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1. 发明授权

US11867229B2 Linear guideway assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path 有权
公开(公告)号：US11867229B2
公开(公告)日：2024-01-09
申请号：US17604704
申请日：2020-02-26
申请人： VDL Enabling Technologies Group B.V.
发明人： Rick Baade , Antonius Theodorus Adrianus Peijnenburg
IPC分类号： F16C32/04
CPC分类号： F16C32/0472
摘要： The invention relates to a linear guideway assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path (x), said linear guideway assembly comprising: one, single rigid body formed as a linear guideway defining said linear displacement path as well as at least one rigid body formed as a product carrier being displaceable along said single linear guideway, wherein the linear guideway assembly further comprises multiple magnetic bearing assemblies for allowing contactless linear displacement of the at least one product carrier relative to the single, linear guideway, wherein all magnetic bearing assemblies are mounted to the product carrier in such way that the magnetic bearing assemblies are arranged in constraining five degrees of freedom (y, z, θ, Φ and ψ) of the product carrier relative to the single, linear guideway, whilst allowing one, translational degree of freedom (x) of the product carrier along the single, linear guideway, wherein all magnetic bearing assemblies, seen in the translational direction (x) of the linear displacement path, are mounted at the side of the product carrier closest to the single, linear guideway.

2. 发明申请

US20180350648A1 DEVICE FOR HOLDING, POSITIONING AND MOVING AN OBJECT 审中-公开
公开(公告)号：US20180350648A1
公开(公告)日：2018-12-06
申请号：US15562319
申请日：2016-04-01
申请人： APPLIED MATERIALS, INC.
发明人： Christof KLESEN
IPC分类号： H01L21/68 , F16C32/04 , H02K7/09 , H02K41/03 , C23C14/50 , C23C16/458
CPC分类号： F16C32/0472 , F16C32/0446 , F16C32/0465 , F16C32/0468 , F16C2370/00 , F16C2380/18 , H01L21/67709 , H01L21/67715 , H01L21/6776
摘要： The present invention relates to a device for holding, positioning and/or moving an object, with a base and with a carrier movable relative to the base, at least one magnetic bearing for generating a bearing or holding force between the base and the carrier, wherein the carrier is contactlessly supported on the base via the magnetic bearing, at least one drive acting contactlessly between base and carrier for the displacement of the carrier along the base in at least one transport direction, wherein the drive comprises a linear motor with at least one slider and one stator, which are arranged on the base and on the carrier and which, aside from a displacement force acting along the transport direction, are configured to create a counter-force between base and carrier which counteracts the bearing or holding force.

3. 发明授权

US08058628B2 Substrate processing apparatus and method 有权
标题翻译：基板加工装置及方法
公开(公告)号：US08058628B2
公开(公告)日：2011-11-15
申请号：US12170361
申请日：2008-07-09
申请人： Marek Zywno , Noah Bareket
发明人： Marek Zywno , Noah Bareket
IPC分类号： G03B27/62
CPC分类号： F16C32/044 , B82Y10/00 , B82Y40/00 , F16C32/0472 , H01J37/3174 , H01L21/68
摘要： Substrate processing methods and apparatus are disclosed. In some embodiments a substrate processing apparatus may comprise a support structure and a moveable stage including first and second stages. The moveable stage has one or more maglev units attached to the first stage and/or second stage proximate an edge of the first stage. The first stage retains one or more substrates and moves with respect to a first axis that is substantially fixed with respect to the second stage. The second stage translates along a second axis with respect to the support structure. In other embodiments, a primary motor may maintain a rotary stage at an angular speed and/or accelerate or decelerate the stage from a first angular speed to a second angular speed. A secondary motor may accelerate the stage from rest to the first angular speed and/or decelerate the stage from a non-zero angular speed.
摘要翻译：公开了基板加工方法和装置。在一些实施例中，衬底处理设备可以包括支撑结构和包括第一和第二阶段的可移动台。可移动台具有一个或多个磁悬浮单元，其附接到靠近第一级边缘的第一级和/或第二级。第一阶段保持一个或多个基板并相对于相对于第二阶段基本固定的第一轴线移动。第二级相对于支撑结构沿第二轴平移。在其他实施例中，主电动机可以以角速度保持旋转台并且/或者将平台从第一角速度加速或减速到第二角速度。次级电动机可以将舞台从休息加速到第一角速度和/或使舞台从非零角速度减速。

4. 发明授权

US07375479B2 Apparatus for processing an object with high position accurancy 失效
标题翻译：用于处理具有高位置精度的物体的装置
公开(公告)号：US07375479B2
公开(公告)日：2008-05-20
申请号：US10539371
申请日：2003-12-15
申请人： Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
发明人： Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
IPC分类号： H02K41/00 , H02P1/00 , H02P3/00 , H02P5/00 , H02P7/00
CPC分类号： F16C32/0472 , F16C32/0444 , G05B2219/41327 , G05B2219/42092 , G05B2219/49276 , H01J37/20 , H01J2237/20278 , H01J2237/3175 , H02K11/22 , H02K41/031
摘要： A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) v the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要翻译：一种设备在精确控制的位置处理诸如半导体晶片的物体（19）。物体（19）由可沿着路径移动的工作平台（12）支撑。安装在工作平台（12）上的悬架致动器部件（14）包含一个软磁芯（24），该软磁芯（24）具有面向沿该路径的支撑结构上的软磁元件（34）表面的磁极和一个绕组（20）用于施加电流以产生穿过磁芯（24）的磁场，并通过软磁元件（34）返回磁极。传感器（17）相对于位置参考元件（16）感测悬架致动器部件（14）的测量位置。控制电路包括外部控制电路（40）和内部控制电路（42）。外部控制电路（40）接收感测结果并且确定力设定点信息以将致动器部件（14）的测量位置调节到所需值。内部控制电路（42）接收力设定点信息并根据力设定点信息控制电流以实现致动器部件（14）和支撑结构（10）之间的力。

5. 发明授权

US06832449B2 Door suspension system 失效
标题翻译：门悬挂系统
公开(公告)号：US06832449B2
公开(公告)日：2004-12-21
申请号：US10034008
申请日：2001-12-20
申请人： Jean-Marie Rennetaud , Tian Zhou
发明人： Jean-Marie Rennetaud , Tian Zhou
IPC分类号： E05C706
CPC分类号： F16C29/02 , E05D2015/0695 , E05F15/60 , F16C32/044 , F16C32/0472 , H02K7/08 , H02K41/03
摘要： A door suspension system includes a rail support attachable to a crosspiece of a door and having a part shaped as a rigid substantially flat plate that supports a rail. A pair of brackets, each having a connector, are attached to support block having an opening in which the rail is partially received. The connectors have a substantially C-profile embracing the flat plate and the rail. A support strip is attached to the connectors and is provided with a connection device for suspending the door of an elevator. A magnetic way is attached to the plate and an elongated primary of a linear motor is attached to the strip in such a manner that the attraction force between the magnetic way and the primary cancels at least partially the weight of the door. The door suspension system further includes a bearing of substantially cylindrical shape with an axial recess. The bearing is mounted in the opening of the support block to guide the rail.
摘要翻译：门悬挂系统包括可附接到门的横档的导轨支架，并具有一个形状为支撑轨道的刚性基本上平坦的板的部分。每个具有连接器的一对支架附接到具有开口的支撑块，轨道部分地被容纳在该开口中。连接器具有包围平板和导轨的大致C形轮廓。支撑条附接到连接器，并且设置有用于悬挂电梯的门的连接装置。磁性方式连接到板上，并且线性电动机的细长主体以这样的方式附接到条带，使得磁路和主体之间的吸引力至少部分地抵消门的重量。门悬挂系统还包括具有轴向凹槽的基本上圆柱形的轴承。轴承安装在支撑块的开口中以引导轨道。

6. 发明授权

US5749444A Contactless slide guide for elevators 失效
标题翻译：非接触式电梯导轨
公开(公告)号：US5749444A
公开(公告)日：1998-05-12
申请号：US550969
申请日：1995-10-31
申请人： Clement A. Skalski
发明人： Clement A. Skalski
IPC分类号： B66B7/02 , B66B7/04 , F16C39/06 , F16F15/03
CPC分类号： F16C32/0444 , B66B7/044 , F16C32/0472 , F16F15/035
摘要： A contactless slide guide or magnetic bearing for guiding an elevator vertically along a hoistway rail has one or more electromagnet actuators spring-mounted within a yoke attached to the elevator car at a corner thereof. The positioning of the electromagnets within the yoke is such that they are positioned extremely close to the surface of the rail so as to form a magnetic bearing having a gap of just a few millimeters, and which is controlled in a position feedback control loop to keep the gap constant. The contactless slide guide may be used for low-rise buildings with a rigid connection between the yoke and the elevator, or may be used in conjunction with an active suspension system more typically used in mid- to high-rise buildings. The active suspension system may be used, for example, in conjunction with a pendulum car suspended within the elevator frame to which contactless slide guides are attached at the top and bottom. The active suspension is controlled with a feedback control system that is completely separate from the position control loops used to control the individual contactless slide guides.
摘要翻译：用于沿着井道导轨垂直地引导电梯的非接触式滑动导轨或磁性轴承具有一个或多个电磁铁致动器，该电动机驱动器弹簧安装在附接到电梯轿厢的轭的拐角处。电磁铁在磁轭内的定位使得它们被定位成非常接近导轨的表面，以形成具有几毫米间隙的磁性轴承，并且其被控制在位置反馈控制回路以保持间隙常数。非接触式滑动导轨可以用于在轭架和电梯之间具有刚性连接的低层建筑物，或者可以与中高层建筑物中通常使用的主动悬架系统结合使用。主动悬架系统可以例如与悬挂在电梯架内的摆车一起使用，非接触式滑动导轨在顶部和底部附接到该悬架系统。主动悬架由与用于控制各个非接触式滑动导轨的位置控制环完全分开的反馈控制系统控制。

7. 发明授权

US5227948A Electromagnetic support with position-independent characteristics 失效
标题翻译：具有位置独立特性的电磁支持
公开(公告)号：US5227948A
公开(公告)日：1993-07-13
申请号：US664162
申请日：1991-03-04
申请人： Fidelus A. Boon , Hendrikus H. M. Cox
发明人： Fidelus A. Boon , Hendrikus H. M. Cox
IPC分类号： G05D3/00 , F16C39/06 , H01F7/20
CPC分类号： F16C32/0451 , F16C32/0446 , F16C32/0472
摘要： A device for positioning a body (5) by means of at least two electromagnets (13, 15). A position sensor (29) measures the size of an air gap (23) between one of the electromagnets (13, 15) and a guide beam (1). An output signal of the position sensor (29) is applied to an electronic control unit (35) which passes a control current through the electromagnets (13, 15) in dependence on a difference between the measured and a desired size of the air gap (23). An electronic multiplier (47, 59) is connected between the control unit (35) and each of the electromagnets (13, 15), multiplying a control signal from the control unit (35) by the output signal from the position sensor (29). In this way a force exerted by the electromagnets (13, 15) on the guide beam (1) depends exclusively on the value of the control signal and not on the size of the air gap (23), so that a position-independent control is obtained. Such an accurate position-independent control may be used in an optical lithographic device for the irradiation of semiconductor substrates. Alternatively, such an electromagnetic support with a position-independent control may be constructed so as to form a micromanipulator.

8. 发明授权

US5220222A Magnetic bushings for an optical access actuator 失效
标题翻译：用于光学接近致动器的磁性衬套
公开(公告)号：US5220222A
公开(公告)日：1993-06-15
申请号：US811867
申请日：1991-12-23
申请人： Boris A. Shtipelman
发明人： Boris A. Shtipelman
IPC分类号： F16C29/00 , F16C39/06 , G11B7/085 , G11B11/105 , H02K7/09 , H02K41/035
CPC分类号： F16C29/00 , F16C32/0472 , G11B11/10571 , G11B7/08582 , H02K41/0356 , H02K7/09
摘要： A magnetic field bushing has a movable member and stationary rod. The stationary rod has high permeability strips of magnetic material forming a portion of the surface. The stationary rod further includes at least two sets of coils, the magnetic field resulting from application of a current to each coil being coupled to a strip. The movable member is configured to encircle substantially the stationary rod. The movable member has regions of high permeability magnetic material which are positioned on the movable member to complete a magnetic circuit with related magnetic strips. The magnetic circuits are completed through air gaps between the movable member regions and the stationary rod strips. The magnetic field in the air gaps results in a force between the movable member regions and the stationary rod strips. Forces are generated between the movable member and the stationary rod, the forces being selected to prevent contact between the movable member and the stationary rod. By using sensors which provide a signal determined by the distance between the movable and the stationary rod to control the current in the coils, the distance the members can be maintained even in the presence of external forces. This magnetic bushing has particular application to the actuator or read/write head of an optical storage system.
摘要翻译：磁场衬套具有可动构件和固定杆。固定杆具有形成表面一部分的高磁导率磁性材料条。固定杆还包括至少两组线圈，由向每个线圈施加电流而产生的磁场耦合到条带。可移动部件构造成围绕基本上固定的杆。可动构件具有位于可动构件上的高磁导率磁性材料区域，以完成具有相关磁条的磁路。磁路通过可移动部件区域和固定杆条之间的气隙完成。气隙中的磁场导致可动构件区域和固定杆条之间的力。在可动件和固定杆之间产生力，所述力被选择以防止可动件与固定杆之间的接触。通过使用传感器，其提供由可动和固定杆之间的距离确定的信号以控制线圈中的电流，即使在存在外力的情况下，也可以保持构件的距离。该磁性套管特别适用于光学存储系统的致动器或读/写头。

9. 发明授权

US5196745A Magnetic positioning device 失效
标题翻译：磁定位装置
公开(公告)号：US5196745A
公开(公告)日：1993-03-23
申请号：US746342
申请日：1991-08-16
申请人： David L. Trumper
发明人： David L. Trumper
IPC分类号： F16C29/00 , F16C39/06 , G03F7/20 , H02K41/02
CPC分类号： H02K41/031 , F16C29/00 , F16C32/0472 , G03F7/70716
摘要： A device for controlling the relative position between a movable platen and a stator, with linear motions, for example in the 200 to 300 mm range, being provided in one or two of the degrees of freedom and precision control in the 10 nm range being provided in six degrees of freedom. Linear motion is provided by adjacent pairs of magnetic arrays and coil arrays, with the magnetic array of each pair preferably being mounted to the platen and the coil array to the stator. Both arrays have smooth mating surfaces spaced by a predetermined gap. Adjacent magnets of each magnetic array are oppositely poled and each coil array has multiple phases, the pitches of the two adjacent arrays preferably being substantially equal. The weight of the platen may be supported by the magnetic and coil arrays or separate magnets may be provided for this purpose.
摘要翻译：提供一种用于控制可动压板和定子之间的相对位置的装置，其具有线性运动，例如在200至300mm的范围内，以10nm范围内的一个或两个自由度和精密度控制提供在六个自由度。线性运动由相邻的磁阵列和线圈阵列提供，每对的磁阵列优选地被安装到压板和线圈阵列到定子。两个阵列具有间隔开预定间隙的平滑配合表面。每个磁阵列的相邻磁体相反极化，并且每个线圈阵列具有多个相位，两个相邻阵列的间距优选地基本相等。压板的重量可以由磁性和线圈阵列支撑，或者为此可以提供单独的磁体。

10. 发明授权

US4505464A High precision workpiece positioning table 失效
标题翻译：高精度工件定位台
公开(公告)号：US4505464A
公开(公告)日：1985-03-19
申请号：US479611
申请日：1983-03-28
申请人： Anwar Chitayat
发明人： Anwar Chitayat
IPC分类号： B23Q1/01 , B23Q1/26 , B23Q1/28 , B60L13/10 , F16C29/00 , F16C29/04 , F16C29/12 , F16C39/06 , H02K41/02 , B23Q1/02
CPC分类号： F16C32/044 , B23Q1/015 , B23Q1/262 , B23Q1/28 , B60L13/10 , F16C29/008 , F16C29/04 , F16C29/12 , F16C32/0472 , H02K41/02
摘要： A high-precision positioning table employs magnetic attraction to guide a table along at least one axis. Precision roller bearings between flat guide ways provide the support. A linear DC motor provides force for positioning along an axis without backlash. The linear motor also contributes attractive force aiding in the guidance or retention of the table. A vacuum lock secures the table in a selected position.
摘要翻译：高精度定位台使用磁吸引力沿着至少一个轴线引导工作台。平面导轨之间的精密滚子轴承提供支撑。线性直流电机提供用于沿着轴定位而没有齿隙的力。线性电动机还有助于引导或保持工作台的吸引力。真空锁将桌子固定在选定的位置。

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