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1. 发明申请

US20110204490A1 FILM FORMING APPARATUS, FILM FORMING METHOD, AND SEMICONDUCTOR DEVICE 有权
标题翻译：薄膜成型装置，薄膜成型方法和半导体装置
公开(公告)号：US20110204490A1
公开(公告)日：2011-08-25
申请号：US13048612
申请日：2011-03-15
申请人： Tsuyoshi SATO , Hiroyasu Kondo , Naoaki Sakurai , Katsuyuki Soeda , Kenichi Ooshiro , Shuichi Kimura
发明人： Tsuyoshi SATO , Hiroyasu Kondo , Naoaki Sakurai , Katsuyuki Soeda , Kenichi Ooshiro , Shuichi Kimura
IPC分类号： H01L29/02 , B05C11/00 , H01L21/31
CPC分类号： H01L21/6715 , B05D1/005 , B05D3/0486 , G03F7/162 , H01L21/67253
摘要： According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.
摘要翻译：根据一个实施例，一种成膜装置包括载物台，涂布部分，蒸气供应部分，鼓风机部分和控制器。在舞台上放置涂层目标。涂布部分将材料施加到放置在载物台上的涂布靶上的预定区域，形成涂膜。蒸气供给部产生能够溶解涂膜的溶剂蒸气。鼓风机部分将由蒸汽供应部分产生的溶剂蒸气吹到放置在载物台上的涂覆靶上的涂膜上。控制器控制由鼓风机部分吹送的溶剂蒸气的量，使得涂膜溶解; 表面层侧的一部分涂膜的粘度比涂布目标侧的一部分的粘度低; 并且表面层侧的部分中的粘度和涂布目标侧的粘度取得防止涂布靶上的涂膜扩散的值。

2. 发明授权

US08614500B2 Film forming apparatus, film forming method, and semiconductor device 有权
标题翻译：成膜装置，成膜方法和半导体装置
公开(公告)号：US08614500B2
公开(公告)日：2013-12-24
申请号：US13048612
申请日：2011-03-15
申请人： Tsuyoshi Sato , Hiroyasu Kondo , Naoaki Sakurai , Katsuyuki Soeda , Kenichi Ooshiro , Shuichi Kimura
发明人： Tsuyoshi Sato , Hiroyasu Kondo , Naoaki Sakurai , Katsuyuki Soeda , Kenichi Ooshiro , Shuichi Kimura
IPC分类号： H01L23/58
CPC分类号： H01L21/6715 , B05D1/005 , B05D3/0486 , G03F7/162 , H01L21/67253
摘要： According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.
摘要翻译：根据一个实施例，一种成膜装置包括载物台，涂布部分，蒸气供应部分，鼓风机部分和控制器。在舞台上放置涂层目标。涂布部分将材料施加到放置在载物台上的涂布靶上的预定区域上以形成涂膜。蒸气供给部产生能够溶解涂膜的溶剂蒸气。鼓风机部分将由蒸汽供应部分产生的溶剂蒸气吹到放置在载物台上的涂覆靶上的涂膜上。控制器控制由鼓风机部分吹送的溶剂蒸气的量，使得涂膜溶解; 表面层侧的一部分涂膜的粘度比涂布目标侧的一部分的粘度低; 并且表面层侧的部分中的粘度和涂布目标侧的粘度取得防止涂布靶上的涂膜扩散的值。

3. 发明授权

US08887657B2 Film forming system and method using application nozzle 有权
标题翻译：成膜系统和使用喷嘴的方法
公开(公告)号：US08887657B2
公开(公告)日：2014-11-18
申请号：US12795259
申请日：2010-06-07
申请人： Kenichi Ooshiro , Tsuyoshi Sato , Takao Tokumoto , Sadao Natsu , Souichirou Iwasaki
发明人： Kenichi Ooshiro , Tsuyoshi Sato , Takao Tokumoto , Sadao Natsu , Souichirou Iwasaki
IPC分类号： B05C11/08 , B05B5/00 , B05B3/04 , H01L21/67 , B05B15/02 , B05B12/08 , B41J2/165 , B05C5/02 , B05D1/00
CPC分类号： H01L21/6715 , B05B12/08 , B05B12/084 , B05B15/52 , B05B15/555 , B05B15/557 , B05C5/0216 , B05C5/0291 , B05C11/08 , B05D1/005 , B41J2/165 , B41J2/16579 , H01L21/67051
摘要： According to one embodiment, a film forming system includes: a stage including a placement surface on which an object to be coated is placed; a rotating mechanism rotating the stage in a rotational direction along the placement surface; an application nozzle discharging a material onto the object placed on the stage for application; a moving mechanism relatively moving the stage and the application nozzle along the placement surface in a cross direction crossing the rotational direction; a controller performing a control to rotate the stage on which the object is placed through the rotating mechanism while relatively moving the stage and application nozzle along the placement surface in the cross direction through the moving mechanism and applying the material to the object on the stage through the application nozzle; and a cleaning apparatus cleaning the application nozzle.
摘要翻译：根据一个实施例，一种成膜系统包括：包括放置表面的载物台，放置被涂物体; 旋转机构沿着所述放置面沿旋转方向旋转所述平台; 一种施加喷嘴，将材料排放到放置在载物台上的物体上以供施用; 沿与所述旋转方向交叉的方向沿所述放置面相对移动所述台和所述施加喷嘴的移动机构; 所述控制器通过所述移动机构使所述台架和所述施加喷嘴沿着所述布置表面沿所述横向方向相对移动，并且将所述材料施加到所述台架上的物体上，同时通过所述旋转机构旋转放置所述物体的台阶，应用喷嘴; 以及清洁施加喷嘴的清洁装置。

4. 发明授权

US08677933B2 Film forming apparatus forming a coating film using spiral coating while adjusting sound wave projected onto the coating film 有权
标题翻译：成膜装置在调节投射到涂膜上的声波时，使用螺旋涂层形成涂膜
公开(公告)号：US08677933B2
公开(公告)日：2014-03-25
申请号：US13214409
申请日：2011-08-22
申请人： Tsuyoshi Sato , Kenichi Ooshiro
发明人： Tsuyoshi Sato , Kenichi Ooshiro
IPC分类号： B05C11/00 , B05C13/02 , B05C11/02 , B05B3/00 , B06B1/02 , B01J19/08 , B05D1/40 , B05D3/00
CPC分类号： B05D1/005 , B05D3/0473 , H01L21/6715 , Y10T428/31504
摘要： According to one embodiment, a film forming apparatus includes: a stage on which a coating object is placed; a rotation mechanism rotating the stage; an application nozzle supplying a coating material to the coating object; an application moving mechanism moving the application nozzle; a controller which controls the rotation mechanism and application moving mechanism to rotate the stage and move the application nozzle between the rotation center and the outer edge and controls the application nozzle to apply the coating material to the coating object; and a sound wave generator which generates a sound wave. The film forming apparatus projects the sound wave onto the surface of the coating film.
摘要翻译：根据一个实施例，一种成膜设备包括：放置涂覆物体的台阶; 旋转台架旋转机构; 施加喷嘴，其向所述涂覆物体供应涂覆材料; 移动施加喷嘴的应用移动机构; 控制器，其控制旋转机构和应用移动机构以使台架旋转并且使旋转中心和外缘之间移动施加喷嘴，并控制施加喷嘴将涂覆材料施加到涂覆对象; 以及产生声波的声波发生器。成膜装置将声波投射到涂膜的表面上。

5. 发明申请

US20120025145A1 COATING APPLICATOR, COATING APPLICATION METHOD AND ELECTRONIC DEVICE 有权
标题翻译：涂料应用者，涂料应用方法和电子设备
公开(公告)号：US20120025145A1
公开(公告)日：2012-02-02
申请号：US13268230
申请日：2011-10-07
申请人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
发明人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
IPC分类号： B05D1/26 , B05C13/00 , H01B1/00 , B05B1/00
CPC分类号： H01L21/6715 , B05C13/02 , B05D1/002 , B05D1/26
摘要： A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.
摘要翻译：具有扁平端部的圆柱形喷嘴放置在旋转的涂覆物体的上方。通过在涂布喷嘴的端部排出涂布溶液，同时使涂布喷嘴相对于被涂物在与涂布体的旋转方向相交的方向移动，将涂布液涂布在涂布体的表面上。涂层喷嘴在其一端的一部分上形成有成角度的凹口。旋转控制单元以涂覆喷嘴的凹口位于将涂布溶液供给到被旋转的涂布体的位置的上游位置的方式来控制涂布喷嘴的旋转。

6. 发明授权

US08919277B2 Coating applicator, coating application method and electronic device 有权
标题翻译：涂布涂布机，涂布应用方法和电子设备
公开(公告)号：US08919277B2
公开(公告)日：2014-12-30
申请号：US13268230
申请日：2011-10-07
申请人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
发明人： Takao Tokumoto , Sadao Natsu , Mitsuhiro Hida , Souichirou Iwasaki , Tsuyoshi Sato , Kenichi Ooshiro
IPC分类号： B05B3/00 , B05B13/02 , B05C11/02 , H01L21/67 , B05C13/02 , B05D1/00 , B05D1/26
CPC分类号： H01L21/6715 , B05C13/02 , B05D1/002 , B05D1/26
摘要： A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.
摘要翻译：具有扁平端部的圆柱形喷嘴放置在旋转的涂覆物体的上方。通过在涂布喷嘴的端部排出涂布溶液，同时使涂布喷嘴相对于被涂物在与涂布体的旋转方向相交的方向移动，将涂布液涂布在涂布体的表面。涂层喷嘴在其一端的一部分上形成有成角度的凹口。旋转控制单元以涂覆喷嘴的凹口位于将涂布溶液供给到被旋转的涂布体的位置的上游位置的方式来控制涂布喷嘴的旋转。

7. 发明申请

US20130078378A1 COATING APPARATUS AND COATING METHOD 审中-公开
标题翻译：涂装和涂装方法
公开(公告)号：US20130078378A1
公开(公告)日：2013-03-28
申请号：US13609893
申请日：2012-09-11
申请人： Haruhiko Ishihara , Tsuyoshi Sato , Kenichi Ooshiro
发明人： Haruhiko Ishihara , Tsuyoshi Sato , Kenichi Ooshiro
IPC分类号： B05D3/04 , B05C9/12 , B05C9/10
CPC分类号： B05D1/26 , B05D1/002 , B05D3/002 , B05D3/0466 , B05D3/104 , H01L21/6715
摘要： According to one embodiment, a coating apparatus includes, a stage which supports an object of coating, and a coating head integrally includes a material discharge unit, which is movable relative to the stage and configured to discharge a coating material to the object of coating on the stage, and a gas injection unit, which, along with the material discharge unit, is movable relative to the stage and configured to inject a gas to the object of coating on the stage.
摘要翻译：根据一个实施例，涂覆装置包括：支撑涂覆物体的台，以及整体地包括材料排出单元的涂覆头，该材料排出单元可相对于载物台移动并且构造成将涂层材料排放到涂层物体上所述台架和气体注入单元，其与所述材料排出单元一起可相对于所述台架移动并且被配置为向所述台架上的涂层物体注入气体。

8. 发明申请

US20120318197A1 SPIRAL COATING APPARATUS AND SPIRAL COATING METHOD 审中-公开
标题翻译：螺旋涂层设备和螺旋涂层方法
公开(公告)号：US20120318197A1
公开(公告)日：2012-12-20
申请号：US13528012
申请日：2012-06-20
申请人： Kenichi Ooshiro , Tsuyoshi Sato
发明人： Kenichi Ooshiro , Tsuyoshi Sato
IPC分类号： B05C11/08
CPC分类号： B05C11/08 , G03F7/162 , H01L21/6715
摘要： According to one embodiment, a spiral coating apparatus includes a stage, a rotation mechanism, a coating nozzle, a movement mechanical unit, a nozzle position detection unit, and a position adjustment unit. The movement mechanical unit enables the stage and the coating nozzle to relatively move across the rotational direction and in the direction of the axis of the rotation. The nozzle position detection unit is configured to acquire positional data on a bottom surface of the coating nozzle in the direction of the axis of the rotation. The position adjustment unit adjusts the positions of the coating nozzle and the surface in the direction of the axis.
摘要翻译：根据一个实施例，螺旋涂布装置包括台，旋转机构，涂布喷嘴，移动机械单元，喷嘴位置检测单元和位置调整单元。移动机械单元使得台架和涂覆喷嘴能够相对于旋转方向和旋转轴线方向相对移动。喷嘴位置检测单元被配置为在旋转轴线的方向上获取涂布喷嘴的底面上的位置数据。位置调整单元调整涂布喷嘴和表面在轴线方向上的位置。

9. 发明申请

US20070222809A1 DROPLET JET INSPECTING DEVICE, DROPLET JETTING APPLICATOR AND METHOD FOR MANUFACTURING COATED BODY 审中-公开
标题翻译：喷射喷嘴检查装置，喷射喷嘴施加器和制造涂覆体的方法
公开(公告)号：US20070222809A1
公开(公告)日：2007-09-27
申请号：US11535319
申请日：2006-09-26
申请人： Kenichi Ooshiro , Tsuyoshi Sato , Yasuhiko Sawada
发明人： Kenichi Ooshiro , Tsuyoshi Sato , Yasuhiko Sawada
IPC分类号： B41J29/393
CPC分类号： B41J29/393
摘要： A droplet jet inspecting device includes an image pickup part taking an image of an inspection area including an area where a droplet jetted from a droplet jetting head jetting the droplet through a nozzle and a unit configured to process the image of the inspection area taken by the image pickup part and further judge a presence of a satellite droplet which is smaller than a main droplet forming the droplet and which is incidental to the main droplet.
摘要翻译：液滴喷射检查装置包括图像拾取部件，其拍摄检查区域的图像，该检查区域包括从通过喷嘴喷射液滴的液滴喷射喷嘴喷射的液滴的区域，以及被配置为处理由所述检测区域拍摄的检查区域的图像的单元图像拾取部分，并且进一步判断小于形成液滴的主液滴并且附着于主液滴的卫星液滴的存在。

10. 发明授权

US08974046B2 Liquid circulation unit, liquid circulation apparatus and method of manufacturing coated body 有权
标题翻译：液体循环装置，液体循环装置和制造涂层体的方法
公开(公告)号：US08974046B2
公开(公告)日：2015-03-10
申请号：US12721024
申请日：2010-03-10
申请人： Yasushi Ooishi , Haruhiko Ishihara , Kenichi Ooshiro
发明人： Yasushi Ooishi , Haruhiko Ishihara , Kenichi Ooshiro
IPC分类号： B41J2/18 , B41J2/175
CPC分类号： B41J2/175 , B41J2/17513 , B41J2/1752 , B41J2/17553 , B41J2/17563 , B41J2/17566 , B41J2/17596 , B41J2/18
摘要： A liquid circulation unit adapted to be provided in a liquid circulation apparatus to circulate a liquid, including, a first liquid storage unit to store the liquid, a sensor to detect a fluid level of the liquid stored in the first liquid storage unit, a liquid sending pump to send the liquid to an outside from the first liquid storage unit based on a detection result of the sensor, a pipe arrangement for deaeration to remove a dissolved gas in the liquid sent from the liquid sending pump, a filter to remove an impurity in the liquid sent from the liquid sending pump, a diaphragm valve which opens when the liquid is sent to the outside from the first liquid storage unit, and a cock valve which opens when the liquid is sent to the first liquid storage unit from the outside, wherein the liquid circulation unit is adapted to be provided so as to be detachable to or from the liquid circulation apparatus.
摘要翻译：一种液体循环单元，适于设置在液体循环装置中以使液体循环，包括用于存储液体的第一液体存储单元，用于检测存储在第一液体存储单元中的液体的液面的传感器，液体基于传感器的检测结果，发送泵将液体从第一液体存储单元发送到外部，用于脱液以排除从送液泵送出的液体中的溶解气体的管道装置，去除杂质的过滤器在从送液泵送出的液体中，当液体从第一液体储存单元送到外部时打开的隔膜阀，以及当液体从外部送到第一液体存储单元时打开的旋塞阀其中，所述液体循环单元适于设置成能够与所述液体循环装置分离。

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