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1. 发明授权

US10012670B2 Wafer bonding method for use in making a MEMS gyroscope 有权
公开(公告)号：US10012670B2
公开(公告)日：2018-07-03
申请号：US14518688
申请日：2014-10-20
申请人： InSighTech, LLC
发明人： Biao Zhang , Tao Ju
IPC分类号： H04R31/00 , G01P15/105 , G01C19/56 , B81B5/00 , G01C19/5776 , G01C19/5712 , B81C1/00 , B81C3/00 , G01R33/09 , G01P15/125
CPC分类号： G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
摘要： A method of making a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass.

2. 发明申请

US20160154020A1 MEMS GYROSCOPE 审中-公开
标题翻译： MEMS陀螺仪
公开(公告)号：US20160154020A1
公开(公告)日：2016-06-02
申请号：US14518712
申请日：2014-10-20
申请人： lnSighTech, LLC
发明人： Biao Zhang , Tao Ju
IPC分类号： G01P15/105 , G01R33/09
CPC分类号： G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
摘要： A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass, wherein the magnetic sensing mechanism comprises an integrated pickup coil of a fluxgate. A magnetic shield is provided in the vicinity of the magnetic source.
摘要翻译：本文公开了一种MEMS陀螺仪，其中所述MEMS陀螺仪包括磁感测机构和形成于所述质量块的磁源，其中所述磁感测机构包括磁通门的集成拾取线圈。在磁源附近设有磁屏蔽。

3. 发明申请

US20150204647A1 Multi-purpose Sensor 审中-公开
标题翻译：多功能传感器
公开(公告)号：US20150204647A1
公开(公告)日：2015-07-23
申请号：US14161699
申请日：2014-01-23
申请人： Ge Yi , Dujiang Wan
发明人： Ge Yi , Dujiang Wan
IPC分类号： G01B7/00 , H01L43/14 , G01P15/08 , G01P13/00 , G01B7/30
CPC分类号： H01L43/14 , A61B5/1117 , A61B2562/0223 , A63B24/0062 , G01C9/06 , G01D5/00 , G01D5/145 , G01D5/2013 , G01D5/24 , G01H11/00 , G01P15/036 , G01P15/105 , G01P15/11 , G01P15/125 , G01P15/18 , G01R33/091 , G01V1/008 , G08B21/043 , G08B21/0446
摘要： A sensor with unique floating magnet based on magnetic levitation, which can be used for multiple purposes, such as fall detection, tilting monitor and vibration measurement, is proposed. The manufacture method of making such a sensor is also given along with the fall detection methodology.
摘要翻译：提出了一种基于磁悬浮的独特浮动磁体的传感器，可用于多种用途，如跌落检测，倾斜监测和振动测量。制造这种传感器的制造方法也与坠落检测方法一起给出。

4. 发明授权

US08991253B2 Microelectromechanical system 有权
标题翻译：微机电系统
公开(公告)号：US08991253B2
公开(公告)日：2015-03-31
申请号：US13241333
申请日：2011-09-23
申请人： Horst Theuss
发明人： Horst Theuss
IPC分类号： G01P15/08 , G01P15/105 , G01P15/11 , G01P15/12 , G01P15/125
CPC分类号： G01P15/08 , G01P15/105 , G01P15/11 , G01P15/123 , G01P15/125
摘要： In various embodiments, a microelectromechanical system may include a chip, a substrate, a signal generator, and a fixing structure configured to fix the chip to the substrate. The chip may be fixed in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate. Furthermore, a signal may be generated by the movement of the chip by means of the signal generator.
摘要翻译：在各种实施例中，微机电系统可以包括芯片，衬底，信号发生器和被配置为将芯片固定到衬底的固定结构。芯片可以被固定成使得在微机电系统的加速时芯片相对于衬底移动。此外，可以通过信号发生器通过芯片的移动来产生信号。

5. 发明申请

US20150082886A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20150082886A1
公开(公告)日：2015-03-26
申请号：US14460450
申请日：2014-08-15
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hideaki FUKUZAWA , Michiko HARA , Yoshihiko FUJI , Yoshihiro HIGASHI , Shiori KAJI , Akio HORI , Tomohiko NAGATA , Akiko YUZAWA , Akira KIKITSU
IPC分类号： G01P15/105
CPC分类号： G01P15/105 , G01P15/0802 , G01P2015/0805
摘要： According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.
摘要翻译：根据一个实施例，惯性传感器包括基部，重物部分，连接部分和第一感测元件单元。连接部连接配重部和基部，能够根据配重部相对于基部的位置的相对位置的变化而变形。第一感测元件单元设置在连接部分的第一部分上，并且包括第一磁性层，第二磁性层和非磁性第一中间层。非磁性第一中间层设置在第一磁性层和第二磁性层之间。

6. 发明申请

US20140150553A1 PACKAGING SYSTEM AND PROCESS FOR INERTIAL SENSOR MODULES USING MOVING-GATE TRANSDUCERS 有权
标题翻译：使用移动栅传感器的惯性传感器模块的包装系统和过程
公开(公告)号：US20140150553A1
公开(公告)日：2014-06-05
申请号：US14094450
申请日：2013-12-02
申请人： Robert Bosch GmbH
发明人： Ando Feyh , Po-Jui Chen
IPC分类号： G01P15/08 , B81C1/00 , G01P15/105
CPC分类号： G01P15/08 , B81B7/02 , B81B2201/0235 , B81B2207/015 , G01C19/5783 , G01P15/0802 , G01P15/105 , G01P15/124 , G01P15/18 , G01P2015/0865
摘要： A sensor device includes a first CMOS chip and a second CMOS chip with a first moving-gate transducer formed in the first CMOS chip for implementing a first 3-axis inertial sensor and a second moving-gate transducer formed in the second CMOS chip for implementing a second 3-axis inertial sensor. An ASIC for evaluating the outputs of the first 3-axis inertial sensor and the second 3-axis inertial sensor is distributed between the first CMOS chip and the second CMOS chip.
摘要翻译：传感器装置包括第一CMOS芯片和第二CMOS芯片，其中第一移动栅极换能器形成在第一CMOS芯片中，用于实现第一三轴惯性传感器和形成在第二CMOS芯片中的第二移动栅极换能器，用于实现第二个三轴惯性传感器。用于评估第一3轴惯性传感器和第二3轴惯性传感器的输出的ASIC被分配在第一CMOS芯片和第二CMOS芯片之间。

7. 发明申请

US20140026660A1 MEMS DEVICE 审中-公开
公开(公告)号：US20140026660A1
公开(公告)日：2014-01-30
申请号：US13936144
申请日：2013-07-06
申请人： Biao Zhang , Tao Ju
发明人： Biao Zhang , Tao Ju
IPC分类号： G01C19/56
CPC分类号： G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
摘要： A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.

8. 发明申请

US20140026659A1 MEMS DEVICE AND A METHOD OF USING THE SAME 审中-公开
公开(公告)号：US20140026659A1
公开(公告)日：2014-01-30
申请号：US13935558
申请日：2013-07-05
申请人： BIAO ZHANG , TAO JU
发明人： BIAO ZHANG , TAO JU
IPC分类号： G01C19/56
CPC分类号： G01P15/105 , B81B5/00 , B81C1/00357 , B81C3/001 , B81C2201/0197 , B81C2203/038 , G01C19/56 , G01C19/5712 , G01C19/5776 , G01P15/125 , G01R33/091 , G01R33/093 , G01R33/098
摘要： A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.

9. 发明授权

US08104345B2 Miniature acceleration sensor 失效
标题翻译：微型加速度传感器
公开(公告)号：US08104345B2
公开(公告)日：2012-01-31
申请号：US12376833
申请日：2007-08-06
申请人： Hubert Brückl , Michael Kast
发明人： Hubert Brückl , Michael Kast
IPC分类号： G01P15/105
CPC分类号： G01P15/105 , B82Y15/00 , B82Y25/00
摘要： A miniature sensor for detecting acceleration and deceleration processes has at least one bar-like spring element which is formed by a nanowire, which is connected by one end to the detector substrate and projects from the latter and which preferably carries at its free end a coating emitting a permanent magnetic stray field, or a nanoparticle of this type, wherein the nanowire and magnetic stray field coating, or mass, together form the inertial mass. A magnetic field detection layer composed, for example, of magnetoresistive material, is disposed at least in the region near the connected end of the nanowire. The substrate is preferably provided with such a layer which preferably, for its part, as sensor component forms a constituent part of a magnetic field detection unit.
摘要翻译：用于检测加速和减速过程的微型传感器具有至少一个棒状弹簧元件，其由纳米线形成，该纳米线由一端连接到检测器基底并从后者突出，并且其优选地在其自由端承载涂层发射永久磁性杂散场或这种纳米颗粒，其中纳米线和磁性杂散场涂层或质量一起形成惯性质量。由例如磁阻材料构成的磁场检测层至少设置在接近纳米线连接端的区域。衬底优选地设置有这样的层，其优选地作为传感器部件形成磁场检测单元的组成部分。

10. 发明授权

US07636517B2 Lens adjusting device comprising protection arrangement 失效
标题翻译：镜头调节装置包括保护装置
公开(公告)号：US07636517B2
公开(公告)日：2009-12-22
申请号：US11531406
申请日：2006-09-13
申请人： Gunnar Klinghult
发明人： Gunnar Klinghult
IPC分类号： G03B17/18
CPC分类号： G01P15/105 , G01P15/0891 , G03B3/02 , G03B2217/005
摘要： A lens adjusting device includes a moveable lens supporting portion; a displacement arrangement that displaces the lens supporting portion, where the displacement arrangement generates a signal corresponding to movement, of the lens supporting portion, associated with an acceleration event; a device that compares the signal to a pre-defined threshold level of acceleration; and a protection arrangement to be activated to protect the lens supporting portion when a result of the comparison indicates that the pre-defined threshold is exceeded.
摘要翻译：透镜调节装置包括可移动透镜支撑部分; 位移布置，其使所述透镜支撑部位移动，其中所述位移布置产生与所述透镜支撑部分相对应的与加速度事件相关联的信号; 将信号与预定义的加速度阈值进行比较的装置; 以及当比较结果指示超过预定阈值时，被激活以保护镜片支撑部分的保护装置。

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