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1. 发明授权

US08671987B2 Two-stage, slow-start valve apparatus 有权
标题翻译：两级缓慢启动阀门装置
公开(公告)号：US08671987B2
公开(公告)日：2014-03-18
申请号：US12968551
申请日：2010-12-15
申请人： Youfan Gu , David Neumeister , Kevin Grout
发明人： Youfan Gu , David Neumeister , Kevin Grout
IPC分类号： F16K1/52
CPC分类号： F16K1/52 , F16K31/1225 , F16K31/1226 , F16K39/024 , F16K51/02 , H01L21/67017 , Y10T137/0318 , Y10T137/86944
摘要： A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.
摘要翻译：两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀，打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。主阀闭合组件和次阀闭合组件都可气动致动以打开。

2. 发明申请

US20120153193A1 TWO-STAGE, SLOW-START VALVE APPARATUS AND METHOD 有权
标题翻译：两级，慢启动阀装置和方法
公开(公告)号：US20120153193A1
公开(公告)日：2012-06-21
申请号：US12968551
申请日：2010-12-15
申请人： Youfan Gu , David Neumeister , Kevin Grout
发明人： Youfan Gu , David Neumeister , Kevin Grout
IPC分类号： F16K31/12
CPC分类号： F16K1/52 , F16K31/1225 , F16K31/1226 , F16K39/024 , F16K51/02 , H01L21/67017 , Y10T137/0318 , Y10T137/86944
摘要： A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.
摘要翻译：两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀，打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。主阀闭合组件和次阀闭合组件都可气动致动以打开。

3. 发明授权

US08679287B2 Method and apparatus for preventing ALD reactants from damaging vacuum pumps 有权
标题翻译：用于防止ALD反应物损坏真空泵的方法和装置
公开(公告)号：US08679287B2
公开(公告)日：2014-03-25
申请号：US11136610
申请日：2005-05-23
申请人： Youfan Gu , David Neumeister
发明人： Youfan Gu , David Neumeister
IPC分类号： H01L21/443
CPC分类号： C23C16/45544 , C23C16/4412
摘要： A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
摘要翻译：具有网状反应器元件和加热器组件的二次反应室定位在CVD反应室和真空泵之间的前级管线中，以混合并反应所有先前未反应的前体反应物，以将它们从流出物中除去，然后它们可以达到并损坏真空泵。

4. 发明授权

US06895178B2 Vapor delivery system 有权
标题翻译：蒸气输送系统
公开(公告)号：US06895178B2
公开(公告)日：2005-05-17
申请号：US10196572
申请日：2002-07-16
申请人： Youfan Gu , Paul Dozoretz , Benjamin Goss , David Neumeister , James Mueller , Donald W. Higgins
发明人： Youfan Gu , Paul Dozoretz , Benjamin Goss , David Neumeister , James Mueller , Donald W. Higgins
IPC分类号： F22B35/00 , B01D1/00 , F22B1/28 , F24F6/00
CPC分类号： B01D1/0082
摘要： The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
摘要翻译：本发明提供了一种根据需要高效生产水蒸汽的蒸气输送系统和方法。更具体地说，本发明通过在蒸发器室内的压力降低时，在蒸发器室内保持足够的水温保持在足够的温度下，而不会形成冰。

5. 发明申请

US20060264045A1 Method and apparatus for preventing ALD reactants from damaging vacuum pumps 有权
标题翻译：用于防止ALD反应物损坏真空泵的方法和装置
公开(公告)号：US20060264045A1
公开(公告)日：2006-11-23
申请号：US11136610
申请日：2005-05-23
申请人： Youfan Gu , David Neumeister
发明人： Youfan Gu , David Neumeister
IPC分类号： H01L21/44 , C23C16/00
CPC分类号： C23C16/45544 , C23C16/4412
摘要： A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
摘要翻译：具有网状反应器元件和加热器组件的二次反应室定位在CVD反应室和真空泵之间的前级管线中，以混合并反应所有先前未反应的前体反应物，以将它们从流出物中除去，然后它们可以达到并损坏真空泵。

6. 发明授权

US08196893B2 Isolation valve with corrosion protected and heat transfer enhanced valve actuator and closure apparatus and method 有权
标题翻译：隔离阀带防腐保护和传热增强型阀门执行机构及封闭装置及方法
公开(公告)号：US08196893B2
公开(公告)日：2012-06-12
申请号：US12194463
申请日：2008-08-19
申请人： Kevin Grout , Jeffrey D. Kiernan , David Neumeister , Matthew C. Grout
发明人： Kevin Grout , Jeffrey D. Kiernan , David Neumeister , Matthew C. Grout
IPC分类号： F16K31/00
CPC分类号： F16K1/36 , F16K15/148 , F16K41/10 , F16K51/02 , Y10T137/6416 , Y10T137/7036
摘要： An isolation valve includes a shield that surrounds and protects the valve closure actuator components from exposure to corrosive fluids that flow through the valve when the valve is open.
摘要翻译：隔离阀包括围绕并保护阀闭合致动器部件免受暴露于当阀打开时流过阀的腐蚀性流体的屏蔽件。

7. 发明申请

US20090255591A1 ISOLATION VALVE WITH CORROSION PROTECTED AND HEAT TRANSFER ENHANCED VALVE ACTUATOR AND CLOSURE APPARATUS AND METHOD 有权
标题翻译：具有腐蚀保护和隔热阀的隔离阀增压阀致动器和闭合装置和方法
公开(公告)号：US20090255591A1
公开(公告)日：2009-10-15
申请号：US12194463
申请日：2008-08-19
申请人： Kevin Grout , Jeffrey D. Kiernan , David Neumeister , Matthew C. Grout
发明人： Kevin Grout , Jeffrey D. Kiernan , David Neumeister , Matthew C. Grout
IPC分类号： F16K49/00 , F16K27/00 , F16K1/32
CPC分类号： F16K1/36 , F16K15/148 , F16K41/10 , F16K51/02 , Y10T137/6416 , Y10T137/7036
摘要： An isolation valve includes a shield that surrounds and protects the valve closure actuator components from exposure to corrosive fluids that flow through the valve when the valve is open.
摘要翻译：隔离阀包括围绕并保护阀闭合致动器部件免受暴露于当阀打开时流过阀的腐蚀性流体的屏蔽件。

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