专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07076920B2 Method of using a combination differential and absolute pressure transducer for controlling a load lock 有权
标题翻译：使用组合差压绝对压力传感器控制负载锁定的方法
公开(公告)号：US07076920B2
公开(公告)日：2006-07-18
申请号：US09815376
申请日：2001-03-21
申请人： Garry Holcomb , Youfan Gu , James Stafford , James M. Mueller , Stacy Wade
发明人： Garry Holcomb , Youfan Gu , James Stafford , James M. Mueller , Stacy Wade
IPC分类号： B65G53/46
CPC分类号： H01L21/67748 , H01L21/67201 , H01L21/67253 , Y10S414/139
摘要： A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10−4 torr and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in the load lock chamber are combined together in a module with a manifold and common circuit components to provide a pressure transducer that is capable of producing not only analog output for absolute pressure measurements, but also control signals at settable absolute and differential pressure values for opening interior and exterior doors of a load lock used to shuttle wafers and other devices into and out of a vacuum processing chamber. The transducer can also produce signals to control transition from slow to fast vacuum pumping of the load lock chamber at a settable threshold pressure.
摘要翻译：用于感测100至10-4托的范围内的负载锁定中的绝对压力的绝食压力传感器和用于感测环境大气压力和负载锁定压力之间的压力差的差压传感器腔室组合在具有歧管和公共电路部件的模块中，以提供压力传感器，其不仅可以产生用于绝对压力测量的模拟输出，而且还可以产生用于打开内部和外部门的可设定绝对压差值和差压值的控制信号用于将晶片和其它设备送入和离开真空处理室的负载锁。换能器还可以产生信号以控制在可设定的阈值压力下从负载锁定室的慢速到快速抽真空的转变。

2. 发明授权

US06562109B2 Acceleration assisted particle/gas separation system 有权
公开(公告)号：US06562109B2
公开(公告)日：2003-05-13
申请号：US09821713
申请日：2001-03-28
申请人： Darren Livingston , Youfan Gu , Paul Dozoretz , James M. Mueller
发明人： Darren Livingston , Youfan Gu , Paul Dozoretz , James M. Mueller
IPC分类号： B01D4514
CPC分类号： B01D45/14
摘要： Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.

3. 发明授权

US3970801A Dialing apparatus for a portable radio telephone 失效
标题翻译：用于便携式无线电话的拨号装置
公开(公告)号：US3970801A
公开(公告)日：1976-07-20
申请号：US529020
申请日：1974-12-03
申请人： Danny E. Ross , James M. Mueller
发明人： Danny E. Ross , James M. Mueller
IPC分类号： H04M19/04 , H04M1/50
CPC分类号： H04M19/04
摘要： This apparatus is especially useful as a conversion kit and includes a new front cover for a portable radio telephone having a plurality of push buttons mounted therein, which push buttons activate a tone generator, the tones from which are applied to a timer and through a multi-contact relay to the speaker and transmitter of the radio telephone. The timer is utilized to activate the relay for 90 milliseconds each time a tone is produced by the tone generator so that a tone is transmitted for only 90 milliseconds and when a tone is not being generated the transmitter is connected to a microphone and the speaker is connected to the receiver in the normal operating manner by the relay.
摘要翻译：该装置作为转换套件是特别有用的，并且包括用于便携式无线电话的新的前盖，其具有安装在其中的多个按钮，该按钮激活音调发生器，其中的音调被应用于计时器并通过多个 - 连接到无线电话机的扬声器和发射机。每当音调发生器产生音调时，定时器用于激活中继器90毫秒，使得音调仅发送90毫秒，并且当没有产生音调时，发射机连接到麦克风，扬声器是通过继电器以正常操作方式连接到接收器。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式