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    • 7. 发明申请
    • Compact Self-Contained Holographic and Interferometric Apparatus
    • 紧凑型自包含全息和干涉仪
    • US20150085291A1
    • 2015-03-26
    • US14388322
    • 2013-01-31
    • ASML Holding N.V.
    • Yuli VladimirskyLev Ryzhikov
    • G01B9/021G03H1/04G03H1/00G01B9/04
    • G01B9/021G01B9/04G02B21/14G03F1/34G03F7/70625G03F7/70633G03F7/7065G03H1/0005G03H1/041G03H1/0443G03H1/0486G03H1/0493G03H2001/005G03H2001/0447G03H2223/52
    • A compact, self-contained holographic and interferometric apparatus and methods for eliminating vibration, including methods for eliminating relative displacement and vibration errors present in object and reference beam paths, are disclosed. The self-contained apparatus (600) includes an illuminated object (302) that scatters light and an objective lens (304) to form an object beam (350). The self-contained apparatus also includes a reference beam forming lens group (308) that forms a reference beam (352) from a portion of the object beam that passes through a pupil plane (306) of the objective lens (304). The object beam and the reference beam are propagated along a shared optical path, which eliminates relative displacement and vibration errors. The self-contained apparatus includes an image plane (316) where the object beam and reference beam are recombined to create an interference pattern, which is detected and analyzed. Methods for eliminating the instability, using the self-contained apparatus, are disclosed.
    • 公开了一种紧凑的,独立的全息和干涉仪以及用于消除振动的方法,包括用于消除物体和参考光束路径中存在的相对位移和振动误差的方法。 独立装置(600)包括散射光的照明物体(302)和物镜(304)以形成物体光束(350)。 独立设备还包括参考光束形成透镜组(308),其从物镜光束的通过物镜(304)的光瞳平面(306)的部分形成参考光束(352)。 物体光束和参考光束沿共享光路传播,消除了相对位移和振动误差。 独立设备包括图像平面(316),其中物体光束和参考光束被重新组合以产生被检测和分析的干涉图案。 公开了使用独立装置消除不稳定性的方法。