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1. 发明授权

US07076920B2 Method of using a combination differential and absolute pressure transducer for controlling a load lock 有权
标题翻译：使用组合差压绝对压力传感器控制负载锁定的方法
公开(公告)号：US07076920B2
公开(公告)日：2006-07-18
申请号：US09815376
申请日：2001-03-21
申请人： Garry Holcomb , Youfan Gu , James Stafford , James M. Mueller , Stacy Wade
发明人： Garry Holcomb , Youfan Gu , James Stafford , James M. Mueller , Stacy Wade
IPC分类号： B65G53/46
CPC分类号： H01L21/67748 , H01L21/67201 , H01L21/67253 , Y10S414/139
摘要： A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10−4 torr and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in the load lock chamber are combined together in a module with a manifold and common circuit components to provide a pressure transducer that is capable of producing not only analog output for absolute pressure measurements, but also control signals at settable absolute and differential pressure values for opening interior and exterior doors of a load lock used to shuttle wafers and other devices into and out of a vacuum processing chamber. The transducer can also produce signals to control transition from slow to fast vacuum pumping of the load lock chamber at a settable threshold pressure.
摘要翻译：用于感测100至10-4托的范围内的负载锁定中的绝对压力的绝食压力传感器和用于感测环境大气压力和负载锁定压力之间的压力差的差压传感器腔室组合在具有歧管和公共电路部件的模块中，以提供压力传感器，其不仅可以产生用于绝对压力测量的模拟输出，而且还可以产生用于打开内部和外部门的可设定绝对压差值和差压值的控制信号用于将晶片和其它设备送入和离开真空处理室的负载锁。换能器还可以产生信号以控制在可设定的阈值压力下从负载锁定室的慢速到快速抽真空的转变。

2. 发明申请

US20050114070A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 有权
标题翻译：集成绝对和差分压力传感器
公开(公告)号：US20050114070A1
公开(公告)日：2005-05-26
申请号：US10721817
申请日：2003-11-24
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00 , G01L27/00 , G06F19/00 , G06F15/00
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

3. 发明申请

US20090228219A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 有权
标题翻译：集成绝对和差分压力传感器
公开(公告)号：US20090228219A1
公开(公告)日：2009-09-10
申请号：US12353201
申请日：2009-01-13
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01F23/14
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

4. 发明授权

US06672171B2 Combination differential and absolute pressure transducer for load lock control 有权
标题翻译：用于负载锁定控制的组合差动和绝对压力传感器
公开(公告)号：US06672171B2
公开(公告)日：2004-01-06
申请号：US09907541
申请日：2001-07-16
申请人： Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L912
CPC分类号： H01J37/32458 , G01L9/0055 , G01L19/003 , G01L21/12 , H01J37/32743 , H01J2237/184
摘要： Transducer apparatus and method combining both an absolute pressure sensor for sensing absolute pressure in the load lock chamber and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber and provides control signals for opening an interior door from the load lock chamber into a vacuum processing chamber and for opening an exterior door between ambient atmosphere and the load lock chamber. The transducer can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber pressure at a predetermined pressure set point.
摘要翻译：传感器装置和方法组合用于感测负载锁定室中的绝对压力的绝对压力传感器和用于感测负载锁定室中的环境大气压力和压力之间的压力差的差压传感器，并且提供用于打开内部门的控制信号负载锁定室进入真空处理室并且用于打开环境大气和负载锁定室之间的外部门。传感器还可以产生信号，以控制在预定压力设定点的负载锁定室压力从慢速到快速真空泵的转换。

5. 发明授权

US07477996B2 Integrated absolute and differential pressure transducer 有权
标题翻译：集成的绝对和差压传感器
公开(公告)号：US07477996B2
公开(公告)日：2009-01-13
申请号：US11759202
申请日：2007-06-06
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01F23/14
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
摘要翻译：一种方法和装置集成差压测量和绝对压力测量，以在单个集成尺度上的宽范围的压力下提供连续的绝对压力分布。获得绝对压力测量和差压测量，并确定绝对压力测量值和差压测量值之间的相关系数。相关因子用于在绝对压力测量下，将公差绝对压力刻度上的压差测量值归一化到虚拟绝对压力值。在宽压力范围内的绝对压力分布包括在绝对压力测量精确的范围的一部分范围内的绝对压力测量，并且其包括压差测量值准确的范围的另一部分中的虚拟绝对压力值。

6. 发明申请

US20070288179A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 有权
标题翻译：集成绝对和差分压力传感器
公开(公告)号：US20070288179A1
公开(公告)日：2007-12-13
申请号：US11759202
申请日：2007-06-06
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

7. 发明授权

US07962294B2 Integrated absolute and differential pressure transducer 有权
标题翻译：集成的绝对和差压传感器
公开(公告)号：US07962294B2
公开(公告)日：2011-06-14
申请号：US12353201
申请日：2009-01-13
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01F23/14
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
摘要翻译：一种方法和装置集成差压测量和绝对压力测量，以在单个集成尺度上的宽范围的压力下提供连续的绝对压力分布。获得绝对压力测量和差压测量，并确定绝对压力测量值和差压测量值之间的相关系数。相关因子用于在绝对压力测量下，将公差绝对压力刻度上的压差测量值归一化到虚拟绝对压力值。在宽压力范围内的绝对压力分布包括在绝对压力测量精确的范围的一部分范围内的绝对压力测量，并且其包括压差测量值准确的范围的另一部分中的虚拟绝对压力值。

8. 发明申请

US20060004539A1 Integrated absolute and differential pressure transducer 审中-公开
标题翻译：集成的绝对和差压传感器
公开(公告)号：US20060004539A1
公开(公告)日：2006-01-05
申请号：US11158917
申请日：2005-06-21
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

9. 发明授权

US06909975B2 Integrated absolute and differential pressure transducer 有权
标题翻译：集成的绝对和差压传感器
公开(公告)号：US06909975B2
公开(公告)日：2005-06-21
申请号：US10721817
申请日：2003-11-24
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00 , G01L27/00 , G01F23/14 , G01L9/12
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

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