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1. 发明授权

US5698070A Method of etching film formed on semiconductor wafer 失效
标题翻译：在半导体晶片上形成的蚀刻膜的方法
公开(公告)号：US5698070A
公开(公告)日：1997-12-16
申请号：US175513
申请日：1993-12-30
申请人： Yoshihisa Hirano , Yoshifumi Tahara , Hiroshi Nishikawa , Isahiro Hasegawa , Keiji Horioka
发明人： Yoshihisa Hirano , Yoshifumi Tahara , Hiroshi Nishikawa , Isahiro Hasegawa , Keiji Horioka
IPC分类号： H01L21/00 , H05H1/00
CPC分类号： H01L21/67109 , H01J37/3244 , H01J2237/2001
摘要： A method of etching oxide film on a semiconductor wafer comprising pushing the wafer against the top of lower electrode while facing it to an upper electrode, decompressing to exhaust a chamber, forming electric field between the wafer and the upper electrode under decompressed state and generating the gas plasma of process gas while supplying the process gas to an oxide-film-formed surface of the wafer through the upper electrode, introducing auxiliary gas to the peripheral portion of the wafer when the gas plasma of process gas is acting on the wafer, and controlling the etching reaction of the gas plasma relative to the peripheral portion of the wafer by auxiliary gas.
摘要翻译：一种在半导体晶片上蚀刻氧化膜的方法，包括将晶片压靠在下电极的顶部同时面向上电极，减压以排出室，在解压缩状态下在晶片和上电极之间形成电场，并产生在处理气体的气体等离子体中，同时通过上部电极将工艺气体供给到晶片的氧化物膜形成表面，当处理气体的气体等离子体作用在晶片上时，将辅助气体引入晶片的周边部分，以及通过辅助气体控制气体等离子体相对于晶片的周边部分的蚀刻反应。

2. 发明授权

US6110287A Plasma processing method and plasma processing apparatus 失效
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US6110287A
公开(公告)日：2000-08-29
申请号：US843129
申请日：1997-04-28
申请人： Izumi Arai , Yoshifumi Tahara , Hiroshi Nishikawa , Yoshinobu Mitano , Shunichi Iimuro , Kazuo Fukasawa , Yutaka Miura , Shozo Hosoda
发明人： Izumi Arai , Yoshifumi Tahara , Hiroshi Nishikawa , Yoshinobu Mitano , Shunichi Iimuro , Kazuo Fukasawa , Yutaka Miura , Shozo Hosoda
IPC分类号： C23C16/509 , H01J37/32 , H01L21/00 , C23C16/00
CPC分类号： H01L21/67069 , C23C16/5096 , H01J37/3244
摘要： A plasma processing method in which a high-frequency power is supplied to a processing chamber in which an object to be processed is mounted, thereby producing a plasma in the processing chamber, and the object is processed in an atmosphere of the plasma, wherein the high-frequency power is subjected to modulation by a low-frequency power. In one embodiment a plasma is produced in a processing chamber by using an electric power with a direction of current changed with passing of time, and the object to be processed is processed in an atmosphere of the plasma, wherein a power having a basic frequency is subjected to frequency modulation with a frequency equal to n-times (n=an integer) the basic frequency. In a plasma processing apparatus of the invention, while a process gas is supplied to a processing chamber via a first gas introducing hole formed in an electrode, an object to be processed, which is held on an opposed electrode, is subjected to plasma processing. There is provided a resistance applying [means for applying] apply resistance to the process gas flowing to the processing chamber via the gas introducing hole from the gas introducing means such that a plasma discharge is prevented from occurring in the gas introducing means when a process pressure in the processing chamber is set at 0.5 Torr or less.
摘要翻译：一种等离子体处理方法，其中将高频电力供应到其中安装有被处理物体的处理室，从而在处理室中产生等离子体，并且在等离子体的气氛中对物体进行处理，其中高频功率受到低频功率的调制。在一个实施例中，通过使用具有随时间变化的电流方向的电力在处理室中产生等离子体，并且待处理物体在等离子体的气氛中被处理，其中具有基本频率的功率为以频率等于基本频率的n倍（n =整数）的频率进行频率调制。在本发明的等离子体处理装置中，当通过形成在电极中的第一气体导入孔将处理气体供给到处理室时，对被保持在对置电极上的被处理物进行等离子体处理。提供了一种电阻，其应用[施加装置]对来自气体导入装置的气体导入孔流向处理室的工艺气体施加阻力，使得当气体导入装置中的过程压力在处理室中设定为0.5乇以下。

3. 发明授权

US5571366A Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US5571366A
公开(公告)日：1996-11-05
申请号：US327798
申请日：1994-10-20
申请人： Nobuo Ishii , Jiro Hata , Chishio Koshimizu , Yoshifumi Tahara , Hiroshi Nishikawa , Isei Imahashi
发明人： Nobuo Ishii , Jiro Hata , Chishio Koshimizu , Yoshifumi Tahara , Hiroshi Nishikawa , Isei Imahashi
IPC分类号： H01J37/32 , H05H1/00
CPC分类号： H01J37/32082 , H01J37/32091 , H01J37/321 , H01J37/32174 , H01J37/32935 , H01J37/32963 , H01J37/3299 , H01J2237/334 , H01J2237/3343
摘要： A plasma processing apparatus includes a chamber having a gas inlet port and a gas discharge port, a rest table, arranged in the chamber, for supporting a wafer which has a surface to be processed, a radio frequency antenna for supplying a radio frequency energy into the chamber, and generating an induced plasma in the chamber, and a radio frequency voltage source for applying a radio frequency voltage to the radio frequency antenna. A pressure and/or light variation in the chamber is measured during generation of the plasma, by a measurement system, and the radio frequency voltage source is controlled based on a signal from the measurement system, so that voltage to be applied to the antenna is controlled according to the pressure and/or light in the chamber.
摘要翻译：一种等离子体处理装置，包括具有气体入口和气体排出口的室，设置在室内的用于支撑具有待处理表面的晶片的静止台，用于将射频能量供给的射频天线并且在腔室中产生感应等离子体，以及用于向射频天线施加射频电压的射频电压源。通过测量系统在等离子体的产生期间测量室中的压力和/或光的变化，并且基于来自测量系统的信号来控制射频电压源，使得施加到天线的电压为根据腔室内的压力和/或光线进行控制。

4. 发明申请

US20150291364A1 SCREW-DRIVE CONVEYING APPARATUS 有权
标题翻译：螺丝传动装置
公开(公告)号：US20150291364A1
公开(公告)日：2015-10-15
申请号：US14752349
申请日：2015-06-26
申请人： Hiroshi Nishikawa , Toshiyuki Iba
发明人： Hiroshi Nishikawa , Toshiyuki Iba
IPC分类号： B65G35/06
CPC分类号： B65G35/066 , B61B13/12
摘要： A screw-drive conveying apparatus has on a conveying traveling body side, a first driven roller pair having a shorter distance between two driven front and rear rollers and a second driven roller pair having a longer distance between two driven front and rear rollers. A first screw shaft row with which the respective driven rollers of the first driven roller pair are engaged and a second screw shaft row with which the respective driven rollers of the second driven roller pair are engaged are provided on a traveling path side. The length of screw discontinued spaces between both screw shaft rows is equal to the distance between the driven rollers of the driven roller pair engaged with the screw shaft row on the upstream side.
摘要翻译：螺杆驱动输送装置具有输送行进体侧，在两个从动前后辊之间具有较短距离的第一从动辊对和在两个从动前辊和后辊之间具有较长距离的第二从动辊对。第一从动辊对的从动辊与第一从动辊对啮合的第一螺纹轴列和第二从动辊对的各个从动辊与其啮合的第二螺杆轴列设置在行进路径侧。两个螺杆轴列之间的螺钉中断空间的长度等于从动辊对的从动辊与上游侧的螺杆轴排啮合的距离。

5. 发明授权

US08792145B2 Image reading apparatus with cleaning member on one reading unit higher in cleaning ability than cleaning member on the other reading unit 有权
标题翻译：图像读取装置，其清洁部件在一个读取单元上的清洁能力高于另一个读取单元上的清洁部件
公开(公告)号：US08792145B2
公开(公告)日：2014-07-29
申请号：US13016500
申请日：2011-01-28
申请人： Hiroshi Nishikawa
发明人： Hiroshi Nishikawa
IPC分类号： H04N1/04
CPC分类号： H04N1/203 , H04N1/00909 , H04N1/121 , H04N1/193 , H04N1/2032
摘要： An image reading apparatus includes a conveying unit for conveying documents one by one, a first reading unit for optically reading the conveyed document through a first transparent member provided at a first reading position on a conveying path in the conveying unit, a first cleaning unit for cleaning the first transparent member provided at the first reading position, a second reading unit for optically reading the conveyed document through a second transparent member provided at a second reading position on the conveying path in the conveying unit and on a downstream side of the first reading position, and a second cleaning unit for cleaning the second transparent member provided at the second reading position. The second cleaning unit is higher in cleaning ability than the first cleaning unit.
摘要翻译：图像读取装置包括一个一个地传送文件的传送单元，用于通过设置在传送单元中的传送路径上的第一读取位置的第一透明构件光学地读取被传送文件的第一读取单元，用于清洁设置在第一读取位置的第一透明构件，第二读取单元，用于通过设置在输送单元中的输送路径上的第二读取位置处的第二透明构件和第一读数的下游侧光学地读取被输送的原稿位置，以及用于清洁设置在第二读取位置的第二透明构件的第二清洁单元。第二清洁单元的清洁能力高于第一清洁单元。

6. 发明授权

US08724334B2 Circuit module and manufacturing method for the same 有权
标题翻译：电路模块及其制造方法相同
公开(公告)号：US08724334B2
公开(公告)日：2014-05-13
申请号：US13547085
申请日：2012-07-12
申请人： Hiroshi Nishikawa , Makoto Fujita , Fumikiyo Kawahara
发明人： Hiroshi Nishikawa , Makoto Fujita , Fumikiyo Kawahara
IPC分类号： H05K7/00
CPC分类号： H05K3/284 , H01L21/561 , H01L23/29 , H01L23/3121 , H01L23/552 , H01L24/97 , H01L2224/48227 , H01L2224/97 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/014 , H01L2924/14 , H01L2924/15192 , H01L2924/1815 , H01L2924/19041 , H01L2924/19105 , H01L2924/3025 , H05K1/0218 , H05K1/095 , H05K3/0044 , H05K3/0052 , H05K3/381 , H05K2203/025 , H05K2203/1316 , Y10T29/49117 , Y10T29/49124 , Y10T29/49126 , Y10T29/4913 , Y10T29/49146 , Y10T29/49151 , Y10T29/49789 , Y10T29/49798 , H01L2224/85
摘要： A circuit module and a manufacturing method for the same, reduce a possibility that a defect area where an electrically conductive resin is not coated may occur in a shield layer. A mother board is prepared. A plurality of electronic components are mounted on a principal surface of the mother board. An insulator layer is arranged so as to cover the principal surface of the mother board and the electronic components. The insulator layer is cut such that grooves and projections are formed in and on the principal surface of the insulator layer and the insulator layer has a predetermined thickness H. An electrically conductive resin is coated on the principal surface of the insulator layer to form a shield layer. The mother board including the insulator layer and the shield layer both formed thereon is divided to obtain a plurality of circuit modules.
摘要翻译：电路模块及其制造方法可以降低屏蔽层中可能发生未涂覆导电性树脂的缺陷区域的可能性。准备了一个母板。多个电子部件安装在母板的主表面上。绝缘体层被布置成覆盖母板和电子部件的主表面。绝缘体层被切割成使得沟槽和突起形成在绝缘体层的主表面中并且在绝缘体层的主表面上并且绝缘体层具有预定的厚度H.导电树脂涂覆在绝缘体层的主表面上以形成屏蔽层。包括其上形成的绝缘体层和屏蔽层的母板被划分以获得多个电路模块。

7. 发明授权

US08527314B2 Optimum service selection assisting system 有权
标题翻译：最优服务选择辅助系统
公开(公告)号：US08527314B2
公开(公告)日：2013-09-03
申请号：US10890152
申请日：2004-07-14
申请人： Hiroshi Nishikawa , Youichi Araki , Kiichi Hama
发明人： Hiroshi Nishikawa , Youichi Araki , Kiichi Hama
IPC分类号： G06Q10/00
CPC分类号： G06Q10/06 , G06Q10/06311 , G06Q10/06375
摘要： A user terminal is connected through the Internet to a server. On the basis of the identification information of the client inputted from the client terminal, the server extracts an service selected by the client from a database for user management, further, extracts calculated maintenance contents for each service from a database for service management and sends them to the user terminal. Thus, the user can collect maintenance contents, such as the staff capable of providing service, the time until the user receives a service, and the charge, so that the user can utilize the information as indications to select an optimal service such as maintenance.
摘要翻译：用户终端通过因特网连接到服务器。根据从客户终端输入的客户端的识别信息，服务器从数据库中提取客户端选择的服务进行用户管理，并从服务管理数据库中提取每个服务的维护内容，并将其发送给到用户终端。因此，用户可以收集诸如能够提供服务的人员的维护内容，直到用户接收到服务的时间和费用，使得用户可以利用该信息作为选择诸如维护的最佳服务的指示。

8. 发明授权

US08503039B2 Image reading apparatus 有权
标题翻译：图像读取装置
公开(公告)号：US08503039B2
公开(公告)日：2013-08-06
申请号：US12981843
申请日：2010-12-30
申请人： Hiroshi Nishikawa
发明人： Hiroshi Nishikawa
IPC分类号： H04N1/04 , H04N1/40
CPC分类号： H04N1/12 , H04N1/00909 , H04N1/1235 , H04N1/125 , H04N1/193 , H04N2201/0081
摘要： In an image reading apparatus, a white reference member for obtaining a reference value used in shading correction in the reading mechanism and an elastic member for cleaning a surface of the transparent member are provided such that respective positions of the white reference member and the elastic member with respect to the transparent member are variable. A controller controls the positions of these members with respect to the transparent member to alternately achieve movement of the white reference member to a position where the white reference member faces the transparent member and movement of the elastic member to a position where the elastic member faces the transparent member. The controller calculates the above reference value using a plurality of detection values read by the reading mechanism through the above positional control.
摘要翻译：在图像读取装置中，设置用于获得在读取机构中的阴影校正中使用的基准值的白色基准部件和用于清洁透明部件的表面的弹性部件，使得白色基准部件和弹性部件相对于透明构件是可变的。控制器控制这些构件相对于透明构件的位置，以交替地实现白色基准构件到白色基准构件面对透明构件的位置的移动，并且弹性构件移动到弹性构件面向的位置透明会员控制器使用通过上述位置控制由读取机构读取的多个检测值来计算上述基准值。

9. 发明授权

US08431827B2 Circuit modules and method of managing the same 有权
标题翻译：电路模块及其管理方法
公开(公告)号：US08431827B2
公开(公告)日：2013-04-30
申请号：US13155463
申请日：2011-06-08
申请人： Hiroshi Nishikawa , Taro Hirai
发明人： Hiroshi Nishikawa , Taro Hirai
IPC分类号： H05K1/00
CPC分类号： H05K1/0266 , H05K2201/09927 , Y10T29/49108 , Y10T29/49115 , Y10T29/49121 , Y10T29/49155
摘要： Circuit modules including identification codes and a method of managing them are provided. A module substrate includes signal input output terminals and outer ground terminals provided at the peripheral portions of a surface which becomes a mounting surface when the circuit module is completed. An inner-ground-terminal formation area surrounded by the signal input output terminals and the outer ground terminals includes a plurality of inner ground terminals arranged in a matrix of rows and columns. One of the edge portions is a direction identification area. The inner ground terminal is not provided in the direction identification area, and a first identification code having information about the position of the module substrate is provided in the direction identification area.
摘要翻译：提供了包括识别码的电路模块及其管理方法。模块基板包括设置在电路模块完成时成为安装表面的表面的周边部分处的信号输入端子和外部接地端子。由信号输入输出端子和外部接地端子包围的内部 - 地面端子形成区域包括以行和列为矩阵排列的多个内部接地端子。边缘部分之一是方向识别区域。内部接地端子不设置在方向识别区域，并且具有关于模块基板的位置的信息的第一识别码被提供在方向识别区域。

10. 发明授权

US08240035B2 Circuit module and manufacturing method for the same 有权
标题翻译：电路模块及其制造方法相同
公开(公告)号：US08240035B2
公开(公告)日：2012-08-14
申请号：US13005018
申请日：2011-01-12
申请人： Hiroshi Nishikawa , Makoto Fujita , Fumikiyo Kawahara
发明人： Hiroshi Nishikawa , Makoto Fujita , Fumikiyo Kawahara
IPC分类号： H05K3/30
CPC分类号： H05K3/284 , H01L21/561 , H01L23/29 , H01L23/3121 , H01L23/552 , H01L24/97 , H01L2224/48227 , H01L2224/97 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/014 , H01L2924/14 , H01L2924/15192 , H01L2924/1815 , H01L2924/19041 , H01L2924/19105 , H01L2924/3025 , H05K1/0218 , H05K1/095 , H05K3/0044 , H05K3/0052 , H05K3/381 , H05K2203/025 , H05K2203/1316 , Y10T29/49117 , Y10T29/49124 , Y10T29/49126 , Y10T29/4913 , Y10T29/49146 , Y10T29/49151 , Y10T29/49789 , Y10T29/49798 , H01L2224/85
摘要： A circuit module and a manufacturing method for the same, reduce a possibility that a defect area where an electrically conductive resin is not coated may occur in a shield layer. A mother board is prepared. A plurality of electronic components are mounted on a principal surface of the mother board. An insulator layer is arranged so as to cover the principal surface of the mother board and the electronic components. The insulator layer is cut such that grooves and projections are formed in and on the principal surface of the insulator layer and the insulator layer has a predetermined thickness H. An electrically conductive resin is coated on the principal surface of the insulator layer to form a shield layer. The mother board including the insulator layer and the shield layer both formed thereon is divided to obtain a plurality of circuit modules.
摘要翻译：电路模块及其制造方法可以降低屏蔽层中可能发生未涂覆导电性树脂的缺陷区域的可能性。准备了一个母板。多个电子部件安装在母板的主表面上。绝缘体层被布置成覆盖母板和电子部件的主表面。绝缘体层被切割成使得沟槽和突起形成在绝缘体层的主表面中并且在绝缘体层的主表面上并且绝缘体层具有预定的厚度H.导电树脂涂覆在绝缘体层的主表面上以形成屏蔽层。包括其上形成的绝缘体层和屏蔽层的母板被划分以获得多个电路模块。

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