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    • 9. 发明授权
    • Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
    • 氟化物晶体透镜优化目标的方法,以及氟化物晶体透镜的目标
    • US07321465B2
    • 2008-01-22
    • US11071699
    • 2005-03-02
    • Michael TotzeckVladimir KamenovToralf Gruner
    • Michael TotzeckVladimir KamenovToralf Gruner
    • G02B27/28
    • G02B1/08G02B1/02G02B5/3083G02B13/143G03F7/70241G03F7/705G03F7/70966Y10S359/90
    • A numerical optimizing method serves to reduce harmful effects caused by intrinsic birefringence in lenses of a fluoride crystal material of cubic crystal structure in an objective, particularly a projection objective for a microlithography system. Under the optimizing method, an optimizing function which takes at least one birefringence-related image aberration into account is minimized. The birefringence-related image aberration is determined from a calculation for a light ray passing through the fluoride crystal lenses. To the extent that the birefringence-related image aberration is a function of parameters of the light ray, it depends only on geometric parameters of the light ray. The numerical optimizing method is used to produce objectives in which an optical retardation as well as an asymmetry of the optical retardation are corrected. The lenses are arranged in homogeneous groups, where each homogeneous group is corrected for the optical retardation asymmetry.
    • 数值优化方法用于减少物镜中的立方晶体结构的氟化物晶体材料的透镜中的固有双折射引起的有害影响,特别是微光刻系统的投影物镜。 在优化方法下,考虑到至少一个双折射相关图像像差的优化函数被最小化。 从通过氟化物晶体透镜的光线的计算确定双折射相关图像像差。 在双折射相关图像像差是光线参数的函数的程度上,其仅取决于光线的几何参数。 使用数值优化方法来产生其中光学延迟以及光学延迟的不对称性被校正的目标。 透镜被排列成均匀的组,其中每个均匀组被校正用于光学延迟不对称。