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    • 10. 发明授权
    • Miniature acceleration sensor
    • 微型加速度传感器
    • US08104345B2
    • 2012-01-31
    • US12376833
    • 2007-08-06
    • Hubert BrücklMichael Kast
    • Hubert BrücklMichael Kast
    • G01P15/105
    • G01P15/105B82Y15/00B82Y25/00
    • A miniature sensor for detecting acceleration and deceleration processes has at least one bar-like spring element which is formed by a nanowire, which is connected by one end to the detector substrate and projects from the latter and which preferably carries at its free end a coating emitting a permanent magnetic stray field, or a nanoparticle of this type, wherein the nanowire and magnetic stray field coating, or mass, together form the inertial mass. A magnetic field detection layer composed, for example, of magnetoresistive material, is disposed at least in the region near the connected end of the nanowire. The substrate is preferably provided with such a layer which preferably, for its part, as sensor component forms a constituent part of a magnetic field detection unit.
    • 用于检测加速和减速过程的微型传感器具有至少一个棒状弹簧元件,其由纳米线形成,该纳米线由一端连接到检测器基底并从后者突出,并且其优选地在其自由端承载涂层 发射永久磁性杂散场或这种纳米颗粒,其中纳米线和磁性杂散场涂层或质量一起形成惯性质量。 由例如磁阻材料构成的磁场检测层至少设置在接近纳米线连接端的区域。 衬底优选地设置有这样的层,其优选地作为传感器部件形成磁场检测单元的组成部分。