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    • 2. 发明授权
    • Gas discharge laser system electrodes and power supply for delivering electrical energy to same
    • 气体放电激光系统电极和用于将电能传递到相同的电源
    • US07706424B2
    • 2010-04-27
    • US11241850
    • 2005-09-29
    • Yoshiho AmadaJames A. CarmichaelRichard G. MortonRichard M. Ness
    • Yoshiho AmadaJames A. CarmichaelRichard G. MortonRichard M. Ness
    • H01S3/22H02G3/04
    • H01S3/03H01S3/0381H01S3/0388H01S3/225
    • A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.
    • 公开了一种可以包括氟气放电激光器系统和电极支撑系统的装置和方法,该系统可以包括电连接到高电压源的第一电极; 将第一电极与地绝缘的第一绝缘机构; 与第一电极电绝缘的第二电极,与第一电极一起形成分别沿第一和第二电极的纵向轴线延伸的第一和第二电极的部分之间的细长放电区,限定电极放电接收区域 端部; 多个电流返回齿电连接到第二电极并接地,所述尖齿沿着细长放电区域的纵向范围分布; 除了通过多个电流返回齿之外,第二绝缘机构将第二电极与地电隔离。
    • 4. 发明授权
    • Adjustable flow guide to accommodate electrode erosion in a gas discharge laser
    • 可调导流板,适应气体放电激光器的电极腐蚀
    • US07068697B1
    • 2006-06-27
    • US11239581
    • 2005-09-28
    • Yoshiho AmadaRichard G. MortonBryan G. Moosman
    • Yoshiho AmadaRichard G. MortonBryan G. Moosman
    • H01S3/22
    • H01S3/097H01S3/036H01S3/038H01S3/225H01S3/2251
    • A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.
    • 一种用于操作激光器的激光器和方法,并公开。 激光器可以包括位于距离第一电极一定距离的第一放电电极和第二放电电极。 可激光气体可与循环系统一起设置,以将气体流入电极之间的空间。 电压源可以连接到电极以在该空间中产生放电; 并且可以提供具有与气体接触的引导表面的流动引导件,其是相对于第一电极选择性地可移动的引导件,以引导气体流入空间。 在一个实施方案中,流动引导件将流动引向第一电极的末端,并且可调节以使流向第一电极磨损时的末端流动。
    • 6. 发明授权
    • Line narrowing apparatus with high transparency prism beam expander
    • 具有高透明棱镜光束扩张器的线条变窄装置
    • US5978409A
    • 1999-11-02
    • US162341
    • 1998-09-28
    • Palash P. DasAlexander I. ErshovRichard G. Morton
    • Palash P. DasAlexander I. ErshovRichard G. Morton
    • G03F7/20H01S3/03H01S3/08H01S3/1055H01S3/137H01S3/225
    • G03F7/70025G03F7/70041G03F7/70558G03F7/70575H01S3/03H01S3/08009H01S3/225H01S3/1055
    • A grating based line-narrowing apparatus having a prism beam expander with at least four prisms. Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as Al.sub.2 O.sub.3, is applied to the hypotenuse face of each prism, providing an efficient, anti-reflection coating. In a preferred embodiment the incident angle of the four prisms are each at about 68.2 degrees. The laser of the preferred embodiment has similar line narrowing efficiency and bandwidth as that for a laser with a 3 prism, ideal multi-layer anti-reflection coated beam expander. The primary benefit of the new four prism arrangement is that the prism coatings should be much less expensive and have greatly increased durability. Applicants have tested the new prisms for 30 million, 10 mJ pulses in air with no noticeable degradation. No present day dielectric multi-layer stack coating could survive such exposure.
    • 一种基于光栅的线条变窄装置,具有至少具有四个棱镜的棱镜扩束器。 每个棱镜定位在67和71度之间的入射角。 高折射率的单层涂层,诸如Al2O3的坚固材料被施加到每个棱镜的斜边面,从而提供有效的抗反射涂层。 在一个优选实施例中,四个棱镜的入射角分别为约68.2度。 优选实施例的激光器具有与具有3棱镜,理想的多层抗反射涂层光束扩展器的激光器相似的线窄化效率和带宽。 新的四棱镜布置的主要优点是棱镜涂层应该便宜得多,并且耐久性大大提高。 申请人已经在空气中测试了新的棱镜3000万,10 mJ脉冲,没有明显的退化。 没有现在的电介质多层堆叠涂层可以经受这样的曝光。
    • 8. 发明授权
    • Cathodes for fluorine gas discharge lasers
    • 氟气放电激光器的阴极
    • US07535948B2
    • 2009-05-19
    • US11488205
    • 2006-07-18
    • Thomas D. SteigerJoshua C. BrownThomas P. DuffeyWalter D. GillespieRichard G. Morton
    • Thomas D. SteigerJoshua C. BrownThomas P. DuffeyWalter D. GillespieRichard G. Morton
    • H01S3/22H01S3/097
    • H01S3/038H01S3/036H01S3/0381H01S3/0382H01S3/0385H01S3/0388H01S3/097H01S3/09702H01S3/0971H01S3/225H01S3/2251H01S3/2256H01S3/2258
    • A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided V-shaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.
    • 公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极,其可包括铜和铜合金阴极体,该铜和铜合金阴极体具有包含铜的阴极的放电足迹的上部弯曲区域,以及包含铜 合金,如果电极的对置部分形成为延伸到弓形部分两侧的直线部分的弓形形状,则直线部分终止于垂直的直边,铜线之间的边界至少包括弧形部分 电极可以包括由铜制成的两片材料加工的接合元件,以及在加工之前由铜合金制成的第二种材料。 电极还可以包括沿着基本上所有的细长电极体形成的第一和第二细长的非平面V形槽,该细长电极体在第一和第二偏斜V形槽之间形成放电接收脊,其中填充有第一 和第二个不对称的V形槽。 还公开了一种电极系统,其中一个电极,例如,阴极在操作期间弯曲并且可以包括被加工成形成冠部的第一和第二细长气体放电电极中的至少一个,以接收补偿弯曲的气体放电 的至少一个气体放电电极在氟气放电激光器的操作期间。
    • 10. 发明授权
    • Protective overcoat for replicated diffraction gratings
    • 复制衍射光栅的保护涂层
    • US06529321B2
    • 2003-03-04
    • US09731938
    • 2000-12-07
    • Xiaojiang J. PanRichard G. MortonAlexander I. Ershov
    • Xiaojiang J. PanRichard G. MortonAlexander I. Ershov
    • G02B508
    • H01S3/225C23C14/0694C23C14/16C23C14/225C23C14/24G02B1/105G02B1/14G02B5/1838G02B5/1847G02B5/1852G02B5/1861G03F7/70025G03F7/70041G03F7/70558G03F7/70575H01S3/03
    • An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing oxides and hydroxides of aluminum and typically is also naturally coated with an aluminum oxide film. The grating is subsequently recoated in a vacuum chamber with a thin, pure, dense aluminum overcoat and then also in the vacuum the aluminum overcoat is coated with a thin film of MgF2. The grating is especially suited for use for wavelength selection in an ArF laser operating producing an ultraviolet laser beam at a wavelength of about 193 nm. The oxygen free aluminum overcoat prevents the ultraviolet light from causing damage by stimulating chemical reactions in grating materials under the aluminum grating surface or in the aluminum oxide film. The MgF2 additionally prevents oxidation on the surface, of the aluminum overcoat.
    • 外涂保护衍射光栅。 具有薄铝反射光栅表面的复制光栅通过主光栅或子光栅的复制产生。 薄的铝反射表面可能是破裂的或具有含有氧化物和铝的氢氧化物的相对较厚的晶界,并且通常也被氧化铝膜自然地涂覆。 随后在具有薄的,纯的,致密的铝外涂层的真空室中重新涂覆光栅,然后在真空中将铝外涂层涂覆有MgF 2的薄膜。 该光栅特别适合用于在大约193nm的波长下产生紫外激光束的ArF激光器中的波长选择。 无氧铝外套防止紫外光通过在铝光栅表面或氧化铝膜下的光栅材料中刺激化学反应而引起损伤。 MgF2另外防止铝外涂层表面的氧化。