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1. 发明申请

US20130288474A1 METHODS FOR FABRICATING DUAL DAMASCENE INTERCONNECT STRUCTURES 审中-公开
标题翻译：用于制造双重DAMASCENE互连结构的方法
公开(公告)号：US20130288474A1
公开(公告)日：2013-10-31
申请号：US13458172
申请日：2012-04-27
申请人： ROHIT MISHRA , JAYAGATAN R. VIJAYEN , KHALID M. SIRAJUDDIN , BRAD EATON , MADHAVA RAO YALAMANCHILI
发明人： ROHIT MISHRA , JAYAGATAN R. VIJAYEN , KHALID M. SIRAJUDDIN , BRAD EATON , MADHAVA RAO YALAMANCHILI
IPC分类号： H01L21/768
CPC分类号： H01L21/76808 , H01J37/32357
摘要： Methods for fabricating dual damascene interconnect structures are provided herein. In some embodiments, a method for fabricating a dual damascene interconnect structure may include etching a via into a substrate through a first photoresist layer; patterning a second photoresist layer atop the substrate to define a trench pattern, wherein the via is aligned within the trench pattern, and wherein a portion of undeveloped photoresist remains in the via after patterning; and etching the trench into the substrate to form a dual damascene pattern in the substrate.
摘要翻译：本文提供了制造双镶嵌互连结构的方法。在一些实施例中，制造双镶嵌互连结构的方法可以包括通过第一光致抗蚀剂层将通孔蚀刻到衬底中; 在衬底上方形成第二光致抗蚀剂层以限定沟槽图案，其中通孔在沟槽图案内对准，并且其中未图案化的光致抗蚀剂的一部分在图案化之后保留在通孔中; 并且将沟槽蚀刻到衬底中以在衬底中形成双镶嵌图案。

2. 发明授权

US08214219B2 Speech communications system for a vehicle and method of operating a speech communications system for a vehicle 有权
标题翻译：用于车辆的语音通信系统和操作车辆的语音通信系统的方法
公开(公告)号：US08214219B2
公开(公告)日：2012-07-03
申请号：US11521929
申请日：2006-09-15
申请人： Ramon Prieto , Rohit Mishra
发明人： Ramon Prieto , Rohit Mishra
IPC分类号： G10L21/00
CPC分类号： B60N2/002 , G10L15/19 , G10L2021/02082 , H04R3/02
摘要： A speech communications system for a vehicle includes a microphone system provided in the vehicle interior in order to detect audio information. An interaction manager provides grammar information to a speech recognizer. The speech recognizer provides speech recognition results to the interaction manager. An acoustic echo canceller eliminates portions of the audio information detected by the microphone system. A sound localizer determines a sound source location in the vehicle interior. A method of operating a speech communications system in a vehicle is also provided. An interruptible text-to-speech operation provides a speech output to a user. Voice information is requested from the user for a maximum number of times if insufficient voice information or no voice information is provided in response to the speech output provided by the interruptible text-to-speech operation. The dialog context of an unfinished speech interaction is saved.
摘要翻译：用于车辆的语音通信系统包括设置在车辆内部的麦克风系统，以便检测音频信息。交互管理器向语音识别器提供语法信息。语音识别器向交互管理器提供语音识别结果。声学回声消除器消除由麦克风系统检测到的音频信息的部分。声音定位器确定车辆内部的声源位置。还提供了一种在车辆中操作语音通信系统的方法。可中断的文本到语音操作向用户提供语音输出。如果语音信息不足或不响应由可中断文本到语音操作提供的语音输出而提供语音信息，则从用户请求语音信息最大次数。保存未完成的语音交互的对话框上下文。

3. 发明授权

US08183081B2 Hybrid heterojunction solar cell fabrication using a metal layer mask 失效
标题翻译：使用金属层掩模的混合异质结太阳能电池制造
公开(公告)号：US08183081B2
公开(公告)日：2012-05-22
申请号：US12504193
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/28
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention generally provide a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include forming one or more layers on a backside of a solar cell substrate prior to the texturing process to prevent attack of the backside surface of the substrate. In one embodiment, the one or more layers are a metalized backside contact structure that is formed on the backside of the solar cell substrate. In another embodiment, the one or more layers are a chemical resistant dielectric layer that is formed over the backside of the solar cell substrate.
摘要翻译：本发明的实施例通常提供使用新颖的处理顺序来形成太阳能电池装置的高效太阳能电池。在一个实施例中，所述方法包括在纹理化处理之前在太阳能电池基板的背面上形成一层或多层以防止基板背面的侵蚀。在一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的金属化背面接触结构。在另一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的耐化学电介质层。

4. 发明授权

US07951637B2 Back contact solar cells using printed dielectric barrier 有权
标题翻译：背面接触太阳能电池使用印刷电介质屏障
公开(公告)号：US07951637B2
公开(公告)日：2011-05-31
申请号：US12549284
申请日：2009-08-27
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Kapila P. Wijekoon , Yonghwa Chris Cha , Tristan Holtam , Vinay Shah
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Kapila P. Wijekoon , Yonghwa Chris Cha , Tristan Holtam , Vinay Shah
IPC分类号： H01L21/00 , H01L21/76 , H01L21/331 , H01L21/20 , H01L33/00
CPC分类号： H01L21/67034 , G01T1/2018 , H01L21/225 , H01L21/306 , H01L21/308 , H01L21/67727 , H01L21/67736 , H01L21/67745 , H01L21/6776 , H01L31/022441 , H01L31/0516 , H01L31/0682 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using novel methods to form the active doped region(s) and the metal contact structure of the solar cell device. In one embodiment, the methods include the steps of depositing a dielectric material that is used to define the boundaries of the active regions and/or contact structure of a solar cell device. Various techniques may be used to form the active regions of the solar cell and the metal contact structure.
摘要翻译：本发明的实施例考虑使用新的方法形成高效太阳能电池，以形成太阳能电池器件的有源掺杂区域和金属接触结构。在一个实施例中，所述方法包括沉积用于限定太阳能电池器件的有源区域和/或接触结构的边界的介电材料的步骤。可以使用各种技术来形成太阳能电池的有源区域和金属接触结构。

5. 发明申请

US20110104850A1 SOLAR CELL CONTACT FORMATION PROCESS USING A PATTERNED ETCHANT MATERIAL 审中-公开
标题翻译：太阳能电池接触形成工艺使用图案化的材料
公开(公告)号：US20110104850A1
公开(公告)日：2011-05-05
申请号：US12985282
申请日：2011-01-05
申请人： Timothy W. WEIDMAN , Rohit MISHRA
发明人： Timothy W. WEIDMAN , Rohit MISHRA
IPC分类号： H01L31/18 , C09K13/00 , C09K13/08 , C09K13/04
CPC分类号： H01L31/022425 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using novel methods to form the active region(s) and the metal contact structure of a solar cell device. In one embodiment, the methods include the use of various etching and patterning processes that are used to define point contacts through a blanket dielectric layer covering a surface of a solar cell substrate. The method generally includes depositing an etchant material that enables formation of a desired pattern in a dielectric layer through which electrical contacts to the solar cell device can be formed.
摘要翻译：本发明的实施例考虑使用新的方法形成高效太阳能电池来形成太阳能电池器件的有源区和金属接触结构。在一个实施例中，所述方法包括使用各种蚀刻和图案化工艺，所述蚀刻和图案化工艺用于通过覆盖太阳能电池基板的表面的覆盖介电层限定点接触。该方法通常包括沉积能够在可以形成与太阳能电池器件的电接触的电介质层中形成所需图案的蚀刻剂材料。

6. 发明授权

US07888168B2 Solar cell contact formation process using a patterned etchant material 有权
标题翻译：使用图案化蚀刻剂材料的太阳能电池接触形成过程
公开(公告)号：US07888168B2
公开(公告)日：2011-02-15
申请号：US12274023
申请日：2008-11-19
申请人： Timothy W. Weidman , Rohit Mishra
发明人： Timothy W. Weidman , Rohit Mishra
IPC分类号： H01L31/18
CPC分类号： H01L31/022425 , Y02E10/50
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using novel methods to form the active region(s) and the metal contact structure of a solar cell device. In one embodiment, the methods include the use of various etching and patterning processes that are used to define point contacts through a blanket dielectric layer covering a surface of a solar cell substrate. The method generally includes depositing an etchant material that enables formation of a desired pattern in a dielectric layer through which electrical contacts to the solar cell device can be formed.
摘要翻译：本发明的实施例考虑使用新的方法形成高效太阳能电池来形成太阳能电池器件的有源区和金属接触结构。在一个实施例中，所述方法包括使用各种蚀刻和图案化工艺，所述蚀刻和图案化工艺用于通过覆盖太阳能电池基板的表面的覆盖介电层限定点接触。该方法通常包括沉积能够在可以形成与太阳能电池器件的电接触的电介质层中形成所需图案的蚀刻剂材料。

7. 发明申请

US20100055822A1 BACK CONTACT SOLAR CELLS USING PRINTED DIELECTRIC BARRIER 有权
标题翻译：返回联系使用印刷电介质的太阳能电池
公开(公告)号：US20100055822A1
公开(公告)日：2010-03-04
申请号：US12549284
申请日：2009-08-27
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Kapila P. Wijekoon , Yonghwa Chris Cha , Tristan Holtam , Vinay Shah
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Kapila P. Wijekoon , Yonghwa Chris Cha , Tristan Holtam , Vinay Shah
IPC分类号： H01L31/18
CPC分类号： H01L21/67034 , G01T1/2018 , H01L21/225 , H01L21/306 , H01L21/308 , H01L21/67727 , H01L21/67736 , H01L21/67745 , H01L21/6776 , H01L31/022441 , H01L31/0516 , H01L31/0682 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using novel methods to form the active doped region(s) and the metal contact structure of the solar cell device. In one embodiment, the methods include the steps of depositing a dielectric material that is used to define the boundaries of the active regions and/or contact structure of a solar cell device. Various techniques may be used to form the active regions of the solar cell and the metal contact structure.
摘要翻译：本发明的实施例考虑使用新的方法形成高效太阳能电池，以形成太阳能电池器件的有源掺杂区域和金属接触结构。在一个实施例中，所述方法包括沉积用于限定太阳能电池器件的有源区和/或接触结构的边界的介电材料的步骤。可以使用各种技术来形成太阳能电池的有源区域和金属接触结构。

8. 发明申请

US20100015751A1 HYBRID HETEROJUNCTION SOLAR CELL FABRICATION USING A METAL LAYER MASK 失效
标题翻译：使用金属层掩模的混合异相太阳能电池制造
公开(公告)号：US20100015751A1
公开(公告)日：2010-01-21
申请号：US12504193
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/28 , B05C11/00
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include the use of various etching and patterning processes that are used to define active regions of the device and regions where the device and/or contact structure is to be located on a surface of a solar cell substrate. The method generally includes the steps of forming one or more layers on a backside of a solar cell substrate to prevent attack of the backside surface of the substrate, and provide a stable supporting surface, when the front side regions of a solar cell are formed. In one embodiment, the one or more layers are a metalized backside contact structure that is formed on the backside of the solar cell substrate. In another embodiment, the one or more layers are a chemical resistant dielectric layer that is formed over the backside of the solar cell substrate.
摘要翻译：本发明的实施例考虑使用新颖的处理顺序形成高效太阳能电池来形成太阳能电池装置。在一个实施例中，所述方法包括使用各种蚀刻和图案化工艺，其用于限定器件的有源区和器件和/或接触结构将位于太阳能电池基板的表面上的区域。该方法通常包括以下步骤：在太阳能电池基板的背面形成一个或多个层，以防止在形成太阳能电池的前侧区域时衬底的背面发生侵蚀，并提供稳定的支撑表面。在一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的金属化的背面接触结构。在另一个实施例中，一个或多个层是形成在太阳能电池基板的背面上的耐化学电介质层。

9. 发明授权

US08309446B2 Hybrid heterojunction solar cell fabrication using a doping layer mask 失效
标题翻译：使用掺杂层掩模的混合异质结太阳能电池制造
公开(公告)号：US08309446B2
公开(公告)日：2012-11-13
申请号：US12504216
申请日：2009-07-16
申请人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
发明人： Timothy W. Weidman , Rohit Mishra , Michael P. Stewart , Yonghwa Chris Cha , Kapila P. Wijekoon , Hongbin Fang
IPC分类号： H01L21/225 , H01L21/385
CPC分类号： H01L31/022425 , H01L21/67155 , H01L31/0236 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel processing sequence to form a solar cell device. In one embodiment, the methods include forming a doping layer on a back surface of a substrate, heating the doping layer and substrate to cause the doping layer diffuse into the back surface of the substrate, texturing a front surface of the substrate after heating the doping layer and the substrate, forming a dielectric layer on the back surface of the substrate, removing portions of the dielectric layer from the back surface to from a plurality of exposed regions of the substrate, and depositing a metal layer over the back surface of the substrate, wherein the metal layer is in electrical communication with at least one of the plurality of exposed regions on the substrate, and at least one of the exposed regions has dopant atoms provided from the doping layer.
摘要翻译：本发明的实施例考虑使用新颖的处理顺序形成高效太阳能电池来形成太阳能电池装置。在一个实施例中，所述方法包括在衬底的背表面上形成掺杂层，加热掺杂层和衬底以使掺杂层扩散到衬底的背面，在加热掺杂之后纹理化衬底的前表面在基板的背面上形成电介质层，从基板的多个露出区域的背面去除电介质层的一部分，在该基板的背面上沉积金属层，其中所述金属层与所述衬底上的所述多个暴露区域中的至少一个电连通，并且所述暴露区域中的至少一个具有从所述掺杂层提供的掺杂剂原子。

10. 发明申请

US20110240114A1 METHOD OF FORMING A NEGATIVELY CHARGED PASSIVATION LAYER OVER A DIFFUSED P-TYPE REGION 审中-公开
标题翻译：在扩展的P型区域形成负电荷的钝化层的方法
公开(公告)号：US20110240114A1
公开(公告)日：2011-10-06
申请号：US13047665
申请日：2011-03-14
申请人： Michael P. Stewart , Mukul Agrawal , Rohit Mishra , Hemant P. Mungekar , Timothy Weidman
发明人： Michael P. Stewart , Mukul Agrawal , Rohit Mishra , Hemant P. Mungekar , Timothy Weidman
IPC分类号： H01L31/0216 , H01L31/02 , H01L31/0248 , H01L31/0264 , H01L31/0376 , H01L31/18
CPC分类号： H01L31/02167 , H01L31/068 , Y02E10/547
摘要： The present invention generally provides a method of forming a high quality passivation layer over a p-type doped region to form a high efficiency solar cell device. Embodiments of the present invention may be especially useful for preparing a surface of a boron doped region formed in a silicon substrate. In one embodiment, the methods include exposing a surface of the solar cell substrate to a plasma to clean and modify the physical, chemical and/or electrical characteristics of the surface and then deposit a charged dielectric layer and passivation layer thereon.
摘要翻译：本发明通常提供一种在p型掺杂区上形成高质量钝化层以形成高效太阳能电池器件的方法。本发明的实施例可以特别用于制备形成在硅衬底中的硼掺杂区的表面。在一个实施例中，所述方法包括将太阳能电池基板的表面暴露于等离子体以清洁和修改表面的物理，化学和/或电特性，然后在其上沉积带电介质层和钝化层。

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