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    • 3. 发明授权
    • Semiconductor device
    • 半导体器件
    • US4261004A
    • 1981-04-07
    • US929959
    • 1978-08-01
    • Toshiaki MasuharaOsamu MinatoYoshio SakaiToshio SasakiMasaharu KuboKotaro NishimuraTokumasa Yasui
    • Toshiaki MasuharaOsamu MinatoYoshio SakaiToshio SasakiMasaharu KuboKotaro NishimuraTokumasa Yasui
    • H03F1/52H01L21/02H01L21/822H01L23/62H01L27/02H01L27/04H01L27/06H01L27/08H01L29/78H03F1/42
    • H01L28/20H01L27/0251H01L27/0288
    • On the surface of an insulating film formed on the surface of a semiconductor substrate on which an MOS type semiconductor device to be protected is formed, there are formed a first polycrystal silicon member having input and output terminals and a resistivity lower than 1 K.OMEGA./.quadrature. and a second polycrystalline silicon member having a resistivity lower than 1 K.OMEGA./.quadrature. and being maintained at a fixed potential. This second polycrystalline silicon member faces at least a part of the first silicon member with polycrystalline silicon of a resistivity higher than 100 K.OMEGA./.quadrature. interposed therebetween. The input terminal of the first polycrystalline silicon member is connected to an input pad of the MOS type semiconductor device to be protected and the output terminal of the first polycrystalline silicon member is connected to an input gate of the semiconductor device to be protected. The input gate of the semiconductor device is protected by utilizing the punch-through effect in the interior of the polycrystalline silicon having a resistivity higher than 100 K.OMEGA./.quadrature..
    • 在形成有要形成有待保护的MOS型半导体器件的半导体衬底的表面上的绝缘膜的表面上形成有具有输入和输出端子的电阻率低于1KΩ的第一多晶硅元件, 并且具有电阻率低于1KΩ/□并且保持在固定电位的第二多晶硅部件。 该第二多晶硅部件面对第一硅部件的至少一部分,其中多晶硅的电阻率高于100KΩ,并插入其间。 第一多晶硅部件的输入端子连接到要被保护的MOS型半导体器件的输入焊盘,并且第一多晶硅部件的输出端子连接到待保护的半导体器件的输入栅极。 半导体器件的输入栅极通过利用电阻率高于100KΩ/□的多晶硅的内部的穿透效应来保护。