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1. 发明授权

US06335522B1 Optical probe having a refractive index micro-lens and method of manufacturing the same 有权
$Optical probe having a refractive index micro-lens and method of manufacturing the same$
标题翻译：具有折射率微透镜的光学探针及其制造方法
公开(公告)号：US06335522B1
公开(公告)日：2002-01-01
申请号：US09426946
申请日：1999-10-26
申请人： Yasuhiro Shimada , Takayuki Yagi , Takayuki Teshima , Ryo Kuroda
发明人： Yasuhiro Shimada , Takayuki Yagi , Takayuki Teshima , Ryo Kuroda
IPC分类号： G02B704
CPC分类号： G01Q60/22 , Y10S977/862
摘要： An optical probe which comprises a substrate, an elastic body supported by the substrate and having a free end, a projection having a micro-aperture and arranged at the free end of the elastic body, and a refractive index micro-lens also arranged at the free end of the elastic body and adapted to focus light to the micro-aperture.
摘要翻译：一种光学探针，其包括基板，由基板支撑并具有自由端的弹性体，具有微孔并且布置在弹性体自由端的突起，以及折射率微透镜，其还布置在弹性体的自由端并适于将光聚焦到微孔。

2. 发明授权

US06215114B1 Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe 失效
标题翻译：用于检测或照射光的光学探针和具有这种探针的近场光学显微镜及其制造方法
公开(公告)号：US06215114B1
公开(公告)日：2001-04-10
申请号：US09158494
申请日：1998-09-23
申请人： Takayuki Yagi , Tsutomu Ikeda , Ryo Kuroda , Yasuhiro Shimada
发明人： Takayuki Yagi , Tsutomu Ikeda , Ryo Kuroda , Yasuhiro Shimada
IPC分类号： H01L2100
CPC分类号： G01Q60/22 , Y10S977/862
摘要： An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.
摘要翻译：用于检测或照射ev逝光的光学证明是通过在基片上形成具有调节膜厚的膜，然后从基片的后表面形成一个凹槽，并从该凹部的一侧形成一个通孔通过蚀刻。获得的光学探针在通孔的尖端处具有微孔，并且通常在单个衬底上形成各自具有均匀轮廓的微孔的多个光学探针。在凹部中，可以设置光接收或光照射装置。

3. 发明授权

US06337477B1 Probe having micro-projection and manufacturing method thereof 失效
标题翻译：探头具有微投影及其制造方法
公开(公告)号：US06337477B1
公开(公告)日：2002-01-08
申请号：US09353153
申请日：1999-07-14
申请人： Yasuhiro Shimada , Takayuki Yagi , Ryo Kuroda
发明人： Yasuhiro Shimada , Takayuki Yagi , Ryo Kuroda
IPC分类号： G12B2100
CPC分类号： G01Q60/22 , Y10S977/875 , Y10S977/879
摘要： A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.
摘要翻译：一种具有用于近场扫描光学显微镜（NSOM）的微投影的探针，其包括衬底，布置在衬底上并彼此电隔离并且由导电材料制成的第一和第二接合层，以及微突起通过第一和第二接合层接合到衬底并且在内部具有空腔。微型突起具有由不同的材料制成的第一和第二材料层，并在另一个之间铺设，以在它们之间形成连接中间层。第一和第二材料层分别和独立地电连接到第一和第二结层。

4. 发明授权

US5260567A Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit 失效
标题翻译：悬臂单元和原子力显微镜，磁力显微镜，再现装置和使用悬臂单元的信息处理装置
公开(公告)号：US5260567A
公开(公告)日：1993-11-09
申请号：US865227
申请日：1992-04-08
申请人： Ryo Kuroda , Katsunori Hatanaka , Toshihiko Miyazaki , Takayuki Yagi , Toshimitsu Kawase , Katsuhiko Shinjo
发明人： Ryo Kuroda , Katsunori Hatanaka , Toshihiko Miyazaki , Takayuki Yagi , Toshimitsu Kawase , Katsuhiko Shinjo
IPC分类号： G01B21/30 , G01B7/34 , G01B9/02 , G01N37/00 , G01P15/08 , G01Q20/02 , G01Q60/08 , G01Q60/24 , G01Q60/40 , G01Q60/50 , G01Q60/56 , G01Q70/14 , G01Q80/00 , G01R33/038 , G11B9/00 , G11B9/14 , H01J5/16
CPC分类号： G01B9/02051 , B82Y35/00 , G01B9/02022 , G01B9/02023 , G01P15/0894 , G01Q20/02 , G01Q60/08 , G01Q60/38 , G01Q60/56 , G01R33/0385 , G11B9/14 , G11B9/1409 , G11B9/1418 , B82Y10/00 , B82Y25/00 , G01B2290/30 , G01Q80/00 , Y10S977/868 , Y10S977/873
摘要： A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of an displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.

5. 发明申请

US20060081776A1 Probe with hollow waveguide and method for producing the same 失效
标题翻译：中空波导探头及其制造方法
公开(公告)号：US20060081776A1
公开(公告)日：2006-04-20
申请号：US11254638
申请日：2005-10-21
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01Q60/22 , G02B6/10 , G02B6/122 , G02B6/241
摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.
摘要翻译：用于检测光或照射光的探针包括在其一端由基底支撑的悬臂，形成在悬臂的自由端的中空尖端，在尖端的端部形成的微孔，以及形成在悬臂内的中空波导。一种用于光检测或光照射的探针的制造方法，包括以下步骤：在基板上加工形成槽，在所述槽上形成平板状的盖部，形成在其一部分具有开口部的中空波导管，在开口上形成具有微孔的中空尖端，并通过蚀刻去除衬底的一部分，以形成悬臂。

6. 发明授权

US06408123B1 NEAR-FIELD OPTICAL PROBE HAVING SURFACE PLASMON POLARITON WAVEGUIDE AND METHOD OF PREPARING THE SAME AS WELL AS MICROSCOPE, RECORDING/REGENERATION APPARATUS AND MICRO-FABRICATION APPARATUS USING THE SAME 失效
标题翻译：具有表面等离子体波长的近场光学探针及其制备方法如微晶，记录/再生装置和使用其的微型制造装置
公开(公告)号：US06408123B1
公开(公告)日：2002-06-18
申请号：US09708587
申请日：2000-11-09
申请人： Ryo Kuroda , Yasuhiro Shimada , Takako Yamaguchi
发明人： Ryo Kuroda , Yasuhiro Shimada , Takako Yamaguchi
IPC分类号： G02B610
CPC分类号： G01Q60/22 , Y10S977/862
摘要： A near-field optical probe comprises a micro-aperture for irradiating and/or detecting evanescent light through the front end of the probe, an elastically deformable cantilever supporting the micro-aperture at the free end thereof, and a surface plasmon polariton waveguide arranged on the cantilever to guide light from a light source to the micro-aperture and/or to guide light from a light source introduced through the micro-aperture.
摘要翻译：近场光学探针包括用于照射和/或检测通过探针的前端的ev逝光的微孔，在其自由端支撑微孔的可弹性变形的悬臂和布置在其上的表面等离子体激元波导管所述悬臂将光从光源引导到微孔和/或引导来自通过微孔引入的光源的光。

7. 发明授权

US06408122B1 Probe for irradiating with or detecting light and method for manufacturing the same 失效
标题翻译：用于照射或检测光的探针及其制造方法
公开(公告)号：US06408122B1
公开(公告)日：2002-06-18
申请号：US09689685
申请日：2000-10-13
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： G02B610
CPC分类号： G01Q60/22 , Y10S977/862
摘要： A method for manufacturing a probe for irradiating with or detecting light is disclosed, which is possible by a batch process with high productivity, has the high process reproducibility of optical micro-apertures, facilitates integration and down sizing, enables a plurality of probes to be fabricated easily, enables fabrication on compound semiconductor substrates, does not need coupling light between a wave guide layer and an optical micro-aperture, and minimize the transmission loss of light; and a probe for irradiating with or detecting light. The method comprises the steps of: (a) forming at least one recession on a first substrate; (b) fabricating a probe structure that contains a wave guide layer on the first substrate with the above recession; (c) bonding the probe structure on a second substrate; (d) transferring the probe structure that has a protrusion onto the second substrate, by peeling the probe structure off the first substrate; and (e) forming a cantilever-type probe that has a protrusion on a free end thereof by removing a part of the second substrate.
摘要翻译：公开了用于照射或检测光的探针的制造方法，其可以通过以高生产率的间歇法生产，具有高的光学微孔的再现性，便于集成和降尺寸，使得多个探针能够容易制造，能够在复合半导体基板上制造，不需要在波导层和光学微孔之间耦合光，并且使光的传输损耗最小化; 以及用于照射或检测光的探针。该方法包括以下步骤：（a）在第一基底上形成至少一个凹陷; （b）制造在上述衰退的第一基板上包含波导层的探针结构; （c）将探针结构粘结在第二基底上; （d）通过将探针结构剥离第一基底将具有突起的探针结构转移到第二基底上; 以及（e）通过去除所述第二基板的一部分，形成在其自由端上具有突起的悬臂型探针。

8. 发明授权

US6046972A Method and producing probe with minute aperture, scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe 失效
标题翻译：使用微孔的方法和产生探针，使用探针扫描近场光学显微镜，并使用探针进行记录和/或再现装置
公开(公告)号：US6046972A
公开(公告)日：2000-04-04
申请号：US825129
申请日：1997-03-27
申请人： Ryo Kuroda , Yasuhiro Shimada
发明人： Ryo Kuroda , Yasuhiro Shimada
IPC分类号： G01B11/30 , G01N37/00 , G01Q10/06 , G01Q30/02 , G01Q60/02 , G01Q60/16 , G01Q60/18 , G01Q60/22 , G01Q60/38 , G01Q60/56 , G01Q70/06 , G01Q80/00 , G02B6/122 , G11B7/005 , G11B7/12 , G11B7/14 , G11B7/22 , G11B9/00 , G11B9/14 , G11B11/00 , G11B11/03 , G11B7/00
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , G01Q70/06 , G02B6/122 , G11B11/03 , G11B7/005 , G11B7/12 , G11B7/14 , G11B7/22 , G11B9/14 , G11B9/1409 , B82Y10/00 , G01Q80/00 , Y10S977/862
摘要： In a method of manufacturing a probe with a minute aperture, the probe is coated with conductive material, a tip of the probe is brought into contact with a conductive substrate and a voltage is applied between the probe and the substrate to remove the coating material at the tip of the probe and form the minute aperture at the tip of the probe. The thus-fabricated probe can be used in a scanning near-field optical microscope for observing an object on the basis of a change in intensity of near-field light and an information recording and/or reproducing apparatus for reproducing information recorded in a record medium by using near-field light.
摘要翻译：在制造具有微小孔径的探针的方法中，探针用导电材料涂覆，探针的尖端与导电基底接触，并且在探针和基底之间施加电压以除去涂层材料探针的尖端，并在探针的尖端形成微小的孔。这样制造的探针可以用于扫描近场光学显微镜，用于基于近场光强度的变化来观察物体，以及用于再现记录在记录介质中的信息的信息记录和/或再现装置通过使用近场光。

9. 发明授权

US07151250B2 Probe with hollow waveguide and method for producing the same 失效
公开(公告)号：US07151250B2
公开(公告)日：2006-12-19
申请号：US11254638
申请日：2005-10-21
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： G02B6/10
CPC分类号： G01Q60/22 , G02B6/10 , G02B6/122 , G02B6/241
摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.

10. 发明授权

US06982419B2 Probe with hollow waveguide and method for producing the same 失效
公开(公告)号：US06982419B2
公开(公告)日：2006-01-03
申请号：US11102662
申请日：2005-04-11
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： H01J40/14
CPC分类号： G01Q60/22 , G02B6/10 , G02B6/122 , G02B6/241
摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opeining, and removing a part of the substrate by etching, to form a cantilever.

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