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    • 2. 发明授权
    • Film forming apparatus, film forming method, and semiconductor device
    • 成膜装置,成膜方法和半导体装置
    • US08614500B2
    • 2013-12-24
    • US13048612
    • 2011-03-15
    • Tsuyoshi SatoHiroyasu KondoNaoaki SakuraiKatsuyuki SoedaKenichi OoshiroShuichi Kimura
    • Tsuyoshi SatoHiroyasu KondoNaoaki SakuraiKatsuyuki SoedaKenichi OoshiroShuichi Kimura
    • H01L23/58
    • H01L21/6715B05D1/005B05D3/0486G03F7/162H01L21/67253
    • According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.
    • 根据一个实施例,一种成膜装置包括载物台,涂布部分,蒸气供应部分,鼓风机部分和控制器。 在舞台上放置涂层目标。 涂布部分将材料施加到放置在载物台上的涂布靶上的预定区域上以形成涂膜。 蒸气供给部产生能够溶解涂膜的溶剂蒸气。 鼓风机部分将由蒸汽供应部分产生的溶剂蒸气吹到放置在载物台上的涂覆靶上的涂膜上。 控制器控制由鼓风机部分吹送的溶剂蒸气的量,使得涂膜溶解; 表面层侧的一部分涂膜的粘度比涂布目标侧的一部分的粘度低; 并且表面层侧的部分中的粘度和涂布目标侧的粘度取得防止涂布靶上的涂膜扩散的值。
    • 10. 发明申请
    • ETHYLENE-BASED RESIN COMPOSITE PARTICLE AND ENVIRONMENTALLY FRIENDLY METHOD FOR PREPARING THE SAME
    • 基于乙烯的树脂复合颗粒和环境友好的制备方法
    • US20100203337A1
    • 2010-08-12
    • US12452950
    • 2008-06-20
    • Shuichi KimuraKiyoshi YagiMakoto Egashira
    • Shuichi KimuraKiyoshi YagiMakoto Egashira
    • B32B27/02B05D7/00
    • C08J3/07C08J3/14C08J2323/04Y10T428/2998
    • The objective of the present invention is to provide an ethylene-based composite resin composite particle having a small-sized, approximately spherical form, comprising functional filler homogeneously dispersed therein, and being compatible with other resin pellets or components.To attain the above objective, the present invention provides an environmentally friendly method for producing an ethylene-based resin composite particle, comprising: (a) dissolving ethylene-based polymer in organic solvent separable from aqueous phase and dispersing hydrophobic filler in environment-friendly organic solvent to form solution of ethylene-based polymer in the organic solvent; (b) emulsifying the solution obtained in step (a) in non-ionic surfactant-containing aqueous solution; (c) heating the emulsion obtained in step (b) to remove the organic solvent; and (d) recovering a precipitate the ethylene-based resin composite particle containing the hydrophobic filler therein. The present invention also provides an ethylene-based resin composite particle produced by the afore-mentioned process.
    • 本发明的目的是提供一种具有小尺寸近似球形的乙烯基复合树脂复合颗粒,其包含均匀分散在其中的功能性填料,并与其它树脂颗粒或组分相容。 为了实现上述目的,本发明提供一种环保型乙烯类树脂复合粒子的制造方法,其特征在于,包括:(a)将乙烯系聚合物溶解在与水相分离的有机溶剂中,将疏水性填料分散在环境友好的有机物 溶剂形成乙烯基聚合物在有机溶剂中的溶液; (b)将在步骤(a)中获得的溶液乳化在含非离子表面活性剂的水溶液中; (c)加热步骤(b)中获得的乳液以除去有机溶剂; 和(d)在其中回收含有疏水性填料的乙烯系树脂复合体。 本发明还提供了通过上述方法制备的乙烯类树脂复合颗粒。