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1. 发明申请

US20100015756A1 HYBRID HETEROJUNCTION SOLAR CELL FABRICATION USING A DOPING LAYER MASK 失效
标题翻译：混合异常太阳能电池制造使用DOPING LAYER MASK
公开(公告)号：US20100015756A1
公开(公告)日：2010-01-21
申请号：US12504216
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/20 , H01L21/28 , C23F1/00
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include forming a doping layer on a back surface of a substrate, heating the doping layer and substrate to cause the doping layer diffuse into the back surface of the substrate, texturing a front surface of the substrate after heating the doping layer and the substrate, forming a dielectric layer on the back surface of the substrate, removing portions of the dielectric layer from the back surface to from a plurality of exposed regions of the substrate, and depositing a metal layer over the back surface of the substrate, wherein the metal layer is in electrical communication with at least one of the plurality of exposed regions on the substrate, and at least one of the exposed regions has dopant atoms provided from the doping layer.
摘要翻译：本发明的实施例考虑使用新颖的处理顺序形成高效太阳能电池来形成太阳能电池装置。在一个实施例中，所述方法包括在衬底的背表面上形成掺杂层，加热掺杂层和衬底以使掺杂层扩散到衬底的背面，在加热掺杂之后纹理化衬底的前表面在基板的背面上形成电介质层，从基板的多个露出区域的背面去除电介质层的一部分，在该基板的背面上沉积金属层，其中所述金属层与所述衬底上的所述多个暴露区域中的至少一个电连通，并且所述暴露区域中的至少一个具有从所述掺杂层提供的掺杂剂原子。

2. 发明授权

US08309446B2 Hybrid heterojunction solar cell fabrication using a doping layer mask 失效
标题翻译：使用掺杂层掩模的混合异质结太阳能电池制造
公开(公告)号：US08309446B2
公开(公告)日：2012-11-13
申请号：US12504216
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/225 , H01L21/385
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include forming a doping layer on a back surface of a substrate, heating the doping layer and substrate to cause the doping layer diffuse into the back surface of the substrate, texturing a front surface of the substrate after heating the doping layer and the substrate, forming a dielectric layer on the back surface of the substrate, removing portions of the dielectric layer from the back surface to from a plurality of exposed regions of the substrate, and depositing a metal layer over the back surface of the substrate, wherein the metal layer is in electrical communication with at least one of the plurality of exposed regions on the substrate, and at least one of the exposed regions has dopant atoms provided from the doping layer.
摘要翻译：本发明的实施例考虑使用新颖的处理顺序形成高效太阳能电池来形成太阳能电池装置。在一个实施例中，所述方法包括在衬底的背表面上形成掺杂层，加热掺杂层和衬底以使掺杂层扩散到衬底的背面，在加热掺杂之后纹理化衬底的前表面在基板的背面上形成电介质层，从基板的多个露出区域的背面去除电介质层的一部分，在该基板的背面上沉积金属层，其中所述金属层与所述衬底上的所述多个暴露区域中的至少一个电连通，并且所述暴露区域中的至少一个具有从所述掺杂层提供的掺杂剂原子。

3. 发明授权

US08183081B2 Hybrid heterojunction solar cell fabrication using a metal layer mask 失效
标题翻译：使用金属层掩模的混合异质结太阳能电池制造
公开(公告)号：US08183081B2
公开(公告)日：2012-05-22
申请号：US12504193
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/28
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention generally provide a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include forming one or more layers on a backside of a solar cell substrate prior to the texturing process to prevent attack of the backside surface of the substrate. In one embodiment, the one or more layers are a metalized backside contact structure that is formed on the backside of the solar cell substrate. In another embodiment, the one or more layers are a chemical resistant dielectric layer that is formed over the backside of the solar cell substrate.
摘要翻译：本发明的实施例通常提供使用新颖的处理顺序来形成太阳能电池装置的高效太阳能电池。在一个实施例中，所述方法包括在纹理化处理之前在太阳能电池基板的背面上形成一层或多层以防止基板背面的侵蚀。在一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的金属化背面接触结构。在另一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的耐化学电介质层。

4. 发明申请

US20100015751A1 HYBRID HETEROJUNCTION SOLAR CELL FABRICATION USING A METAL LAYER MASK 失效
标题翻译：使用金属层掩模的混合异相太阳能电池制造
公开(公告)号：US20100015751A1
公开(公告)日：2010-01-21
申请号：US12504193
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/28 , B05C11/00
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include the use of various etching and patterning processes that are used to define active regions of the device and regions where the device and/or contact structure is to be located on a surface of a solar cell substrate. The method generally includes the steps of forming one or more layers on a backside of a solar cell substrate to prevent attack of the backside surface of the substrate, and provide a stable supporting surface, when the front side regions of a solar cell are formed. In one embodiment, the one or more layers are a metalized backside contact structure that is formed on the backside of the solar cell substrate. In another embodiment, the one or more layers are a chemical resistant dielectric layer that is formed over the backside of the solar cell substrate.
摘要翻译：本发明的实施例考虑使用新颖的处理顺序形成高效太阳能电池来形成太阳能电池装置。在一个实施例中，所述方法包括使用各种蚀刻和图案化工艺，其用于限定器件的有源区和器件和/或接触结构将位于太阳能电池基板的表面上的区域。该方法通常包括以下步骤：在太阳能电池基板的背面形成一个或多个层，以防止在形成太阳能电池的前侧区域时衬底的背面发生侵蚀，并提供稳定的支撑表面。在一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的金属化的背面接触结构。在另一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的耐化学电介质层。

5. 发明授权

US07542132B2 Raman spectroscopy as integrated chemical metrology 失效
标题翻译：拉曼光谱作为综合化学计量学
公开(公告)号：US07542132B2
公开(公告)日：2009-06-02
申请号：US11830202
申请日：2007-07-30
申请人： Hongbin Fang , Josh Golden , Timothy W. Weidman , Yaxin Wang , Arulkumar Shanmugasundram
发明人： Hongbin Fang , Josh Golden , Timothy W. Weidman , Yaxin Wang , Arulkumar Shanmugasundram
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01N21/65
摘要： A method for measuring the concentration of the metal solution and reducing agent solution within the electroless plating solution is disclosed. Raman spectroscopy is used to measure the concentration of each solution within the electroless plating solution after they have been mixed together. By measuring the concentration of each solution prior to providing the solution to a plating cell, the concentration of the individual solutions can be adjusted so that the targeted concentration of each solution is achieved. Additionally, each solution can be individually analyzed using Raman spectroscopy prior to mixing with the other solutions. Based upon the Raman spectroscopy measurements of the individual solutions prior to mixing, the individual components that make up each solution can be adjusted prior to mixing so that the targeted component concentration can be achieved.
摘要翻译：公开了一种用于测量化学镀溶液中的金属溶液和还原剂溶液的浓度的方法。拉曼光谱法用于测量化学镀溶液混合在一起后每种溶液的浓度。通过在将溶液提供给电镀池之前测量每种溶液的浓度，可以调节各溶液的浓度，从而实现每种溶液的目标浓度。此外，每个溶液可以在与其他溶液混合之前使用拉曼光谱单独分析。基于混合前单个溶液的拉曼光谱测量，可以在混合之前调整组成每种溶液的各个组分，从而可以实现目标组分浓度。

6. 发明申请

US20120040490A1 ENHANCED VISION SYSTEM FOR SCREEN PRINTING PATTERN ALIGNMENT 有权
标题翻译：用于屏幕打印图案对齐的增强视觉系统
公开(公告)号：US20120040490A1
公开(公告)日：2012-02-16
申请号：US13133919
申请日：2009-10-02
申请人： Marco Gallazzo , Timothy W. Weidman , Andrea Baccini , Sunhom (Steve) Paak , Hongbin Fang , Zhenhua Zhang
发明人： Marco Gallazzo , Timothy W. Weidman , Andrea Baccini , Sunhom (Steve) Paak , Hongbin Fang , Zhenhua Zhang
IPC分类号： H01L31/18 , B05C11/00
CPC分类号： H01L31/022425 , H01L21/67253 , H01L31/0236 , H01L31/02363 , H01L31/0288 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention also generally provide a solar cell formation process that includes the formation of metal contacts over heavly doped regions that are formed in a desired pattern on a surface of a substrate. Embodiments of the invention also provide an inspection system and supporting hardware that is used to reliably position a similarly shaped, or patterned, metal contact structure on the patterned heavily doped regions to allow an Ohmic contact to be made. The metal contact structure, such as fingers and busbars, are formed on the heavily doped regions so that a high quality electrical connection can be formed between these two regions.
摘要翻译：本发明的实施例还通常提供一种太阳能电池形成方法，其包括在衬底表面上以所需图案形成的重掺杂区域上形成金属触点。本发明的实施例还提供了一种检查系统和支撑硬件，其用于在图案化的重掺杂区域上可靠地定位类似形状或图案化的金属接触结构，以允许进行欧姆接触。在重掺杂区域上形成诸如指状物和母线的金属接触结构，从而可以在这两个区域之间形成高质量的电连接。

7. 发明授权

US08673679B2 Enhanced vision system for screen printing pattern alignment 有权
标题翻译：增强视觉系统的丝网印刷图案对齐
公开(公告)号：US08673679B2
公开(公告)日：2014-03-18
申请号：US13133919
申请日：2009-10-02
申请人： Marco Gallazzo , Timothy W. Weidman , Andrea Baccini , Sunhom (Steve) Paak , Hongbin Fang , Zhenhua Zhang
发明人： Marco Gallazzo , Timothy W. Weidman , Andrea Baccini , Sunhom (Steve) Paak , Hongbin Fang , Zhenhua Zhang
IPC分类号： H01L21/00
CPC分类号： H01L31/022425 , H01L21/67253 , H01L31/0236 , H01L31/02363 , H01L31/0288 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention also generally provide a solar cell formation process that includes the formation of metal contacts over heavily doped regions that are formed in a desired pattern on a surface of a substrate. Embodiments of the invention also provide an inspection system and supporting hardware that is used to reliably position a similarly shaped, or patterned, metal contact structure on the patterned heavily doped regions to allow an Ohmic contact to be made. The metal contact structure, such as fingers and busbars, are formed on the heavily doped regions so that a high quality electrical connection can be formed between these two regions.
摘要翻译：本发明的实施例还通常提供一种太阳能电池形成工艺，其包括在基底表面上以所需图案形成的重掺杂区域上形成金属触点。本发明的实施例还提供了一种检查系统和支撑硬件，其用于在图案化的重掺杂区域上可靠地定位类似形状或图案化的金属接触结构，以允许进行欧姆接触。在重掺杂区域上形成诸如指状物和母线的金属接触结构，从而可以在这两个区域之间形成高质量的电连接。

8. 发明申请

US20120100666A1 PHOTOLUMINESCENCE IMAGE FOR ALIGNMENT OF SELECTIVE-EMITTER DIFFUSIONS 审中-公开
标题翻译：用于选择性发射扩散的对准的光致发光图像
公开(公告)号：US20120100666A1
公开(公告)日：2012-04-26
申请号：US13282219
申请日：2011-10-26
申请人： James M. Gee , Asaf Schlezinger , Marco Galiazzo , Andrea Baccini , Timothy W. Weidman , Sunhom Paak , Hongbin Fang , Zhenhua Zhang
发明人： James M. Gee , Asaf Schlezinger , Marco Galiazzo , Andrea Baccini , Timothy W. Weidman , Sunhom Paak , Hongbin Fang , Zhenhua Zhang
IPC分类号： H01L31/18 , B05C11/00 , B05C13/00
CPC分类号： H01L31/1804 , G03F9/00 , H01L21/67706 , H01L21/67715 , H01L21/6776 , H01L21/681 , H01L21/6838 , H01L31/022425 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention generally provide a solar cell formation process that includes the formation of metal contacts over heavily doped regions that are formed in a desired pattern on a surface of a substrate. Embodiments of the invention also provide an inspection system and supporting hardware that is used to reliably position a similarly shaped, or patterned, metal contact structure on the patterned heavily doped regions to allow an Ohmic contact to be made. The metal contact structure, such as fingers and busbars, are formed on the heavily doped regions so that a high quality electrical connection can be formed between these two regions.
摘要翻译：本发明的实施例通常提供一种太阳能电池形成工艺，其包括在基底表面上以所需图案形成的重掺杂区域上形成金属触点。本发明的实施例还提供了一种检查系统和支撑硬件，其用于在图案化的重掺杂区域上可靠地定位类似形状或图案化的金属接触结构，以允许进行欧姆接触。在重掺杂区域上形成诸如指状物和母线的金属接触结构，从而可以在这两个区域之间形成高质量的电连接。

9. 发明授权

US07256111B2 Pretreatment for electroless deposition 有权
标题翻译：化学沉积预处理
公开(公告)号：US07256111B2
公开(公告)日：2007-08-14
申请号：US10934850
申请日：2004-09-03
申请人： Sergey Lopatin , Arulkumar Shanmugasundram , Ramin Emami , Hongbin Fang
发明人： Sergey Lopatin , Arulkumar Shanmugasundram , Ramin Emami , Hongbin Fang
IPC分类号： H01L21/26 , H01L21/42
CPC分类号： H01L21/02074 , H01L21/288 , H01L21/67161 , H01L21/6723 , H01L21/76849 , H01L21/76862 , H01L21/76864
摘要： Embodiments of the present invention relate to an apparatus and method of annealing substrates in a thermal anneal chamber and/or a plasma anneal chamber before electroless deposition thereover. In one embodiment, annealing in a thermal anneal chamber includes heating the substrate in a vacuum environment while providing a gas, such as noble gases, hydrogen gas, other reducing gases, nitrogen gas, other non-reactive gases, and combinations thereof. In another embodiment, annealing in a plasma chamber comprises plasma annealing the substrate in a plasma, such as a plasma from an argon gas, helium gas, hydrogen gas, and combinations thereof.
摘要翻译：本发明的实施例涉及在其之前的无电沉积之前在热退火室和/或等离子体退火室中退火衬底的装置和方法。在一个实施例中，热退火室中的退火包括在真空环境中加热衬底，同时提供气体，例如惰性气体，氢气，其它还原气体，氮气，其它非反应性气体及其组合。在另一个实施例中，等离子体室中的退火包括等离子体等离子体等离子体退火，例如来自氩气，氦气，氢气及其组合的等离子体。

10. 发明授权

US06939804B2 Formation of composite tungsten films 有权
公开(公告)号：US06939804B2
公开(公告)日：2005-09-06
申请号：US10299212
申请日：2002-11-18
申请人： Ken K. Lai , Jeong Soo Byun , Frederick C. Wu , Ramanujapuran A. Srinivas , Avgerinos Gelatos , Mei Chang , Moris Kori , Ashok K. Sinha , Hua Chung , Hongbin Fang , Alfred W. Mak , Michael X. Yang , Ming Xi
发明人： Ken K. Lai , Jeong Soo Byun , Frederick C. Wu , Ramanujapuran A. Srinivas , Avgerinos Gelatos , Mei Chang , Moris Kori , Ashok K. Sinha , Hua Chung , Hongbin Fang , Alfred W. Mak , Michael X. Yang , Ming Xi
IPC分类号： C23C16/14 , C23C16/02 , C23C16/04 , C23C16/08 , C23C16/44 , C23C16/455 , H01L21/28 , H01L21/285 , H01L21/768 , H01L21/44
CPC分类号： C23C16/45525 , C23C16/0281 , C23C16/08 , C23C16/14 , C23C16/45523 , H01L21/28556 , H01L21/28562 , H01L21/76843 , H01L21/76876 , H01L21/76877
摘要： Methods for the deposition of tungsten films are provided. The methods include depositing a nucleation layer by alternatively adsorbing a tungsten precursor and a reducing gas on a substrate, and depositing a bulk layer of tungsten over the nucleation layer.

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