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    • 3. 发明授权
    • Ignition/misfire detector for an internal combustion engine
    • 内燃机点火/失火探测器
    • US4567755A
    • 1986-02-04
    • US584383
    • 1984-02-28
    • Yoshinori OotsukaTadashi HattoriMinoru YamamotoTadashi Ozaki
    • Yoshinori OotsukaTadashi HattoriMinoru YamamotoTadashi Ozaki
    • G01M15/08G01M15/00
    • G01M15/11G01M15/08
    • A device for the detection of ignition misfire in an internal combustion engine is disclosed. A pressure detector detects changes in the combustion pressure of the engine, and a timing detector calculates a reference angular position of the engine. An ignition/misfire detection unit detects occurrences of ignition/misfire. The detection unit compares the output of the pressure detector with predetermined positive and negative reference voltages, and produces signals when these thresholds are passed. The period of a signal produced from the point of positive value detection to the negative value detection is counted and another period which is double the period from the generation of the positive value to the signal from the timing detector unit is counted. These two signals are then compared against one another, using a predetermined program, to detect if ignition or misfire has occurred in the internal combustion engine. A sample and hold circuit may also delay the value obtained by the pressure detector, if necessary.
    • 公开了一种用于检测内燃机中的点火失火的装置。 压力检测器检测发动机的燃烧压力的变化,定时检测器计算发动机的基准角位置。 点火/失火检测单元检测点火/失火的发生。 检测单元将压力检测器的输出与预定的正和负参考电压进行比较,并且当这些阈值通过时产生信号。 对从正值检测点到负值检测产生的信号的周期进行计数,并计数从正值的产生到来自定时检测器单元的信号的周期的两倍的周期。 然后使用预定程序将这两个信号彼此进行比较,以检测内燃机中是否发生点火或失火。 如果需要,采样和保持电路也可以延迟由压力检测器获得的值。
    • 4. 发明授权
    • Process for forming diamond film
    • 金刚石膜成型工艺
    • US5094878A
    • 1992-03-10
    • US540595
    • 1990-06-19
    • Minoru YamamotoSatoshi NakamuraNobuei ItoTadashi Hattori
    • Minoru YamamotoSatoshi NakamuraNobuei ItoTadashi Hattori
    • C23C16/27C23C16/513
    • C23C16/276C23C16/513
    • A device for synthesizing a diamond at a high synthesis speed and obtaining an improved purity of diamond is provided, and is characterized by having a vacuum vessel maintained under a predetermined vacuum; a positive electrode and a negative electrode arranged within the vacuum vessel so as to be opposed to each other; an arc discharge power source electrically connected to the positive electrode and the negative electrode and applying a predetermined power to cause an arc discharge in a space between the positive electrode and the negative electrode; a gas supply source which generates a gas plasma by flowing a plasma source gas over the arc discharge, and blowing a resulting gas plasma containing a carbon source gas over a substrate arranged downstream thereof; an electrical field application power source for applying an electrical field between an area at which the gas plasma is generated and the substrate, to give the substrate a higher potential and thereby provide a flow of a predetermined amount of current therebetween.
    • 提供了一种用于以高合成速度合成金刚石并获得改善的金刚石纯度的装置,其特征在于使真空容器保持在预定真空下; 布置在所述真空容器内的正极和负极,以便彼此相对; 与正极和负极电连接并施加预定功率以在正极和负极之间的空间中产生电弧放电的电弧放电电源; 气体供给源,其通过使等离子体源气体流过电弧放电而产生气体等离子体,并且在其下游配置的基板上吹送含有碳源气体的所得气体等离子体; 用于在产生气体等离子体的区域和衬底之间施加电场的电场施加电源,以使衬底具有更高的电位,从而在其间提供预定量的电流。
    • 5. 发明授权
    • Method and apparatus for forming a diamond film
    • 用于形成金刚石膜的方法和装置
    • US5099788A
    • 1992-03-31
    • US547162
    • 1990-07-03
    • Nobuei ItoMinoru YamamotoSatoshi NakamuraTadashi Hattori
    • Nobuei ItoMinoru YamamotoSatoshi NakamuraTadashi Hattori
    • C23C16/27C23C16/513C23C16/52
    • C23C16/276C23C16/513C23C16/52
    • A method and apparatus for forming a diamond film, has a casing in which vacuum is maintained at a predetermined value. A substrate is disposed within the casing so that the diamond film is formed thereon. A gas plasma generator for generating a gas plasma near the substrate from a plasma source gas and a carbon source gas by an arc discharge is provided within the casing. A detector detects a factor which is related to a change in a surface temperature of the diamond film, and an electronic controller controls in response to the detected factor the surface temperature of the diamond film so as to maintain such temperature near a predetermined optimal value for forming the diamond film. As the surface temperature is maintained near the optimal value by a feedback control, high purity diamond film is obtained irrespective of the thickness or the forming time thereof.
    • 用于形成金刚石膜的方法和装置具有其中真空保持在预定值的壳体。 衬底设置在壳体内,使得金刚石膜形成在其上。 一种用于通过电弧放电从等离子体源气体和碳源气体在基板附近产生气体等离子体的气体等离子体发生器。 检测器检测与金刚石膜的表面温度变化有关的因素,并且电子控制器根据检测到的因素控制金刚石膜的表面温度,以便将这种温度保持在预定的最佳值附近,以便 形成金刚石膜。 当通过反馈控制将表面温度保持在最佳值附近时,无论厚度或其形成时间如何,都可以获得高纯度的金刚石膜。
    • 6. 发明授权
    • Method and device for forming diamond film
    • 用于形成金刚石膜的方法和装置
    • US4851254A
    • 1989-07-25
    • US142813
    • 1988-01-11
    • Minoru YamamotoNobuei ItoHiroshi UesugiTadashi Hattori
    • Minoru YamamotoNobuei ItoHiroshi UesugiTadashi Hattori
    • C23C16/27C23C16/513C30B25/10
    • C23C16/276C23C16/513C30B25/105
    • A device for forming a diamond film has a casing in which a vacuum is maintained to 50 Torr: a positive electrode and a negative electrode are disposed within the casing so that ends of the positive electrode and the negative electrode are opposed to each other through a space: a substrate is disposed near the space between the electrodes, a gas inlet pipe supplies a mixture gas of hydrogen, argon and methane to the space between the electrodes and an arc power supply is connected to the electrodes for supplying a predetermined arc output power thereacross to form an arc discharge column in the space therebetween. By supplying the mixture gas to the arc discharge column of which the temperature is extremely high, the mixture gas is decomposed at a high rate, and a diamond film of high purity grows on the substrate at a high speed.
    • 用于形成金刚石膜的装置具有其中真空保持在50托的壳体:正极和负极设置在壳体内,使得正极和负极的端部通过一个 空间:基板设置在电极之间的空间附近,气体入口管将氢,氩和甲烷的混合气体供应到电极之间的空间,并且电弧源连接到用于提供预定电弧输出功率的电极 在它们之间的空间中形成电弧放电柱。 通过将混合气体供给到温度极高的电弧放电塔,混合气体以高速分解,高纯度的金刚石膜在基板上高速生长。
    • 8. 发明申请
    • SUPPORT SYSTEM FOR SETTING EQUIPMENT PARAMETERS
    • 用于设置设备参数的支持系统
    • US20120323350A1
    • 2012-12-20
    • US13055334
    • 2010-06-16
    • Minoru YamamotoTatsushi ImoriShinobu Hirano
    • Minoru YamamotoTatsushi ImoriShinobu Hirano
    • G05B19/18
    • G05B11/42G05B13/042G05B17/02
    • An object is to provide an equipment parameter setting support system for supporting the setting of parameters in various processing equipment. The equipment parameter setting support system has an execution results acquisition unit for acquiring, from an equipment controller or EES of the equipment design and manufacturing support system, execution results of a real equipment at any two points in time; a parameter calculation unit for calculating PID parameters at each time point on the basis of the acquired execution results; a difference calculation unit for calculating the difference between the calculated PID parameters; and a variation value calculation unit for calculating a variation value for a unit interval in relation to the calculated difference, wherein, in the equipment design and manufacturing support system, the calculated variation value and a PID parameters stored in the equipment simulator are computed to calculate a new PID parameter, and PID control is executed in the equipment simulator using the new PID parameter.
    • 目的是提供一种用于支持各种处理设备中参数设置的设备参数设置支持系统。 设备参数设置支持系统具有执行结果获取单元,用于从设备控制器或设备设计制造支持系统的EES获取任意两点的实际设备的执行结果; 参数计算单元,用于基于所获取的执行结果来计算每个时间点的PID参数; 差分计算单元,用于计算所计算的PID参数之间的差; 以及变化值计算单元,用于计算与计算出的差异相关的单位间隔的变化值,其中,在设备设计和制造支持系统中,计算计算的变化值和存储在设备模拟器中的PID参数,以计算 使用新的PID参数在设备模拟器中执行新的PID参数和PID控制。