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1. 发明授权

US07556786B2 Method of processing alkali-activation exhaust gas 有权
标题翻译：碱活化废气的处理方法
公开(公告)号：US07556786B2
公开(公告)日：2009-07-07
申请号：US11599385
申请日：2006-11-15
申请人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
发明人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
IPC分类号： B01D53/92 , A62D3/00
CPC分类号： B01D53/77 , B01D53/42 , B01D53/46 , B01D53/76 , B01D2257/00 , B01D2258/02
摘要： Disclosed is a method for processing an exhaust gas containing an alkaline substance, the exhaust gas being emitted when activating a carbon material with an alkaline substance. The method includes the steps of preparing a humidified gas, which exhibits a dew point of 25° C. or more, by mixing an inert gas with water vapor, generating a hydroxide of metallic alkali by mixing the humidified gas with the exhaust gas; and trapping the generated hydroxide out of the mixture gas of the humidified gas and the exhaust gas.
摘要翻译：公开了一种处理含有碱性物质的废气的方法，当用碱性物质活化碳材料时排出废气。该方法包括以下步骤：通过将惰性气体与水蒸气混合，制成露点为25℃或更高的加湿气体，通过将加湿气体与废气混合而产生金属碱的氢氧化物; 并将生成的氢氧化物从加湿气体和废气的混合气体中捕获。

2. 发明授权

US5523516A Method for recycling lithium batteries 失效
标题翻译：锂电池回收方法
公开(公告)号：US5523516A
公开(公告)日：1996-06-04
申请号：US418775
申请日：1995-04-07
申请人： Stan D. Berry , Frank Bis , Dave T. Edelstein , Arpad E. Torma
发明人： Stan D. Berry , Frank Bis , Dave T. Edelstein , Arpad E. Torma
IPC分类号： B01D53/42 , B09B3/00 , B09B5/00 , F23G5/00 , F23G7/00 , H01M6/52 , C06B21/00
CPC分类号： H01M6/52 , B01D53/42 , B09B3/00 , B09B5/00 , F23G5/006 , F23G7/003 , F23G2201/80 , F23G2201/90 , F23G2202/20 , F23J2219/40 , Y02W30/84 , Y10S149/124
摘要： A method for processing electric storage batteries, particularly lithium/thionyl chloride batteries, which includes the steps of discharging the batteries, lowering the temperature of the battery components to -180.degree. C., and cutting the battery into pieces while in its cold state before further processing. The process can also include the further steps of incineration, collecting the solid, liquid and gaseous discharges from the incinerator, washing the solid and liquid discharges with water and the gaseous discharge with an alkaline solution, mixing the resultant wash streams, separating precipitates formed from the mixed stream and neutralizing the remaining solution.
摘要翻译：一种用于处理蓄电池，特别是锂/亚硫酰氯电池的方法，其包括将电池放电的步骤，将电池组件的温度降低至-180℃，并且在处于冷态时将电池切割成片进一步处理。该方法还可以包括进一步的焚化步骤，从焚化炉收集固体，液体和气体排放物，用水洗涤固体和液体排出物，用碱性溶液排出气体，混合所得洗涤液流，分离由混合流并中和剩余的溶液。

3. 发明申请

US20180096836A1 SUBSTRATE PROCESSING DEVICE 审中-公开
公开(公告)号：US20180096836A1
公开(公告)日：2018-04-05
申请号：US15834764
申请日：2017-12-07
申请人： SCREEN Holdings Co., Ltd.
发明人： Michinori Iwao
IPC分类号： H01L21/02 , B01D53/78 , B08B3/08
CPC分类号： H01L21/02041 , B01D53/1412 , B01D53/1456 , B01D53/346 , B01D53/40 , B01D53/42 , B01D53/78 , B01D2251/50 , B01D2251/60 , B01D2258/0216 , B08B3/08
摘要： A substrate processing apparatus includes a processing unit supplying at least one of a plurality of types of chemical liquids to a substrate and a scrubber cleaning an exhaust by bringing the exhaust in contact with a scrubbing liquid. The scrubber includes an exhaust passage that guides the exhaust, generated at the processing unit and containing the chemical liquid, toward an exhaust equipment disposed outside the substrate processing apparatus and a discharger that is able to discharge each of a plurality of types of scrubbing liquids that clean the exhaust individually inside the exhaust passage. A controller selects any one of the plurality of types of scrubbing liquids based on the type of chemical liquid contained in the exhaust and makes the selected scrubbing liquid be discharged from the discharger.

4. 发明申请

US20160020085A1 SUBSTRATE PROCESSING DEVICE 审中-公开
标题翻译：基板处理装置
公开(公告)号：US20160020085A1
公开(公告)日：2016-01-21
申请号：US14652471
申请日：2014-02-18
申请人： SCREEN Holdings Co., Ltd.
发明人： Michinori IWAO
IPC分类号： H01L21/02 , B08B3/08 , B01D53/78
CPC分类号： H01L21/02041 , B01D53/1412 , B01D53/1456 , B01D53/346 , B01D53/40 , B01D53/42 , B01D53/78 , B01D2251/50 , B01D2251/60 , B01D2258/0216 , B08B3/08
摘要： A substrate processing apparatus includes a processing unit supplying at least one of a plurality of types of chemical liquids to a substrate and a scrubber cleaning an exhaust by bringing the exhaust in contact with a scrubbing liquid. The scrubber includes an exhaust passage that guides the exhaust, generated at the processing unit and containing the chemical liquid, toward an exhaust equipment disposed outside the substrate processing apparatus and a discharger that is able to discharge each of a plurality of types of scrubbing liquids that clean the exhaust individually inside the exhaust passage. A controller selects any one of the plurality of types of scrubbing liquids based on the type of chemical liquid contained in the exhaust and makes the selected scrubbing liquid be discharged from the discharger.
摘要翻译：基板处理装置包括处理单元，其将多种类型的化学液体中的至少一种提供给基板，以及通过使排气与洗涤液体接触来清洁排气的洗涤器。洗涤器包括排气通道，该排气通道在处理单元处产生并且容纳化学液体的排气朝向设置在基板处理设备外部的排气设备引导，并且排出器能够排出多种洗涤液体中的每一种，在排气通道内单独清洁排气。控制器基于排气中所含的化学液体的类型选择多种类型的洗涤液中的任何一种，并使所选择的洗涤液从排出器排出。

5. 发明申请

US20090282977A1 GAS PURIFICATION SYSTEM HAVING PROVISIONS FOR CO2 INJECTION OF WASH WATER 审中-公开
标题翻译：具有二氧化碳注入洗涤水的气体净化系统
公开(公告)号：US20090282977A1
公开(公告)日：2009-11-19
申请号：US12436309
申请日：2009-05-06
申请人： Peter Ulrich Koss
发明人： Peter Ulrich Koss
IPC分类号： B01D47/00 , B01D47/14
CPC分类号： B01D53/1406 , B01D53/1493 , B01D53/42 , B01D53/58 , B01D2257/40 , B01D2257/504 , C01C1/26 , Y02C10/04 , Y02C10/06 , Y02P20/152
摘要： The present invention relates to a methods and systems for the removal of contaminants from a gas stream, comprising the steps of: a)introducing CO2 into a wash water stream to obtain a CO2 enriched wash water; and b) contacting said CO2 enriched wash water with the gas stream containing contaminants to be removed to allow absorption of the contaminants into the CO2 enriched wash water. The present invention further relates to the use of CO2 enriched wash water for removal of alkaline contaminants from a gas stream in a gas purification system.
摘要翻译：本发明涉及一种从气流中去除污染物的方法和系统，包括以下步骤：a）将CO 2引入洗涤水流中以获得富含CO 2的洗涤水; 和b）使所述富含CO 2的洗涤水与要除去的污染物的气流接触，以便将污染物吸收到富含CO 2的洗涤水中。本发明还涉及使用富CO 2洗涤水从气体净化系统中的气流中除去碱性污染物。

6. 发明申请

US20070116618A1 Method of processing alkali-activation exhaust gas 有权
标题翻译：碱活化废气的处理方法
公开(公告)号：US20070116618A1
公开(公告)日：2007-05-24
申请号：US11599385
申请日：2006-11-15
申请人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
发明人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
IPC分类号： B01D53/42 , B01J8/04 , B01D53/46
CPC分类号： B01D53/77 , B01D53/42 , B01D53/46 , B01D53/76 , B01D2257/00 , B01D2258/02
摘要： Disclosed is a method for processing an exhaust gas containing an alkaline substance, the exhaust gas being emitted when activating a carbon material with an alkaline substance. The method includes the steps of preparing a humidified gas, which exhibits a dew point of 25° C. or more, by mixing an inert gas with water vapor, generating a hydroxide of metallic alkali by mixing the humidified gas with the exhaust gas; and trapping the generated hydroxide out of the mixture gas of the humidified gas and the exhaust gas.
摘要翻译：公开了一种处理含有碱性物质的废气的方法，当用碱性物质活化碳材料时排出废气。该方法包括以下步骤：通过将惰性气体与水蒸气混合，制成露点为25℃或更高的加湿气体，通过将加湿气体与废气混合而产生金属碱的氢氧化物; 并将生成的氢氧化物从加湿气体和废气的混合气体中捕获。

7. 发明申请

US20060152695A1 Exposure apparatus 有权
标题翻译：曝光装置
公开(公告)号：US20060152695A1
公开(公告)日：2006-07-13
申请号：US11324290
申请日：2006-01-04
申请人： Seiji Nagahara
发明人： Seiji Nagahara
IPC分类号： G03B27/52
CPC分类号： B01D53/75 , B01D53/185 , B01D53/42 , B01D53/44 , B01D53/60 , B01D2251/404 , B01D2251/604 , B01D2253/102 , B01D2255/20707 , B01D2255/802 , B01D2257/302 , B01D2257/404 , B01D2259/804 , G03F7/70866 , G03F7/70916 , G03F7/70933
摘要： The exposure apparatus of the invention includes a chamber 1 housing an exposure apparatus body 6 provided with an illumination optical system 2, a reticle 3, a projection lens 4 and a stage 5, gas supply units 7, 13, 17 and 18 that are disposed in the chamber 1 and supply gas taken in from the outside of the chamber 1 to the vicinities of the reticle 3 and stage 5 and a wet filter 10 which is disposed in the vicinity of a gas intake 8 from which the gas is supplied to the gas supply units 7, 13, 17 and 18 and forms a water film through which the gas passes.
摘要翻译：本发明的曝光装置包括容纳设置有照明光学系统2，标线片3，投影透镜4和台5的曝光装置主体6的室1，气体供给单元7,13,17和18，在室1中并将从室1的外部吸入的气体分配到标线片3和阶段5的附近;以及湿式过滤器10，其设置在气体供给到气体入口8的附近气体供应单元7,13,17和18，并形成气体通过的水膜。

8. 发明授权

US11823923B2 Transfer chamber 有权
公开(公告)号：US11823923B2
公开(公告)日：2023-11-21
申请号：US17860202
申请日：2022-07-08
申请人： SINFONIA TECHNOLOGY CO., LTD.
发明人： Toshihiro Kawai , Takashi Shigeta , Munekazu Komiya , Yasushi Taniyama
IPC分类号： H01L21/67 , F24F13/28 , F24F7/06 , B01D53/04 , B65G49/07 , H01L21/677 , F24F3/167 , F24F7/08 , H01L21/673 , F24F7/003 , B01D53/40 , B01D53/42 , C12M1/12 , F24F6/00 , H01L21/687
CPC分类号： H01L21/67196 , B01D53/04 , B01D53/40 , B01D53/42 , B65G49/07 , C12M37/00 , F24F3/167 , F24F6/00 , F24F7/003 , F24F7/06 , F24F7/065 , F24F7/08 , F24F13/28 , H01L21/67017 , H01L21/67389 , H01L21/67393 , H01L21/67766 , H01L21/68707 , B01D2258/02
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.
The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

9. 发明授权

US07785543B2 Method of processing alkali-activation exhaust gas 有权
标题翻译：碱活化废气的处理方法
公开(公告)号：US07785543B2
公开(公告)日：2010-08-31
申请号：US12476597
申请日：2009-06-02
申请人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
发明人： Tetsuya Kume , Yasuyuki Higaonna , Kazuaki Yanagi
IPC分类号： B01D50/00
CPC分类号： B01D53/77 , B01D53/42 , B01D53/46 , B01D53/76 , B01D2257/00 , B01D2258/02
摘要： Disclosed is an apparatus for processing an exhaust gas containing an alkaline substance, the exhaust gas being emitted when activating a carbon material with an alkaline substance. The apparatus includes a humidified-gas preparing device for preparing a humidified gas, which exhibits a dew point of 25° C. or more; a gas mixing device for mixing the humidified gas with the exhaust gas at a temperature equal to or greater than the dewpoint of the humidified gas, thereby generating a hydroxide of metallic alkali; and a trapping device for trapping the generated hydroxide out of the mixture gas of the humidified gas and the exhaust gas.
摘要翻译：公开了一种用于处理含有碱性物质的排气的装置，当用碱性物质活化碳材料时排出废气。该装置包括一个加湿气体制备装置，用于制备露点为25℃或更高的加湿气体; 气体混合装置，用于在加湿气体的露点以上的温度下混合加湿气体和排气，从而产生金属碱的氢氧化物; 以及用于将生成的氢氧化物从加湿气体和废气的混合气体中捕获的捕集装置。

10. 发明申请

US20090232713A1 Method of Processing Alkali-Activation Exhaust Gas 有权
标题翻译：碱性活化废气的处理方法
公开(公告)号：US20090232713A1
公开(公告)日：2009-09-17
申请号：US12476597
申请日：2009-06-02
申请人： Tetsuya KUME , Yasuyuki HIGAONNA , Kazuaki YANAGI
发明人： Tetsuya KUME , Yasuyuki HIGAONNA , Kazuaki YANAGI
IPC分类号： B01D53/34
CPC分类号： B01D53/77 , B01D53/42 , B01D53/46 , B01D53/76 , B01D2257/00 , B01D2258/02
摘要： Disclosed is an apparatus for processing an exhaust gas containing an alkaline substance, the exhaust gas being emitted when activating a carbon material with an alkaline substance. The apparatus includes a humidified-gas preparing device for preparing a humidified gas, which exhibits a dew point of 25° C. or more; a gas mixing device for mixing the humidified gas with the exhaust gas at a temperature equal to or greater than the dewpoint of the humidified gas, thereby generating a hydroxide of metallic alkali; and a trapping device for trapping the generated hydroxide out of the mixture gas of the humidified gas and the exhaust gas.
摘要翻译：公开了一种用于处理含有碱性物质的排气的装置，当用碱性物质活化碳材料时排出废气。该装置包括一个加湿气体制备装置，用于制备露点为25℃或更高的加湿气体; 气体混合装置，用于在加湿气体的露点以上的温度下混合加湿气体和排气，从而产生金属碱的氢氧化物; 以及用于将生成的氢氧化物从加湿气体和废气的混合气体中捕获的捕集装置。

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