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    • 3. 发明授权
    • Dual robot processing system
    • 双机器人处理系统
    • US06729824B2
    • 2004-05-04
    • US10017039
    • 2001-12-14
    • Lawrence C. LeiMoris Kori
    • Lawrence C. LeiMoris Kori
    • B65G4907
    • H01L21/67184H01L21/67126H01L21/67201H01L21/67742H01L21/67745H01L21/67748Y10S414/139
    • A substrate processing system having a transfer chamber having two processing chambers and two load lock chambers coupled thereto is generally provided. The transfer chamber includes a body having a first transfer area and a second transfer area defined therein on either side of a center axis. A first passage couples one of the load locks with the first transfer area and a second passage couples the other one of the load locks with the second transfer area. The first passage and the second passage form an acute angle about the center axis. A transfer platform is disposed between the first transfer area and the second transfer area. A first transfer robot and a second transfer robot are disposed in the first and second transfer areas, respectively. Each robot is adapted to transfer substrates between the load locks, the transfer platform and a processing chamber.
    • 通常提供具有传送室的基板处理系统,该传送室具有两个处理室和与其连接的两个加载锁定室。 传送室包括在中心轴线的任一侧上具有限定在其中的第一传送区域和第二传送区域的主体。 第一通道将负载锁中的一个与第一传送区域耦合,并且第二通道将另一个负载锁与第二传送区域耦合。 第一通道和第二通道围绕中心轴线形成锐角。 传送平台设置在第一传送区域和第二传送区域之间。 第一传送机器人和第二传送机器人分别设置在第一传送区域和第二传送区域中。 每个机器人适于在负载锁,转移平台和处理室之间传送衬底。