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1. 发明授权

US08671987B2 Two-stage, slow-start valve apparatus 有权
标题翻译：两级缓慢启动阀门装置
公开(公告)号：US08671987B2
公开(公告)日：2014-03-18
申请号：US12968551
申请日：2010-12-15
申请人： Youfan Gu , David Neumeister , Kevin Grout
发明人： Youfan Gu , David Neumeister , Kevin Grout
IPC分类号： F16K1/52
CPC分类号： F16K1/52 , F16K31/1225 , F16K31/1226 , F16K39/024 , F16K51/02 , H01L21/67017 , Y10T137/0318 , Y10T137/86944
摘要： A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.
摘要翻译：两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀，打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。主阀闭合组件和次阀闭合组件都可气动致动以打开。

2. 发明授权

US07477996B2 Integrated absolute and differential pressure transducer 有权
标题翻译：集成的绝对和差压传感器
公开(公告)号：US07477996B2
公开(公告)日：2009-01-13
申请号：US11759202
申请日：2007-06-06
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01F23/14
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
摘要翻译：一种方法和装置集成差压测量和绝对压力测量，以在单个集成尺度上的宽范围的压力下提供连续的绝对压力分布。获得绝对压力测量和差压测量，并确定绝对压力测量值和差压测量值之间的相关系数。相关因子用于在绝对压力测量下，将公差绝对压力刻度上的压差测量值归一化到虚拟绝对压力值。在宽压力范围内的绝对压力分布包括在绝对压力测量精确的范围的一部分范围内的绝对压力测量，并且其包括压差测量值准确的范围的另一部分中的虚拟绝对压力值。

3. 发明申请

US20070288179A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 有权
标题翻译：集成绝对和差分压力传感器
公开(公告)号：US20070288179A1
公开(公告)日：2007-12-13
申请号：US11759202
申请日：2007-06-06
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

4. 发明授权

US06895178B2 Vapor delivery system 有权
标题翻译：蒸气输送系统
公开(公告)号：US06895178B2
公开(公告)日：2005-05-17
申请号：US10196572
申请日：2002-07-16
申请人： Youfan Gu , Paul Dozoretz , Benjamin Goss , David Neumeister , James Mueller , Donald W. Higgins
发明人： Youfan Gu , Paul Dozoretz , Benjamin Goss , David Neumeister , James Mueller , Donald W. Higgins
IPC分类号： F22B35/00 , B01D1/00 , F22B1/28 , F24F6/00
CPC分类号： B01D1/0082
摘要： The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
摘要翻译：本发明提供了一种根据需要高效生产水蒸汽的蒸气输送系统和方法。更具体地说，本发明通过在蒸发器室内的压力降低时，在蒸发器室内保持足够的水温保持在足够的温度下，而不会形成冰。

5. 发明授权

US08679287B2 Method and apparatus for preventing ALD reactants from damaging vacuum pumps 有权
标题翻译：用于防止ALD反应物损坏真空泵的方法和装置
公开(公告)号：US08679287B2
公开(公告)日：2014-03-25
申请号：US11136610
申请日：2005-05-23
申请人： Youfan Gu , David Neumeister
发明人： Youfan Gu , David Neumeister
IPC分类号： H01L21/443
CPC分类号： C23C16/45544 , C23C16/4412
摘要： A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.
摘要翻译：具有网状反应器元件和加热器组件的二次反应室定位在CVD反应室和真空泵之间的前级管线中，以混合并反应所有先前未反应的前体反应物，以将它们从流出物中除去，然后它们可以达到并损坏真空泵。

6. 发明授权

US08172197B2 Fast-acting pneumatic diaphragm valve 有权
标题翻译：快速气动隔膜阀
公开(公告)号：US08172197B2
公开(公告)日：2012-05-08
申请号：US11456044
申请日：2006-07-06
申请人： Youfan Gu , Sven Nuesken
发明人： Youfan Gu , Sven Nuesken
IPC分类号： F16K31/12
CPC分类号： F16K31/406 , F16K7/17 , Y10T137/86614 , Y10T137/86686 , Y10T137/86919
摘要： A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.
摘要翻译：快速作用的气动隔膜阀包括隔膜阀关闭构件，在关闭构件上提供闭合力的气动活塞，以及控制对活塞的加压空气以使活塞以往往的方式移动的螺线管先导阀使得封闭构件打开和关闭阀。阀座密封件可以是用于提高速度的弹性体，并且电磁导阀可以被定位和配置为沿着螺线管电枢纵向通过或经过螺线管电枢的气流，以提高速度。

7. 发明申请

US20120061369A1 MULTIPLE HEATER CONTROL SYSTEM WITH EXPANDABLE MODULAR FUNCTIONALITY 有权
标题翻译：具有可扩展模块化功能的多重加热器控制系统
公开(公告)号：US20120061369A1
公开(公告)日：2012-03-15
申请号：US13048824
申请日：2011-03-15
申请人： Youfan Gu , Jeffrey D. Kiernan , Charles C. Lawhead , William C. Bohlinger , Eric E. Ellis , Curtis A. Foster , James P. Hentges , Mark Loius-Gilmer Hoven , James H. Kreisel , Shawn Leininger , Robert O. Moran , Kurt W. Peterson , Jason R. Powell , Dale T. Wolfe
发明人： Youfan Gu , Jeffrey D. Kiernan , Charles C. Lawhead , William C. Bohlinger , Eric E. Ellis , Curtis A. Foster , James P. Hentges , Mark Loius-Gilmer Hoven , James H. Kreisel , Shawn Leininger , Robert O. Moran , Kurt W. Peterson , Jason R. Powell , Dale T. Wolfe
IPC分类号： H05B1/02 , H01R13/62
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.
摘要翻译：多重加热器控制系统包括电缆，连接器和接线盒，用于加热器控制器和加热器的用户友好的菊花链连接，各种配置或单独控制的加热器系列和/或主从加热器系列的组合。加热器控制器包括对加热器的AC电力的过程控制和基本上独立于过程控制的上限安全关闭。加热器控制器还具有基础模块中可变级别的控制，调整，显示和通信功能，可扩展到各种级别，扩展模块可连接到基座模块并可拆卸。连接器，电缆和接头配置，适配器和闩锁功能增强了用户友好性。

8. 发明授权

US07871587B2 Reactive chemical containment system 有权
标题翻译：反应性化学品容纳系统
公开(公告)号：US07871587B2
公开(公告)日：2011-01-18
申请号：US12645455
申请日：2009-12-22
申请人： Youfan Gu , Paul Dozoretz
发明人： Youfan Gu , Paul Dozoretz
IPC分类号： B01D53/38 , B01D53/68 , B01D53/76
CPC分类号： C23C16/4412 , B01D53/76 , B01D2251/102 , B01D2251/11 , B01D2257/204 , B01D2258/0216 , B01F3/02 , B01F5/0682 , B01F5/0688 , B01F5/0692 , B01F5/0693 , B01F5/0694 , Y02C20/30
摘要： A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.
摘要翻译：小规模但有效的反应性化学容纳系统包括用于使从反应炉排出的处理气体与不可燃方式的反应气体反应的装置和方法，以产生和容纳颗粒或粉末副产物，从而将工艺气体从废气流。该设备提供工艺气体入口，处理反应气体扩散，工艺气体和处理反应气体预混合，初级容纳，二次容纳和出口区。

9. 发明申请

US20080023661A1 FAST-ACTING PNEUMATIC DIAPHRAGM VALVE 有权
标题翻译：快速气动膜片阀
公开(公告)号：US20080023661A1
公开(公告)日：2008-01-31
申请号：US11456044
申请日：2006-07-06
申请人： Youfan Gu , Sven Nuesken
发明人： Youfan Gu , Sven Nuesken
IPC分类号： F16K31/12
CPC分类号： F16K31/406 , F16K7/17 , Y10T137/86614 , Y10T137/86686 , Y10T137/86919
摘要： A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.
摘要翻译：快速作用的气动隔膜阀包括隔膜阀关闭构件，在关闭构件上提供闭合力的气动活塞，以及控制对活塞的加压空气以使活塞以往往的方式移动的螺线管先导阀使得封闭构件打开和关闭阀。阀座密封件可以是用于提高速度的弹性体，并且电磁导阀可以被定位和配置为沿着螺线管电枢纵向通过或经过螺线管电枢的气流，以提高速度。

10. 发明申请

US20050114070A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 有权
标题翻译：集成绝对和差分压力传感器
公开(公告)号：US20050114070A1
公开(公告)日：2005-05-26
申请号：US10721817
申请日：2003-11-24
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00 , G01L27/00 , G06F19/00 , G06F15/00
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

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