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    • 1. 发明授权
    • Process for forming diamond film
    • 金刚石膜成型工艺
    • US5094878A
    • 1992-03-10
    • US540595
    • 1990-06-19
    • Minoru YamamotoSatoshi NakamuraNobuei ItoTadashi Hattori
    • Minoru YamamotoSatoshi NakamuraNobuei ItoTadashi Hattori
    • C23C16/27C23C16/513
    • C23C16/276C23C16/513
    • A device for synthesizing a diamond at a high synthesis speed and obtaining an improved purity of diamond is provided, and is characterized by having a vacuum vessel maintained under a predetermined vacuum; a positive electrode and a negative electrode arranged within the vacuum vessel so as to be opposed to each other; an arc discharge power source electrically connected to the positive electrode and the negative electrode and applying a predetermined power to cause an arc discharge in a space between the positive electrode and the negative electrode; a gas supply source which generates a gas plasma by flowing a plasma source gas over the arc discharge, and blowing a resulting gas plasma containing a carbon source gas over a substrate arranged downstream thereof; an electrical field application power source for applying an electrical field between an area at which the gas plasma is generated and the substrate, to give the substrate a higher potential and thereby provide a flow of a predetermined amount of current therebetween.
    • 提供了一种用于以高合成速度合成金刚石并获得改善的金刚石纯度的装置,其特征在于使真空容器保持在预定真空下; 布置在所述真空容器内的正极和负极,以便彼此相对; 与正极和负极电连接并施加预定功率以在正极和负极之间的空间中产生电弧放电的电弧放电电源; 气体供给源,其通过使等离子体源气体流过电弧放电而产生气体等离子体,并且在其下游配置的基板上吹送含有碳源气体的所得气体等离子体; 用于在产生气体等离子体的区域和衬底之间施加电场的电场施加电源,以使衬底具有更高的电位,从而在其间提供预定量的电流。
    • 2. 发明授权
    • Method and apparatus for forming a diamond film
    • 用于形成金刚石膜的方法和装置
    • US5099788A
    • 1992-03-31
    • US547162
    • 1990-07-03
    • Nobuei ItoMinoru YamamotoSatoshi NakamuraTadashi Hattori
    • Nobuei ItoMinoru YamamotoSatoshi NakamuraTadashi Hattori
    • C23C16/27C23C16/513C23C16/52
    • C23C16/276C23C16/513C23C16/52
    • A method and apparatus for forming a diamond film, has a casing in which vacuum is maintained at a predetermined value. A substrate is disposed within the casing so that the diamond film is formed thereon. A gas plasma generator for generating a gas plasma near the substrate from a plasma source gas and a carbon source gas by an arc discharge is provided within the casing. A detector detects a factor which is related to a change in a surface temperature of the diamond film, and an electronic controller controls in response to the detected factor the surface temperature of the diamond film so as to maintain such temperature near a predetermined optimal value for forming the diamond film. As the surface temperature is maintained near the optimal value by a feedback control, high purity diamond film is obtained irrespective of the thickness or the forming time thereof.
    • 用于形成金刚石膜的方法和装置具有其中真空保持在预定值的壳体。 衬底设置在壳体内,使得金刚石膜形成在其上。 一种用于通过电弧放电从等离子体源气体和碳源气体在基板附近产生气体等离子体的气体等离子体发生器。 检测器检测与金刚石膜的表面温度变化有关的因素,并且电子控制器根据检测到的因素控制金刚石膜的表面温度,以便将这种温度保持在预定的最佳值附近,以便 形成金刚石膜。 当通过反馈控制将表面温度保持在最佳值附近时,无论厚度或其形成时间如何,都可以获得高纯度的金刚石膜。
    • 3. 发明授权
    • Apparatus for forming diamond film
    • 用于形成金刚石膜的装置
    • US5314540A
    • 1994-05-24
    • US855742
    • 1992-03-23
    • Satoshi NakamuraMinoru YamamotoNobuei ItoTadasi Hattori
    • Satoshi NakamuraMinoru YamamotoNobuei ItoTadasi Hattori
    • C23C16/27C23C16/513H01J37/32H05H1/48C23C16/00C23C16/50
    • C23C16/276C23C16/513H01J37/32055H01J37/32587H05H1/48
    • Apparatus and process for synthesizing a diamond film of high purity at a high rate. Mixture gas of hydrocarbon gas and hydrogen gas is introduced into an arc discharge to produce a gas plasma. This gas plasma is blown against a substrate to deposit diamond. A plasma current power supply is connected with a third electrode disposed above the substrate to place the third electrode at a positive potential. An electrical current is supplied into the gas plasma from the third electrode. Flow of the electrical current through the plasma promotes the decomposition of the hydrogen and hydrocarbon. A diamond film of high purity can be deposited at a high rate. The invention is characterized in that the substrate is placed at a lower potential than the third electrode or the direction of the electrical current intersects the flow of the gas plasma although the electrical current is passed through the plasma. Therefore, it is unlikely that the accelerated electrons reach the substrate, elevating its temperature. Hence, diamond of high quality can be synthesized.
    • 用于以高速率合成高纯度金刚石膜的装置和方法。 将碳氢化合物气体和氢气的混合气体引入电弧放电以产生气体等离子体。 将该气体等离子体吹向基板以沉积金刚石。 等离子体电流电源与设置在衬底上方的第三电极连接以将第三电极置于正电位。 从第三电极向气体等离子体供给电流。 通过等离子体的电流的流动促进了氢和烃的分解。 高纯度的金刚石膜可以高速沉积。 本发明的特征在于,尽管电流通过等离子体,但是基板被放置在比第三电极低的电位或电流的方向与气体等离子体的流动相交。 因此,加速电子不可能到达基板,升高其温度。 因此,可以合成高质量的金刚石。
    • 9. 发明申请
    • IMAGE PROCESSING APPARATUS AND PIXEL INTERPOLATION METHOD
    • 图像处理装置和像素插值方法
    • US20140126840A1
    • 2014-05-08
    • US14156141
    • 2014-01-15
    • Satoshi Nakamura
    • Satoshi Nakamura
    • G06T3/40
    • G06T3/4007H04N1/4097
    • A periodicity determining unit determines whether an image region including a target pixel is a periodic region in which pixel values vary periodically. A first generating unit generates a pixel value using a first interpolation method. A second generating unit generates a pixel value using a second interpolation method. A control unit determines, based on the determination result of the periodicity determining unit, which one of the first and second generating units is to be used for generating a pixel value of the target pixel. A pixel value inserting unit inserts the generated pixel value to the target pixel. The periodicity determining unit includes a cycle estimating unit to estimate, using pixel values of pixels within the image region, a variation cycle of the pixel values, and/or a determining unit to determine whether each region positioned at left and right sides of the target pixel is the periodic region.
    • 周期性确定单元确定包括目标像素的图像区域是否是像素值周期性变化的周期性区域。 第一生成单元使用第一插值方法生成像素值。 第二生成单元使用第二插值方法生成像素值。 控制单元基于周期性确定单元的确定结果确定要用于生成目标像素的像素值的第一和第二生成单元中的哪一个。 像素值插入单元将生成的像素值插入到目标像素。 周期性确定单元包括:周期估计单元,用于使用图像区域内的像素的像素值估计像素值的变化周期;和/或确定单元,确定位于目标的左侧和右侧的每个区域 像素是周期性区域。