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1. 发明授权

US10672632B2 Transfer chamber 审中-公开
公开(公告)号：US10672632B2
公开(公告)日：2020-06-02
申请号：US15554135
申请日：2016-02-05
申请人： SINFONIA TECHNOLOGY CO., LTD.
发明人： Toshihiro Kawai , Takashi Shigeta , Munekazu Komiya , Yasushi Taniyama
IPC分类号： H01L21/67 , B01D53/40 , B01D53/42 , C12M1/12 , F24F13/28 , F24F6/00 , F24F7/06 , H01L21/687 , B01D53/04 , F24F7/00 , B65G49/07 , H01L21/677
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

2. 发明申请

US20070116618A1 Method of processing alkali-activation exhaust gas 有权
标题翻译：碱活化废气的处理方法
公开(公告)号：US20070116618A1
公开(公告)日：2007-05-24
申请号：US11599385
申请日：2006-11-15
申请人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
发明人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
IPC分类号： B01D53/42 , B01J8/04 , B01D53/46
CPC分类号： B01D53/77 , B01D53/42 , B01D53/46 , B01D53/76 , B01D2257/00 , B01D2258/02
摘要： Disclosed is a method for processing an exhaust gas containing an alkaline substance, the exhaust gas being emitted when activating a carbon material with an alkaline substance. The method includes the steps of preparing a humidified gas, which exhibits a dew point of 25° C. or more, by mixing an inert gas with water vapor, generating a hydroxide of metallic alkali by mixing the humidified gas with the exhaust gas; and trapping the generated hydroxide out of the mixture gas of the humidified gas and the exhaust gas.
摘要翻译：公开了一种处理含有碱性物质的废气的方法，当用碱性物质活化碳材料时排出废气。该方法包括以下步骤：通过将惰性气体与水蒸气混合，制成露点为25℃或更高的加湿气体，通过将加湿气体与废气混合而产生金属碱的氢氧化物; 并将生成的氢氧化物从加湿气体和废气的混合气体中捕获。

3. 发明授权

US10471378B2 Carbon scrubber 有权
公开(公告)号：US10471378B2
公开(公告)日：2019-11-12
申请号：US16025965
申请日：2018-07-02
申请人： Reza Afshar
发明人： Reza Afshar
IPC分类号： B01D53/02 , B01D53/04 , B01D53/82 , B01D53/44 , B01D53/26 , B01D53/42
摘要： Wastewater treatment and conveyance; and other chemical processes result in emission of a wide variety of odorous compounds. Contaminated exhaust air is typically a byproduct emitted from sludge in tanks and wells that are part of a wastewater treatment, conveyance, or chemical process. Said contaminated air has to be treated to capture or reduce odorous compounds or pollutants below human smell recognition threshold levels before the exhaust is discharged to the atmosphere. The present invention is a carbon scrubber used to treat and filter contaminated exhaust air produced in wastewater treatment and conveyance; and other chemical processes.

4. 发明申请

US20180040493A1 TRANSFER CHAMBER 审中-公开
公开(公告)号：US20180040493A1
公开(公告)日：2018-02-08
申请号：US15554135
申请日：2016-02-05
申请人： SINFONIA TECHNOLOGY CO., LTD.
发明人： Toshihiro Kawai , Takashi Shigeta , Munekazu Komiya , Yasushi Taniyama
IPC分类号： H01L21/67 , B01D53/42 , C12M1/12 , F24F13/28 , F24F6/00 , H01L21/687 , B01D53/40 , F24F7/06
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

5. 发明授权

US11823923B2 Transfer chamber 有权
公开(公告)号：US11823923B2
公开(公告)日：2023-11-21
申请号：US17860202
申请日：2022-07-08
申请人： SINFONIA TECHNOLOGY CO., LTD.
发明人： Toshihiro Kawai , Takashi Shigeta , Munekazu Komiya , Yasushi Taniyama
IPC分类号： H01L21/67 , F24F13/28 , F24F7/06 , B01D53/04 , B65G49/07 , H01L21/677 , F24F3/167 , F24F7/08 , H01L21/673 , F24F7/003 , B01D53/40 , B01D53/42 , C12M1/12 , F24F6/00 , H01L21/687
CPC分类号： H01L21/67196 , B01D53/04 , B01D53/40 , B01D53/42 , B65G49/07 , C12M37/00 , F24F3/167 , F24F6/00 , F24F7/003 , F24F7/06 , F24F7/065 , F24F7/08 , F24F13/28 , H01L21/67017 , H01L21/67389 , H01L21/67393 , H01L21/67766 , H01L21/68707 , B01D2258/02
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.
The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

6. 发明授权

US11247190B2 Composite material, its manufacture and use in gas purification 有权
公开(公告)号：US11247190B2
公开(公告)日：2022-02-15
申请号：US16317415
申请日：2017-07-28
申请人： Nanyang Technological University
发明人： Lan Zhang , Siew Hwa Chan , Ovi Lian Ding , Hongquan He
IPC分类号： B01J20/10 , B01J20/12 , B01D53/02 , B01D53/68 , B01D53/82 , B01J20/20 , B01J20/30 , B01J20/32 , B01J20/28 , B01J20/06 , C01B3/50 , B01J20/02 , B01D53/40 , B01D53/42
摘要： The invention provides a composite material formed from an inorganic mesoporous, or mesoporous-like, material that is dispersed throughout a polymeric matrix formed by a crosslinked polymer that has acidic- or basic-residues and which may also optionally have further acidic- or basic-residues grafted onto the inorganic mesoporous material. The resulting composite material may be used to remove acidic or basic impurities from a gas in need thereof and can be easily regenerated.

7. 发明授权

US4225323A Ionization effected removal of alkali composition from a hot gas 失效
标题翻译：电离从热气中除去碱组分
公开(公告)号：US4225323A
公开(公告)日：1980-09-30
申请号：US044314
申请日：1979-05-31
申请人： Andrew S. Zarchy , Shiro G. Kimura
发明人： Andrew S. Zarchy , Shiro G. Kimura
IPC分类号： B01D53/32 , B01D53/42 , B03C3/38 , C10K1/00 , B03C1/00
CPC分类号： B01D53/32 , B01D53/42 , B03C3/38 , C10K1/00
摘要： A process for ionization-effected removal of alkali composition from an ultrahigh temperature gaseous mixture containing the composition in vapor form is described. A flow of the hot gaseous mixture is conducted through a flow-through network in intimate contact with a metalliferous surface having a work function of at least 5.3 electron volts. The mixture heats the surface to the requisite temperature for effecting substantial alkali metal ionization. The resulting ions are removed by passing the resulting mixture containing same along a flow path through the lines of force of an electrical field of sufficiently low voltage to avoid both glow discharge and breakdown discharge. The lines of force extend to an electrically conductive ion-collection surface maintained at a sufficiently low temperature such that the ions are retained on the latter surface as a condensed phase.
摘要翻译：描述了从含有蒸气形式的组合物的超高温气态混合物离子化去除碱组合物的方法。热气体混合物的流动通过流通网络进行，其与具有至少5.3电子伏特的功函数的含金表面紧密接触。混合物将表面加热到必需的温度以实现大量的碱金属离子化。通过使所得到的混合物沿着流动路径通过足够低电压的电场的力线将所得到的混合物除去，以避免辉光放电和击穿放电。力线延伸到保持在足够低的温度下的导电离子收集表面，使得离子作为凝聚相保留在后者表面上。

8. 发明授权

US11424145B2 Transfer chamber 有权
公开(公告)号：US11424145B2
公开(公告)日：2022-08-23
申请号：US16845555
申请日：2020-04-10
申请人： SINFONIA TECHNOLOGY CO., LTD.
发明人： Toshihiro Kawai , Takashi Shigeta , Munekazu Komiya , Yasushi Taniyama
IPC分类号： H01L21/67 , F24F13/28 , F24F7/06 , B01D53/04 , F24F7/00 , B65G49/07 , H01L21/677 , F24F3/167 , F24F7/08 , H01L21/673 , B01D53/40 , B01D53/42 , C12M1/12 , F24F6/00 , H01L21/687
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.
The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

9. 发明授权

US5997613A Gas phase adsorption process utilizing oxidized pitch-based activated carbon fibers 失效
标题翻译：使用氧化沥青基活性炭纤维的气相吸附法
公开(公告)号：US5997613A
公开(公告)日：1999-12-07
申请号：US887394
申请日：1992-05-21
申请人： Katsumi Kaneko , Takeshi Maeda
发明人： Katsumi Kaneko , Takeshi Maeda
IPC分类号： B01D53/02 , C01B31/04 , D01F9/14 , D01F9/145 , D01F9/15 , D01F11/12 , B01D53/42
CPC分类号： D01F11/122 , D01F9/145 , D01F9/15
摘要： A gas phase adsorption process in which a gas phase containing water vapor or a basic gas is brought into contact with activated carbon fiber to adsorb the water vapor or basic gas. The activated carbon fiber comprises pitch-based oxidized activated carbon fiber having oxygen-containing functional groups and an oxygen content of 3-18% by weight, based on the weight of the fiber. The oxidized activated carbon fiber is prepared by oxidizing pitch-based activated carbon fiber having a specific surface area of 200-2500 m.sup.2 /g.
摘要翻译：使含有水蒸气或碱性气体的气相与活性炭纤维接触以吸附水蒸汽或碱性气体的气相吸附方法。活性炭纤维包括基于纤维重量的具有含氧官能团和氧含量为3-18重量％的沥青基氧化活性炭纤维。通过氧化比表面积为200-2500m 2 / g的沥青类活性炭纤维来制备氧化活性炭纤维。

10. 发明授权

US5660807A Process for the removal of HCN from gas mixtures 失效
标题翻译：从气体混合物中除去HCN的方法
公开(公告)号：US5660807A
公开(公告)日：1997-08-26
申请号：US553588
申请日：1996-05-13
申请人： Wolfgang Forg , Gerhard Ranke , Michael Heisel , Dietrich Maschmeyer , Robert Walter
发明人： Wolfgang Forg , Gerhard Ranke , Michael Heisel , Dietrich Maschmeyer , Robert Walter
IPC分类号： B01D53/86 , B01J23/26 , C01B3/58 , C10K1/34 , B01D53/42
CPC分类号： B01J23/26 , B01D53/8603 , B01D53/8621 , C01B3/58 , C10K1/34 , B01D2257/308 , B01D2257/408 , C01B2203/045 , C01B2203/0465 , C01B2203/0475 , C01B2203/0485
摘要： The invention relates to a process for the removal of HCN from gas mixtures that contain at least HCN and sulfur compounds, especially from gas mixtures that are obtained by partial oxidation of hydrocarbons, by catalytic decomposition of HCN, as well as a catalyst for the decomposition of HCN. According to the invention, the gas mixture is brought into contact with a catalyst which decomposes the HCN by hydrogenation and/or by hydrolysis and COS that is contained in the gas mixture is decomposed at least partially in this catalyst by hydrolysis. Advantageously, a catalyst that is based on titanium oxide and/or zirconium oxide as a vehicle and that contains chromium oxide as an active component is used. Advantageously, the catalyst is reduced during catalyst production or before use with H.sub.2 and/or a reducing gas at temperatures above the operating temperature of catalytic decomposition.
摘要翻译： PCT No.PCT / EP94 / 01646 Sec。 371日期：1996年5月13日 102（e）日期1996年5月13日PCT提交1994年5月20日PCT公布。出版物WO94 / 29004 日期1994年12月22日本发明涉及从气体混合物中除去HCN的方法，所述气体混合物至少含有HCN和硫化合物，特别是通过烃的部分氧化获得的气体混合物，HCN的催化分解以及用于分解HCN的催化剂。根据本发明，使气体混合物与通过氢化和/或水解分解HCN的催化剂接触，并且气体混合物中包含的COS至少部分地通过水解在该催化剂中分解。有利地，使用基于氧化钛和/或氧化锆作为载体并且含有氧化铬作为活性组分的催化剂。有利地，催化剂在催化剂生产期间或在高于催化分解操作温度的温度下用H2和/或还原气体使用之前被还原。

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