non-planar or three-dimensional article or surface. The non-planar or three-dimensional article or surface has a photoresist composition on its surface facing the optical fibers of the fiber optic array or panel, and the article or surface is nested against the contour or shape of the array or panel. Radiation is transported through the optical fibers and exposes the photoresist composition. The optical fiber array may perform an image-wise exposure of the photoresist composition by appropriate blockage of the radiation before it enters or as it enters a distal end of the optical fibers. In this manner, an image-wise distribution of radiation is presented against the photoresist composition, and an image-wise developable resist pattern is created on the non-planar or three-dimensional article or surface. This process can be used on cylinders, tubes, spheres, undulating surfaces, blocks, wavy surfaces, stepped surfaces, and any other shape that can be standardized or formatted into a nesting shape.
    • 光致抗蚀剂蚀刻工艺和系统可用于通过使用非平面形状的光纤阵列或光纤面板来蚀刻非平面或三维表面。 阵列或面板具有可嵌套非平面或三维制品或表面的轮廓或形状。 非平面或三维制品或表面在其面向光纤阵列或面板的光纤的表面上具有光致抗蚀剂组合物,并且制品或表面嵌套在阵列或面板的轮廓或形状上。 辐射通过光纤传输并暴露光致抗蚀剂组合物。 光纤阵列可以在辐射入射之前适当地阻挡辐射,或者在进入光纤的远端时进行光致抗蚀剂组合物的成像曝光。 以这种方式,针对光致抗蚀剂组合物呈现辐射的图像分布,并且在非平面或三维制品或表面上形成图像显影抗蚀剂图案。 该过程可用于圆柱体,管子,球体,波状表面,块状,波浪形表面,台阶表面以及可被标准化或格式化成嵌套形状的任何其它形状。