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    • 2. 发明授权
    • Method and apparatus for X-ray analyses
    • X射线分析的方法和装置
    • US5877498A
    • 1999-03-02
    • US893034
    • 1997-07-15
    • Aritoshi SugimotoYoshimi SudoTokuo KureKen NinomiyaKatsuhiro KurodaTakashi NishidaHideo TodokoroYasuhiro MitsuiHiroyasu Shichi
    • Aritoshi SugimotoYoshimi SudoTokuo KureKen NinomiyaKatsuhiro KurodaTakashi NishidaHideo TodokoroYasuhiro MitsuiHiroyasu Shichi
    • G01N23/225H01J37/256
    • G01N23/2252H01J2237/2445H01J2237/2807
    • An X-ray analyzing method for inspecting opening states of fine holes comprises the steps of: irradiating a finely converged electron beam into a first fine hole, observing an X-ray emitted from the inside of said first fine hole in order to obtain an first X-ray analysis data about the residue substance existing at the bottom of said first fine hole; irradiating a finely converged electron beam into a second fine hole, observing an X-ray emitted from the inside of said second fine hole in order to obtain an second X-ray analysis data about the residue substance existing at the bottom of said second fine hole; and comparing said first X-ray analysis data with said second X-ray analysis data, forming a judgment as to whether or not a difference between said first and second analysis data is smaller than a predetermined threshold value and using an outcome of said judgment to determine the opening states of said first and second fine holes. The X-ray observations are carried out by detecting only the X-rays emitted within the angular range -.theta. to +.theta. where notation .theta. is an angle formed with a center axis of the irradiated electron beam and so defined that tan .theta. is equal to a/d whereas notations a and d are the radius and the depth of the fine holes.
    • 用于检查细孔的打开状态的X射线分析方法包括以下步骤:将精细会聚的电子束照射到第一细孔中,观察从所述第一细孔的内部发射的X射线,以获得第一细孔 关于存在于所述第一细孔底部的残留物质的X射线分析数据; 将精细会聚的电子束照射到第二细孔中,观察从所述第二细孔的内部发射的X射线,以获得关于存在于所述第二细孔底部的残留物质的第二X射线分析数据 ; 以及将所述第一X射线分析数据与所述第二X射线分析数据进行比较,形成关于所述第一和第二分析数据之间的差是否小于预定阈值的判断,并且使用所述判断结果 确定所述第一和第二细孔的打开状态。 通过仅检测在角度范围θ至+θ内发射的X射线来进行X射线观察,其中符号θ是与照射的电子束的中心轴形成的角度,并且如此定义,tanθ等于 a / d,而符号a和d是细孔的半径和深度。
    • 5. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07776495B2
    • 2010-08-17
    • US11725507
    • 2007-03-20
    • Masahito HiroshimaTakashi Nishida
    • Masahito HiroshimaTakashi Nishida
    • G03F7/00
    • H01L28/91G03F1/00H01L27/10808H01L27/10852
    • A semiconductor device and a manufacturing method thereof in which the peripheral length of an aperture and the mechanical strength of cylinders in a cell can be increased without changing the occupation rate of patterns in the cell. By forming a slit in the middle of each mask pattern so as not to expose parts of wafer, the aperture of the wafer becomes nearly cocoon-shaped with a constriction in the middle. Thereby, the peripheral length of the aperture can be increased without changing the occupation rate of the mask patterns in a cell. Further, the shape of the bottom of the aperture also becomes nearly cocoon-shaped with a constriction in the middle, and therefore it is possible to increase the mechanical strength of cylinders.
    • 一种半导体器件及其制造方法,其中可以增加孔的圆周长度和单元中气缸的机械强度,而不改变单元中图案的占用率。 通过在每个掩模图案的中间形成狭缝以不暴露晶片的一部分,晶片的孔径在中间收缩而变为几乎茧形。 因此,可以增加孔径的周长,而不改变单元中的掩模图案的占有率。 此外,孔的底部的形状也变得几乎茧形,中间有收缩,因此可以提高气缸的机械强度。
    • 6. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07208788B2
    • 2007-04-24
    • US10995134
    • 2004-11-24
    • Masahito HiroshimaTakashi Nishida
    • Masahito HiroshimaTakashi Nishida
    • H01L29/73
    • H01L28/91G03F1/00H01L27/10808H01L27/10852
    • A semiconductor device and a manufacturing method thereof in which the peripheral length of an aperture and the mechanical strength of cylinders in a cell can be increased without changing the occupation rate of patterns in the cell. By forming a slit in the middle of each mask pattern so as not to expose parts of wafer, the aperture of the wafer becomes nearly cocoon-shaped with a constriction in the middle. Thereby, the peripheral length of the aperture can be increased without changing the occupation rate of the mask patterns in a cell. Further, the shape of the bottom of the aperture also becomes nearly cocoon-shaped with a constriction in the middle, and therefore it is possible to increase the mechanical strength of cylinders.
    • 一种半导体器件及其制造方法,其中可以增加孔的圆周长度和单元中气缸的机械强度,而不改变单元中图案的占用率。 通过在每个掩模图案的中间形成狭缝以不暴露晶片的一部分,晶片的孔径在中间收缩而变为几乎茧形。 因此,可以增加孔径的周长,而不改变单元中的掩模图案的占有率。 此外,孔的底部的形状也变得几乎茧形,中间有收缩,因此可以提高气缸的机械强度。