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1. 发明授权

US5356515A Dry etching method 失效
标题翻译：干蚀刻法
公开(公告)号：US5356515A
公开(公告)日：1994-10-18
申请号：US988809
申请日：1992-12-10
申请人： Yoshifumi Tahara , Yoshihisa Hirano , Masahiro Ogasawara , Isahiro Hasegawa , Keiji Horioka , Takaya Matsushita
发明人： Yoshifumi Tahara , Yoshihisa Hirano , Masahiro Ogasawara , Isahiro Hasegawa , Keiji Horioka , Takaya Matsushita
IPC分类号： H01L21/311 , H01L21/00
CPC分类号： H01L21/31116
摘要： A dry etching method which includes supplying a workpiece having an oxide portion or a nitride portion into a processing vessel, keeping said workpiece at temperatures not higher than 0.degree. C. within said processing vessel, supplying an etching gas including a first gas containing a halogen element and a second gas containing carbon having an oxidation number of less than 4 and oxygen to a region in the vicinity of the workpiece while keeping the temperature the workpiece at a level not higher than 0.degree. C., and forming a plasma of said etching gas for etching the oxide portion or the nitride portion of the workpiece with said plasma.
摘要翻译：一种干蚀刻方法，其包括将具有氧化物部分或氮化物部分的工件供应到处理容器中，将所述工件保持在所述处理容器内不高于0℃的温度，提供包括含有卤素的第一气体的蚀刻气体元素和含有氧化数小于4的碳的第二气体和氧气到工件附近的区域，同时将工件的温度保持在不高于0℃的水平，并形成所述蚀刻的等离子体用于利用所述等离子体蚀刻工件的氧化物部分或氮化物部分的气体。

2. 发明授权

US5270266A Method of adjusting the temperature of a semiconductor wafer 失效
标题翻译：调整半导体晶片的温度的方法
公开(公告)号：US5270266A
公开(公告)日：1993-12-14
申请号：US988669
申请日：1992-12-10
申请人： Yoshihisa Hirano , Yoshifumi Tahara , Isahiro Hasegawa , Keiji Horioka
发明人： Yoshihisa Hirano , Yoshifumi Tahara , Isahiro Hasegawa , Keiji Horioka
IPC分类号： B23Q3/15 , H01L21/00 , H01L21/302 , H01L21/3065 , H01L21/683 , H01L21/465
CPC分类号： H01L21/67109 , H01J37/3244 , H01J2237/2001 , Y10S148/05
摘要： A method of adjusting the temperature of a semiconductor wafer comprising mounting and attracting the wafer on a susceptor in a process chamber, exhausting and decompressing the process chamber, controlling the temperature of the wafer to become equal to a process temperature while cooling or heating the susceptor, supplying process gas into the chamber to process the wafer with this process gas, and introducing CF.sub.4 gas into interstices between the wafer and the susceptor through the susceptor to allow heat exchange to be achieved between them. CF.sub.4 gas includes same components as at least some of those of the process gas and it is more excellent in heat transmitting characteristic than helium gas. Even when CF.sub.4 gas is leaked into a process area, therefore, any influence is not added to the process.
摘要翻译：一种调节半导体晶片的温度的方法，包括在处理室中的基座上安装和吸引晶片，对处理室进行排气和减压，在冷却或加热基座的同时将晶片的温度控制为等于处理温度将处理气体供应到室中以用该处理气体处理晶片，并且通过基座将CF 4气体引入到晶片和基座之间的间隙中以允许在它们之间实现热交换。 CF4气体包括与工艺气体中的至少一些相同的组分，并且其传热特性比氦气更优异。因此，即使CF4气体泄漏到处理区域中，也不会对过程产生任何影响。

3. 发明授权

US5698070A Method of etching film formed on semiconductor wafer 失效
标题翻译：在半导体晶片上形成的蚀刻膜的方法
公开(公告)号：US5698070A
公开(公告)日：1997-12-16
申请号：US175513
申请日：1993-12-30
申请人： Yoshihisa Hirano , Yoshifumi Tahara , Hiroshi Nishikawa , Isahiro Hasegawa , Keiji Horioka
发明人： Yoshihisa Hirano , Yoshifumi Tahara , Hiroshi Nishikawa , Isahiro Hasegawa , Keiji Horioka
IPC分类号： H01L21/00 , H05H1/00
CPC分类号： H01L21/67109 , H01J37/3244 , H01J2237/2001
摘要： A method of etching oxide film on a semiconductor wafer comprising pushing the wafer against the top of lower electrode while facing it to an upper electrode, decompressing to exhaust a chamber, forming electric field between the wafer and the upper electrode under decompressed state and generating the gas plasma of process gas while supplying the process gas to an oxide-film-formed surface of the wafer through the upper electrode, introducing auxiliary gas to the peripheral portion of the wafer when the gas plasma of process gas is acting on the wafer, and controlling the etching reaction of the gas plasma relative to the peripheral portion of the wafer by auxiliary gas.
摘要翻译：一种在半导体晶片上蚀刻氧化膜的方法，包括将晶片压靠在下电极的顶部同时面向上电极，减压以排出室，在解压缩状态下在晶片和上电极之间形成电场，并产生在处理气体的气体等离子体中，同时通过上部电极将工艺气体供给到晶片的氧化物膜形成表面，当处理气体的气体等离子体作用在晶片上时，将辅助气体引入晶片的周边部分，以及通过辅助气体控制气体等离子体相对于晶片的周边部分的蚀刻反应。

4. 发明授权

US5302236A Method of etching object to be processed including oxide or nitride portion 失效
标题翻译：蚀刻包括氧化物或氮化物部分的待处理物体的方法
公开(公告)号：US5302236A
公开(公告)日：1994-04-12
申请号：US779376
申请日：1991-10-18
申请人： Yoshifumi Tahara , Yoshihisa Hirano , Isahiro Hasegawa , Keiji Horioka
发明人： Yoshifumi Tahara , Yoshihisa Hirano , Isahiro Hasegawa , Keiji Horioka
IPC分类号： H01L21/311 , H01L21/00
CPC分类号： H01L21/31144 , H01L21/31116
摘要： According to this invention, a semiconductor wafer on which an oxide or nitride film is formed is loaded in a processing vessel, and when the oxide or nitride film of the semiconductor wafer is to be etched by a plasma of CHF.sub.3 gas in the processing vessel, CO gas is present in the plasma atmosphere.
摘要翻译：根据本发明，其中形成有氧化物或氮化物膜的半导体晶片被装载到处理容器中，并且当半导体晶片的氧化物或氮化物膜被处理容器中的CHF 3气体的等离子体蚀刻时， CO气体存在于等离子体气氛中。

5. 发明授权

US5411624A Magnetron plasma processing apparatus 失效
标题翻译：磁控管等离子体处理装置
公开(公告)号：US5411624A
公开(公告)日：1995-05-02
申请号：US173473
申请日：1993-12-27
申请人： Yoshihisa Hirano , Yoshifumi Takara , Masahiro Ogasawara
发明人： Yoshihisa Hirano , Yoshifumi Takara , Masahiro Ogasawara
IPC分类号： H01J37/34 , H01L21/00
CPC分类号： H01J37/3411 , H01J37/3405 , H01J37/347
摘要： A magnetron plasma processing apparatus includes a reaction chamber for housing an object to be processed, an electric field generating device, provided in the reaction chamber and having a first electrode for placing the object to be processed thereon and a second electrode opposing the first electrode, for generating an electric field between the first and second electrodes, a magnetic field generating device for generating a magnetic field having a component perpendicular to the electric field, and a device for supplying a reaction gas into the reaction chamber to generate a magnetron plasma by functions of the electric field and the magnetic field. A ring for strengthening the component of the electric field perpendicular to the magnetic field and for increasing the plasma generated at the peripheral portion of the object to be processed is provided to surround the peripheral portion of the object to be processed.
摘要翻译：磁控管等离子体处理装置包括用于容纳待处理物体的反应室，设置在反应室中的电场产生装置，具有用于放置待处理物体的第一电极和与第一电极相对的第二电极，用于在第一和第二电极之间产生电场，用于产生具有垂直于电场的分量的磁场的磁场产生装置，以及用于将反应气体供应到反应室中以通过功能产生磁控管等离子体的装置的电场和磁场。设置用于加强与磁场垂直的电场的分量并增加在被处理物体的周边部分产生的等离子体的环，以包围被处理物体的周边部分。

6. 发明授权

US07144257B2 Mounting structure, electro-optical device, electronic apparatus, and method of manufacturing electro-optical device 有权
标题翻译：安装结构，电光装置，电子设备和制造电光装置的方法
公开(公告)号：US07144257B2
公开(公告)日：2006-12-05
申请号：US11055361
申请日：2005-02-10
申请人： Masanori Yumoto , Chiaki Imaeda , Yoshihisa Hirano
发明人： Masanori Yumoto , Chiaki Imaeda , Yoshihisa Hirano
IPC分类号： H01R12/00
CPC分类号： G02F1/13452 , H05K1/141 , H05K1/147 , H05K2201/09081
摘要： An electro-optical device is provided wherein a plurality of electronic components is integrally mounted on a circuit board and the circuit board is then connected to an FPC board. In the FPC board, a protrusion portion extending in the length direction of the FPC board is formed, and terminals of the protrusion portion and terminals of the circuit board are connected to each other in a state where an end of the circuit board overlapping the surface of a main body of the FPC board enters the back surface side of the protrusion portion and thus the protrusion portion overlaps the circuit board, so that the circuit board is disposed to intersect the protrusion portion.
摘要翻译：提供一种电光装置，其中多个电子部件一体地安装在电路板上，然后电路板连接到FPC板。在FPC基板上，形成在FPC基板的长度方向上延伸的突出部，并且电路基板的端部与表面重叠的状态下，突起部和电路基板的端子的端子相互连接 FPC基板的主体进入突起部的背面侧，突出部与电路基板重叠，电路基板与突出部相交。

7. 发明授权

US06416193B2 Side-view mirrors 有权
标题翻译：侧视镜
公开(公告)号：US06416193B2
公开(公告)日：2002-07-09
申请号：US09858463
申请日：2001-05-17
申请人： Yoshihisa Hirano , Kyozo Omi
发明人： Yoshihisa Hirano , Kyozo Omi
IPC分类号： G02B7182
CPC分类号： B60R1/068 , B60R1/062 , B60R1/07
摘要： Side-view mirrors are provided in which, without adversely affecting operations of retracting side-view mirrors and adjusting mirror surfaces, mechanisms are greatly simplified and a waterproofing/dustproofing mechanism can be omitted, thereby resulting in much lower manufacturing costs. In a switching driving section of the control device which adjusts the mirror surfaces of a pair of left-side and right-side side-view mirrors, a motor is selectively meshed with gears or gears by a switching operation by a plunger. The mirror surfaces of the side-view mirrors can thereby be adjusted to an arbitrary mounting angle. Namely, driving mechanisms provided for each of a left-side and a right-side as in conventional structures are combined into the single switching driving section, and thus the manufacturing costs are greatly reduced.
摘要翻译：提供了侧视镜，其中，在不利地影响后视镜和调整镜面的操作的情况下，大大简化了机构，并且可以省略防水/防尘机构，从而导致低得多的制造成本。在调整一对左侧和右侧侧视镜的镜面的控制装置的切换驱动部中，通过柱塞的切换操作，马达选择性地与齿轮或齿轮啮合。因此可以将侧视镜的镜面调节到任意的安装角度。也就是说，像传统结构那样为每一个左侧和右侧设置的驱动机构被组合成单个开关驱动部分，从而大大降低了制造成本。

8. 发明授权

US09335858B2 Input device 有权
标题翻译：输入设备
公开(公告)号：US09335858B2
公开(公告)日：2016-05-10
申请号：US13568254
申请日：2012-08-07
申请人： Takahiro Shirai , Yoshihisa Hirano , Yasuhiro Fujioka
发明人： Takahiro Shirai , Yoshihisa Hirano , Yasuhiro Fujioka
IPC分类号： G06F3/041 , G06F1/16 , G06F3/044
CPC分类号： G06F3/0416 , G06F1/1643 , G06F3/041 , G06F3/044
摘要： An input device includes a touch panel configured to be displaceable in vertical direction and to be urged upwardly toward an original position in a non-depressed state, a depression start detector that detects a start of a depression manipulation of the touch panel while the touch panel is depressed and displaced downward, a determination manipulation detector that detects a determination manipulation based on the touch panel is displaced to a position which is lower than a position where the depression start detector detects the start of the depression manipulation, and a decision unit that stores the touch position when the depression start detector detects the start of the depression manipulation, and thereafter decides that the determination manipulation has been conducted at the stored touch position when the determination manipulation detector detects the determination manipulation.
摘要翻译：一种输入装置，包括：触摸面板，被配置为在垂直方向上可移动并且被向上朝非原始位置向上推压;按压开始检测器，其在触摸面板上检测触摸面板的按压操作开始; 被按下并向下移位，检测基于触摸面板的确定操作的判定操作检测器被移位到低于按压开始检测器检测到开始按压操作的位置的位置，以及存储当按压开始检测器检测到按压操作的开始时的触摸位置，然后当判定操作检测器检测到确定操作时，决定已经在存储的触摸位置进行了确定操作。

9. 发明授权

US08348013B2 Exhaust device of internal combustion engine 有权
标题翻译：内燃机排气装置
公开(公告)号：US08348013B2
公开(公告)日：2013-01-08
申请号：US13020135
申请日：2011-02-03
申请人： Hisashi Uneta , Taichi Honda , Tomoya Matsuo , Yoshihisa Hirano
发明人： Hisashi Uneta , Taichi Honda , Tomoya Matsuo , Yoshihisa Hirano
IPC分类号： F01N1/02 , F01N1/08
CPC分类号： F01N1/084 , F01N1/02 , F01N1/083 , F01N1/089 , F01N2260/06 , F01N2490/16
摘要： An exhaust device of an internal combustion engine for reducing exhaust sound and for suppressing the occurrence of a torque valley. A sound-deadening and pressure-dissipating device connected to the downstream end of an exhaust pipe includes a spherical member having an opening portion opening toward a downstream edge of the exhaust pipe. Exhaust gas from the exhaust pipe is reflected by an inner spherical surface of the spherical member to reduce exhaust pressure in the spherical member and then is discharged from the opening portion.
摘要翻译：一种用于减少排气声音并抑制扭矩谷的发生的内燃机的排气装置。连接到排气管的下游端的消音和减压装置包括具有朝向排气管的下游边缘开口的开口部的球形部件。来自排气管的废气由球形构件的内球面反射，以减小球形构件中的排气压力，然后从开口部排出。

10. 发明授权

US08072765B2 Electro-optical apparatus, flexible printed circuit board, manufacturing method for electro-optical apparatus, and electronic equipment 有权
标题翻译：电光装置，柔性印刷电路板，电光装置的制造方法以及电子设备
公开(公告)号：US08072765B2
公开(公告)日：2011-12-06
申请号：US10944674
申请日：2004-09-17
申请人： Masanori Yumoto , Yoshihisa Hirano , Chiaki Imaeda
发明人： Masanori Yumoto , Yoshihisa Hirano , Chiaki Imaeda
IPC分类号： H05K1/00
CPC分类号： G02F1/13452 , G02F1/133615 , H05K1/141 , H05K1/147 , H05K3/361 , H05K2201/045 , H05K2201/055
摘要： A liquid crystal display device includes a liquid crystal display panel having a first substrate and a second substrate opposed thereto arranged so that the inner surfaces thereof oppose each other with an intermediate sealing member and a liquid crystal interposed in the internal space, and a flexible printed circuit board having an input/output terminals connected thereto. A circuit board on which a plurality of electronic components required for operating the liquid crystal display apparatus are mounted on the flexible printed circuit board.
摘要翻译：液晶显示装置包括具有第一基板和与其相对的第二基板的液晶显示面板，其布置成使得其内表面相对于中间密封构件和插入在内部空间中的液晶，并且柔性印刷电路板具有连接到其上的输入/输出端子。在柔性印刷电路板上安装有用于操作液晶显示装置所需的多个电子部件的电路板。

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