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1. 发明公开

US20230160682A1 Polarization-Separated, Phase-Shifted Interferometer 审中-公开
公开(公告)号：US20230160682A1
公开(公告)日：2023-05-25
申请号：US17572353
申请日：2022-01-10
申请人： Massachusetts Institute of Technology
发明人： Noah GILBERT , Joshua BROWN
IPC分类号： G01B9/02001 , G01B11/24 , G01B9/02055
CPC分类号： G01B9/0201 , G01B11/2441 , G01B9/02067 , G01B2290/70
摘要： A polarization-separated, phase-shifted interferometer can generate interferograms without moving parts. It uses a phase shifter, such as an electro-optic phase modulator, to modulate the relative phase between sample and reference beams. These beams are transformed into orthogonal polarization states (e.g., horizontally and vertically polarized states) and coupled via a common path (e.g., polarization-maintaining fiber) to a polarizing beam splitter (PBS), which sends them into separate sample and reference arms. Quarter-wave plates in the sample and reference arms rotate the polarization states of the sample and reference beams so they are coupled out of the PBS to a detector via a 45° linear polarizer. The polarizer projects the aligned polarization components of the sample and reference beams onto the detector, where they interfere with known relative phase to produce an output that can be used to map surface topography of the test object.

2. 发明申请

US20190204065A1 LIGHT MEASUREMENT DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD 审中-公开
公开(公告)号：US20190204065A1
公开(公告)日：2019-07-04
申请号：US16322592
申请日：2017-08-07
申请人： NEC CORPORATION , NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
发明人： Takeshi AKAGAWA , Masahiro KUBO , Katsumi ABE , Kimiyasu TAKOH , Ersin ALTINTAS , Yuji OHNO , Tetsuri ARIYAMA , Ichiro ISHIMARU
IPC分类号： G01B9/02 , G01J3/45
CPC分类号： G01B9/02067 , G01B9/02041 , G01B9/02061 , G01B9/02068 , G01J3/45
摘要： A light measurement device that maintains high measurement precision. The light measurement device includes: light source that irradiates light upon measurement object; branch part that splits transmitted light or reflected light from measurement object; phase-changing unit that changes the phase of one beam of the branched light beams; phase-fixing unit that maintains the phase of the other beam of the branched light beams; adjustment mechanism, which is provided in phase-changing unit or phase-fixing unit, for adjusting the propagation direction of light; multiplexer that causes the light emitted by each of phase-changing unit and phase-fixing unit to interfere with each other; detection unit that detects light that is interfered with by multiplexer; and control unit that controls the adjustment mechanism on the basis of the luminance values of an interference image that is detected by detection unit and adjusts the propagation direction of light in phase-changing unit or phase-fixing unit.

3. 发明申请

US20180031415A1 INTERFEROMETER SYSTEM HAVING A CONTINUOUSLY VARIABLE BROADBAND REFLECTOR AND METHOD TO GENERATE AN INTERFERENCE SIGNAL OF A SURFACE OF A SAMPLE 审中-公开
公开(公告)号：US20180031415A1
公开(公告)日：2018-02-01
申请号：US15782097
申请日：2017-10-12
申请人： MITUTOYO CORPORATION
发明人： Han HAITJEMA , Johannes Anna QUAEDACKERS , Adriaan Tiemen ZUIDERWEG
IPC分类号： G01J1/02 , G02B27/10 , G01B9/02 , G02B27/28
CPC分类号： G01J1/02 , G01B9/02012 , G01B9/02067 , G01B9/0209 , G02B27/10 , G02B27/283
摘要： An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

4. 发明授权

US09797705B2 Laser heterodyne interferometric signal processing method based on locking edge with high frequency digital signal 有权
公开(公告)号：US09797705B2
公开(公告)日：2017-10-24
申请号：US14520985
申请日：2014-10-22
申请人： ZHEJIANG SCI-TECH UNIVERSITY
发明人： Benyong Chen , Enzheng Zhang , Liping Yan
IPC分类号： G01B9/02 , G01B11/14 , G01P3/36
CPC分类号： G01B9/02083 , G01B9/02002 , G01B9/02007 , G01B9/02067 , G01B9/0207 , G01B11/14 , G01P3/36
摘要： The present invention discloses a processing method for laser heterodyne interferometric signal based on locking edge with high frequency digital signal. A reference signal and a measurement signal of heterodyne interferometer, after being processed by photodetector, signal amplifier, filtering circuit, voltage comparator and high frequency digital edge locking module, are transferred to pulse counting synchronized latching processing module, to obtain entire cycle interference fringe numbers and filling pulse numbers in one interference fringe cycle, of the reference signal and the measurement signal; the numbers are transferred to a computer to obtain displacement and speed of a measured object; usage of a high frequency digital pulse signal to lock the rising edge of laser heterodyne interferometric signal can improve the gradient of the rising edge of interference signal and eliminate wrong pulse caused by noises, and improve the accuracy and stability of the processing for the following signals.

5. 发明申请

US20170205223A1 AGILE IMAGING SYSTEM 审中-公开
公开(公告)号：US20170205223A1
公开(公告)日：2017-07-20
申请号：US15477850
申请日：2017-04-03
申请人： Thorlabs, Inc. , Praevium Research, Inc.
发明人： Alex Ezra CABLE , Vijaysekhar Jayaraman , James JIANG , Benjamin Potsaid
IPC分类号： G01B9/02 , H01S5/183 , H01S5/065 , A61B3/10 , A61B5/00
CPC分类号： G01B9/02091 , A61B3/102 , A61B5/0066 , G01B9/02004 , G01B9/02044 , G01B9/02067 , G01B9/02069 , H01S5/0651 , H01S5/18361 , H01S5/18366
摘要： An agile optical imaging system for optical coherence tomography imaging using a tunable source comprising a wavelength tunable VCL laser is disclosed. The tunable source has long coherence length and is capable of high sweep repetition rate, as well as changing the sweep trajectory, sweep speed, sweep repetition rate, sweep linearity, and emission wavelength range on the fly to support multiple modes of OCT imaging. The imaging system also offers new enhanced dynamic range imaging capability for accommodating bright reflections. Multiscale imaging capability allows measurement over orders of magnitude dimensional scales. The imaging system and methods for generating the waveforms to drive the tunable laser in flexible and agile modes of operation are also described.

6. 发明授权

US09036011B2 Optical phase extraction system having phase compensation function of closed loop type and three-dimensional image extraction method thereof 有权
标题翻译：具有闭环型相位补偿功能的光学相位提取系统及其三维图像提取方法
公开(公告)号：US09036011B2
公开(公告)日：2015-05-19
申请号：US13524156
申请日：2012-06-15
申请人： Hyoung Jun Park , Hyun Seo Kang , Young Sun Kim , Kwon-Seob Lim , In Hee Shin , Young Soon Heo
发明人： Hyoung Jun Park , Hyun Seo Kang , Young Sun Kim , Kwon-Seob Lim , In Hee Shin , Young Soon Heo
IPC分类号： H04N13/02 , H04N5/225 , H04N5/335 , H04N3/14 , G01B9/02 , G01B11/24 , G01H9/00
CPC分类号： G01B9/0201 , G01B9/02067 , G01B9/0207 , G01B9/02095 , G01B11/2441 , G01H9/00
摘要： Provided is an image extraction method of optical phase extraction system. The image extraction method may include checking whether a phase error due to an environmental disturbance of optical fiber occurs by monitoring an output signal obtained by interfering reflection optical signals reflected through two paths. When a phase error occurs, an error is compensated using a phase compensation control method of closed loop type through one of the two paths and an image is extracted by capturing an image of object in a state that the image of object is shifted by the set phase value when a phase error is compensated. According to the inventive concept, a phase error occurring in an optical fiber type interferometer due to an environmental disturbance is minimized or compensated. Also, since an interference image accurately shifted by the phase value set among arbitrary various phase values is obtained through a camera, reliability of three-dimensional phase information being extracted is guaranteed.
摘要翻译：提供了一种光学相位提取系统的图像提取方法。图像提取方法可以包括通过监视通过两条路径反射的干涉反射光信号获得的输出信号来检查由于光纤的环境干扰引起的相位误差。当发生相位误差时，通过两路径之一的闭环类型的相位补偿控制方法来补偿误差，并且通过在对象的图像被组合移位的状态下捕获对象的图像来提取图像补偿相位误差时的相位值。根据本发明的概念，由于环境干扰而在光纤型干涉仪中发生的相位误差被最小化或补偿。此外，由于通过相机获得在任意各种相位值之间精确移位了相位值的干涉图像，因此保证了提取的三维相位信息的可靠性。

7. 发明申请

US20140320865A1 APPARATUS FOR DETECTING A 3D STRUCTURE OF AN OBJECT 有权
标题翻译：用于检测物体的三维结构的装置
公开(公告)号：US20140320865A1
公开(公告)日：2014-10-30
申请号：US14259942
申请日：2014-04-23
申请人： Voco GmbH
发明人： Alexander Knüttel
IPC分类号： G01B11/24 , G01B9/02
CPC分类号： G01B11/2441 , A61B6/145 , G01B9/02001 , G01B9/02007 , G01B9/02027 , G01B9/02032 , G01B9/02047 , G01B9/02067 , G01N21/211 , G01N21/453 , G01N2021/213 , G01S7/4815 , G01S17/36 , G02B5/32 , G02B21/367 , G03H1/0005 , G03H1/0443 , G03H1/0465 , G03H1/0486 , G03H1/2645 , G03H1/265 , G03H1/32 , G03H2001/0033 , G03H2001/0212 , G03H2001/0445 , G03H2001/046 , G03H2001/0491 , G03H2001/266 , G03H2210/63 , G03H2222/13 , G03H2222/16 , G03H2222/17 , G03H2222/31 , G03H2222/34 , G03H2222/35 , G03H2222/44 , G03H2223/19 , G03H2223/22 , G03H2223/23
摘要： An apparatus for detecting a 3D structure of an object. The apparatus has first and second laser emitters which generate laser radiation having first and second wavelengths, respectively, the first wavelength being different from the second wavelength. Optical devices are disclosed, including a beam splitter, which splits the laser radiation of the laser emitters in each case into a reference radiation and an illuminating radiation. The illuminating radiation impinges upon the object to be measured, is reflected by the object as object radiation and interferes with the reference radiation. A detector receives the interference patterns. The laser emitters are located such that the illuminating radiation of the first and second laser emitters impinge upon the object at different angles of incidence. Also discussed is a measuring device which measures the two wavelengths of the laser radiation of the laser emitters and influences the recording of the interference patterns.
摘要翻译：一种用于检测物体的3D结构的装置。该装置具有分别产生具有第一和第二波长的激光辐射的第一和第二激光发射器，第一波长分别与第二波长不同。公开了包括分束器的光学装置，其将激光发射器的激光辐射在每种情况下分裂成参考辐射和照射辐射。照射的辐射照射在待测物体上，被物体作为物体辐射反射，并干扰参考辐射。检测器接收干扰图案。激光发射器被定位成使得第一和第二激光发射器的照射辐射以不同的入射角撞击在物体上。还讨论了测量激光发射器的激光辐射的两个波长并影响干涉图案的记录的测量装置。

8. 发明申请

US20140218742A1 Optical Coherence Tomography Control Systems and Methods 有权
标题翻译：光学相干断层扫描控制系统与方法
公开(公告)号：US20140218742A1
公开(公告)日：2014-08-07
申请号：US14160939
申请日：2014-01-22
申请人： Desmond Adler
发明人： Desmond Adler
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , A61B5/0066 , A61B5/0084 , G01B9/02004 , G01B9/02067 , H01S3/0092 , H01S3/1062 , H01S3/1396 , H01S5/183
摘要： In part, the invention relates to methods, devices, and systems suitable for controlling a light source. The light source is configured for use in a data collection system such as an optical coherence tomography system. The light source can be controlled with a drive waveform. Linearizing and symmetrizing parameters of the light source such as forward and backward scan durations is achieved using a suitable drive waveform. Phase, amplitude, and other parameters for different harmonics of a fundamental wave can be identified that improve operating parameters such as the duty cycle and peak frequency matching between scans. The fundamental wave and one or more of such harmonics can be combined to generate the suitable drive wave form. The light source can include a tunable light source that includes or is in optical communication with a tunable filter.
摘要翻译：部分地，本发明涉及适于控制光源的方法，装置和系统。光源被配置用于诸如光学相干断层摄影系统的数据采集系统中。光源可以用驱动波形控制。使用合适的驱动波形实现光源的线性化和对称性参数，如前进和后退扫描持续时间。可以确定基波不同谐波的相位，幅度和其他参数，以提高扫描之间的占空比和峰值频率匹配等工作参数。基波和这些谐波中的一个或多个可以组合以产生合适的驱动波形。光源可以包括可调谐光源，其包括或者与可调谐滤光器光学通信。

9. 发明授权

US08675204B2 Interferometric material sensing apparatus including adjustable reference arm and associated methods 有权
标题翻译：干涉材料感测装置包括可调参考臂和相关方法
公开(公告)号：US08675204B2
公开(公告)日：2014-03-18
申请号：US13102755
申请日：2011-05-06
申请人： Robert M. Montgomery , Randy L. Carmean , Charles Franklin Middleton, IV , James G. Tonti
发明人： Robert M. Montgomery , Randy L. Carmean , Charles Franklin Middleton, IV , James G. Tonti
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01N21/1702 , G01B9/02067 , G01B9/02068 , G01B2290/35 , G01B2290/60 , G01H9/004 , G01N29/043 , G01N29/2418
摘要： A material sensing apparatus includes an excitation source configured to induce waves in a workpiece, and an optical waveguide interferometer configured to sense the induced waves in the workpiece. The optical waveguide interferometer includes a plurality of optical couplers and interconnecting optical fibers arranged to define a reference arm, a measurement arm, and a probe segment coupled to the reference arm and the measurement arm and having a probe segment end to be positioned adjacent the workpiece. An optical path length adjustor is coupled to the reference arm. A controller cooperates with the optical path length adjustor and the first optical detector. The controller is configured to adjust an optical path length of the reference arm to maintain a constant relationship with respect to an optical path length of the measurement arm, and to generate workpiece data based upon the first optical detector.
摘要翻译：材料感测装置包括被配置为在工件中感应波的激励源和被配置为感测工件中的感应波的光波导干涉仪。光波导干涉仪包括多个光耦合器和互连光纤，其布置成限定参考臂，测量臂和耦合到参考臂和测量臂的探针段，并且具有探针段端部以邻近工件定位。光路长度调节器耦合到参考臂。控制器与光路长度调节器和第一光学检测器配合。控制器被配置为调整参考臂的光路长度以保持与测量臂的光路长度恒定的关系，并且基于第一光学检测器产生工件数据。

10. 发明授权

US08564787B2 OCT apparatus and interference signal level control method for the same 有权
标题翻译： OCT设备和干扰信号电平控制方法相同
公开(公告)号：US08564787B2
公开(公告)日：2013-10-22
申请号：US12797352
申请日：2010-06-09
申请人： Hiroshi Yamakita
发明人： Hiroshi Yamakita
IPC分类号： G01B9/02
CPC分类号： G01B9/02012 , G01B9/02067 , G01B9/02091
摘要： An OCT measurement apparatus includes a level detection section which detects the signal level of a piece of signal intensity information in interference information outputted from an interference beam detection section, a variable optical attenuator (VOA) which adjusts the light quantity of a return beam of a reference beam, and a light quantity control section which controls the VOA on the basis of the signal level of the piece of signal intensity information in the interference information detected by the level detection section. Accordingly, an interference signal at an appropriate level can be detected without saturation of the interference signal and reduction of an S/N ratio, and optical structure information of an object to be measured can be generated using the interference signal.
摘要翻译： OCT测量装置包括：电平检测部，其检测从干涉光束检测部输出的干涉信息中的一条信号强度信息的信号电平;调整光束的返回光的光量的可变光衰减器（VOA）参考光束，以及光量控制部分，其基于由电平检测部分检测到的干涉信息中的信号强度信息的信号电平来控制VOA。因此，可以在没有干扰信号的饱和和S / N比的降低的情况下检测到适当电平的干扰信号，并且可以使用干扰信号来生成待测量对象的光学结构信息。

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