专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06674074B2 Enhanced scanning probe microscope 失效
标题翻译：增强扫描探针显微镜
公开(公告)号：US06674074B2
公开(公告)日：2004-01-06
申请号：US10087295
申请日：2002-03-01
申请人： Peter V. Schwartz
发明人： Peter V. Schwartz
IPC分类号： G12B2100
CPC分类号： G01Q20/02 , G01Q30/10 , Y10S977/857 , Y10S977/871
摘要： An enhanced scanning probe microscope is provided with means for controlling the atmosphere surrounding the probe tip and the sample or surface to be scanned. Additional enhancements include a tip holder which can be tuned to reflect the laser light of the apparatus on the photodiode, a brace to stabilize the optical microscope relative to the sample and a mirror placed to allow visualization of the sample and tip from the side. Also provided is an enhanced method of nanolithography using an enhanced scanning probe microscope in which it is possible to control the atmosphere surrounding the probe tip and the substrate to be patterned or etched.
摘要翻译：增强的扫描探针显微镜设置有用于控制探针尖端和待扫描的样品或表面周围的气氛的装置。附加的增强包括可以被调整以反映光电二极管上的装置的激光的尖端保持器，用于使光学显微镜相对于样品稳定的支架和放置以允许从侧面观察样品和尖端的反射镜。还提供了使用增强扫描探针显微镜的增强的纳米光刻方法，其中可以控制探针尖端周围的气氛和待图案化或蚀刻的基底。

2. 发明授权

US06737646B2 Enhanced scanning probe microscope and nanolithographic methods using the same 失效
标题翻译：增强的扫描探针显微镜和使用其的纳米光刻方法
公开(公告)号：US06737646B2
公开(公告)日：2004-05-18
申请号：US10163068
申请日：2002-06-04
申请人： Peter V. Schwartz
发明人： Peter V. Schwartz
IPC分类号： G12B2100
CPC分类号： G01Q20/02 , G01Q30/10 , Y10S977/852 , Y10S977/871
摘要： An enhanced scanning probe microscope is provided with means for controlling the atmosphere surrounding the probe tip and the sample or surface to be scanned. Additional enhancements include a tip holder which can be tuned to reflect the laser light of the apparatus on the photodiode, a brace to stabilize the optical microscope relative to the sample and a mirror placed to allow visualization of the sample and tip from the side. Also provided is an enhanced method of nanolithography using an enhanced scanning probe microscope in which it is possible to control the atmosphere surrounding the probe tip and the substrate to be patterned or etched.
摘要翻译：增强的扫描探针显微镜设置有用于控制探针尖端和待扫描的样品或表面周围的气氛的装置。附加的增强包括可以被调整以反映光电二极管上的装置的激光的尖端保持器，用于使光学显微镜相对于样品稳定的支架和放置以允许从侧面观察样品和尖端的反射镜。还提供了使用增强扫描探针显微镜的增强的纳米光刻方法，其中可以控制探针尖端周围的气氛和待图案化或蚀刻的基底。

3. 发明授权

US06337477B1 Probe having micro-projection and manufacturing method thereof 失效
标题翻译：探头具有微投影及其制造方法
公开(公告)号：US06337477B1
公开(公告)日：2002-01-08
申请号：US09353153
申请日：1999-07-14
申请人： Yasuhiro Shimada , Takayuki Yagi , Ryo Kuroda
发明人： Yasuhiro Shimada , Takayuki Yagi , Ryo Kuroda
IPC分类号： G12B2100
CPC分类号： G01Q60/22 , Y10S977/875 , Y10S977/879
摘要： A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.
摘要翻译：一种具有用于近场扫描光学显微镜（NSOM）的微投影的探针，其包括衬底，布置在衬底上并彼此电隔离并且由导电材料制成的第一和第二接合层，以及微突起通过第一和第二接合层接合到衬底并且在内部具有空腔。微型突起具有由不同的材料制成的第一和第二材料层，并在另一个之间铺设，以在它们之间形成连接中间层。第一和第二材料层分别和独立地电连接到第一和第二结层。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式