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1. 发明公开

US20230183068A1 NOVEL METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS CONTAMINANT STREAM EXITING AN ETCH CHAMBER 审中-公开
公开(公告)号：US20230183068A1
公开(公告)日：2023-06-15
申请号：US18165513
申请日：2023-02-07
申请人： Jennifer Bugayong Luna , Atul M. Athalye , Ce Ma , Ashwini K. Sinha
发明人： Jennifer Bugayong Luna , Atul M. Athalye , Ce Ma , Ashwini K. Sinha
IPC分类号： C01B23/00 , B01D53/00 , B01D53/04 , B01D53/14
CPC分类号： C01B23/0094 , B01D53/005 , B01D53/0462 , B01D53/1431 , B01D53/1456 , C01B23/0021 , C01B23/0057 , C01B23/0078 , C01B23/0089 , B01D2253/1122 , B01D2257/11 , B01D2257/2047 , B01D2257/2066 , B01D2257/502 , B01D2257/504 , B01D2257/80 , C01B2210/0004 , C01B2210/0021 , C01B2210/0025 , C01B2210/0035 , C01B2210/0037 , C01B2210/005 , C01B2210/0056 , C01B2210/0068 , C01B2210/0098
摘要： Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

2. 发明授权

US5743944A Fluid clathrate system for continuous removal of heavy noble gases from mixtures of lighter gases 失效
标题翻译：流体包合物系统，用于从较轻气体的混合物中连续除去重稀有气体
公开(公告)号：US5743944A
公开(公告)日：1998-04-28
申请号：US540715
申请日：1995-10-11
申请人： Kenneth C. Gross , Francis Markun , Mary T. Zawadzki
发明人： Kenneth C. Gross , Francis Markun , Mary T. Zawadzki
IPC分类号： B01D53/14 , B01D53/18 , C01B23/00 , B01D47/02
CPC分类号： B01D53/18 , B01D53/14 , B01D53/1493 , C01B23/00 , C01B23/0089 , B01D2257/11 , C01B2210/0031 , C01B2210/0035 , C01B2210/0037 , C01B2210/0039 , C01B2210/004
摘要： An apparatus and method for separation of heavy noble gas in a gas volume. An apparatus and method have been devised which includes a reservoir containing an oil exhibiting a clathrate effect for heavy noble gases with a reservoir input port and the reservoir is designed to enable the input gas volume to bubble through the oil with the heavy noble gas being absorbed by the oil exhibiting a clathrate effect. The gas having reduced amounts of heavy noble gas is output from the oil reservoir, and the oil having absorbed heavy noble gas can be treated by mechanical agitation and/or heating to desorb the heavy noble gas for analysis and/or containment and allow recycling of the oil to the reservoir.
摘要翻译：用于分离气体体积中的重稀有气体的装置和方法。已经设计了一种装置和方法，该装置和方法包括储存器，其包含对具有储存器输入端口的重稀有气体具有包合效应的油，并且储存器被设计成使得输入气体体积能够通过吸收重质惰性气体的油气泡由油表现出包合作用。具有减少量的重稀有气体的气体从储油器输出，并且可以通过机械搅拌和/或加热来处理吸收重稀土气体的油，以解吸重稀土气体用于分析和/或容纳，并允许再循环油到油库。

3. 发明申请

US20150044117A1 CAVITAND COMPOSITIONS AND METHODS OF USE THEREOF 审中-公开
标题翻译： CAVITAN组合物及其使用方法
公开(公告)号：US20150044117A1
公开(公告)日：2015-02-12
申请号：US14387317
申请日：2013-03-22
申请人： GEORGETOWN UNIVERSITY
发明人： Kevin Travis Holman , Christopher Kane
IPC分类号： C07D493/22 , C07F7/18 , B01D53/02 , C01B23/00 , B01J20/22 , C07C7/20 , C10L3/10
CPC分类号： C07D493/22 , B01D53/02 , B01D2253/20 , B01D2253/204 , B01D2256/18 , B01D2257/11 , B01D2257/2062 , B01D2257/2064 , B01D2257/2066 , B01D2257/504 , B01D2257/7022 , B01D2257/7025 , B01D2257/704 , B01J20/22 , B01J20/226 , B01J20/28095 , C01B23/0089 , C07C7/20 , C07C17/389 , C07C41/36 , C07F7/1804 , C10L3/10 , Y02P20/154 , C07C43/043 , C07C19/043 , C07C19/03
摘要： Cavitand compositions that comprise void spaces are disclosed. The void spaces may be empty, which means that voids are free of guest molecules or atoms, or the void spaces may comprise guest molecules or atoms that are normally in their gas phase at standard temperature and pressure. These cavitands may be useful for industrial applications, such as the separation or storage of gasses. Novel cavitand compounds are also disclosed.
摘要翻译：公开了包含空隙的Cavitand组合物。空隙空间可以是空的，这意味着空隙不含客体分子或原子，或者空隙空间可以包括在标准温度和压力下通常处于气相的客体分子或原子。这些空穴可用于工业应用，例如气体的分离或储存。还公开了新的空穴化合物。

4. 发明授权

US08858679B2 Separation of industrial gases 有权
标题翻译：分离工业气体
公开(公告)号：US08858679B2
公开(公告)日：2014-10-14
申请号：US13149240
申请日：2011-05-31
申请人： Frederik Arnold Buhrman , Jingyu Cui , Mahendra Ladharam Joshi , Stanley Nemec Milam , Scott Lee Wellington
发明人： Frederik Arnold Buhrman , Jingyu Cui , Mahendra Ladharam Joshi , Stanley Nemec Milam , Scott Lee Wellington
IPC分类号： B01D53/14 , C01B3/52 , C01B23/00 , B01D53/79 , B01D45/16 , B01D53/18
CPC分类号： B01D53/18 , B01D45/16 , B01D53/79 , B01D2257/108 , B01D2257/11 , C01B3/52 , C01B23/0089 , C01B2203/0233 , C01B2203/025 , C01B2203/0261 , C01B2203/0283 , C01B2203/0415 , C01B2203/0475 , C01B2203/0485 , C01B2203/1241 , C01B2210/0031 , C01B2210/0046 , C01B2210/0053
摘要： The present invention is directed to a method and a system for separating hydrogen or helium from gas having a mixture of gaseous components. A compressible feed stream that contains at least one target compressible component and hydrogen or helium is mixed in a substantially co-current flow with an incompressible fluid stream comprising an incompressible fluid in which the target component(s) is/are capable of being preferentially absorbed. Rotational velocity is imparted to the mixed streams, separating an incompressible fluid in which at least a portion of the target component is absorbed from a compressible product stream containing the hydrogen or helium. The compressible feed stream may be provided at a stream velocity having a Mach number of at least 0.1.
摘要翻译：本发明涉及一种用于从具有气体组分的混合物的气体中分离氢或氦的方法和系统。包含至少一个目标可压缩组分和氢或氦的可压缩进料流以基本上流动的流动与包含不可压缩流体的不可压缩流体流混合，其中目标组分能够被优先吸收。赋予混合流的旋转速度，将含有至少一部分目标组分的不可压缩流体与包含氢或氦的可压缩产物流分离。可压缩进料流可以以马赫数至少为0.1的流速提供。

5. 发明申请

US20110296986A1 SEPARATION OF INDUSTRIAL GASES 有权
标题翻译：工业气体分离
公开(公告)号：US20110296986A1
公开(公告)日：2011-12-08
申请号：US13149240
申请日：2011-05-31
申请人： Frederik Arnold BUHRMAN , Jingyu CUI , Mahendra Ladharam JOSHI , Stanley Nemec MILAM , Scott Lee WELLINGTON
发明人： Frederik Arnold BUHRMAN , Jingyu CUI , Mahendra Ladharam JOSHI , Stanley Nemec MILAM , Scott Lee WELLINGTON
IPC分类号： B01D53/24 , B01D53/14
CPC分类号： B01D53/18 , B01D45/16 , B01D53/79 , B01D2257/108 , B01D2257/11 , C01B3/52 , C01B23/0089 , C01B2203/0233 , C01B2203/025 , C01B2203/0261 , C01B2203/0283 , C01B2203/0415 , C01B2203/0475 , C01B2203/0485 , C01B2203/1241 , C01B2210/0031 , C01B2210/0046 , C01B2210/0053
摘要： The present invention is directed to a method and a system for separating hydrogen or helium from gas having a mixture of gaseous components. A compressible feed stream that contains at least one target compressible component and hydrogen or helium is mixed in a substantially co-current flow with an incompressible fluid stream comprising an incompressible fluid in which the target component(s) is/are capable of being preferentially absorbed. Rotational velocity is imparted to the mixed streams, separating an incompressible fluid in which at least a portion of the target component is absorbed from a compressible product stream containing the hydrogen or helium. The compressible feed stream may be provided at a stream velocity having a Mach number of at least 0.1.
摘要翻译：本发明涉及一种用于从具有气体组分的混合物的气体中分离氢或氦的方法和系统。包含至少一个目标可压缩组分和氢或氦的可压缩进料流以基本上流动的流动与包含不可压缩流体的不可压缩流体流混合，其中目标组分能够被优先吸收。赋予混合流的旋转速度，将含有至少一部分目标组分的不可压缩流体与包含氢或氦的可压缩产物流分离。可压缩进料流可以以马赫数至少为0.1的流速提供。

6. 发明申请

US20070156046A1 Method of enriching hyperpolarized atom nuclei and an apparatus for implementing the method 审中-公开
标题翻译：丰富超极化原子核的方法及其实现方法
公开(公告)号：US20070156046A1
公开(公告)日：2007-07-05
申请号：US10586569
申请日：2004-12-08
申请人： Friedrich Hasing , Stephan Appelt , Kerstin Munnemann
发明人： Friedrich Hasing , Stephan Appelt , Kerstin Munnemann
IPC分类号： A61B5/05
CPC分类号： G01R33/28 , A61K49/1806 , A61K49/1815 , C01B23/0089 , C01B2210/0037
摘要： The invention relates to a method for enriching hyperpolarized nuclei. According to the inventive method, hyperpolarized atomic nuclei flowing in a gaseous mixture are dissolved in a solvent which is cooled at less than 293 K. A device for carrying out the method comprises at least one chamber with means for the degassing of hyperpolarized atomic nuclei which are dissolved in a solvent which is located in the chamber. The device comprises means for forming a magnetic field of 0.04 T maximum. Die Erfindung betrifft ein Verfahren zur Anreicherung von hyperpolarisienen Atomkernen. Das Ver-fahren sieht vor, in einem Gasgemisch stromende hyperpolarisierte Atomkeme in einem unterhalb 293 K gekühlten Lösungsmittel zu lösen. Eine Vorrichtung zur Durchführung des Verfahrens umfasst mindestens eine Kammer mit Mitteln zur Entgasung von hyperpolarisiente Atomkemen, die in einem in der Kammer befindlichen Lösungsmittel gelöst sind. Die Vorrichtung umfasst Mittel zur Ausbildung eines Magnetfeldes von maximal 0,04 T.
摘要翻译：本发明涉及一种富集超极化核的方法。根据本发明的方法，将在气体混合物中流动的超极化原子核溶解在冷却至低于293K的溶剂中。用于实施该方法的装置包括至少一个具有用于脱极超极化原子核的装置的室，溶解在位于室中的溶剂中。该装置包括用于形成0.04T最大磁场的装置。 Die Erfindung betrifft ein Verfahren zur Anreicherung von hyperpolarisienen Atomkernen。 Das Ver-fahren sieht vor，in einem Gasgemisch stromende hyperpolarisierte Atomkeme in einem unterhalb 293 KgekühltenLösungsmittelzulösen。 Eine Vorrichtung zurDurchführungdes Verfahrens umfasst mindestens eine Kammer mit Mitteln zur Entgasung von hyperpolarisiente Atomkemen，die in einem in der Kammer befindlichenLösungsmittelgelöstsind。 Die Vorrichtung umfasst Mittel zur Ausbildung eines Magnetfeldes von maximal 0,04 T.

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