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    • 8. 发明申请
    • SPUTTER TOOL
    • 飞溅工具
    • US20160177439A1
    • 2016-06-23
    • US14578332
    • 2014-12-19
    • Yu-Chen ShenTaiqing QiuRobe WoehlKieran Mark TracyMukul Agrawal
    • Yu-Chen ShenTaiqing QiuRobe WoehlKieran Mark TracyMukul Agrawal
    • C23C14/50C23C14/34
    • C23C14/50C23C14/165C23C14/34C23C14/3464H01J37/32715
    • Sputter tools are described. In one embodiment, an apparatus to support a wafer includes a pallet having a depression to receive the wafer. The pallet includes an opening below the depression, and an edge in the depression is to support the wafer over the opening. A cover at least partially covers the opening. In one example, the cover may be a plate with one or more holes, and a pipe may be located below each of the holes in the cover. In one embodiment, a wafer-processing system includes a processing chamber and a pallet with a depression to receive a wafer. The pallet has an opening below the depression, and an edge in the depression supports the wafer over the opening. In one such embodiment, a cover at least partially covers the opening. According to one embodiment, an energy-absorbing material is disposed below the opening in the pallet.
    • 描述了溅射工具。 在一个实施例中,用于支撑晶片的装置包括具有用于接收晶片的凹陷的托盘。 托盘包括在凹陷下方的开口,并且凹陷中的边缘将晶片支撑在开口上。 盖子至少部分地覆盖开口。 在一个示例中,盖可以是具有一个或多个孔的板,并且管可以位于盖中的每个孔下方。 在一个实施例中,晶片处理系统包括处理室和具有凹陷的托盘以接收晶片。 托盘在凹陷下方具有开口,并且凹陷中的边缘将晶片支撑在开口上方。 在一个这样的实施例中,盖至少部分地覆盖开口。 根据一个实施例,能量吸收材料设置在托盘中的开口下方。
    • 10. 发明申请
    • SIGNAL TRANSITION DETECTION CIRCUIT AND METHOD OF THE SAME
    • 信号转换检测电路及其方法
    • US20130223493A1
    • 2013-08-29
    • US13454352
    • 2012-04-24
    • Yu-Chen ShenKuei-Chang Yang
    • Yu-Chen ShenKuei-Chang Yang
    • H04B17/00
    • H04L1/24
    • A signal transition detection circuit is provided. The signal transition detection circuit comprises a counter module, a DAC, a comparator and a digital sampling module. The counter module generates a digital step signal. The DAC converts the digital step signal into an analog input signal and transmits it to an under-test circuit such that the under-test circuit generates an output signal transiting from a first stable level to a second stable level, wherein a transition section is located between the first and the second stable level. The comparator receives and compares the output signal with a default value to generate a normalized output signal. The digital sampling module samples the normalized output signal to retrieve impulses such that when the number of the impulses is accumulated to be larger than a reference value, a corresponding step of the digital step signal is determined to be a transition point.
    • 提供了一种信号转换检测电路。 信号转换检测电路包括计数器模块,DAC,比较器和数字采样模块。 计数器模块产生数字步进信号。 DAC将数字步进信号转换为模拟输入信号并将其发送到未被测试的电路,使得欠测试电路产生从第一稳定电平转移到第二稳定电平的输出信号,其中过渡部分位于 在第一和第二稳定水平之间。 比较器接收并比较输出信号与默认值,以产生归一化的输出信号。 数字采样模块对归一化的输出信号进行采样以取回脉冲,使得当脉冲数被累积到大于参考值时,数字步进信号的相应步骤被确定为转变点。