专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08671987B2 Two-stage, slow-start valve apparatus 有权
标题翻译：两级缓慢启动阀门装置
公开(公告)号：US08671987B2
公开(公告)日：2014-03-18
申请号：US12968551
申请日：2010-12-15
申请人： Youfan Gu , David Neumeister , Kevin Grout
发明人： Youfan Gu , David Neumeister , Kevin Grout
IPC分类号： F16K1/52
CPC分类号： F16K1/52 , F16K31/1225 , F16K31/1226 , F16K39/024 , F16K51/02 , H01L21/67017 , Y10T137/0318 , Y10T137/86944
摘要： A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.
摘要翻译：两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀，打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。主阀闭合组件和次阀闭合组件都可气动致动以打开。

2. 发明申请

US20120153193A1 TWO-STAGE, SLOW-START VALVE APPARATUS AND METHOD 有权
标题翻译：两级，慢启动阀装置和方法
公开(公告)号：US20120153193A1
公开(公告)日：2012-06-21
申请号：US12968551
申请日：2010-12-15
申请人： Youfan Gu , David Neumeister , Kevin Grout
发明人： Youfan Gu , David Neumeister , Kevin Grout
IPC分类号： F16K31/12
CPC分类号： F16K1/52 , F16K31/1225 , F16K31/1226 , F16K39/024 , F16K51/02 , H01L21/67017 , Y10T137/0318 , Y10T137/86944
摘要： A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.
摘要翻译：两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀，打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。主阀闭合组件和次阀闭合组件都可气动致动以打开。

3. 发明授权

US06895178B2 Vapor delivery system 有权
标题翻译：蒸气输送系统
公开(公告)号：US06895178B2
公开(公告)日：2005-05-17
申请号：US10196572
申请日：2002-07-16
申请人： Youfan Gu , Paul Dozoretz , Benjamin Goss , David Neumeister , James Mueller , Donald W. Higgins
发明人： Youfan Gu , Paul Dozoretz , Benjamin Goss , David Neumeister , James Mueller , Donald W. Higgins
IPC分类号： F22B35/00 , B01D1/00 , F22B1/28 , F24F6/00
CPC分类号： B01D1/0082
摘要： The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
摘要翻译：本发明提供了一种根据需要高效生产水蒸汽的蒸气输送系统和方法。更具体地说，本发明通过在蒸发器室内的压力降低时，在蒸发器室内保持足够的水温保持在足够的温度下，而不会形成冰。

4. 发明授权

US08679287B2 Method and apparatus for preventing ALD reactants from damaging vacuum pumps 有权
标题翻译：用于防止ALD反应物损坏真空泵的方法和装置
公开(公告)号：US08679287B2
公开(公告)日：2014-03-25
申请号：US11136610
申请日：2005-05-23
申请人： Youfan Gu , David Neumeister
发明人： Youfan Gu , David Neumeister
IPC分类号： H01L21/443
CPC分类号： C23C16/45544 , C23C16/4412
摘要： A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
摘要翻译：具有网状反应器元件和加热器组件的二次反应室定位在CVD反应室和真空泵之间的前级管线中，以混合并反应所有先前未反应的前体反应物，以将它们从流出物中除去，然后它们可以达到并损坏真空泵。

5. 发明申请

US20060264045A1 Method and apparatus for preventing ALD reactants from damaging vacuum pumps 有权
标题翻译：用于防止ALD反应物损坏真空泵的方法和装置
公开(公告)号：US20060264045A1
公开(公告)日：2006-11-23
申请号：US11136610
申请日：2005-05-23
申请人： Youfan Gu , David Neumeister
发明人： Youfan Gu , David Neumeister
IPC分类号： H01L21/44 , C23C16/00
CPC分类号： C23C16/45544 , C23C16/4412
摘要： A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
摘要翻译：具有网状反应器元件和加热器组件的二次反应室定位在CVD反应室和真空泵之间的前级管线中，以混合并反应所有先前未反应的前体反应物，以将它们从流出物中除去，然后它们可以达到并损坏真空泵。

6. 发明授权

US07477996B2 Integrated absolute and differential pressure transducer 有权
标题翻译：集成的绝对和差压传感器
公开(公告)号：US07477996B2
公开(公告)日：2009-01-13
申请号：US11759202
申请日：2007-06-06
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01F23/14
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
摘要翻译：一种方法和装置集成差压测量和绝对压力测量，以在单个集成尺度上的宽范围的压力下提供连续的绝对压力分布。获得绝对压力测量和差压测量，并确定绝对压力测量值和差压测量值之间的相关系数。相关因子用于在绝对压力测量下，将公差绝对压力刻度上的压差测量值归一化到虚拟绝对压力值。在宽压力范围内的绝对压力分布包括在绝对压力测量精确的范围的一部分范围内的绝对压力测量，并且其包括压差测量值准确的范围的另一部分中的虚拟绝对压力值。

7. 发明申请

US20070288179A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 有权
标题翻译：集成绝对和差分压力传感器
公开(公告)号：US20070288179A1
公开(公告)日：2007-12-13
申请号：US11759202
申请日：2007-06-06
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

8. 发明授权

US07932480B2 Multiple heater control system with expandable modular functionality 有权
标题翻译：多个加热器控制系统，具有可扩展的模块化功能
公开(公告)号：US07932480B2
公开(公告)日：2011-04-26
申请号：US11278800
申请日：2006-04-05
申请人： Youfan Gu , Jeffrey D. Kiernan , Charles C. Lawhead , William C. Bohlinger , Eric E. Ellis , Curtis A. Foster , James P. Hentges , Mark Louis-Gilmer Hoven , James H. Kreisel , Shawn Leininger , Robert O. Moran , Kurt W. Peterson , Jason R. Powell , Dale T. Wolfe
发明人： Youfan Gu , Jeffrey D. Kiernan , Charles C. Lawhead , William C. Bohlinger , Eric E. Ellis , Curtis A. Foster , James P. Hentges , Mark Louis-Gilmer Hoven , James H. Kreisel , Shawn Leininger , Robert O. Moran , Kurt W. Peterson , Jason R. Powell , Dale T. Wolfe
IPC分类号： H05B1/02
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.
摘要翻译：多重加热器控制系统包括电缆，连接器和接线盒，用于加热器控制器和加热器的用户友好的菊花链连接，各种配置或单独控制的加热器系列和/或主从加热器系列的组合。加热器控制器包括对加热器的AC电力的过程控制和基本上独立于过程控制的上限安全关闭。加热器控制器还具有基础模块中可变级别的控制，调整，显示和通信功能，可扩展到各种级别，扩展模块可连接到基座模块并可拆卸。连接器，电缆和接头配置，适配器和闩锁功能增强了用户友好性。

9. 发明授权

US07076920B2 Method of using a combination differential and absolute pressure transducer for controlling a load lock 有权
标题翻译：使用组合差压绝对压力传感器控制负载锁定的方法
公开(公告)号：US07076920B2
公开(公告)日：2006-07-18
申请号：US09815376
申请日：2001-03-21
申请人： Garry Holcomb , Youfan Gu , James Stafford , James M. Mueller , Stacy Wade
发明人： Garry Holcomb , Youfan Gu , James Stafford , James M. Mueller , Stacy Wade
IPC分类号： B65G53/46
CPC分类号： H01L21/67748 , H01L21/67201 , H01L21/67253 , Y10S414/139
摘要： A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10−4 torr and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in the load lock chamber are combined together in a module with a manifold and common circuit components to provide a pressure transducer that is capable of producing not only analog output for absolute pressure measurements, but also control signals at settable absolute and differential pressure values for opening interior and exterior doors of a load lock used to shuttle wafers and other devices into and out of a vacuum processing chamber. The transducer can also produce signals to control transition from slow to fast vacuum pumping of the load lock chamber at a settable threshold pressure.
摘要翻译：用于感测100至10-4托的范围内的负载锁定中的绝对压力的绝食压力传感器和用于感测环境大气压力和负载锁定压力之间的压力差的差压传感器腔室组合在具有歧管和公共电路部件的模块中，以提供压力传感器，其不仅可以产生用于绝对压力测量的模拟输出，而且还可以产生用于打开内部和外部门的可设定绝对压差值和差压值的控制信号用于将晶片和其它设备送入和离开真空处理室的负载锁。换能器还可以产生信号以控制在可设定的阈值压力下从负载锁定室的慢速到快速抽真空的转变。

10. 发明授权

US06790258B2 Method for removing condensable aluminum chloride vapor from aluminum etch effluent 有权
标题翻译：从铝蚀刻流出物中除去可冷凝的氯化铝蒸气的方法
公开(公告)号：US06790258B2
公开(公告)日：2004-09-14
申请号：US09847674
申请日：2001-05-02
申请人： Youfan Gu
发明人： Youfan Gu
IPC分类号： B01D5300
CPC分类号： H01J37/32844 , B01D5/0036 , B01D8/00 , C23C16/4412 , Y02C20/30 , Y10S438/905
摘要： A method and apparatus for trapping AlCl3 from an aluminum etch effluent includes a housing containing disposable trapping medium with a first trapping stage and a second trapping media positioned radially outward and axially downward, respectively, from the strap inlet at respective distances to take advantage of differences in heat exchange efficiencies between the trapping media and solid AlCl3 build-up on the trapping media and of resulting changes in partial vapor pressure of AlCl3 adjacent condensation surfaces as solid AlCl3 build-up occurs to initially induce condensation and build-up near the inlet, but then preferentially flow vapor to more distant trapping media as build-up occurs before the build-up clogs the inlet. The first stage trapping media has less surface density than the second stage trapping media, so that the first stage trapping media collect more than half, preferably 90-95% of the AlCl3 vapor with the media at ambient temperature, and so that the second stage trapping media remove the remaining AlCl3 vapor with the media at ambient temperature.
摘要翻译：用于从铝蚀刻流出物捕获AlCl 3的方法和装置包括：包含一次性捕集介质的壳体，其具有第一捕集级和第二捕集介质，所述第一捕集级和第二捕集介质分别以相应距离从带入口径向向外和向下向下定位，以利用差异在捕集介质和捕集介质上的固体AlCl 3堆积之间的热交换效率以及由于固体AlCl 3积聚而导致的AlCl 3相邻冷凝表面的部分蒸气压的变化，以最初诱导在入口附近的冷凝和积聚，但是然后优先将蒸汽流向更远的捕集介质，因为堆积在堆积物堵塞入口之前发生。第一阶段捕集介质具有比第二阶段捕集介质更少的表面密度，使得第一阶段捕集介质在环境温度下与介质一起收集一半以上，优选90-95％的AlCl 3蒸气，并且使得第二阶段捕集介质在环境温度下用介质除去剩余的AlCl 3蒸气。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式