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    • 4. 发明申请
    • GAS BEARING ASSEMBLY FOR AN EUV LIGHT SOURCE
    • 气体轴承组件用于EUV光源
    • US20140376842A1
    • 2014-12-25
    • US14310632
    • 2014-06-20
    • KLA-Tencor Corporation
    • Francis C. ChileseRudy F. Garcia
    • F16C32/06
    • F16C32/0614F16C32/0685F16C33/748F16C2380/18
    • A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis, a first annulus, in the stator or the spindle and arranged to vent the bearing gas from a first portion of the first space, a second annulus, in the stator or the spindle, and arranged to transport a barrier gas, at a second pressure, into a second portion of the first space, and a third annulus, in the stator or the spindle, the third annulus disposed between the first and second annuli and arranged to transport the bearing gas and the barrier gas out of a third portion of the space to a create, in the third portion, a third pressure less than the first and second pressures.
    • 一种气体轴承组件,包括:定子,可围绕轴线旋转的主轴,所述心轴和所述定子之间的第一空间,并且布置成在第一压力下接收轴承气体,以支撑所述心轴围绕所述轴的旋转;第一环 在定子或主轴中,并布置成从第一空间的第一部分,在定子或主轴中的第二环形空气排出轴承气体,并且布置成在第二压力下将阻挡气体输送到第二压力 所述第一空间的一部分和所述定子或所述心轴中的第三环形空间,所述第三环形空间设置在所述第一和第二环之间,并且被布置成将所述轴承气体和所述阻挡气体从所述空间的第三部分输送到所述空间 在第三部分中,具有小于第一和第二压力的第三压力。