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    • 3. 发明授权
    • Nanotube probe and a method for manufacturing the same
    • 纳米管探针及其制造方法
    • US07511270B2
    • 2009-03-31
    • US10570525
    • 2004-09-08
    • Yoshikazu NakayamaTakashi OkawaShigenobu YamanakaAkio Harada
    • Yoshikazu NakayamaTakashi OkawaShigenobu YamanakaAkio Harada
    • G21K7/00
    • G01Q70/12
    • The present invention realizes a nanotube probe with high durability that can be manufactured in short time with less impurities adhered to the holder sustaining the nanotube. The nanotube probe according to this invention is constructed by fastening a nanotube 8 on the protruded portion 4 of a cantilever by way of at least two partial coating films 12a and 12b. One or more additional partial coating films may be formed in the intermediate area between these two partial coating films. Each partial coating film is formed by irradiating electron beam 10 on the position where the nanotube 8 is in contact with the protruded portion 4 of the cantilever. The partial coating films are separated not to overlap each other. By minimizing the size of partial coating film as well as by narrowing down the beam diameter, coating time may be further shortened. With the beam diameter narrowed down, excessive deposit of impurities can be put under control.
    • 本发明实现了具有高耐久性的纳米管探针,其可以在短时间内制造,而较少的杂质附着在支撑纳米管的支架上。 根据本发明的纳米管探针通过至少两个部分涂膜12a和12b将纳米管8紧固在悬臂的突出部分4上而构成。 可以在这两个部分涂膜之间的中间区域中形成一个或多个附加的部分涂膜。 每个部分涂膜通过在纳米管8与悬臂的突出部分4接触的位置上照射电子束10而形成。 将部分涂膜分离成不重叠。 通过最小化部分涂膜的尺寸以及通过使光束直径变窄,可以进一步缩短涂布时间。 随着光束直径变窄,可以控制杂质沉积过多。
    • 4. 发明申请
    • Nanotube probe and method for manufacturing the same
    • 纳米管探头及其制造方法
    • US20070018098A1
    • 2007-01-25
    • US10570525
    • 2004-09-08
    • Yoshikazu NakayamaTakashi OkawaShigenobu YamanakaAkio Harada
    • Yoshikazu NakayamaTakashi OkawaShigenobu YamanakaAkio Harada
    • G21K7/00
    • G01Q70/12
    • The present invention realizes a nanotube probe with high durability that can be manufactured in short time with less impurities adhered to the holder sustaining the nanotube. The nanotube probe according to this invention is constructed by fastening a nanotube 8 on the protruded portion 4 of a cantilever by way of at least two partial coating films 12a and 12b. One or more additional partial coating films may be formed in the intermediate area between these two partial coating films. Each partial coating film is formed by irradiating electron beam 10 on the position where the nanotube 8 is in contact with the protruded portion 4 of the cantilever. The partial coating films are separated not to overlap each other. By minimizing the size of partial coating film as well as by narrowing down the beam diameter, coating time may be further shortened. With the beam diameter narrowed down, excessive deposit of impurities can be put under control.
    • 本发明实现了具有高耐久性的纳米管探针,其可以在短时间内制造,而较少的杂质附着在支撑纳米管的支架上。 根据本发明的纳米管探针通过至少两个部分涂膜12a和12b将纳米管8紧固在悬臂的突出部分4上而构成。 可以在这两个部分涂膜之间的中间区域中形成一个或多个附加的部分涂膜。 每个部分涂膜通过在纳米管8与悬臂的突出部分4接触的位置上照射电子束10而形成。 将部分涂膜分离成不重叠。 通过最小化部分涂膜的尺寸以及通过使光束直径变窄,可以进一步缩短涂布时间。 随着光束直径变窄,可以控制杂质沉积过多。