专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5916366A Substrate spin treating apparatus 失效
标题翻译：底物旋转处理装置
公开(公告)号：US5916366A
公开(公告)日：1999-06-29
申请号：US944229
申请日：1997-10-06
申请人： Tsutomu Ueyama , Akira Izumi , Hideki Adachi
发明人： Tsutomu Ueyama , Akira Izumi , Hideki Adachi
IPC分类号： B05C11/08 , B08B11/02 , G03F7/16 , H01L21/00 , H01L21/687 , B05C5/00
CPC分类号： H01L21/68728 , B05C11/08 , B08B11/02 , G03F7/162 , H01L21/6715 , H01L21/68792 , Y10S134/902
摘要： A substrate treating apparatus for performing a predetermined treatment of a substrate in a spin, has a spin motor including a rotor having a hollow opening centrally thereof, and a stator disposed coaxially with the rotor and having a hollow opening centrally thereof. The rotor includes holders for supporting the substrate in three peripheral positions thereof. A support mechanism switches the holders between a position for supporting the substrate, and a position retracted therefrom. The opposite surfaces of the substrate supported by the holders are cleaned with a cleaning solution supplied through nozzles. The holders have a substrate supporting force derived from a weight and magnetism of the support mechanism, to support the substrate reliably. A guide is disposed in the hollow of the rotor, and connected to the rotor. The holders are arranged in a substrate treating space formed inwardly of the guide. The holders are arranged on the guide. Thus, the spin motor is protected from exposure to a treating solution atmosphere.
摘要翻译：一种用于在旋转中进行基板的预定处理的基板处理装置，具有包括其中心具有中空开口的转子的旋转马达和与该转子同轴配置并具有中心的中空开口的定子。转子包括用于在其三个周边位置支撑基板的保持器。支撑机构在支撑基板的位置和从其缩回的位置之间切换支架。由保持器支撑的基板的相对表面用通过喷嘴提供的清洁溶液进行清洁。保持器具有源自支撑机构的重量和磁力的基板支撑力，以可靠地支撑基板。引导件设置在转子的中空中并连接到转子。保持器布置在形成在引导件内部的基板处理空间中。支架安置在导轨上。因此，保护旋转马达免于暴露于处理溶液气氛中。

2. 发明授权

US5571325A Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus 失效
标题翻译： Subtrate处理装置及其在衬底处理装置中的衬底交换方法
公开(公告)号：US5571325A
公开(公告)日：1996-11-05
申请号：US476052
申请日：1995-06-07
申请人： Tsutomu Ueyama , Hideki Adachi , Yoshio Matsumura , Yasuhide Tanaka
发明人： Tsutomu Ueyama , Hideki Adachi , Yoshio Matsumura , Yasuhide Tanaka
IPC分类号： G03F7/20 , H01L21/00 , H01L21/677 , H01L21/687 , B05C13/02
CPC分类号： G03F7/7075 , G03F7/70733 , H01L21/67161 , H01L21/67178 , H01L21/67742 , H01L21/67748 , H01L21/67751 , H01L21/68707 , Y10S414/135 , Y10S414/136 , Y10S414/14
摘要： A substrate processing apparatus comprises a processing part and a transferring part. In the processing part there are a plurality of stages in which a plurality of processing units are arranged in a row along a horizontal direction and the stages are arranged in a stack vertically. Thus, the processing units are arranged in matrix. The transferring part includes a plurality of horizontal transferring devices each movable in the horizontal direction and a vertical transferring device movable in the vertical direction. Hence, a substrate is movable both horizontally and vertically to be transferred to the desired processing unit.
摘要翻译：基板处理装置包括处理部和转印部。在处理部分中，存在多个处理单元沿着水平方向排列成一排的多个阶段，并且这些阶段以堆叠方式垂直排列。因此，处理单元被布置成矩阵。传送部分包括可沿水平方向移动的多个水平传送装置和可在垂直方向上移动的垂直传送装置。因此，基板可以水平和垂直地移动以被转移到期望的处理单元。

3. 发明授权

US6077321A Wet/dry substrate processing apparatus 失效
标题翻译：湿/干基板处理装置
公开(公告)号：US6077321A
公开(公告)日：2000-06-20
申请号：US966295
申请日：1997-11-07
申请人： Hideki Adachi , Akira Izumi
发明人： Hideki Adachi , Akira Izumi
IPC分类号： H01L21/00 , H01L21/677 , C23C14/00 , H01L21/64 , C23C9/00
CPC分类号： H01L21/67167 , H01L21/67028 , H01L21/6719 , H01L21/67196 , H01L21/67778 , Y10T29/41
摘要： A buffer chamber is provided between a transfer chamber and a cleaning/drying chamber, and completely-closable shutters are provided between the transfer chamber and the buffer chamber as well as between the buffer chamber and the cleaning/drying chamber. The cleaning/drying chamber serving as a composite processing part including a processing in the wet atmosphere is connected with the remaining chambers of dry atmospheres.
摘要翻译：在转移室和清洁/干燥室之间设置有缓冲室，并且在转移室和缓冲室之间以及缓冲室和清洁/干燥室之间设置完全闭合的快门。用作包括在湿气氛中的处理的复合处理部分的清洁/干燥室与其余的干燥气氛室连接。

4. 发明授权

US06669808B2 Substrate processing apparatus and substrate processing method 失效
公开(公告)号：US06669808B2
公开(公告)日：2003-12-30
申请号：US10102391
申请日：2002-03-18
申请人： Hideki Adachi , Katsuhiko Miya , Akira Izumi , Itsuki Kajino
发明人： Hideki Adachi , Katsuhiko Miya , Akira Izumi , Itsuki Kajino
IPC分类号： B08B504
CPC分类号： H01L21/68728 , G03F7/3021 , H01L21/6715 , H01L21/6838
摘要： A support member of a rotary base member engages with a substrate for preventing the substrate from horizontal movement and rotation with respect to the rotary base member while allowing vertical movement of the substrate, and a proximity suction plate is provided above the rotary base member so that the lower surface thereof is formed on a plane on the rotary base member parallel to the substrate for downwardly and outwardly injecting gas toward the overall upper surface of the substrate and sucking the substrate in a proximity state by Bernoulli effect. It is possible to provide an apparatus capable of reliably preventing mist of a processing solution or the processing solution from reaching the upper surface of the substrate when rotating the substrate and supplying the processing solution to the lower surface for processing the substrate.

5. 发明申请

US20060102289A1 Substrate processing apparatus, substrate processing method, substrate position correcting apparatus, and substrate position correcting method 失效
标题翻译：基板处理装置，基板处理方法，基板位置校正装置和基板位置校正方法
公开(公告)号：US20060102289A1
公开(公告)日：2006-05-18
申请号：US11270338
申请日：2005-10-28
申请人： Eiji Fukatsu , Hiroyuki Yashiki , Hideki Adachi , Katsuhiko Miya
发明人： Eiji Fukatsu , Hiroyuki Yashiki , Hideki Adachi , Katsuhiko Miya
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： H01L21/67259 , H01L21/67051 , H01L21/68 , Y10S414/136
摘要： A substrate W rotates about the center of rotations A0 of a spin base 3, while supported by plural support pins 5 in such a manner that the substrate W can freely slide and while held owing to the force of friction which develops between the bottom surface of the substrate W and the support pins 5. After a detection sensor 74 detects, while the substrate W rotates, an edge surface position (eccentric position) of the edge surface of the substrate which is the farthest from the center of rotations A0, a press block 71 pushes this edge surface position to a preset position P1 which is away along the horizontal direction from the center of rotations A0 by a distance which is determined in accordance with the radius of the substrate W. This aligns the eccentric position to the preset position P1 and positions the center W0 of the substrate within a predetermined range from the center of rotations A0.
摘要翻译：基板W围绕旋转基座3的旋转中心A 0旋转，同时由多个支撑销5支撑，使得基板W能够自由滑动并且由于摩擦力在底面的基板W和支撑销5。在检测传感器74检测到基板W旋转之后，离开旋转中心A 0的基板的边缘表面的边缘表面位置（偏心位置）时，压块71将该边缘表面位置推到预设位置P 1，其从旋转中心A 0沿水平方向离开根据基板W的半径确定的距离。将偏心位置对准预设位置P 1并将中心位置 W 0从旋转中心A 0的预定范围内。

6. 发明申请

US20050150450A1 Thin film forming apparatus, film supplier, film cassette, transport mechanism and transport method 有权
公开(公告)号：US20050150450A1
公开(公告)日：2005-07-14
申请号：US11052599
申请日：2005-02-07
申请人： Hideki Adachi
发明人： Hideki Adachi
IPC分类号： H01L21/285 , B32B38/18 , H01L21/00 , H01L21/283 , H01L21/31 , H01L21/677 , H01L21/687 , H01L21/768 , B05C11/02 , B05C13/00
CPC分类号： B32B38/18 , B32B38/164 , B32B2037/243 , B32B2038/1891 , B32B2457/14 , B32B2457/20 , H01L21/6715 , H01L21/67167 , H01L21/6719 , H01L21/67207 , H01L21/67248 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10T156/17 , Y10T156/1705 , Y10T156/1744
摘要： A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.

7. 发明授权

US6064915A Equipment control apparatus 失效
标题翻译：设备控制装置
公开(公告)号：US6064915A
公开(公告)日：2000-05-16
申请号：US797891
申请日：1997-02-10
申请人： Tokuharu Kaneko , Masanori Miyata , Hideki Adachi , Shinichi Nakamura , Naoyuki Ohki , Satoshi Kuroyanagi , Hiroshi Ozaki , Hisatsugu Tahara , Satoshi Kaneko , Taisei Fukada , Mitsuharu Takizawa
发明人： Tokuharu Kaneko , Masanori Miyata , Hideki Adachi , Shinichi Nakamura , Naoyuki Ohki , Satoshi Kuroyanagi , Hiroshi Ozaki , Hisatsugu Tahara , Satoshi Kaneko , Taisei Fukada , Mitsuharu Takizawa
IPC分类号： G03G15/00 , G05B15/00
CPC分类号： G03G15/5091 , G03G2215/00109
摘要： An equipment control apparatus in a system having an input unit for entering data on the conditions of equipment from the equipment, a communication unit for communicating with the apparatus located at a distance, and a control unit for exerting control in such a way as to transmit the data to the apparatus located at a distance through the steps of interrupting communication once on receiving a call from the apparatus requesting the data and then calling the apparatus located at a distance via the communication unit.
摘要翻译：一种系统中的设备控制装置，具有用于从设备输入设备状态的输入单元的输入单元，用于与远程位置的设备进行通信的通信单元和用于以发送方式进行控制的控制单元通过在从请求数据的装置接收到呼叫并随后通过通信单元呼叫位于一定距离的设备的情况下通过中断一次通信的步骤将数据传送到设备。

8. 发明授权

US5699167A Image forming apparatus which outputs a color image by separating color image information into at least two color components 失效
标题翻译：图像形成装置，其通过将彩色图像信息分离成至少两个颜色分量来输出彩色图像
公开(公告)号：US5699167A
公开(公告)日：1997-12-16
申请号：US315299
申请日：1994-09-29
申请人： Tetsuya Nozaki , Hideki Adachi , Yoshiyuki Suzuki , Kazuhiko Hirooka , Hiroyuki Ichikawa , Masahito Yamamoto
发明人： Tetsuya Nozaki , Hideki Adachi , Yoshiyuki Suzuki , Kazuhiko Hirooka , Hiroyuki Ichikawa , Masahito Yamamoto
IPC分类号： G06T1/00 , H04N1/46 , H04N1/52 , H04N1/60 , H04N1/40 , G03F3/08
CPC分类号： H04N1/52
摘要： An image forming apparatus discriminates a color of an inputted color image for each pixel and generates a first color component and a second color component. The apparatus compares values of the first and the second color components, and selects and outputs the color component having a larger value. Meanwhile a color component which is not selected is diffused to neighboring pixels. When pixels neighboring a pixel of interest in a predetermined area are filled with one color component, the other color component is selected and outputted regardless of the values of the first and second color components.
摘要翻译：图像形成装置识别每个像素的输入彩色图像的颜色，并生成第一颜色分量和第二颜色分量。该装置比较第一和第二颜色分量的值，并选择和输出具有较大值的颜色分量。同时，未选择的颜色分量被扩散到相邻像素。当与一个颜色分量填充预定区域中感兴趣的像素相邻的像素时，与第一和第二颜色分量的值无关地选择和输出另一个颜色分量。

9. 发明授权

US5420667A Communication control apparatus for monitoring a condition of an image forming apparatus and inhibiting transmission of data when a power supply means is turned off 失效
标题翻译：通信控制装置，用于在电源装置关闭时监视图像形成装置的状态并禁止数据传输
公开(公告)号：US5420667A
公开(公告)日：1995-05-30
申请号：US168133
申请日：1993-12-17
申请人： Satoshi Kaneko , Masanori Miyata , Hideki Adachi , Shinichi Nakamura , Naoyuki Ohki , Tokuharu Kaneko , Satoshi Kuroyanagi , Hiroshi Ozaki , Hisatsugu Tahara , Taisei Fukada , Mitsuharu Takizawa
发明人： Satoshi Kaneko , Masanori Miyata , Hideki Adachi , Shinichi Nakamura , Naoyuki Ohki , Tokuharu Kaneko , Satoshi Kuroyanagi , Hiroshi Ozaki , Hisatsugu Tahara , Taisei Fukada , Mitsuharu Takizawa
IPC分类号： G03G15/00
CPC分类号： G03G15/5004 , G03G15/5075
摘要： A machine monitoring apparatus includes an input device for receiving data from a machine, the data being indicative of a condition of the machine, a storage device for storing the received data, a communication device for communicating between the storage device and an external apparatus installed at a position separate from the machine, and a control device for inhibiting the communication device from transmitting the data stored in the storage device when a power supply for supplying the machine with electric power is turned off while the data is being received by the input device.
摘要翻译：机器监视装置包括：用于从机器接收数据的输入装置，表示机器状态的数据;存储接收数据的存储装置;用于在存储装置与安装在存储装置之间的外部装置之间进行通信的通信装置; 与该机器分离的位置，以及控制装置，用于在输入装置正在接收数据时关闭用于向机器提供电力的电源时，禁止通信装置发送存储在存储装置中的数据。

10. 发明授权

US5359391A Equipment control apparatus 失效
标题翻译：具有与集中控制装置通信的装置的设备控制装置
公开(公告)号：US5359391A
公开(公告)日：1994-10-25
申请号：US112318
申请日：1993-08-27
申请人： Satoshi Kuroyanagi , Masanori Miyata , Hideki Adachi , Shinichi Nakamura , Naoyuki Ohki , Tokuharu Kaneko , Hiroshi Ozaki , Hisatsugu Tahara , Satoshi Kaneko , Taisei Fukada , Mitsuharu Takizawa
发明人： Satoshi Kuroyanagi , Masanori Miyata , Hideki Adachi , Shinichi Nakamura , Naoyuki Ohki , Tokuharu Kaneko , Hiroshi Ozaki , Hisatsugu Tahara , Satoshi Kaneko , Taisei Fukada , Mitsuharu Takizawa
IPC分类号： G03G15/00 , G06F11/273 , G06F11/30 , H04M11/00 , G03G21/00
CPC分类号： G06F11/0733 , G03G15/5079 , G03G21/1652 , G06F11/0748 , H04M11/007 , G03G15/55 , G03G2215/00109 , G03G2221/16 , G03G2221/1675 , G03G2221/1696 , G06F11/2294 , G06F11/30
摘要： An equipment controlling apparatus is composed of a counter for counting the operational number of the equipment, memories for storing data indicating the state of the equipment, a communication device for communicating on the stored data with a centralized control apparatus, which controls the communicated data intensively, and a controlling device for causing the stored data to be transmitted to the centralized control apparatus when the counter has counted a predetermined value.
摘要翻译：设备控制装置由用于对设备的操作数进行计数的计数器，用于存储指示设备状态的数据的存储器，用于通过集中控制装置进行存储的数据通信的通信装置，其集中控制通信数据以及控制装置，用于当计数器计数了预定值时，将存储的数据发送到集中控制装置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式