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1. 发明授权

US06215114B1 Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe 失效
标题翻译：用于检测或照射光的光学探针和具有这种探针的近场光学显微镜及其制造方法
公开(公告)号：US06215114B1
公开(公告)日：2001-04-10
申请号：US09158494
申请日：1998-09-23
申请人： Takayuki Yagi , Tsutomu Ikeda , Ryo Kuroda , Yasuhiro Shimada
发明人： Takayuki Yagi , Tsutomu Ikeda , Ryo Kuroda , Yasuhiro Shimada
IPC分类号： H01L2100
CPC分类号： G01Q60/22 , Y10S977/862
摘要： An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.
摘要翻译：用于检测或照射ev逝光的光学证明是通过在基片上形成具有调节膜厚的膜，然后从基片的后表面形成一个凹槽，并从该凹部的一侧形成一个通孔通过蚀刻。获得的光学探针在通孔的尖端处具有微孔，并且通常在单个衬底上形成各自具有均匀轮廓的微孔的多个光学探针。在凹部中，可以设置光接收或光照射装置。

2. 发明授权

US06337477B1 Probe having micro-projection and manufacturing method thereof 失效
标题翻译：探头具有微投影及其制造方法
公开(公告)号：US06337477B1
公开(公告)日：2002-01-08
申请号：US09353153
申请日：1999-07-14
申请人： Yasuhiro Shimada , Takayuki Yagi , Ryo Kuroda
发明人： Yasuhiro Shimada , Takayuki Yagi , Ryo Kuroda
IPC分类号： G12B2100
CPC分类号： G01Q60/22 , Y10S977/875 , Y10S977/879
摘要： A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.
摘要翻译：一种具有用于近场扫描光学显微镜（NSOM）的微投影的探针，其包括衬底，布置在衬底上并彼此电隔离并且由导电材料制成的第一和第二接合层，以及微突起通过第一和第二接合层接合到衬底并且在内部具有空腔。微型突起具有由不同的材料制成的第一和第二材料层，并在另一个之间铺设，以在它们之间形成连接中间层。第一和第二材料层分别和独立地电连接到第一和第二结层。

3. 发明授权

US06335522B1 Optical probe having a refractive index micro-lens and method of manufacturing the same 有权
$Optical probe having a refractive index micro-lens and method of manufacturing the same$
标题翻译：具有折射率微透镜的光学探针及其制造方法
公开(公告)号：US06335522B1
公开(公告)日：2002-01-01
申请号：US09426946
申请日：1999-10-26
申请人： Yasuhiro Shimada , Takayuki Yagi , Takayuki Teshima , Ryo Kuroda
发明人： Yasuhiro Shimada , Takayuki Yagi , Takayuki Teshima , Ryo Kuroda
IPC分类号： G02B704
CPC分类号： G01Q60/22 , Y10S977/862
摘要： An optical probe which comprises a substrate, an elastic body supported by the substrate and having a free end, a projection having a micro-aperture and arranged at the free end of the elastic body, and a refractive index micro-lens also arranged at the free end of the elastic body and adapted to focus light to the micro-aperture.
摘要翻译：一种光学探针，其包括基板，由基板支撑并具有自由端的弹性体，具有微孔并且布置在弹性体自由端的突起，以及折射率微透镜，其还布置在弹性体的自由端并适于将光聚焦到微孔。

4. 发明授权

US06171730B2 Exposure method and exposure apparatus 有权
标题翻译：曝光方法和曝光装置
公开(公告)号：US06171730B2
公开(公告)日：2001-01-09
申请号：US09184655
申请日：1998-11-03
申请人： Ryo Kuroda , Tsutomu Ikeda , Yasuhiro Shimada
发明人： Ryo Kuroda , Tsutomu Ikeda , Yasuhiro Shimada
IPC分类号： G03F900
CPC分类号： G03F7/7035 , B82Y10/00 , G03F1/50 , G03F7/2014 , G03F7/70325
摘要： An exposure apparatus and method for transferring a pattern to an object to be exposed by exposure to evanescent light using a mask having an aperture pattern having a width of 100 nm or less. The mask is arranged opposite to the object to be exposed, and pressure is applied to the mask arranged opposite to the object from the side of the mask opposite to the surface facing the object to generate evanescent light under the pressure applied, to transfer the pattern of the mask to the object to be exposed by exposure to the evanescent light.
摘要翻译：一种曝光装置和方法，用于使用具有宽度为100nm以下的孔径图案的掩模，通过曝光于ev逝光将图案转印到待曝光的对象物上。掩模被布置成与要暴露的物体相对，并且将压力施加到与面对物体的表面相反侧的与物体相对的掩模上，以在施加的压力下产生ev逝光，以转移图案通过暴露于ev逝的光，将面具暴露于被曝光的物体上。

5. 发明授权

US5959957A Probe and a cantilever formed with same material 失效
标题翻译：探头和悬臂与相同的材料形成
公开(公告)号：US5959957A
公开(公告)日：1999-09-28
申请号：US786181
申请日：1997-01-21
申请人： Tsutomu Ikeda , Takayuki Yagi , Yasuhiro Shimada
发明人： Tsutomu Ikeda , Takayuki Yagi , Yasuhiro Shimada
IPC分类号： G01B21/30 , G01B7/34 , G01N37/00 , G01Q60/16 , G01Q60/38 , G01Q70/14 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/14 , G02B21/00
CPC分类号： G11B9/1409 , G01Q60/04 , G01Q70/14 , G11B9/1418 , B82Y10/00 , Y10S977/873
摘要： A probe has a metal tip on a cantilever. A diffused layer made from a metal silicide is formed at an interface between the tip and the cantilever. In the diffused layer, a material for forming the cantilever and a material for forming the tip are diffused.
摘要翻译：探针在悬臂上具有金属尖端。在尖端和悬臂之间的界面处形成由金属硅化物制成的扩散层。在扩散层中，用于形成悬臂的材料和用于形成尖端的材料被扩散。

6. 发明授权

US6011261A Probe formed of mono-crystalline SI, the manufacturing method thereof, and an information processing device using the probe 失效
标题翻译：由单晶SI形成的探针及其制造方法以及使用该探针的信息处理装置
公开(公告)号：US6011261A
公开(公告)日：2000-01-04
申请号：US34227
申请日：1998-03-04
申请人： Tsutomu Ikeda , Takayuki Yagi , Yasuhiro Shimada , Takeo Yamazaki
发明人： Tsutomu Ikeda , Takayuki Yagi , Yasuhiro Shimada , Takeo Yamazaki
IPC分类号： G01N37/00 , G01B5/28 , G01C7/00 , G01Q60/10 , G01Q60/16 , G01Q60/22 , G01Q60/24 , G01Q60/38 , G01Q70/10 , G01Q70/14 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B21/22 , H01J37/26 , H01L21/306
CPC分类号： G01Q60/40 , B82Y35/00 , G01Q60/04 , Y10S977/875
摘要： A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of one-end-supported beam which is bowed and formed upon the lever member. The probe is manufactured by forming a film of a material with low density and high elasticity on the silicon layer of an SOI substrate, then oxidizing part of the silicon layer and removing the oxidized portion to form a tip with the material as a so-called bird's beak, and finally the SOI substrate is worked to form the cantilever shape of the lever member. The probe can be used for an information recording/reproducing device with good traceability even in high speed scanning over a recording medium.
摘要翻译：用于检测微小物理行为的探针包括由单晶硅层形成的杠杆构件，特别是悬臂形式的杠杆构件，以及在杆构件上弯曲并形成的一端支撑梁形式的尖端。通过在SOI衬底的硅层上形成具有低密度和高弹性的材料的膜，然后氧化硅层的一部分并除去氧化部分以形成具有所谓的材料的尖端来制造探针鸟的喙，最后，SOI基板被加工成形成杠杆构件的悬臂形状。即使在记录介质上进行高速扫描，该探针也可以用于具有良好追溯性的信息记录/再生装置。

7. 发明授权

US06227519B1 Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate 失效
标题翻译：具有热可流动层的母模基板，其制造方法以及使用该母基板制作微探针头的方法
公开(公告)号：US06227519B1
公开(公告)日：2001-05-08
申请号：US09069290
申请日：1998-04-29
申请人： Takayuki Yagi , Tsutomu Ikeda , Yasuhiro Shimada
发明人： Takayuki Yagi , Tsutomu Ikeda , Yasuhiro Shimada
IPC分类号： B29C3338
CPC分类号： G01Q70/16 , Y10S977/875
摘要： A female mold substrate used for the production of a microprobe tip or probe detecting a tunneling current or weak force includes a substrate provided with a recess section and a heat-flowable layer having flowability by heat treatment formed on the substrate and covering the recess. The female mold substrate is made by forming a recess section on the top surface of a substrate and forming a heat-flowable layer on the top surface of the substrate including the recess section. A microprobe tip detecting a tunneling current or weak force is made by forming a tip material layer on the female mold substrate and transferring the tip of material layer onto another substrate.
摘要翻译：用于生产探测隧道电流或弱力的微探针头或探针的阴模基底包括设置有凹部的基底和通过热处理形成在基底上并覆盖凹部的流动性的热可流动层。通过在基板的顶面上形成凹部而在包括该凹部的基板的上表面上形成热交换层而制成阴模基板。通过在母模衬底上形成尖端材料层并将材料层的顶端转移到另一衬底上，来形成检测隧穿电流或弱力的微探针尖端。

8. 发明授权

US5923637A Method of manufacturing micro-tip for detecting tunneling current or micro-force or magnetic force 失效
标题翻译：用于检测隧道电流或微力或磁力的微尖端的制造方法
公开(公告)号：US5923637A
公开(公告)日：1999-07-13
申请号：US715391
申请日：1996-09-13
申请人： Yasuhiro Shimada , Takayuki Yagi , Tsutomu Ikeda
发明人： Yasuhiro Shimada , Takayuki Yagi , Tsutomu Ikeda
IPC分类号： G01B21/30 , G01B7/34 , G01N37/00 , G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/10 , G01Q70/14 , G01Q80/00 , G01Q90/00 , G01R33/038 , G11B5/35 , G11B9/00 , G11B9/14 , G02B21/00
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q60/38 , G01Q60/54 , G01Q70/14 , G01R33/0385 , G11B5/35 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1436 , B82Y10/00 , B82Y25/00 , Y10S977/875
摘要： A micro-tip for detecting tunneling current, micro force or magnetic force is manufactured as follows. A recess portion is formed on the surface of a first substrate. A peeling layer are formed on the substrate including the recess of the first substrate. A micro-tip is formed on the peeling layer of the first substrate. A joining layer is formed on a second substrate. The micro-tip on the peeling layer including the recess in the first substrate is transferred onto the joining layer on the second substrate. The peeling layer mainly consists of an oxide or a nitride, of a metal element, a semi-metal element or a semiconductor element.
摘要翻译：用于检测隧道电流，微力或磁力的微尖端如下制造。在第一基板的表面上形成凹部。在包括第一基板的凹部的基板上形成剥离层。在第一基板的剥离层上形成微尖端。接合层形成在第二基板上。包括第一基板中的凹部的剥离层上的微尖端被转印到第二基板上的接合层上。剥离层主要由金属元素，半金属元素或半导体元件的氧化物或氮化物构成。

9. 发明授权

US5866021A Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip and the probe 失效
标题翻译：制造微尖端和阴模基板的方法，以及用微尖头和探头制造探针的方法
公开(公告)号：US5866021A
公开(公告)日：1999-02-02
申请号：US713228
申请日：1996-09-12
申请人： Takayuki Yagi , Tsutomu Ikeda , Yasuhiro Shimada
发明人： Takayuki Yagi , Tsutomu Ikeda , Yasuhiro Shimada
IPC分类号： G01N37/00 , B81B3/00 , B81C1/00 , G01B7/34 , G01N27/00 , G01Q60/16 , G01Q60/24 , G01Q60/38 , G01Q70/18 , G11B9/14 , H01J9/02 , B44C1/22
CPC分类号： G01Q70/16 , B81C1/00111 , B82Y35/00 , H01J9/025 , B81B2201/12 , B81C2201/0191
摘要： A micro-tip is manufactured by forming a recess portion on a first substrate consisting of monocrystalline silicon for forming a tip. A peeling layer is formed on the recess portion, and contact layer is formed on at least a portion other than the peeling layer on the substrate. A tip material layer is formed on the peeling layer and the contact layer. The tip material layer on the peeling layer is transferred onto a second substrate.
摘要翻译：通过在由用于形成尖端的单晶硅组成的第一衬底上形成凹部来制造微尖端。在凹部上形成剥离层，在基板上的剥离层以外的至少一部分上形成接触层。在剥离层和接触层上形成尖端材料层。剥离层上的尖端材料层被转印到第二基板上。

10. 发明授权

US06333497B2 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe 有权
公开(公告)号：US06333497B2
公开(公告)日：2001-12-25
申请号：US09765374
申请日：2001-01-22
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： G02B2740
CPC分类号： G01Q60/22 , G01Q80/00 , G03F7/70375 , G03F7/70616 , G11B7/122 , G11B7/22 , Y10S977/862 , Y10S977/875
摘要： A probe for detecting or irradiating light includes a displaceable support member on a substrate, a tip formed on the support member, and a bonding layer for bonding the tip onto the support member. The tip has a micro aperture. When a light-shielding layer is further formed on a surface of the tip, the micro aperture is formed on the light-shielding layer. The tip consists of a light transmission material.

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