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1. 发明授权

US07375479B2 Apparatus for processing an object with high position accurancy 失效
标题翻译：用于处理具有高位置精度的物体的装置
公开(公告)号：US07375479B2
公开(公告)日：2008-05-20
申请号：US10539371
申请日：2003-12-15
申请人： Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
发明人： Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
IPC分类号： H02K41/00 , H02P1/00 , H02P3/00 , H02P5/00 , H02P7/00
CPC分类号： F16C32/0472 , F16C32/0444 , G05B2219/41327 , G05B2219/42092 , G05B2219/49276 , H01J37/20 , H01J2237/20278 , H01J2237/3175 , H02K11/22 , H02K41/031
摘要： A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) v the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要翻译：一种设备在精确控制的位置处理诸如半导体晶片的物体（19）。物体（19）由可沿着路径移动的工作平台（12）支撑。安装在工作平台（12）上的悬架致动器部件（14）包含一个软磁芯（24），该软磁芯（24）具有面向沿该路径的支撑结构上的软磁元件（34）表面的磁极和一个绕组（20）用于施加电流以产生穿过磁芯（24）的磁场，并通过软磁元件（34）返回磁极。传感器（17）相对于位置参考元件（16）感测悬架致动器部件（14）的测量位置。控制电路包括外部控制电路（40）和内部控制电路（42）。外部控制电路（40）接收感测结果并且确定力设定点信息以将致动器部件（14）的测量位置调节到所需值。内部控制电路（42）接收力设定点信息并根据力设定点信息控制电流以实现致动器部件（14）和支撑结构（10）之间的力。

2. 发明授权

US5126648A High resolution piggyback linear motor design for placement systems and the like 失效
标题翻译：用于放置系统的高分辨率背负式线性电机设计等
公开(公告)号：US5126648A
公开(公告)日：1992-06-30
申请号：US498335
申请日：1990-03-22
申请人： Fred Jacobs
发明人： Fred Jacobs
IPC分类号： B23Q1/62 , B23Q5/28 , B25J9/12 , G05B19/39 , H02K41/03
CPC分类号： H02K41/03 , B23Q1/621 , B23Q5/28 , B25J9/123 , G05B19/39 , G05B2219/34052 , G05B2219/37108 , G05B2219/37154 , G05B2219/37462 , G05B2219/37555 , G05B2219/41337 , G05B2219/45035 , G05B2219/49271 , G05B2219/49276 , H02K2201/18
摘要： A positioning system for accurately positioning components and the like in which a two-dimensional linear motor moves upon an air bearing across a large platen having a predetermined grid pattern yielding reasonably good resolution. A second two-dimensional positioning assembly of extremely fine resolution is secured to the linear motor arranged to traverse the large platen. Location sensors are provided in closed loop feedback system for detecting the X and Y positions. Coarse resolution is obtained by operating the first two-dimensional linear motor and fine resolution is obtained by operating the second two-dimensional positioning assembly, preferably after disabling the air bearing. The fine positioning system may also include a driver motor for rotating a manipulator arranged upon the second positioning system to correct for any angular misalignment of the component being placed by the manipulator.
摘要翻译：一种用于精确定位组件等的定位系统，其中二维线性电动机在具有预定网格图案的大压板上的空气轴承上移动，产生相当好的分辨率。具有极细分辨率的第二二维定位组件被固定到布置成横过大压板的线性电动机。在闭环反馈系统中提供位置传感器，用于检测X和Y位置。通过操作第一二维线性电动机获得粗分辨率，并且优选地在禁用空气轴承之后，通过操作第二二维定位组件获得精细分辨率。精细定位系统还可以包括用于旋转布置在第二定位系统上的操纵器的驱动器电机，以校正由操纵器放置的部件的任何角度偏移。

3. 发明授权

US06903807B2 Stage apparatus and its driving method, exposure apparatus and device manufacturing method 失效
标题翻译：舞台装置及其驱动方法，曝光装置及装置制造方法
公开(公告)号：US06903807B2
公开(公告)日：2005-06-07
申请号：US10645579
申请日：2003-08-22
申请人： Shinji Uchida
发明人： Shinji Uchida
IPC分类号： H01L21/68 , G03F7/20 , G05D3/00 , G05D3/12 , H01J37/20 , H01L21/027 , G03B27/32 , G03B27/42 , G03B27/58 , H02K41/00
CPC分类号： B23Q15/013 , G03F7/70725 , G03F7/70758 , G05B2219/41297 , G05B2219/45028 , G05B2219/49257 , G05B2219/49276 , H01J37/20 , H01J2237/20221 , H01J2237/20278
摘要： A stage apparatus including a center slider movable in XY directions and a substrate stage mounted on the center slider. The center slider and the substrate stage are connected by plural electromagnet units to generate a moving force in a predetermined direction to the substrate stage by application of electric current to exciting coils. A moving force to be applied to the substrate stage and its direction are determined in correspondence with movement of the slider, and an electric current is selectively applied to the exciting coils of said plural electromagnet units. Upon application of electric current to the respective exciting coils, the directions of the electric current applied to the respective exciting coils are selected so as to reduce a leak magnetic field around a wafer on the substrate stage.
摘要翻译：一种舞台装置，包括可沿XY方向移动的中心滑块和安装在中心滑块上的基片台。中心滑块和基板台通过多个电磁体单元连接，以通过向励磁线圈施加电流而在预定的方向上产生通向基板台的移动力。根据滑动件的移动来确定施加到基板台的移动力及其方向，并且选择性地将电流施加到所述多个电磁体单元的励磁线圈。在向各个励磁线圈施加电流时，选择施加到各个励磁线圈的电流的方向，以便减少衬底台上的晶片周围的泄漏磁场。

4. 发明申请

US20040201834A1 Stage apparatus and its driving method, exposure apparatus and device manufacturing method 失效
标题翻译：舞台装置及其驱动方法，曝光装置及装置制造方法
公开(公告)号：US20040201834A1
公开(公告)日：2004-10-14
申请号：US10645579
申请日：2003-08-22
申请人： Canon Kabushiki Kaisha
发明人： Shinji Uchida
IPC分类号： G03B027/58
CPC分类号： B23Q15/013 , G03F7/70725 , G03F7/70758 , G05B2219/41297 , G05B2219/45028 , G05B2219/49257 , G05B2219/49276 , H01J37/20 , H01J2237/20221 , H01J2237/20278
摘要： A stage apparatus including a center slider movable in XY directions and a substrate stage mounted on the center slider. The center slider and the substrate stage are connected by plural electromagnet units to generate a moving force in a predetermined direction to the substrate stage by application of electric current to exciting coils. A moving force to be applied to the substrate stage and its direction are determined in correspondence with movement of the slider, and an electric current is selectively applied to the exciting coils of said plural electromagnet units. Upon application of electric current to the respective exciting coils, the directions of the electric current applied to the respective exciting coils are selected so as to reduce a leak magnetic field around a wafer on the substrate stage.
摘要翻译：一种舞台装置，包括可沿XY方向移动的中心滑块和安装在中心滑块上的基片台。中心滑块和基板台通过多个电磁体单元连接，以通过向励磁线圈施加电流而在预定的方向上产生通向基板台的移动力。根据滑动件的移动来确定施加到基板台的移动力及其方向，并且选择性地将电流施加到所述多个电磁体单元的励磁线圈。在向各个励磁线圈施加电流时，选择施加到各个励磁线圈的电流的方向，以便减少衬底台上的晶片周围的泄漏磁场。

5. 发明授权

US06618121B2 Stage apparatus capable of suppressing rolling of a vibration isolation table 失效
标题翻译：能够抑制振动隔离台的滚动的台架装置
公开(公告)号：US06618121B2
公开(公告)日：2003-09-09
申请号：US10103215
申请日：2002-03-20
申请人： Naobumi Okada
发明人： Naobumi Okada
IPC分类号： G03B2758
CPC分类号： F16F15/02 , G05B19/416 , G05B2219/35438 , G05B2219/49276
摘要： With a simple operation of inputting the target movement amount for the stage through the input device as input data, an acceleration signal is output from the control device to the acceleration/deceleration device based on the input data, and then n×T seconds after the acceleration signal is output, a deceleration signal having the same waveform as that of the acceleration signal and an opposite direction thereto is output.
摘要翻译：通过输入装置输入用于舞台的目标移动量的简单操作作为输入数据，根据输入数据，从控制装置向加减速装置输出加速度信号，然后在加速信号后nxT秒输出具有与加速度信号相同的波形和与其相反的方向的减速信号。

6. 发明授权

US06094255A Projection exposure apparatus and method that floats a plate 失效
标题翻译：抛光板的投影曝光装置和方法
公开(公告)号：US06094255A
公开(公告)日：2000-07-25
申请号：US016934
申请日：1998-02-02
申请人： Kazuya Ota
发明人： Kazuya Ota
IPC分类号： G03F9/00 , G03F7/20 , G05B19/19 , H01L21/027 , G03B27/62 , G03B27/60 , G01B11/00 , G05B1/06
CPC分类号： G03F7/70816 , G03F7/70358 , G03F7/70716 , G05B19/19 , G05B2219/37423 , G05B2219/45027 , G05B2219/49276
摘要： A projection exposure apparatus controls the position of a mask so that the mask is in a desired position without reducing throughput even if the size of the mask is increased. For example, a controller adjusts the pressure of air blown from air holes so that a reticle is floated at a desired distance above a reticle floating plate. The controller also controls the driving of linear motors having stators and sliders, thereby adjusting the pressing force of control bars in contact with the sides of the floating reticle to press the sides of the reticle and control the two-dimensional position of the reticle. Therefore, it is possible to control a mask so that the mask is placed in a desired position without reducing throughput.
摘要翻译：投影曝光装置控制掩模的位置，使得即使掩模的尺寸增加，掩模也处于期望位置而不降低生产量。例如，控制器调节从气孔吹出的空气的压力，使得光罩在标线板浮动板上方所希望的距离处浮起。控制器还控制具有定子和滑块的线性电动机的驱动，由此调节与浮动掩模版的侧面接触的控制杆的按压力，以压制光罩的侧面并控制光罩的二维位置。因此，可以控制掩模，使得掩模被放置在期望位置而不降低生产量。

7. 发明授权

US5120034A Two-step positioning device using Lorentz forces and a static gas bearing 失效
标题翻译：使用LORENTZ力和静态气体轴承的两步定位装置
公开(公告)号：US5120034A
公开(公告)日：1992-06-09
申请号：US594520
申请日：1990-10-04
申请人： Gerard Van Engelen , Adrianus G. Bouwer
发明人： Gerard Van Engelen , Adrianus G. Bouwer
IPC分类号： H01L21/30 , B23Q1/00 , B23Q1/38 , B23Q1/62 , B23Q5/28 , B23Q16/00 , G03F7/20 , G05B19/39 , H01L21/027
CPC分类号： G03F7/70716 , B23Q1/621 , G05B19/39 , G05B2219/37275 , G05B2219/49271 , G05B2219/49276 , G05B2219/49284
摘要： A positioning device includes a table (101, 213) guided by a carriage (15, 199), the carriage (15, 199) being displaceable in two coordinate directions (X, Y) with respect to the base (3) and the table (101, 213) being displaceable with respect to the carriage (15, 199) in the same coordinate directions (X, Y) solely by Lorentz forces, while in a third coordinate direction (Z) the position of the table (101, 213) is determined by a static gas bearing. The two-step positioning device is particularly suitable for use in opto-lithographic devices.

8. 发明授权

US07375346B2 Positioning device and method of initializing a positioning device 失效
标题翻译：定位装置及初始化定位装置的方法
公开(公告)号：US07375346B2
公开(公告)日：2008-05-20
申请号：US11557137
申请日：2006-11-07
申请人： Yugo Shibata
发明人： Yugo Shibata
IPC分类号： G05G11/00
CPC分类号： G03F7/70716 , G03F7/70725 , G05B19/19 , G05B2219/49276 , Y10T74/20354
摘要： In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
摘要翻译：为了实现高精度和高再现性的初始化序列，一种定位装置包括可在X和Y方向上移动的XY滑块，用于测量XY滑块的位置的物体位置测量装置，用于测量XY滑块的位置的X光束方向Y并且可以沿X方向移动，Y方向引导XY滑块沿Y方向移动的Y光束，具有设置在XY滑块上的至少两对电磁体的电磁体单元以包围侧 X光束和Y光束的面，以及设置在X光束上的用于调节X光束的旋转的旋转限制部。

9. 发明申请

US20070063149A1 POSITIONING DEVICE AND METHOD OF INITIALIZING A POSITIONING DEVICE 失效
标题翻译：定位装置和初始化定位装置的方法
公开(公告)号：US20070063149A1
公开(公告)日：2007-03-22
申请号：US11557137
申请日：2006-11-07
申请人： Yugo Shibata
发明人： Yugo Shibata
IPC分类号： G21K5/10
CPC分类号： G03F7/70716 , G03F7/70725 , G05B19/19 , G05B2219/49276 , Y10T74/20354
摘要： In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
摘要翻译：为了实现高精度和高再现性的初始化序列，一种定位装置包括可在X和Y方向上移动的XY滑块，用于测量XY滑块的位置的物体位置测量装置，用于测量XY滑块的位置的X光束方向Y并且可以沿X方向移动，Y方向引导XY滑块沿Y方向移动的Y光束，具有设置在XY滑块上的至少两对电磁体的电磁体单元以包围侧 X光束和Y光束的面，以及设置在X光束上的用于调节X光束的旋转的旋转限制部。

10. 发明授权

US4890241A Robotic system 失效
标题翻译：机器人系统
公开(公告)号：US4890241A
公开(公告)日：1989-12-26
申请号：US112534
申请日：1987-10-26
申请人： Brian D. Hoffman , Steven H. Pollack
发明人： Brian D. Hoffman , Steven H. Pollack
IPC分类号： B25J9/16 , G05B19/418 , G05B19/425
CPC分类号： B25J9/1676 , G05B19/4182 , G05B19/425 , G05B2219/31166 , G05B2219/32239 , G05B2219/33053 , G05B2219/33057 , G05B2219/33297 , G05B2219/34012 , G05B2219/34345 , G05B2219/34348 , G05B2219/34403 , G05B2219/35283 , G05B2219/36147 , G05B2219/45055 , G05B2219/49143 , G05B2219/49276 , G05B2219/50198 , G05B2219/50249 , Y02P90/04 , Y02P90/083
摘要： A robotic system in which robot devices are assembled from an inventory of elements responsive to a work request. The robotic devices include robots incorporating two-dimensional, linear motors movable along a stationary platen and coupled to various power sources through flexible, extendible, umbilical cords. The robot devices are selectively connectible with manipulators for holding parts to be assembled and/or for performing operations on such parts and/or members to which such parts are mounted. The devices are automatically assembled by selecting elements capable of performing the tasks necessary to complete the work request as well as selecting those elements which result in optimization of the assembly time and avoid collisions and cord tangling in moving along the paths traversed by the robot devices during their assembly. A multiplicity of assembled robotic devices may perform the tasks associated with the work request under control of an electronic system permitting simultaneous operations while preventing collisions and cord tangling. Robotic device assembly, disassembly and job tasks based on work requests can be performed simultaneously in any combination.

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