专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5877498A Method and apparatus for X-ray analyses 失效
标题翻译： X射线分析的方法和装置
公开(公告)号：US5877498A
公开(公告)日：1999-03-02
申请号：US893034
申请日：1997-07-15
申请人： Aritoshi Sugimoto , Yoshimi Sudo , Tokuo Kure , Ken Ninomiya , Katsuhiro Kuroda , Takashi Nishida , Hideo Todokoro , Yasuhiro Mitsui , Hiroyasu Shichi
发明人： Aritoshi Sugimoto , Yoshimi Sudo , Tokuo Kure , Ken Ninomiya , Katsuhiro Kuroda , Takashi Nishida , Hideo Todokoro , Yasuhiro Mitsui , Hiroyasu Shichi
IPC分类号： G01N23/225 , H01J37/256
CPC分类号： G01N23/2252 , H01J2237/2445 , H01J2237/2807
摘要： An X-ray analyzing method for inspecting opening states of fine holes comprises the steps of: irradiating a finely converged electron beam into a first fine hole, observing an X-ray emitted from the inside of said first fine hole in order to obtain an first X-ray analysis data about the residue substance existing at the bottom of said first fine hole; irradiating a finely converged electron beam into a second fine hole, observing an X-ray emitted from the inside of said second fine hole in order to obtain an second X-ray analysis data about the residue substance existing at the bottom of said second fine hole; and comparing said first X-ray analysis data with said second X-ray analysis data, forming a judgment as to whether or not a difference between said first and second analysis data is smaller than a predetermined threshold value and using an outcome of said judgment to determine the opening states of said first and second fine holes. The X-ray observations are carried out by detecting only the X-rays emitted within the angular range -.theta. to +.theta. where notation .theta. is an angle formed with a center axis of the irradiated electron beam and so defined that tan .theta. is equal to a/d whereas notations a and d are the radius and the depth of the fine holes.
摘要翻译：用于检查细孔的打开状态的X射线分析方法包括以下步骤：将精细会聚的电子束照射到第一细孔中，观察从所述第一细孔的内部发射的X射线，以获得第一细孔关于存在于所述第一细孔底部的残留物质的X射线分析数据; 将精细会聚的电子束照射到第二细孔中，观察从所述第二细孔的内部发射的X射线，以获得关于存在于所述第二细孔底部的残留物质的第二X射线分析数据 ; 以及将所述第一X射线分析数据与所述第二X射线分析数据进行比较，形成关于所述第一和第二分析数据之间的差是否小于预定阈值的判断，并且使用所述判断结果确定所述第一和第二细孔的打开状态。通过仅检测在角度范围θ至+θ内发射的X射线来进行X射线观察，其中符号θ是与照射的电子束的中心轴形成的角度，并且如此定义，tanθ等于 a / d，而符号a和d是细孔的半径和深度。

2. 发明申请

US20070134920A1 CU WIRING FORMATION METHOD 审中-公开
标题翻译： CU线路形成方法
公开(公告)号：US20070134920A1
公开(公告)日：2007-06-14
申请号：US11556382
申请日：2006-11-03
申请人： Shinya Hirano , Yoshimi Sudo , Tetsunori Imaizumi , Yasuhiro Yoshida
发明人： Shinya Hirano , Yoshimi Sudo , Tetsunori Imaizumi , Yasuhiro Yoshida
IPC分类号： H01L21/44
CPC分类号： H01L21/2885 , H01L21/02068 , H01L21/321 , H01L21/76877 , H01L21/76883
摘要： A Cu wiring formation method comprises the steps of: forming a Cu film on a wafer by plating; subjecting the Cu film to anticorrosive treatment on the surface thereof after the plating; and annealing the Cu film after the anticorrosive treatment.
摘要翻译： Cu布线形成方法包括以下步骤：通过电镀在晶片上形成Cu膜; 在镀覆之后对其表面进行Cu膜的耐腐蚀处理; 并在防腐处理后退火Cu膜。

3. 发明授权

US5594246A Method and apparatus for x-ray analyses 失效
标题翻译： x射线分析的方法和装置
公开(公告)号：US5594246A
公开(公告)日：1997-01-14
申请号：US430535
申请日：1995-04-25
申请人： Yoshimi Sudo , Tokuo Kure , Ken Ninomiya , Katsuhiro Kuroda , Takashi Nishida , Hideo Todokoro , Yasuhiro Mitsui , Hiroyasu Shichi
发明人： Yoshimi Sudo , Tokuo Kure , Ken Ninomiya , Katsuhiro Kuroda , Takashi Nishida , Hideo Todokoro , Yasuhiro Mitsui , Hiroyasu Shichi
IPC分类号： G01N23/225 , H01J37/252 , G01N23/223
CPC分类号： G01N23/2252 , H01J37/252 , H01J2237/2445
摘要： An X-ray analyzing method includes the steps of applying an irradiated electron beam, converged by a condenser lens and an objective lens into a thin beam, to the inside of a fine hole existing on the surface of a sample; observing X-rays generated from a residual substance existing inside the fine hole; and performing a qualitative and quantitative analysis of the residual substance. The X-rays are observed by an X-ray detector installed in an internal space of the condenser lens, an internal space of the objective lens, or between the condenser lens and the objective lens, by detecting only the X-rays radiated within the angular range -.theta. to +.theta., where .theta. is an angle formed with a center axis of the electron beam, and so defined that tan .theta. is substantially equal to a/d, where a and d are the radius and the depth of the fine hole, respectively.
摘要翻译： X射线分析方法包括以下步骤：将由聚光透镜和物镜会聚的照射的电子束施加到薄的光束中，使其存在于样品表面上的细孔的内部; 观察由存在于细孔内的残留物质产生的X射线; 并对剩余物质进行定性和定量分析。 X射线由安装在聚光透镜的内部空间，物镜的内部空间或者聚光透镜与物镜之间的X射线检测器观测，仅检测在该透镜内辐射的X射线角度范围-θ至+θ，其中θ是与电子束的中心轴形成的角度，并且如此定义为tanθ基本上等于a / d，其中a和d是微细的半径和深度孔。

4. 发明授权

US4567208A Preliminarily foamed particles of non-crosslinked polypropylene-type resin 失效
标题翻译：非交联聚丙烯类树脂的初始发泡颗粒
公开(公告)号：US4567208A
公开(公告)日：1986-01-28
申请号：US678679
申请日：1984-12-05
申请人： Hideki Kuwabara , Yoshimi Sudo
发明人： Hideki Kuwabara , Yoshimi Sudo
IPC分类号： C08J9/16 , C08J9/18 , C08J9/228 , C08L23/14 , C08L23/20
CPC分类号： C08J9/228 , C08J9/18 , C08J2323/16 , C08L2205/02 , C08L2207/02 , C08L23/14 , Y10S264/16
摘要： Preliminarily foamed particles of a non-crosslinked polypropylene-type resin based on a mixture of 10 to 95% by weight of an alpha-olefin/propylene random copolymer having an amount of the heat of crystallization of not more than 10 cal/g in differential scanning calorimetry and 90 to 5% by weight of an ethylene/propylene random copolymer as a base resin, said preliminarily foamed particles having such a crystal structure that when a DSC curve is drawn by heating 1 to 3 mg of the preliminarily foamed particles to 220.degree. C. at a rate of 10.degree. C./min. by means of a differential scanning calorimeter, a high temperature peak is observed at a higher temperature than the temperature of the peak inherent to the base resin. These preliminarily foamed articles can be molded under lower vapor pressures than in the prior art.
摘要翻译：基于10至95重量％的结晶热量不超过10cal / g的α-烯烃/丙烯无规共聚物的混合物的非交联聚丙烯类树脂的初始发泡颗粒扫描量热法和90〜5重量％的作为基础树脂的乙烯/丙烯无规共聚物，所述预发泡粒子具有这样的晶体结构，即当通过将1〜3mg的预发泡粒子加热至220℃而绘制DSC曲线时 ℃，以10℃/ min的速率。通过差示扫描量热计，在比基础树脂固有的峰的温度高的温度下观察到高温峰。这些预发泡制品可以在比现有技术更低的蒸气压下成型。

5. 发明授权

US4806293A Method of producing a foamed, molded article 失效
标题翻译：制造发泡的模制品的方法
公开(公告)号：US4806293A
公开(公告)日：1989-02-21
申请号：US37172
申请日：1987-04-10
申请人： Hiroyuki Akiyama , Yoshimi Sudo , Masahiko Kishida , Mitsuru Nishida
发明人： Hiroyuki Akiyama , Yoshimi Sudo , Masahiko Kishida , Mitsuru Nishida
IPC分类号： B29C47/00 , B29B11/06 , B29C44/06 , B29C44/34 , B29C44/38 , B29C44/42 , B29C47/50 , B29K105/04 , B29C67/22
CPC分类号： B29C44/421 , B29B11/06 , B29C44/10 , B29C47/368 , B29C2791/006 , B29C47/0009 , B29K2033/00 , B29K2105/253
摘要： Method of producing a molded article of a foamed thermoplastic resin. A molten mass of an expandable thermoplastic resin is accumulated in an accumulator while it is prevented from foaming. A predetermined quantity of the accumulated thermoplastic resin is ejected rapidly from the accumulator into the atmosphere so that the thermoplastic resin commences foaming. The ejected thermoplastic resin is placed in a mold cavity before the foaming expansion has been completed and is compressed. The expansion and molding of the ejected thermoplastic resin is completed in the mold while controlling the compression pressure to obtain a foamed molded article.
摘要翻译：生产发泡热塑性树脂的模塑制品的方法。可膨胀热塑性树脂的熔融物质在其被防止发泡的同时积聚在蓄液器中。将预定量的积聚的热塑性树脂从蓄液器快速喷射到大气中，使得热塑性树脂开始发泡。喷射的热塑性树脂在发泡膨胀完成并被压缩之前放置在模腔中。喷射的热塑性树脂的膨胀和模塑在模具中完成，同时控制压缩压力以获得发泡成型制品。

6. 发明授权

US4695593A Prefoamed propylene polymer-base particles, expansion-molded article produced from said particles and production process of said article 失效
标题翻译：预发泡的丙烯聚合物基颗粒，由所述颗粒制备的发泡模制品和所述制品的制备方法
公开(公告)号：US4695593A
公开(公告)日：1987-09-22
申请号：US831548
申请日：1986-02-21
申请人： Hideki Kuwabara , Atsushi Kitagawa , Yoshimi Sudo
发明人： Hideki Kuwabara , Atsushi Kitagawa , Yoshimi Sudo
IPC分类号： C08J9/232 , C08J9/24
CPC分类号： C08J9/232 , C08J2323/10 , Y10S264/07 , Y10S264/16
摘要： Prefoamed polypropylene-base particles have a crystalline structure featuring a high-temperature peak appeared on the higher temperature side than the peak inherent to polypropylene-base resins on a DSC curve obtained by differential scanning calorimetry upon heating 1-3 mg of the prefoamed polypropylene-base particles at a constant heating rate of 10.degree. C./min. to 220.degree. C. by means of a differential scanning calorimeter and the internal pressure decreasing velocity coefficient k of the particles is either equal to or smaller than 0.70 (k.ltoreq.0.70) at 25.degree. C. and 1 atm. The prefoamed polypropylene-base particles can be formed into an expansion-molded polypropylene-base article by imparting foamability to the particles, filling the resultant particles in a mold and then heating the particles so as to cause their expansion. The expansion-molded article has good surface quality, excellent dimensional accuracy, and superb physical properties such as shrinkage factor, compression hardness, compression set and interparticle fusion-bonding property.
摘要翻译：预发泡的聚丙烯基颗粒具有在高温侧出现的高温峰的晶体结构，而不是聚丙烯基树脂固有的峰，在通过差示扫描量热法获得的DSC曲线上，加热1-3mg预发泡的聚丙烯 - 基础颗粒以10℃/分钟的恒定加热速率。通过差示扫描量热计至220℃，并且在25℃和1atm下，颗粒的内部压力降低速度系数k等于或小于0.70（k <0.70）。预发泡的聚丙烯基颗粒可以通过赋予颗粒发泡性，将所得颗粒填充到模具中，然后加热颗粒以使其膨胀而形成为膨胀模制的聚丙烯基制品。发泡成形品具有良好的表面质量，优异的尺寸精度，以及收缩率，压缩硬度，压缩永久变形和颗粒间熔合性等极好的物理性能。

7. 发明授权

US4587270A Preliminarily foamed particles of non-crosslinked polypropylene-type resin 失效
标题翻译：非交联聚丙烯类树脂的初始发泡颗粒
公开(公告)号：US4587270A
公开(公告)日：1986-05-06
申请号：US673917
申请日：1984-11-21
申请人： Hideki Kuwabara , Yoshimi Sudo
发明人： Hideki Kuwabara , Yoshimi Sudo
IPC分类号： C08J9/16 , C08J9/228 , C08J9/22
CPC分类号： C08J9/228 , C08J2323/16
摘要： Preliminarily foamed particles of a non-crosslinked polypropylene resin based on an alpha-olefin/propylene random copolymer having an amount of the heat of crystallization in the range of 5 to 15 cal/g, said preliminarily foamed particles having such a crystal structure that when a DSC curve is drawn by means of a differential scanning calorimeter, by heating 1 to 3 mg of the preliminarily foamed particles to 220.degree. C. at a rate of 10.degree. C./min., a high temperature peak is observed at a higher temperature than the temperature of the peak inherent to the base resin.
摘要翻译：基于具有在5至15cal / g范围内的结晶热量的α-烯烃/丙烯无规共聚物的非交联聚丙烯树脂的初始发泡颗粒，所述预发泡颗粒具有这样的晶体结构，即当通过差示扫描量热计绘制DSC曲线，以10℃/分钟的速度将1〜3mg的预发泡粒子加热至220℃，观察到较高的高温峰温度高于基础树脂固有的峰值温度。

8. 发明授权

US08946895B2 Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus 有权
标题翻译：半导体装置，半导体装置的制造方法，半导体制造和检查装置以及检查装置
公开(公告)号：US08946895B2
公开(公告)日：2015-02-03
申请号：US12389479
申请日：2009-02-20
申请人： Takahiko Kato , Hiroshi Nakano , Haruo Akahoshi , Yuuji Takada , Yoshimi Sudo , Tetsuo Fujiwara , Itaru Kanno , Tomoryo Shono , Yukinori Hirose
发明人： Takahiko Kato , Hiroshi Nakano , Haruo Akahoshi , Yuuji Takada , Yoshimi Sudo , Tetsuo Fujiwara , Itaru Kanno , Tomoryo Shono , Yukinori Hirose
IPC分类号： H01L23/48 , H01L23/532 , H01L21/768
CPC分类号： H01L22/12 , H01L21/76843 , H01L21/76873 , H01L21/76877 , H01L21/76879 , H01L23/53238 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having Cu wiring including a basic crystal structure which can reduce surface voids, and an inspecting technique for the semiconductor device. In the semiconductor device, surface voids can be reduced down to 1/10 or less of a current practical level by specifying a barrier layer and a seed layer and setting a proportion (frequency) of occupation of a coincidence site lattice (CSL) boundary having a grain boundary Sigma value 27 or less to all crystal grain boundaries of a Cu wiring to 60% or higher. Alternatively, a similar effect of surface void reduction can be obtained by specifying a barrier layer and a seed layer and setting a proportion (frequency) of occupation of a coincidence site lattice (CSL) boundary having a grain boundary Sigma value 3 to all crystal grain boundaries of a Cu wiring to 40% or higher.
摘要翻译：具有包括可以减小表面空隙的碱性晶体结构的Cu布线的半导体器件和用于半导体器件的检查技术。在半导体装置中，通过指定阻挡层和种子层，并设定具有一致位点网格（CSL）边界的占有比例（频率），表面空隙可以降低到当前实用水平的1/10以下，具有对于Cu布线的所有晶界，晶界Sigma值为27以下，为60％以上。或者，可以通过指定阻挡层和种子层并且将具有晶界Sigma值3的重合位点晶格（CSL）边界的占有比例（频率）设置为全部晶粒，可以获得类似的表面空隙降低效果 Cu布线的边界为40％以上。

9. 发明申请

US20090218694A1 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING AND INSPECTING APPARATUS, AND INSPECTING APPARATUS 有权
标题翻译：半导体器件，半导体器件的制造方法，半导体制造和检查装置以及检查装置
公开(公告)号：US20090218694A1
公开(公告)日：2009-09-03
申请号：US12389479
申请日：2009-02-20
申请人： Takahiko KATO , Hiroshi NAKANO , Haruo AKAHOSHI , Yuuji TAKADA , Yoshimi SUDO , Tetsuo FUJIWARA , Itaru KANNO , Tomoryo SHONO , Yukinori HIROSE
发明人： Takahiko KATO , Hiroshi NAKANO , Haruo AKAHOSHI , Yuuji TAKADA , Yoshimi SUDO , Tetsuo FUJIWARA , Itaru KANNO , Tomoryo SHONO , Yukinori HIROSE
IPC分类号： H01L23/532 , H01L21/768
CPC分类号： H01L22/12 , H01L21/76843 , H01L21/76873 , H01L21/76877 , H01L21/76879 , H01L23/53238 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device having Cu wiring including a basic crystal structure which can reduce surface voids, and an inspecting technique for the semiconductor device. In the semiconductor device, surface voids can be reduced down to 1/10 or less of a current practical level by specifying a barrier layer and a seed layer and setting a proportion (frequency) of occupation of a coincidence site lattice (CSL) boundary having a grain boundary Sigma value 27 or less to all crystal grain boundaries of a Cu wiring to 60% or higher. Alternatively, a similar effect of surface void reduction can be obtained by specifying a barrier layer and a seed layer and setting a proportion (frequency) of occupation of a coincidence site lattice (CSL) boundary having a grain boundary Sigma value 3 to all crystal grain boundaries of a Cu wiring to 40% or higher.
摘要翻译：具有包括可以减小表面空隙的碱性晶体结构的Cu布线的半导体器件和用于半导体器件的检查技术。在半导体装置中，通过指定阻挡层和种子层，并设定具有一致位点网格（CSL）边界的占有比例（频率），表面空隙可以降低到当前实用水平的1/10以下，具有对于Cu布线的所有晶界，晶界Sigma值为27以下，为60％以上。或者，可以通过指定阻挡层和种子层并且将具有晶界Sigma值3的重合位点晶格（CSL）边界的占有比例（频率）设置为全部晶粒，可以获得类似的表面空隙降低效果 Cu布线的边界为40％以上。

10. 发明授权

US4617323A Prefoamed particles of crosslinked propylene-type resin and molded article prepared therefrom 失效
标题翻译：交联丙烯类树脂的预发泡颗粒和由其制备的模塑制品
公开(公告)号：US4617323A
公开(公告)日：1986-10-14
申请号：US700895
申请日：1985-02-12
申请人： Hideki Kuwabara , Yoshimi Sudo , Atusi Kitagawa
发明人： Hideki Kuwabara , Yoshimi Sudo , Atusi Kitagawa
IPC分类号： C08J9/22 , B29C44/00 , B29K23/00 , B29K105/04 , C08J9/18 , C08J9/228
CPC分类号： C08J9/228 , C08J9/18 , C08J2203/06 , C08J2203/142 , C08J2323/02
摘要： Prefoamed crosslinked propylene-type resin particles prepared by using as a base resin a propylene random copolymer whose amount of heat of crystallization determined by a DSC method is 19 to 10 cal/g. The prefoamed particles have a gel fraction of 1 to 65%. Also provided is a molded article of a crosslinked propylene-type resin which is a fused aggregate of the aforesaid prefoamed particles in which the number of cells, N per mm.sup.2, and the density, d (g/cm.sup.3), have the relation represented by the expression 2
摘要翻译：通过使用通过DSC法测定的结晶热量为19〜10cal / g的丙烯无规共聚物作为基础树脂而制备的预发泡交联丙烯类树脂颗粒。预发泡颗粒具有1至65％的凝胶分数。还提供了交联丙烯类树脂的模制品，其是上述预发泡颗粒的熔融聚集体，其中细胞数N（mm 2，密度d（g / cm 3））具有由表达式2

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式